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Technology with Passion
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Technology with Passion
Feinfocus technology
for electronics industry
Feinfocus X-Ray Systems
Fabian Eicke
Manager Europe Sales
FEINFOCUS Product Line
Technology with Passion 3Feinfocus technology | September 2018
We are YXLON!
▪ YXLON is the worldwide leading manufacturer and supplier of
▪ Industrial X-ray inspection systems and
▪ Industrial Computed Tomography (CT) systems
for non-destructive testing of materials (NDT)
▪ YXLON offers application and testing services
▪ YXLON offers a broad range of systems and services
incl. 24h customer support worldwide
Technology with Passion 4Feinfocus technology | September 2018
Agenda
1 Requirements of electronics industry
2 Feinfocus technology
2.1 System
2.2 X-ray tube
2.3 Digital detector
2.4 Software
2.5 Manipulation Concept
2.6 CT
Technology with Passion 5Feinfocus technology | September 2018
YXLON International
a company of the COMET Group
X-ray & CT systems
▪ worldwide ~ 1100 employees
▪ Global Sales and Service net
ebeam engines and
systems
X-ray sources
Portable X-ray modules
RF power supply
Technology with Passion 6Feinfocus technology | September 2018
YXLON a company of the COMET Group
▪ Headquarters: Flamatt / CH
▪ Worldwide ~ 1100 Employees
▪ Worldwide Sales and Service
Umsatz 2015: 282 Mio. CHF
Technology with Passion 7Feinfocus technology | September 2018
We are YXLON!
Eight locations on three continents with more than 370 employees
Hamburg,
headquarters
Hattingen,
application center
Heilbron,
application center
Hudson, USA &
San Jose, USA
Yokohama,
Japan
Beijing & Shanghai,
China
Technology with Passion 8Feinfocus technology | September 2018
YXLON Product Overview
Standard
Systems
Standard
Microfocus-
Systems
Standard
CT Systems
Minifocus
X-ray Tubes
Microfocus
X-ray Tubes
Tire
Inspection
Systems
Customized
Solutions
Line DetectorsWheel
Inspection
Systems
Technology with Passion 9Feinfocus technology | September 2018
YXLON offers the perfect products for your inspection
tasks
Electronics Wheel Tire
Foundries Aerospace Laboratories and R&D
Technology with Passion 10Feinfocus technology | September 2018
Electronic Manufacturing Services EMS
• Assembly of PCBs
• Inspection of hidden solder joins and die attach
• Typical components: BGA, QFN, MLF, MOSFET, Connectors, THT
• Components which cannot be tested by AOI
Technology with Passion 11Feinfocus technology | September 2018
Semicon industry
• Development and production of semiconductors
• Inspection of wire bonding, copper pillars, TSV, etc
Technology with Passion 12Feinfocus technology | September 2018
Automotive/Aerospace Suppliers
• Assembly of Electronic Control Units (ECUs), High-Frequence
componentes (e.g. Radar), sensors, electrical motors
• MEMS, MOEMS
• Voids and cracks in castings of aluminum, magnesium and plastics
components
• Fast CT for detailed analysis
Technology with Passion 13Feinfocus technology | September 2018
Medical Devices Manufacturer
• Production of electronic devices (pace
makers, insulin pumps, …)
• Production of micro-mechanical devices
(inhalors, stents, …)
• Sometimes automation requested
• Fast CT for detailed analysis
Technology with Passion 14Feinfocus technology | September 2018
General expectation
The best possible IMAGE QUALITY
what allows to find a deffect/issue
and SOLVES a customer’s PROBLEM
Technology with Passion 15Feinfocus technology | September 2018
Our claim
The best image
in the shortest time
Technology with Passion 16Feinfocus technology | September 2018
Agenda
1 Requirements of electronics industry
2 Feinfocus technology
2.1 System
2.2 X-ray tube
2.3 Digital detector
2.4 Software
2.5 Manipulation Concept
2.6 CT
Technology with Passion 17Feinfocus technology | September 2018
YXLON International
• Safety and Quality – for a safe life
• Worldwide market leader in
industrial X-ray
• Headquarter in Hamburg, Germany
• over 400 motivated employees
Technology with Passion 18Feinfocus technology | September 2018
YXLON International - core competences
Software ▪ Automated defect recognition (ADR)
▪ Continuously developed image
