the quality choice in clean room certificationpurestat.com/certs/crc-102014.pdfiso class 5 cleanroom...

PURESTAT ENGINEERED

TECHNOLOGIES, INC

ISO CLASS 5 CLEANROOM

CLEANROOM CERTIFICATION REPORT

REPORT NO. 14145

OCTOBER 23, 2014

Phone (214) 607-0555 w Fax (214) 607-0564 www.cleanroomcerts.com

The Quality Choice in Clean Room Certification

Table of Contents

71 Winter Ct Woonsocket, RI 02895 ph (401)765-5743 fx (401)769-6739 www.cleanromcerts.com

Section 1 Room Layout ...................................................................................................... 1 Filter Layout ...................................................................................................... 2

Section 2 - Airflow Velocity Measurements

Summary .......................................................................................................3 Maps .......................................................................................................4 Data .......................................................................................................5

Section 3 - Room Pressurization Summary .......................................................................................................6 Maps .......................................................................................................7 Data .......................................................................................................8

Section 4 - Particle Counts Summary .......................................................................................................9 Maps .......................................................................................................10 Data .......................................................................................................11

Section 5 – CCSI Procedures Velocity Test .......................................................................................................13 Pressurization .......................................................................................................15 Particle Counts .......................................................................................................16

Section 6 - Equipment Calibration Certificates

PURESTAT ENGINEERED TECHNOLOGIES, INC

ROOM LAYOUT

A B C D E F G H1

2

3

4

5

6

7

TESTSCustomer: PURESTATTest: Room Layout 1. Airflow Velocity

Certification & Calibration Services, Inc. Test Date: 2. Pressurization 3201 Fair Oak Drive Project Mgr: David Bowman 3. Particle Counts Rowlett, TX 75089 Technician: Marc Lambert

ph: (214) 607-0555 fx: (214) 607-0564

10/23/2014

CLEANROOM ISO CLASS 5

CONTROLS ROOM

AIR SHOWER

GOWNING ROOM

Page 1


FILTER LAYOUT

A B C D E F G H1

2

3

4

5

TESTSCustomer: PURESTATTest: Filter Layout 1. Airflow Velocity

Certification & Calibration Services, Inc. Test Date: 10/23/2014 2. Pressurization 3201 Fair Oak Drive Project Mgr: David Bowman 3. Particle Counts Rowlett, TX 75089 Technician: Marc Lambert

ph: (214) 607-0555 fx: (214) 607-0564

Page 2

PURESTAT ENGINEERED TECHNOLOGIES, INC.ISO CLASS 5 CLEANROOMCLEANROOM CERTIFICATION SUMMARY

TEST DATE: OCTOBER 23, 2014

SUMMARY

AIRFLOW VELOCITY MEASUREMENTS

INSTRUMENTATION:

1. Shortridge Multimeter model ADM-870 with velgrid attachment.

PROCEDURE:

Measurements of 8 second duration were taken on a 2' X 2' test matrix under each filterat an elevation 6" beneath each filter face as per procedures in IES-RP-CC-006.2. Fourmeasurements were recorded for each 4' X 4' filter within the cleanroom.

RESULTS

1. 56 Measurements were taken on 14 filters. The results are as follows:

Average FPM: 161Standard Deviation: 33.1

Relative Standard Deviation: 20.5%Average CFM: 1,552

Air Changes/Hour: 408

3201 Fair Oak Dr., Rowlett, TX 75089 PH: 214 607-0555 FX: 214 607-0564 www.cleanroomcerts.com

Page 3


AIRFLOW VOLUME MEASUREMENTS (CFM)

A B C D E F G H1

2 479 1,471 1,647 1,702 1,753 1,767 1,830

3

4 1,565 1,637 1,454 1,519 1,563 1,572 1,772

5

TEST DATA:Customer: PURESTATTest: Velocity Meas. Avg CFM: 1,552

Certification & Calibration Services, Inc. Test Date: 3201 Fair Oak Drive Project Mgr: David Bowman Rowlett, TX 75089 Technician: Marc Lambert

