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Products & Services Catalog

“What YOU need, when YOU need it!” SM

Cryopumps & Compressors • Mechanical Pumps • Dry Pumps • Turbo Pumps • Power Generators • Valves • Leak Detectors

http://www.ptbsales.com

About PTB Sales

PTB Sales was established in 1995 and is a leading North American provider of key services to the

Semiconductor Fabrication, PV Solar, Nano-Technology, MEMS, Vacuum Coating, Aerospace and

Defense, Research and Development and General Industrial markets. Founded on our guiding principle

of “What YOU need, when YOU need it!” SM we have established a track record of being there when our

customers need support in a timely manner and at affordable prices.

Based in Azusa, CA we provide Equipment Refurbishment and Sale, Repairs and Exchanges and

manufacture and the new GreenChipSM Service Programs across a variety of critical components such

as cryogenic vacuum pumps, turbomolecular vacuum pumps, roughing pumps, power generators and

related electronics, valves and others. Because of our commitment to quality and superior customer

relations, the portfolio of products we serve continues to expand.

PTB Sales operates multiple remanufacturing lines out of 3 facilities with a combined capacity of 40,000

ft2, which also store a very significant inventory stock. We have a highly technically competent staff that is

focused on customer service and getting it right the first time.

We have an extensive and growing network of partners throughout the supply chain and have solid

relationships with many equipment OEMs. As a result we can deliver services to our customers that are

equivalent to those they could receive from an OEM but at a much more affordable price level. Almost

two decades after being founded our focus remains on reliable, timely and high quality servicing of our

customers needs!

Main Facility Power Generator FacilityCryogenic Pump Facility

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TABLE OF CONTENTS

SERVICES OFFERED

REFURBISHED EQUIPMENT

SYSTEMS & SPARES

Refurbished Equipment

Cryopumps ..................................................................................................................................................................................................................... 19

Cryo Compressors & Arrays .............................................................................................................................................................................................. 21

Polycold Cryogenerators .................................................................................................................................................................................................. 23

Dry & Scroll Pumps ........................................................................................................................................................................................................ 25

Rotary Vane & Piston Pumps .......................................................................................................................................................................................... 29

Rotary Lobe Blowers ....................................................................................................................................................................................................... 35

Diffusion Pumps .............................................................................................................................................................................................................. 37

Traps & Baffles ................................................................................................................................................................................................................ 39

Ion Pumps & Controllers .................................................................................................................................................................................................. 41

Turbomolecular Pumps ................................................................................................................................................................................................... 43

Turbo Pumping Stations .................................................................................................................................................................................................. 47

Turbo Controllers ............................................................................................................................................................................................................. 49

Power Generators ........................................................................................................................................................................................................... 53

E-Beam Power Generators & Guns .................................................................................................................................................................................. 61

Table of Contents

Services Offered

Refurbished Equipment Sales .......................................................................................................................................................................................... 01

Repairs & Exchanges ...................................................................................................................................................................................................... 03

GreenChipSM Services ...................................................................................................................................................................................................... 13

Systems & Spares

Leak Detectors & Rentals ................................................................................................................................................................................................. 63

Aerospace Equipment ..................................................................................................................................................................................................... 65

Gate Valves ..................................................................................................................................................................................................................... 67

Angle Valves .................................................................................................................................................................................................................... 71

Throttle Valves ................................................................................................................................................................................................................. 75

Throttle & System Valve Controllers ................................................................................................................................................................................. 77

Vacuum & Deposition Gauges ......................................................................................................................................................................................... 79

Deposition Rate Monitors ................................................................................................................................................................................................ 81

Thin Film Systems .......................................................................................................................................................................................................... 83

Schreiber Chillers ........................................................................................................................................................................................................... 87

Inland Vacuum Oils & Greases ........................................................................................................................................................................................ 89

Services Offered

Refurbished Equipment Sales

At PTB Sales we are dedicated to a philosophy of “What YOU need, When YOU need it!” SM and our

refurbished equipment sales exemplifies this belief. We have a core competency in sourcing material

critical to our customers operations and production needs. Over the years we have developed the

capability to refurbish a wide range of vacuum pumps used in high tech manufacturing and provide the

highest quality refurbishment to new conditions in the North American market.