processing
Detectors ▪ Technology facilitates rapid image
acquisition
▪ Carefully chosen strategic component
for best images
Computer
tomography
(CT)
▪ 3D capture
▪ Detailed imaging of potential defects
Mikrofocus X-Ray ▪ YXLON own desing and production
▪ Brilliant images
▪ High performance
Technology with Passion 19Feinfocus technology | September 2018
Agenda
1 Requirements of electronics industry
2 Feinfocus technology
2.1 System
2.2 X-ray tube
2.3 Digital detector
2.4 Software
2.5 Manipulation Concept
2.6 CT
Technology with Passion 20Feinfocus technology | September 2018
System Cheetah Evo
Y.FXE-160.51 Multifocus X-Ray
Tube Collimator
Y.Panel 1313 UHS / HR
High power target and High Resolution Power Target
With Standard Replacement Target
Standard planar table, high resolution table and
rotational table
Standard with high performance PC with Yxlon CT +
VG and 27 inch UHD Dell monitor
CT Part Holder Set SMT, CT Part Holder Set SEMI,
Board clamp and Board fixer
Standard micro3Dslice
20 pieces of standard filament
27 inch ultra thin frame, Ultra Sharp Dell monitor
Y.FGUI Frame and Zoom
Y.FGUI Map and Report
Y.FGUI MAVC Inspection
Y.FGUI BGA Inspection
Y.FGUI Quality Toolkit
FeinFocus Zoom +
Longer axis
Technology with Passion 21Feinfocus technology | September 2018
System Cougar Evo
Y.FXE-160.51 Multifocus X-Ray
Tube Collimator
Y.Panel 1313 UHS / HR
High power target and High Resolution Power Target
With Standard Replacement Target
Standard planar table, high resolution table and
rotational table
Standard with high performance PC with Yxlon CT +
VG and 27 inch UHD Dell monitor
CT Part Holder Set SMT, CT Part Holder Set SEMI,
Board clamp and Board fixer
Standard micro3Dslice
20 pieces of standard filament
27 inch ultra thin frame, Ultra Sharp Dell monitor
Y.FGUI Frame and Zoom
Y.FGUI Map and Report
Y.FGUI MAVC Inspection
Y.FGUI BGA Inspection
Y.FGUI Quality Toolkit
FeinFocus Zoom +
Smallest foodprint
21Feinfocus technology | September 2018
Technology with Passion 22Feinfocus technology | September 2018
Technology with Passion 23Feinfocus technology | September 2018
25µm Copper Pillars and 7µm TSV µBump connections
Technology with Passion
Technology with Passion 25Feinfocus technology | September 2018
Complex
Military spec
connector
showing
frayed
internal
wires
Technology with Passion 26Feinfocus technology | September 2018
Twin cable
connector
showing great
internal detail
Technology with Passion 27Feinfocus technology | September 2018
CT Rendering showing voiding on BGA
interfaces
Technology with Passion 28Feinfocus technology | September 2018
Battery end
cap
showing
solder
voids
Technology with Passion 29Feinfocus technology | September 2018
Ultra Capacitor End Cap
Technology with Passion 30Feinfocus technology | September 2018
3D Micro-Slice of Ultra Capacitor
Technology with Passion 31Feinfocus technology | September 2018
Wire Bonding failure 1st & 2nd Bond Gap
Technology with Passion 32Feinfocus technology | September 2018
Joint crack
Technology with Passion 33Feinfocus technology | September 2018
CSP Balls Open Circuit CT Image
Technology with Passion 34Feinfocus technology | September 2018
Balls with crack through voids
Technology with Passion 35Feinfocus technology | September 2018
3D IGBT reconstruction with layers separated
Technology with Passion 36Feinfocus technology | September 2018
Slice of the
copper pillars
(30µm diameter)
Technology with Passion 37Feinfocus technology | September 2018
Mechanical damage on 20 micron gold wire
Technology with Passion 38Feinfocus technology | September 2018
Automated measurement of blind and buried µvias
Technology with Passion 39Feinfocus technology | September 2018
Agenda
1 Requirements of electronics industry
2 Feinfocus technology
2.1 System
2.2 X-ray tube
2.3 Digital detector
2.4 Software
2.5 Manipulation Concept
2.6 CT
Technology with Passion 40Feinfocus technology | September 2018
Feinfocus Tube Technology
The first commercially successful microfocus x-ray tube, featuring a focal spot
size of less than 5 µm, was introduces and patented in 1982 by German
engineer Alfred Reinold, who founded his own company FEINFOCUS.