ph: (214) 607-0555 fx: (214) 607-0564

10/23/2014

Page 4

PURESTAT ENGINEERED TECHNOLOGIES, INCFILTER VELOCITY MEASUREMENT DATA

AREA LOCATION 1 2 3 4 AVG FPM AVG CFM DATECLEANROOM A2 41 67 44 47 50 479 10/23/2014CLEANROOM A4 165 146 170 169 163 1,565 10/23/2014CLEANROOM B2 176 143 119 173 153 1,471 10/23/2014CLEANROOM B4 174 103 198 205 170 1,637 10/23/2014CLEANROOM C2 168 174 135 207 171 1,647 10/23/2014CLEANROOM C4 151 140 171 142 151 1,454 10/23/2014CLEANROOM D2 196 168 164 179 177 1,702 10/23/2014CLEANROOM D4 146 153 189 143 158 1,519 10/23/2014CLEANROOM E2 173 211 132 212 182 1,753 10/23/2014CLEANROOM E4 181 150 132 186 162 1,563 10/23/2014CLEANROOM F2 196 157 180 201 184 1,767 10/23/2014CLEANROOM F4 165 185 114 189 163 1,572 10/23/2014CLEANROOM G2 193 188 224 155 190 1,830 10/23/2014CLEANROOM G4 161 225 185 165 184 1,772 10/23/2014

AVERAGE 161 1,552STANDARD DEVIATION 33.1

20.5%OPEN FILTER AREA (FT2) 9.63AVERAGE CFH/FILTER 93,148ROOM SIZE (CF) 3,199TOTAL CFM 1,304,069AIR CHANGES/HOUR 408


RELATIVE STANDARD DEVIATION

Page 5



SUMMARY

ROOM PRESSURIZATION MEASUREMENTS

INSTRUMENTATION:

1. Shortridge Multimeter model ADM-870.

DESIGN REQUIREMENTS:

1. Cleanroom maintains a positive pressure to areas with less clean requirements.

PROCEDURE:

Close all doors throughout the cleanroom. Measure and record the pressure differential(in. w.g.) between the inner most cleanroom or clean space and adjacent spaces, rooms, orthe exterior environment. Measure and record the pressure differential (in. w.g.) betweenthe next adjacent spaces or rooms and other spaces or the exterior environment. Continuethe above measurements until all pressure differentials have been obtained and recorded.

RESULTS

1. The results are indicated on the enclosed map and data sheet.

2. The cleanroom is positive to areas with less clean requirements.


Page 6


ROOM PRESSURIZATION MEASUREMENTS

A B C D E F G H1

2

3

40.014 " w.g.

5 0.018 " w.g.

6

7

TESTSCustomer: PURESTATTest: Pressurization Cleanroom is positive

Certification & Calibration Services, Inc. Test Date: to areas with less 3201 Fair Oak Drive Project Mgr: David Bowman clean requirements. Rowlett, TX 75089 Technician: Marc Lambert

ph: (214) 607-0555 fx: (214) 607-0564

10/23/2014

CLEANROOM

CONTROLS ROOM

AIR SHOWER GOWNING ROOM

Page 7

PURESTAT ENGINEERED TECHNOLOGIES, INC ROOM PRESSURIZATION DATA

LOCATION AVG. PRESS. AREA DATEA5 0.018 " w.g. *ISO Class 5 Cleanroom/Controls Room 10/23/2014F5 0.014 " w.g. *ISO Class 5 Cleanroom/Air Shower 10/23/2014

* ROOM UNDER POSITIVE PRESSURE

3201 Fair Oak Dr., Rowlett, TX 75089 PH: 214 607-0555 FX: 214 607-0564 www.cleanroomcerts.comPage 8



SUMMARY

AIRBORNE PARTICLE COUNTS

INSTRUMENTATION:

1. Climet Instruments model CI-750 particle counter with 2.6 CFM sampling rate and minimum sensitivity of 0.3 microns.

DESIGN REQUIREMENTS:

1. ISO Class 5 </= 100 particles/cu. ft. at 0.5 microns

PROCEDURE:

Particle counts were taken as specified in ISO 14644-1 with sample volumes of 1 cubic foot.Isokinetic probes were used on each particle counter and size discriminations of 0.3, 0.5,1.0, and 5.0 microns were recorded.

