prezentace aplikace powerpoint - euv litho · up & running since 2016 branch of the institute...
TRANSCRIPT
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HiLASE CENTRELASER SYSTEMS & TECHNOLOGIES
Dr. Tomáš MocekHead of Centre
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„Teaming for Success“
HiLASE at a Glance▪ Laser Technology R&D Infrastructure
▪ Up & Running since 2016
▪ Branch of the Institute of Physics
▪ DPSSLs with breakthrough parameters
▪ Applications of DPSSL in hi-tech industry
▪ Project of National Interest
▪ 84 FTE / 95 heads + 30 part-timers
▪ FY2017 budget: CZK 110M (USD 5M)
▪ 11% (institutional)
▪ 89% (projects & contracts)
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„Teaming for Success“
Laser Facilities (1st floor)
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„Teaming for Success“
Experimental Halls (2nd floor)
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„Teaming for Success“
World-leading Performance
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„Teaming for Success“
First-ever 1-kW, ns Superlaser Bivoj
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„Teaming for Success“
Breaking the 1-kW barrier
Mason et al, Optica 4, 438 (2017)
World’s first kW average
power HE-DPSSL
”Scientists create ‘super laser’ which puts every other laser to shame”
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„Teaming for Success“
Laser Shock Peening station
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„Teaming for Success“
Laser Induced Damage Threshold station
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„Teaming for Success“
High power thin-disk laser platforms
1030 nm 2 μmConversion
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„Teaming for Success“
PERLA B-20
Laser Systems
for Research & Industrial Apps
GO Stable Pico
PERLA C-100
Thermal Modelling
R&D Services
Contract Research Commercial Service
LIDT
Products & Services
Laser Processing
Laser Shock Peening
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„Teaming for Success“
PERLA C-100
Specifications
Wavelength 1030 nm
Bandwidth 2 nm
Average power 100 W
Repetition rate 100 kHz
Pulse energy 1 mJ
Pulse width 2 ps
Power stability (RMS) < 0.5%
Energy stability (RMS) < 1%
Contrast of pulse train 500:1
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„Teaming for Success“
PERLA C-100: main features ▪ 100-W, 1-mJ picosecond laser▪ Excellent beam quality▪ Integrated pulse-picker: Variable repetition rate (100 kHz, 50 kHz and lower)
Pulse-on-demand mode▪ Integrated beam pointing stabilization▪ Good pulse contrast▪ Integrated CVBG pulse compressor
(or external grating compressor)▪ Control system with user-friendly GUI▪ External fiber front-end module▪ External modules for IR OPA
and harmonic generation
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„Teaming for Success“
Extreme water repellency by PERLA laser
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„Teaming for Success“
Conversion to VIS/DUV▪ Assets of PERLA C fundamental beam for HG:
High average output (100-500 W) + Picosecond pulses (1-10 ps)
Application of harmonics:▪ Material processing: low heat loading → photo-ablation → cutting & microdrilling with
precise and high density structuring▪ Scientific applications (DUV): semiconductor lithography, photoemission from metal cathodes at
accelerator devices, promotion of surface phase transitions
Harmonicfrequency
Wavelength(nm)
Crystal Length(mm)
Type
2ω 515 LBO 10, 5 I, oo-e
3ω = 1ω + 2ω 343 LBO 5 II, oe-o
4ω = 2ω + 2ω 257.5BBO,
or CLBO36
I, oo-e
5ω = 1ω + 4ω 206 CLBO 4 I, oo-e
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„Teaming for Success“
Generation of 2H, 4H, 5H
-10 -5 0 5 10
0.0
0.5
1.0In
ten
sity (
a.u
.)
Delay (ps)
2.3 ps
0 20 40 60 80 100 120 140 160 180 2000
10
20
30
40
50
60
70
80
90
100
92 kHz
pulse duration ~10 ps
First harmonic (W)
Se
co
nd
ha
rmo
nic
(W
)
LBO 8x8x10 mm
5-9-2018
0
5
10
15
20
25
30
35
40
45
Eff
icie
ncy (
%)
Imax~10 GW/cm2
0 10 20 30 40 50 60 70 80 90 1000
5
10
15
20
25
Second harmonic (W)
Fo
urt
h h
arm
on
ic (
W)
pulse duration ~10 ps
92 kHz
CLBO 6x6x6 mm (150 °C)
5-9-2018
0
5
10
15
20
25
30
35
40
Eff
icie
ncy (
%)
Fundamental beam
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„Teaming for Success“
Tunable parametric mid-IR source • High power pump laser
– 100 W, ps pulse-width, 100 kHz, 1030 nm
• Seed generation for mid-IR
– OPG
• Amplification – Signal beam amplified
– Mid-IR idler beam generated
• Wavelength tunable 1.5 – 3.5 μm (oxide crystals)
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„Teaming for Success“
OPA in KTP crystals
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„Teaming for Success“
Compact ps fiber oscillator
▪ GO = Good One ▪ Repetition rate 37 MHz (tunable)▪ Pulse energy 1 nJ ▪ Pulses duration <2 ps▪ Wavelength 1030 nm▪ Key feature Reliability▪ GO Stable Femto is under development
GO Stable Pico is a commercially availablepicosecond fiber oscillator that is used forspectroscopy and seeding high energy systems.
for Industrial applications
GO Stable Pico
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„Teaming for Success“
Industrial Collaboration Network
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„Teaming for Success“
Academic Collaboration Network
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„Teaming for Success“
The DNA of HiLASE