Technology with Passion 41Feinfocus technology | September 2018
Benefits of Open Microfocus Tubes
▪ Smaller Focal Spot Size
▪ Better Resolution
▪ Sample can be closer to Focal Spot
▪ Higher Magnification
▪ Target can be rotated and replaced
▪ No degradation in image quality over time
▪ Higher Power can be applied to the Tube
▪ X-ray Higher Density Samples
▪ Unlimited lifetime
▪ Sealed/Closed tube has to be replaced after certain time
Technology with Passion 42Feinfocus technology | September 2018
Feinfocus Tube Technology – TXI
• True X-ray Intensity – immediate and steady X-Ray stability after auto-start
• Measures the power at the target for more efficient control of focal spot size
• Constant image qualtiy = repeatable results
Patented YXLON Technology
Image with TXI Image without TXI
Out Put
In Put
X-raytube
Technology with Passion 43Feinfocus technology | September 2018
▪ Highest FeinFocus resolution
▪ Up to 160 kV at 64 W
▪ Multi-focus transmission tube
▪ Diamond-based high power and
high resolution targets
▪ Robust and durable lifetime
FXE-160.51
Technology with Passion 44Feinfocus technology | September 2018
Feinfocus Tube TechnologyY.High Power Target
• 5 µm tungsten layer
• Offers a resolution at high-power factor 2-
3x higher compared to standard targets
• Optimum target for applications at high
target power with high resolution
• Max. target power: 15 W
Y.High Resolution Power Target (HRP-
Target)
• 1 µm tungsten layer
• Offers a resolution at nanofocus factor 2x
higher compared to standard targets until
8 W
• Optimum target for applications with
highest resolution
Technology with Passion 45Feinfocus technology | September 2018
Comparision Standard vs High Power Target
Conventional target
with de-focusing
High Power Target
keeping focus
High Power Target
Standard Target
At same tube and detector settings
Technology with Passion 46Feinfocus technology | September 2018
Agenda
1 Requirements of electronics industry
2 Feinfocus technology
2.1 System
2.2 X-ray tube
2.3 Digital detector
2.4 Software
2.5 Manipulation Concept
2.6 CT
Technology with Passion 47Feinfocus technology | September 2018
Feinfocus Detector Technology
Best image quality in the market
Flat panels detector technology is standard
Distortion-free
Real time imaging, <30 fps (<60 fps with Ultra High Speed Detector)
16 bit image processing – 65000 grey values
No image integration necessary
Technology with Passion 48Feinfocus technology | September 2018
Feinfocus Detector Technology
Carefully chosen Varian detectors with
ballanced spatial
and
contrast resolution
Technology with Passion 49Feinfocus technology | September 2018
▪ Spatial resolution
▪ Spatial detector resolution of the image in x- and y-direction
▪ Smallest detail perpendicular to the X-ray beam resolved in the image
▪ Also known as effective pixel size
▪ Measured with indipendent JIMA (Japan Inspection Instruments Manufacturers’ Association; www.jima.jp/english/) mask
Spatial resolution and contrast resolution 1/2
Technology with Passion 50Feinfocus technology | September 2018
▪ Also known as ContrastSensitivity
▪ (CS) indicates thesmallest material difference, which can beresolved in the image
▪ Contrast sensitivity „works“ in x-ray beam direction (z-axis)
▪ Digital detectors have up to 16 bit (65000 different grey values)
Spatial resolution and contrast resolution 2/2
Technology with Passion 51Feinfocus technology | September 2018
Agenda
1 Requirements of electronics industry
2 Feinfocus technology
2.1 System
2.2 X-ray tube
2.3 Digital detector
2.4 Software
2.5 Manipulation Concept
2.6 CT
Technology with Passion 52Feinfocus technology | September 2018
Y.FGUI
X-ray settings(kV, µA, X-ray ON/OFF)
XXL real-time image