RESULTS

1. A total of 15 measurements were taken. The results for the Cleanroom are as follows:

ISO 14644-1Area Average Standard Classification

particle/ft3 Deviation @0.5 micronsCleanroom 23 23 ISO Class 5

2. The cleanrooms were tested in the "At Rest" phase and passed ISO 14644-1 Specifications as defined above.


Page 9


AIRBORNE PARTICLE COUNTS > 0.5 MICRONS

A B C D E F G H1

2 19 9 35 18 24

3 91 10 7 19 28

4 3 1 40 16

5

TEST DATA:Customer: PURESTATTest: Particle Counts Average particle/ft3:

Certification & Calibration Services, Inc. Test Date: 233201 Fair Oak Drive Project Mgr: David BowmanRowlett, TX 75089 Technician: Marc Lambert

ph: (214) 607-0555 fx: (214) 607-0564

10/23/2014

Page 10

PURESTAT ENGINEERED TECHNOLOGIES, INCPARTICLE COUNT DATA

1 CUBIC FOOT SAMPLES (PER ISO 14644-1 SPECIFICATIONS)AREA LOCATION > 0.3 uM > 0.5 uM > 1.0 uM > 5.0 uM DATE

CLEANROOM A2 26 19 12 3 10/23/2014CLEANROOM A3 149 91 54 14 10/23/2014CLEANROOM C2 24 9 7 0 10/23/2014CLEANROOM C3 21 10 4 1 10/23/2014CLEANROOM C4 5 3 1 0 10/23/2014CLEANROOM D2 52 35 23 8 10/23/2014CLEANROOM D3 11 7 7 1 10/23/2014CLEANROOM D4 4 1 1 0 10/23/2014CLEANROOM F2 29 18 11 8 10/23/2014CLEANROOM F3 26 19 15 7 10/23/2014CLEANROOM F4 109 40 20 2 10/23/2014CLEANROOM G2 34 24 17 4 10/23/2014CLEANROOM G3 42 28 22 7 10/23/2014CLEANROOM G4 23 16 9 2 10/23/2014

STANDARD DEVIATION>> 41 23 13 4STANDARD ERROR>> 11 6 4 1

AVERAGES>> 40 23 15 4ISO 14644-1 CLASS 5 LIMITS 289 100 24 1

This area has "PASSED" ISO 14644-1 for ISO Class 5 at 0.5 microns


Page 11

CERTIFICATION AND CALIBRATION SERVICES, INC. CLEANROOM TESTING PROCEDURES

TESTING PROCEDURES

Testing may be performed at different stages as characterized by the completeness of cleanroom installation and operational modes as defined below. The testing stages are defined as follows:

Stage 1 As-Built Facility: A clean room which is complete and operating with all services

connected and functioning, following initial clean down. There is to be no process equipment or operating personnel within the facility.

Stage 2 At-Rest Facility: A cleanroom which is complete and operating. The room is to

be fully populated with process equipment staged in a non-operational mode. There shall be no operating personnel present.

Stage 3 Operating Facility: A cleanroom in normal operation, fully populated with

functioning process equipment and operating personnel. NOTE: At times it will be necessary to take exception to strict compliance with the

aforementioned testing stages. Deviation or interaction among the stages may be required due to availability or operational status of the process equipment. These situations shall be identified and acknowledged as part of the contractual agreement.

REFERENCE DOCUMENTS

1. NATIONAL ENVIRONMENTAL BALANCING BUREAU (NEBB): Procedural Standards for Certified Testing of Cleanrooms.

2. FEDERAL STANDARD 209E: Clean Room and Work Station Requirements, Controlled Environment.

3. RECOMMENDED PRACTICE IEST-RP-CC-001-86: HEPA Filters

4. RECOMMENDED PRACTICE IEST-RP-CC-002-86: Laminar Flow Clean Air Devices.

5. RECOMMENDED PRACTICE IEST-RP-CC006-84-T: Testing Clean Rooms.

6. RECOMMENDED PRACTICE IEST-RP-CC-013-86-T: Equipment Calibration or Validation Procedures.

7. ISO 14644-1: Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness

8. ISO 14644-3: Cleanrooms and associated controlled environments - Part 3: Metrology and test methods

Page 12


I. FILTER AIRFLOW AND UNIFORMITY TESTS A. SCOPE

1. The purpose of these tests is to determine the average airflow velocity and/or volume, the uniformity of airflow within a unidirectional area of a cleanroom, and the total airflow provided.

