div class=ts-pagebutton class=gotoPage data-page=1Page 1button div class=ts-imageimg data-url=pii-0167-93179390080-o-chouwebpublications46-fischerrie-high-pb-fischerhtmlpage=1 data-page=1 class=ts-thumb lazyload alt=Page 1: PII: 0167-93179390080-Ochouwebpublications46 Fischer_RIE High · PB Fischer and SY Chou trenches in silicon and silicon-germanium 0167-93179 The Si wafers are p-type with loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader033vdocumentinreader033viewer20220421015e7e381f87012e723f742c29html5thumbnails1jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=2Page 2button div class=ts-imageimg data-url=pii-0167-93179390080-o-chouwebpublications46-fischerrie-high-pb-fischerhtmlpage=2 data-page=2 class=ts-thumb lazyload alt=Page 2: PII: 0167-93179390080-Ochouwebpublications46 Fischer_RIE High · PB Fischer and SY Chou trenches in silicon and silicon-germanium 0167-93179 The Si wafers are p-type with loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader033vdocumentinreader033viewer20220421015e7e381f87012e723f742c29html5thumbnails2jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=3Page 3button div class=ts-imageimg data-url=pii-0167-93179390080-o-chouwebpublications46-fischerrie-high-pb-fischerhtmlpage=3 data-page=3 class=ts-thumb lazyload alt=Page 3: PII: 0167-93179390080-Ochouwebpublications46 Fischer_RIE High · PB Fischer and SY Chou trenches in silicon and silicon-germanium 0167-93179 The Si wafers are p-type with loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader033vdocumentinreader033viewer20220421015e7e381f87012e723f742c29html5thumbnails3jpg width=140 height=200 divdivdiv class=ts-pagebutton class=gotoPage data-page=4Page 4button div class=ts-imageimg data-url=pii-0167-93179390080-o-chouwebpublications46-fischerrie-high-pb-fischerhtmlpage=4 data-page=4 class=ts-thumb lazyload alt=Page 4: PII: 0167-93179390080-Ochouwebpublications46 Fischer_RIE High · PB Fischer and SY Chou trenches in silicon and silicon-germanium 0167-93179 The Si wafers are p-type with loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader033vdocumentinreader033viewer20220421015e7e381f87012e723f742c29html5thumbnails4jpg width=140 height=200 divdiv