Overview sample tabel
for easy sample positioning
Image Processing:
▪ Image Analysis
▪ Enhancements
▪ Filter
▪ Histogram
▪ Gamma
▪ etc
▪ OSD: On Screen Display
▪ Drawing
▪ Measuring
▪ …
Workspace(EASY, IP, X-Ray)
Technology with Passion 53Feinfocus technology | September 2018
Y.FGUI eHDR Filter
without eHDR Filter with eHDR Filter
Contrast enhancement for ultimate detail recognition
Technology with Passion 54Feinfocus technology | September 2018
Y.FGUI eHDR Filter
without eHDR Filter with eHDR Filter
Contrast enhancement for ultimate detail recognition
Technology with Passion 55Feinfocus technology | September 2018
Y.FGUI eHDR Filter
without eHDR Filter with eHDR Filter
Technology with Passion 56Feinfocus technology | September 2018
Y.FGUI The best image in the shortest time
Technology with Passion 57Feinfocus technology | September 2018
Y.FGUI The best image in the shortest time
▪ Manual inspection of BGA
▪ Open BGA ball only visible in tilted view and higher magnification
▪ Top down analysis would not detect this defect
Technology with Passion 58Feinfocus technology | September 2018
Y.FGUI Automatic Analysis MAVC
▪ Automatic Analysis of Multi Void Areas
▪ Each area can be calculated independently
▪ Each area can have own defect criteria
Technology with Passion 59Feinfocus technology | September 2018
Y.FGUI Automatic Analysis BGA
▪ Automatic Analysis of BGAs
Technology with Passion 60Feinfocus technology | September 2018
Y.FGUI Semi Automatic Analysis
▪ Automatic manipulation to ROIs
▪ Good / Bad descision by operator manually
▪ Good / Bad marks generate inspection report automatically
Technology with Passion 61Feinfocus technology | September 2018
Agenda
1 Requirements of electronics industry
2 Feinfocus technology
2.1 System
2.2 X-ray tube
2.3 Digital detector
2.4 Software
2.5 Manipulation Concept
2.6 CT
Technology with Passion 62Feinfocus technology | September 2018
2D & µCT inspection trays – fast and easy to change
Technology with Passion 63Feinfocus technology | September 2018
1-click operationZoom+ – Synchronized motion for tube & detector
▪ Constant X-ray intensity & contrast
▪ No alteration to tube settings or
detector re-calibration
▪ Continuously brilliant images and
superior image quality
▪ Faster inspection
▪ Effortless operation
Click image for animation
Technology with Passion 64Feinfocus technology | September 2018
1-click operationZoom+ – Synchronized motion for tube & detector
Click image for animation
Technology with Passion 65Feinfocus technology | September 2018
1-click operationZoom+ Constant intensity for any magnification
# p
ixels
# p
ixels
# p
ixels
Technology with Passion 66Feinfocus technology | September 2018
1-click operationPowerDrive – Driving for power and speed
▪ Increasing intensity
▪ Optimizing for signal-to-noise
▪ Faster image capture
▪ Even quicker µCT scans
▪ Magnification remains constant
▪ Simple joystick operation
▪ Power boost factor of 33x
Click image for animation
Technology with Passion 67Feinfocus technology | September 2018
1-click operationPowerDrive – Driving for power and speed
SNR
FDD
r
2r
3r
I=1
I=1/4
I=1/9
Same
acquisition
time
Technology with Passion 68Feinfocus technology | September 2018
Agenda
1 Requirements of electronics industry
2 Feinfocus technology
2.1 System
2.2 X-ray tube
2.3 Digital detector
2.4 Software
2.5 Manipulation Concept
2.6 CT
Technology with Passion 69Feinfocus technology | September 2018
µCT - Computed Tomography
CHEETAH Evowith µCT Module
3D Analysis
Software VGStudio
Technology with Passion 70Feinfocus technology | September 2018
µCT - Computed Tomography Principle
2D projections
ima, jpg, tif …
Focus
Object
DetectorF
OD
FD
D
α
x
yz
3D slices
3D view
Filtered
back-
projection
µ,
α,
no.