2. Measurement readings shall be taken at a specified distance (entrance plane) from the face of the filter system, such as 3 to 6 inches (75 to 150 mm) from the filter face, or as specified by the Buyer or Owner.

3. The measurement area shall be a cross-sectional area of the filter face normal to the airflow. This area shall consist of the filter media area, which is exclusive of the filter frame or patch area of the filter (the net free area). For example, a 48 inch x 24 inch (1200 mm x 600 mm) HEPA filter does not have a net free area of eight square feet (0.72 square meters), but is closer to a little over seven square feet (0.63 square meters), with the frame, etc. deducted.

B. MEASUREMENT INSTRUMENTATION

1. Use an airflow velocity measurement device capable of accurate velocity measurement between 50 fpm and 120 fpm (0.25 m/s and 0.80 m/s) velocity ± 5 percent of the reading.

C. VELOCITY TEST PROCEDURES (Unidirectional Airflow)

1. Divide the net filter face (entrance plane) for single point measurements into grids of equal area of not greater than one square foot (0.09 square meters), or as specified by the buyer or Owner. With other types of measurements, such as a tube array sensor, individual grid areas shall not exceed four square feet (0.37 square meters).

2. Measure and record the velocity at the specified distance of each grid point. Special care is necessary to keep the sampled area unobstructed during the airflow measurement. The use of a support stand is recommended with sensor type measuring instruments.

3. Take the measurement for a minimum of 5 seconds or the minimum specified time for the meter, using the average during that period as the measurement. No adjacent reading should vary by more than 20 percent of one another.

D. AIRFLOW AND UNIFORMITY REPORTING

1. Velocity Reports

a. Record all airflow measurements with corresponding grid locations.

b. Calculate the average airflow velocity, which is the arithmetic mean of the recorded velocity measurement readings, using the following Equation:

Equation: VAM = (V1 + V2 + ... + VN) /N

Where: VAM = Arithmetic Mean Velocity - fpm (m/s)

Page 13


VN = Velocity readings - fpm (m/s) N = Number of readings

c. Calculate the standard deviation of the velocity measurement readings using the following Equation:

SDV = (((V1 - VAM)2 + (V2 - VAM)2 + ... + (VN - VAM)2)/ N-1)1/2

Where: SDV = Standard Deviation of velocities - fpm (m/s) VN = Velocity readings - fpm (m/s) N = Number of readings

d. The relative standard deviation (uniformity) of the airflow velocity may be calculated as a percentage using the following Equation:

RSD = SDV/VAM x 100

Where: RSD = Relative Standard Deviation - % SDV = Standard Deviation of velocities - fpm (m/s) VAM = Velocity average - fpm (m/s)

E. TEST ACCEPTANCE

1. The average airflow velocity for the cleanroom should be within ± 5 percent of that specified by the Buyer or Owner unless otherwise specified.

2. The relative standard deviation should not exceed 15 percent unless otherwise specified by the Buyer or Owner.

3. Identify all readings which are outside the airflow uniformity ranges.

Page 14


II. PRESSURIZATION TEST A. SCOPE

1. After a cleanroom or clean space has been tested successfully for airflow volume, velocity, uniformity and parallelism, the proper pressurization of cleanroom areas must be verified. The purpose of this test is to verify the capability of the HVAC systems to maintain the specified pressure differentials.

B. INSTRUMENTATION

1. An electronic manometer, inclined manometer or differential pressure gauge should be used with all openings and doors closed and all air handling systems operating.

C. PROCEDURE

1. Measure and record the pressure differentials (in.w.g. or Pa) between the inner most cleanroom or clean space and adjacent spaces, rooms, or the exterior environment.

2. Measure and record the pressure differential (in.w.g. or Pa) between the next adjacent spaces or rooms and other spaces or the exterior environment.

3. Continue the above measurements until all pressure differentials have been obtained and recorded.

D. REPORTING

1. Report all measured pressure differentials to the nearest 0.01 in.w.g. (2.5 Pa) at recorded or specified locations.

E. ACCEPTANCE

1. Specified pressurization levels (such as 0.03 to 0.05 in.w.g. or 7.5 to 12.5 Pa) are subject to the agreement between the Buyer and the Seller.

Page 15


III. AIRBORNE PARTICLE COUNT A. SCOPE

1. The airborne particle count test is performed to determine the actual particle count level within the facility at the time of the test (as-built, at-rest, or operating).