Our customers range from semiconductor fabrication facilities, to aerospace companies, to research and

development laboratories, to small industrial coating firms. We are able to meet the equipment needs

of this diversified and demanding base of customers because of our focus on servicing our customers

needs and capability to refurbish a very wide range of critical components.

We have a large inventory of equipment and components to serve high tech manufacturing industries in

our 3 facilities of over 40,000 ft2. Our competency is in locating, refurbishing and having readily available

the equipment our customers need to support their manufacturing operations.

Asset Management

We buy your excess vacuum related equipment.

Visit www.ptbsales.com,

or call toll free 866-332-0500 option 3.


CREFURBISHED EQUIPMENT SALES

VACUUM PUMPS

POWER GENERATORS

VACUUM SYSTEMS & SPARES

Vacuum Systems & Spares

Equipment Manufacturers Models

Leak Detectors Agilent/Varian, Adixen/Alcatel, Edwards, Veeco VS, ASM, Spectron, MS

Valves & Controllers Edwards, Oerlikon Leybold, MKS ENI, VAT Angle, Gate, Throttle, Transfer

Vacuum & Deposition Gauges Granville-Phillips, Oerlikon Leybold, MKS ENI Cold cathode, Thermocouple T/C, Convection

Deposition Rate Monitors Temescal, Oerlikon Leybold, Maxtek, Sycon FDC, IC, XMS, XTC, XTM. MDC, STM, STC

Thin Film Systems Applied Materials, Brooks Automation, Electroglas AMAT Endura, MagnaTran, 2001X

Chillers Schreiber Chillers 300, 500, 750, 1000, 1250, 5000

Oils & Greases Inland Vacuum Fomblin, Galden, Halovac, Invoil

02

Vacuum Pumps


Cryopumps CTI, Oerlikon Leybold, SHI-APD, Ricor Cryo-Torr, On-Board, On-Board IS

Cryo Compressors CTI, Polycold 8510, 9600, 9700, PFC

Dry Pumps Edwards, Adixen/Alcatel, EBARA iQDP, iH, iL, IPX, EPX, ACP, AA

Dry Scroll Pumps Agilent/Varian, Edwards, ANEST IWATA, Leybold DS, PTS, SH, ESDP, GVSP, XDS, ISP, SC

Rotary Vane Pumps Adixen, Agilent/Varian, Oerlikon Leybold, Stokes, Welch DS, SD, Trivac, Microvane

Rotary Piston Pumps Kinney/Tuthill, Oerlikon Leybold, Stokes KTC, KT, E, DK, H11

Rotary Lobe Blowers Adixen, Edwards, Kinney, Oerlikon Leybold, Stokes RSV, EH, KMBD, WA/WAU, WS/WSU

Diffusion Pumps Agilent/Varian, Edwards, CVC HS, M, VHS, Diffstak, PMC

Ion Pumps & Controllers Agilent/Varian, Perkin-Elmer StarCell VacIon, PE, Multicell, Digitel

Turbo Pumps Seiko Seiki, Adixen, Agilent/Varian, Oerlikon Leybold STP, ATP, ATH, MDP, TV, TMP, TW, MAG

Turbo Pumping Stations Agilent/Varian, Adixen/Alcatel, Pfeiffer PTB Sales Custom, Drytel, TSH/TSU, Turbo Dry

Turbo Controllers Adixen, EBARA, Leybold, Seiko Seiki, Agilent/Varian CFF, CFV, ACT, ET, NT, SCU, V

Power Generators


DC Magnetron Advanced Energy, MKS ENI, Ametek-Sorensen MDX, Pinnacle, DCG, RPG, DCS, DCR, XTQ, DHP

Ion Implant/Beam HiTek Power, Advanced Energy, Commonwealth MH, OL, ID, IBS

RF Plasma Advanced Energy, MKS ENI, RFPP, Comdel RFG, RFX, OEM, Spectrum, LF, RF, CPS, CX

E-Beam Advanced Energy, Telemark, Temescal ID, TT, CV, Guns

Repairs & Exchanges

We are an independent service provider whose quality standards meet or exceed the OEMs in the area of

repair. We are focused on providing full support for your product once it leaves its original warranty.