Volume Data
Voxel
Technology with Passion 71Feinfocus technology | September 2018
Computed Tomography (CT)
• Carefully chosen partner for CT
applications – Volume Graphics
• Y.Cougar and Y.Cheetah are prepared
for CT upgrades at customer site
• Y.FF20CT is particularly designed for
CT analysis
• Separate and powerful CT worksation is
a standard
Technology with Passion 72Feinfocus technology | September 2018
Computed Tomography (CT)
▪ Cracks was not visible in 2D
▪ Cracks only visible with high manification 3D CT Scan
▪ With CT result a precise measurement is possible
▪ 10µm crack
Technology with Passion 73Feinfocus technology | September 2018
Computed Tomography (CT)
Technology with Passion 74Feinfocus technology | September 2018
Computed Tomography (CT)
Technology with Passion 75Feinfocus technology | September 2018
Measurement in CT
Technology with Passion 76Feinfocus technology | September 2018
Feinfocus USP – Y.QuickScan
▪ Fastest CT Scan in the market
▪ Finish CT scan in minutes, instead of half an hour - 2 min, aquiring1080 projections
▪ The result of Quickscan is of 90% performance of high quality scan
▪ High Quality scan takes 15 minutes
64W x-ray tube
+
TXI (True Intencity Control)
+
10-15W target power
+
Real time Flat Panel
Detector
+
Volume Graphics 64bit CT
software
=
Y.QuickScan
Technology with Passion 77Feinfocus technology | September 2018
4 min QuickScan 30 min Quality Scan
Feinfocus USP – Y.QuickScan
Technology with Passion 78Feinfocus technology | September 2018
Y.micro3D slices Semicon
Working principle
• Sample is placed on the table
• Detector tilt in fixed position and table rotate the sample 360° in selcted steps
Technology with Passion 79Feinfocus technology | September 2018
Y.micro3D slices
benefit:
▪ Collision free three dimensional inspection for large pc boards
▪ Higher magnification and much better resolution than microCT
inspection at large multi layer or double sided boards
Technology with Passion 80Feinfocus technology | September 2018
2D image of the sample
▪ Mos-FET soldered in
vacuum oven
▪ Customer was suprised
about big voids
▪ Evaluation with Micro3D
Slice to check where
voids located
Y.micro3D slices
Technology with Passion 81Feinfocus technology | September 2018
micro 3Dslice image of the sample to be inspected (IC layer 1)
Y.micro3D slices
Technology with Passion 82Feinfocus technology | September 2018
micro 3Dslice image of the sample to be inspected (IC layer 2)
Y.micro3D slices
Technology with Passion 83Feinfocus technology | September 2018
micro 3Dslice image of the sample (connection to PCB)
Y.micro3D slices
Technology with Passion 84Feinfocus technology | September 2018
micro 3Dslice image with Void Calculation: Void percentage: 2,07%
Y.micro3D slices
Technology with Passion 85Feinfocus technology | September 2018
Y.micro3D slices
Technology with Passion 86Feinfocus technology | September 2018
▪ Y.micro 3Dslice SMT can inspect double sided boards
▪ each side can be seperated and easyly inspected
▪ large boards can be inspected without cutting
▪ high magnification can be achieved since the sample is placed on the table
▪ Wizard guided workspace for easy operation
Y.micro3D slices Benefits
Technology with Passion 87Feinfocus technology | September 2018
Y.micro3D slices Semicon
Working principle
• Sample is placed on the table
• Detector tilt in fixed position and table rotate the sample 360° in selcted steps
Technology with Passion 88Feinfocus technology | September 2018
Acquisition with Cinematic Renderer
Technology with Passion 89Feinfocus technology | September 2018
BGA – Cinematic Image Processor View
Technology with Passion 90Feinfocus technology | September 2018
Ball Grid Array Voids
Technology with Passion 91Feinfocus technology | September 2018
BGA Slice in Z
Technology with Passion 92Feinfocus technology | September 2018
3D Lead Image
Technology with Passion 93Feinfocus technology | September 2018
Lens Feature to Magnifies BGA HiP
Technology with Passion 94Feinfocus technology | September 2018
Our claim
• The best image in the shortest time
• We can proof it in our application centers in:
• Hamburg, Hattingen or Heilbronn
• Shanghai, Shenzhen
• Yokohama
• Hudson (OH), San Jose (CA)
Y.Cougar SMT Y.Cheetah Y.FF20CT
Technology with Passion
Thank you for your attention.
© 2014 YXLON International GmbH
YXLON International GmbHEssener Bogen 15, D-22419 HamburgT +49 40 52729 0, F +49 40 52729 [email protected], www.yxlon.com
Technology with Passion