B. TEST APPARATUS

1. Use an optical particle counter having a particle size discrimination capability to count particles 0.5 micron and larger for testing clean areas designated ISO Class 6(Class 1000) and greater, a capability to count particles 0.2 micron and greater for testing clean areas designated ISO Class 5(Class 100), and a capability to count particles 0.1 micron and greater for testing clean areas designated from ISO Class 1 through 4(Class 1 through Class 10).

C. TEST PROCEDURES

1. Verify that all aspects of the cleanroom system which contribute to its operational integrity (air handling, filtration systems, walls, ceilings, floors, etc.) are complete and functioning nominally in accordance with the requirement of the type clean room and the operational mode under test. The requirements are those specified by the Cleanroom Owner.

2. Establish a test point grid pattern at the working level which satisfies user requirements and is compatible with the type of cleanroom and the operational mode being tested.

3. Sampling Points - ISO 14644-1

a. Derive the minimum number of sampling points from the following equation:

NL = (A)1/2

Where: NL = Minimum number of sample locations A = Area of the cleanroom in square meters

b. Where only one sampling location is required, a minimum of three sample volumes shall be taken.

4. The size of particles for room certification particle counts shall be as agreed between the Owner and Certification Firm or as specified. Particle counts and size normally shall be based on Table I of Federal Standard 209E Airborne Particulate Cleanliness Classes or Table 1 of ISO 14644-1 Cleanrooms and associated controlled environments.

a. For example, particle counts for a ISO Class 5(Class 100) cleanroom may be based on 0.2 micron, 0.3 micron, and/or 0.5 micron particle sizes per unit volume of air depending on the agreement or specification.

Note: All measurements are made under ambient conditions; there is no induced challenge.

5. Each sample of air tested at each location shall be of sufficient volume such that at least 20 particles would be detected, if the particle concentration were at the class limit, for each specified particle size.

Page 16


The following formulas provide a means of calculating the minimum volume of air to be sampled as a function of the number of particles per unit volume listed in the appropriate table: ISO 14644-1 (Table 1): Volume = 20/[class limit (particle/volume) from Table 1] x 1000 {Volume is in litres}

6. The volume of air sampled shall be no less than 2 litres (.071 ft3) for ISO 14644-1. The results of the

calculation of the sampled volume shall not be rounded down. D. REPORTING

1. Record the mean particle count at each grid location.

2. Note all measurement exceeding the specified air cleanliness level.

E. ACCEPTANCE

1. To classify the complete cleanroom as meeting the specified air cleanliness level, particle counts shown on the sample point plan should not exceed the specified level. Clean work zone areas within the cleanroom may also be specified and classified by the maximum allowable particle count, in addition the room or work area may be classified differently in the as-built, at-rest. and operating facility modes. Classification requirements should be specified.

Page 17

CCSI Test Equipment List

3201 Fair Oak Dr. w Rowlett, TX 75089 w ph: (214)607-0555 w fx: (214)607-0564 w www.cleanroomcerts.com

Test: Airflow Velocity Measurements/Room Pressurization Equipment: Anemometer Manufacturer: Shortridge Instruments Model: ADM-870 Serial Number: M01113 Calibration Due: 02/02/2015

Test: Airborne Particle Counts Equipment: Particle Counter Model: CI-750 Serial Number: 067708 Calibration Due: 01/31/2015

Manufacturer:

Model:

Serial Number:

Asset Number:

Pro-Calibration. LLC 480 Harwich Rd. Brewster, MA 02631

774-323-3662

Calibration Certificate

SHORTRIDGE INSTRUMENTS ADM-870 M01113 CCS-008

CUSTOMER: CCS Inc. 71 Winter Court

VVoonsocketRI02895

Pro-Calibration, LLC certifies that the above listed instrument meets or exceeds all specifications as stated in the referenced · procedure (unless otherwise noted). It has been calibrated using measurement standards traceable to the National Institute of Standards and Technology (NIST), or to NIST accepted intrinsic standards of measurement, or derived by the ratio type of self-calibration techniques. This calibration complies with ANSI/NCSL Z540.3.2006 and or ISO/IEC 17025:2005. (TUR >=4: 1) in accordance with "The Guide to the Epression of Uncertainty in Measurement (GUM)".This report may not be reproduced, except in full, unless permission for the publication of an approved abstract is obtained in writing from the calibration organization issuing this report.

JcALIBRATION INFORMATION

Cal Date 2 Feb 2014 Temperature: 20.0"C

Next Cal Due 2 Feb 2015 Humidity: 40 %

Cal Procedure: Manufacturer Specifications Test Result: y

I R'm"k>•

!sTANDARDS USED FOR CALIBRATION

Asset Number

CTI1064

CTI1066

CTI1072

CTI1094

CTI1097

CTI1098

CTI930

CTI993

Description

FLUKE 725 MULTIFUNTION PROCESS CALIBRATOR FLUKE 9009 DUAL WELL DRY BLOCK CALIBRATOR SHORTRIDGE INSTRUMENTS ADM-870 AIRDATA MULTI METER PRINCO INSTRUMENTS 453 FORTIN TYPE MERCURIAL BAROMETER FLUKE 700P01 10"WC PRESSURE MODULE

FLUKE 700POO 1.0"WC PRESSURE MODULE

MERIAM INSTURMENTS DP2001 DIGITAL MANOMETER TSI1650 THERMOANEMOMETER

PRINTED ON 2 Feb 2014 Certificate Number

CCS-008:1391333346

As Received: In Tolerance

As Returned: In Tolerance

Cal. Date Due Date

01 Mar 2013 01 Mar 2014

15 May 2013 15 May 2014

28 Oct 2013 28 Oct 2014

13 Sep 2012 13 Sep 2017

28 Jan 2014 28 Jan 2015

28 Jan 2014 28 Jan 2015

18 Dec 2013 18 Dec 2014

22 Feb 2013 22 Feb 2014

~-~~JI Signed: ~7~

Page 1 of 1

•

•

Pro-Calibration, LLC Calibration Data Sheet

Submitted by: """""C::....::C=S=-:.In=c::..:.·--------Manufacturer: Shortridge Instruments

Page 1 of 1 Asset Number #: ---------==C'-'=C'""'S'--'-0"-'0~8 Cal. Technician: CT2

----------------~= Model Number: =...cA=D=M~-8'--'-7--"-0 ________ _ Cal. Date: -------=2"--'/0=2"--'/1'--'-4 Serial Number: -=-M=0-"'--1"'--'lo__e1e..=:3'----------

Description: Air Data Multimeter Due Date: -------=2'--"/0=2"--'11'-"'-5

Cal. Procedure: Manufacturer Specifications

STD#

930

1064

1072

1097

1098

930

993

1072

1066

1094

Note;

Cal. Interval: 12 Months

Standards Used:

930 993 1064 1066 1072 1094 1097 1098

Temperature: 20Deg.C Barometric Pressure: 30.17"HG Humidity: 40%RH

Tested Function

Pressure in/we

+!- 2%rdg.,+/-O.OOJ"wc

Air Velocity

+!- 3%rdg.,+/-7fpm

Temperature

+/- 0.5°F

+/- 0.5°F

+/- 1.0°F

+/- 1.0°F

Absolute Pressure ±2%, rdg, ±O.l"HG

Range Standard Uut. Meas. Val. Allowable Tolerance Range

0-60"WC 0.0500 0.0501

0.5000 0.5005

1.000 1.003

10.00 10.08

25.00 25.11

50.00 50.35

25-5000 54 55

Ft/min. 190 190

465 464

810 812

1805 1809

3265 3272

4880 4898

-65/+250°F 5.00 5.2

32.00 32.1

77.00 77.1

100.00 100.1

240.00 240.1

14 -40in.Hg 30.17 29.9

Pro-Calibration, LLC 480 Harwich Rd. Brewster, MA 02631 77 4-323-3662

www.pro-calibration.com Veteran owned and operated.

0.0480- 0.0520"wc

0.4890- 0.5110"wc

0.9790- 1.0210"wc

9.799 -10.201"wc

24.499- 25.501 "we

48.999- 51.001 "we

45-63 tpm

177-203 tpm

444-486 tpm

779- 841 tpm

1744- 1871 tpm

3160-3375 tpm

4727 - 5033 fpm

4.5- 5.5of

31.5- 32.5of

76.5 -77.5of

99.0- lOl.Oof

239.0 -241.0of

29.47-31.57 in.Hg.

. CALIBRATION SERVICES, INC. 615 Aldrich Street Uxbridge, MA 01569 508-278-2932, fax 508-278-7244, [email protected]

CERTIFICATE OF CALIBRATION IN CONFORMANCE WITH ISO 21501-4 Requirements for calibration intervals

Summary of tests conformed for ID # 7708

• Size calibration The voltage response to test particles are evaluated using the internal PHA and proprietary calibration software. Thresholds for each channel are adjusted to

match the median particles response.

• False counts Commonly referred to as a zero count test, under ISO 21501-4 the results are expressed as a 95 % upper confidence limit for false counts, Although not a requirement for post - production calibrations, a standard Zero count test is provided as part of the recalibration intervals, because the basic testing is still important.

DOCUMENT LIST • PAGE 1: This cover page • PAGE 2: Certificate of calibration, summary page

• Page 3: Certificate of calibration, data sheet

• Page 4: Certificate of calibration, traceability sheet

REVISED 12 February 2013 Page lof4

mailto:[email protected]

CALIBRATION SERVICES INC. 615 Aldrich St., Uxbridge, MA 01569 508-278-2932 fax 508-278-7244 !.~::,,::'-"..:c..;,;c_::..:..c::::_.::-=-."".:=.:

CERTIFICATE OF CALIBRATION Performance Summary

Climet aerosol particle counter, model: CI-750 SIN: 067708 Unit ID: 7708

Cal date: 07 Jan 2014 Due date: 31 Jan 2015

PREPARED FOR: CCS CALIBRATION PERFORMED AT: Calibration Services, Inc. CALIBRATION PRCEDURE NUMBER: Procedure Number 01

Physical condition upon receipt: _ not applicable .x good _ damaged poorly packaged _ rough handling

Condition of calibration, as found: condition, as left new unit x in tolerance out of tolerance lL to specifications

Comments

Calibration parameters: Laser Power and Peak Noise are recorded for reference purposes only. Air Flow is a critical parameter during calibration, because it establishes the nominal sample volume and it establishes particle velocity, which affects sizing. Because flow variances after calibration affects sample volume inversely, variances up to 100/0 have negligible affect on recorded counts. Particle response amplitudes correspond to detection thresholds. Amplitudes greater than the thresholds will result in counts greater than normal. Amplitudes below thresholds will result in undercounting.

Date: 07 Jan 2014

Page 2

Calibration perfo~d by: ",,-M=i~ke~~~......;;;;..

Signed:~'-~~~~~_____~~~~~~_

CALIBRATION SERVICES 615 Aldrich Street, Uxbridge MA 01569 phone: 508-278-2932 fax: 508-278-7244 email: !I!g~§!!@Qb.§!t©l:.n.~l

CALIBRATION TEST DATA

MODEL: CI-750 Aerosol Particle Counter SIN 067708 10: 7708

DATE OF CALIBRATION: 07 Jan 2014 Due: 31 Jan 2015

Condition of instrument In tolerance Out of tolerance

ELECTRONIC MEASUREMENTS

TEST NOMINAL TOLERANCE AS FOUND PASS AS LEFT

L.D. current drive (voltage) 2050 mVdc (reference) 2058 mVdc NIA 2058 mVdc

AIR FLOW 75 LPM +1- 3.5 LPM 75 LPM Y 75 LPM

PEAK NOISE <200 mV (reference) 175 mV NIA 175 mV

I\lnitlal value; the voltage Increases as the laser diode ages

PERFORMANCE DATA

NOMINAL PARTICLE SIZE 0.3 UM I 0.5 UM 1.0 UM 5.0 UM

EXPECTED AMPLITUDE (last cal) 302mV 306mV 920mV 401 mV

TOLERANCE +1- 60 mV +1 30 mV +1-165 mV +1- 50 mV

AS FOUND 308mV 317 mV 900mV 401 mV

PASS (YIN) Y Y Y Y

AS LEFT 308mV 317mV 900mV 401 mV

COLLECTIVE UNCERTAINTY OF MEASUREMENT:+/- 2.3% AT 0.3 UM AND 0.5 UM; +/- 3.5% AT 5 UM. The collective uncertainty is based on the contribution of the Pulse Height Analyzer, the Mass Flow Meter, and the judgement of the technician in establishing the median of the displayed distribution, as determined by empirical tests and 1 sigma uncertainty calculation.

ACCURACY RATIO: The collective uncertainty of the measurement standard is less than 25% of the listed tolerances (4:1 measurement ratio).

CALIBRATION TOLERANCES: The particle sizes listed are nominal; refer to the Test Equipment Record for actual sizes. Tolerance voltages listed represent a 2% sizing error and the particle deviation from the size. If the particle response is below the tolerance for Expected Amplitude the particle will be sized larger than it actually is, resulting in counts that are greater than they actually should be. The actual counts cannot be extrapolated from the out-of-tolerance counts. Temperature and Humidity sensors) if present, are for reference, and are not part of the calibration.

Technician: Mike DiLibero

Page 3

mailto:I!g~�!!@Qb.�!t�l:.n.~l

CALIBRATION SERVICES INC. 615 Aldrich St., Uxbridge, MA 01569 508-278-2932 fax 508-278-7244, email: ,~..=_~;....""'":~:!.._."-",,o.:-,_,-,,,__,

CERTIFICATE OF CALIBRATION Standards of Traceability

UNIT ID: 7708 ST A TEMENT OF TRACEABILITY

This instrument has been calibrated in accordance with ISO 10012-1 and ANSI Z540-1 (which replaces MIL-STD-45662A).

Temperature and Relative Humidity are not controlled during calibration because of the wide operating range of the instrument. (Temperature:30 deg F to 120 degF humidity:O-lOO%, non-condensing).

Al1 test equipment used in the calibration of Calibration Services Inc.s' products is calibrated at manufacturer Recommended intervals by an approved outside calibration service. Calibration certificates for each piece of test equipment are on file at Calibration Services Inc; copies will be supplied if requested.

Calibration traceability to a National Measurement Standard (NMS) is established by using monodisperse latex spheres as a calibration standard. These spheres are sized by methods traceable, by lot number, to the National Institute of Standards and Technology.

The instruments and reference standards listed below were used to calibrate the instrument certified by this document.

DOCUMENT DATE: 07 Jan 2014 CALIBRATION METHOD

Climet particle counters are calibrated by using one or more sizes of polystyrene latex spheres, which serve as standards for comparing and adjusting amplifier response to known particle sizes. The particles are introduced to the sensor as an aerosol sample with moderate concentration. The digital voltmeter is used to make reference measurements. The oscilloscope is used for reference during calibration, and as a tool to evaluate the condition of the sensor. The Pulse Height Analyzer (PHA) is the primary calibration instrument. It is used to collect particle pulses produced by the test particles; these form a distribution ofpulses on the PHA display.

The PHA provides the requisite resolution to determine the mediation of the distribution. The amplifier circuitry is adjusted, as needed, to bring the median distribution to the amplitude specified for a given particle standard. Initial factory prime calibration includes verification of count efficiency by count comparison with CDCIDMA or with a reference particle counter used as a transfer standard.

Equipment Make and Model Serial Number Cal Date Cal Due Date

Pulse Height Analyzer DVM Oscilloscope Flow Meter Flow Meter Particle Counter Digital Stop Watch

Amptek MCA 8000 Fluke 73 TDS220 4043 4040 CI-88R ~-

1051

001335 34154633 B071196 40430628002 40401024010 103962 111599574

22 Aug 2013 09 Aug20l3 09 Aug20l3 26 Aug 2013 l3 Aug2013 22 Aug 2013 09 Aug 2013

31 Aug 2014 28 Feb 2014 28 Feb 2014 28 Feb 2014 28 Feb 2014 28 Feb 2014 28 Feb 2014

PARTICLE STANDARDS

NOMINAL ACTUAL SIZE LOT EXP. NOMINAL ACTUAL SIZE LOT EXP. SIZE SIZE DEVIATION NUMBER DATE SIZE SIZE DEVIATION NUMBER DATE

300nm 296nm +/- 6 nm 41699 Feb 2016 l.Oum 1.019 urn +/-0.015urn 39486 Sep 2014 495nm 496nrn +-/- 8.1 nm 42179 Jun 2016 3.0um 3.002 urn +/- 0.019um 40078 Feb 2015 5.0 urn 4.996 urn +/- 0.056 um 41903 Apr 2016

Cert Statement form Revised Aug 2013 Page 4

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