Cryopump Rebuild Service

• PTB Sales has a decade of cryopump rebuild service.

• Is the only independent that can fully rebuild the CTI On-Board IS series of cryopump.

• Our average cycle time is 5 days.

• All sub assemblies are individually tested prior to final assembly.

• Rebuilt over 2,200 units in the last three years.

• 400 units in stock.

Turbo Pump Rebuild Service

• PTB Sales can exchange out 10 different manufacturers of turbo pumps.

• Utilizes many qualified independent repair houses to meet your needs.

• Rebuilt over 600 units in the last 3 years.

• 500 units in stock.

Vacuum Pump Rebuild service

• PTB Sales will meet or exceed manufacturers’ specifications.

• Has factory trained technicians for scroll pumps, dry and wet pumps.

• Rebuilt over 3,000 units in the last 3 years.

• 1,000 units in stock.

Power Generator Repair Service

• PTB Sales has 6 years of experience refurbishing power generators.

• Repaired over 800 units in the last 3 years.

• 1,500 units in stock.

• Return material authorization numbers

• Contamination declaration report

CREPAIRS & EXCHANGES 04

CRYOPUMP REBUILD SERVICE

CRYO COMPRESSOR REBUILD SERVICE

Cryopump Rebuild Service

PTB Sales has become the industry leader in rebuilding cryopumps and cryo compressors. We back this claim by offering a up to one year parts and labor

warranty (for most items), the longest standard warranty in the industry. Our OEM trained technicians rebuild cryopumps and compressors to meet or ex-

ceed the manufacturer’s specifications for performance. PTB Sales cryopump rebuilds are the most thorough in the industry. Our final test covers complete

cycles as close to the production environment as possible.

PTB Sales employs OEM trained operational and technical talent and provides equivalent quality and service levels associated with the OEM but at much

more affordable pricing. We have the most robust BOM parts replacement in each rebuild, which is a full overhaul tested to OEM equipment specifications.

Cryopump rebuild service includes:

Vacuum Side

• Replacement of charcoal array.

• Replacement of all indium.

• 80K array is given new nickel plating.

• Parts are cleaned and baked out.

• He leak checked to 1x10-8 cc/s.

Helium Circuit

• Replacement of all bearings on the pump and motor.

• Replacement of all O-rings, valves, Teflon seals and springs.

• Valve timing set for perfect seal.

• 1st and 2nd stage displacers cleaned and baked out.

Cryo Compressor Rebuild Service

Cryo compressor rebuild service includes:

• Replacement of valve plate, valves and adsorber (new).

• Recharge with 99.999% ultra pure helium.

• Clean and purge helium lines.

• Leak check.

• Replacement of marginal mechanical and electronic parts (extra charge, requires customer approval).

Cryo Test

• Pump is fully charged with 99.999% ultra pure helium.

• Pump is tested over a 24 hour period.

• Cryo is put through two full regens.

• All electronics are tested on On-Board and IS cryopumps.

• Pumps are tagged to reflect work done and test data.

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CTI Cryo-Torr Line

Model Warranty

100 6 months

7 6 months

8 1 year

8F 1 year

250F 1 year

10 1 year

400 1 year

500 6 months

CTI On-Board Line

Model Warranty

6 1 year

8 1 year

8F 1 year

10 1 year

250 1 year

P300 1 year

400 1 year

CTI CRYO-TORR LINE

CTI ON-BOARD LINE

CTI ON-BOARD IS LINE

CTI ON-BOARD WATERPUMPS

CTI COMPRESSORS

CTI Compressors

Model Warranty

8200 1 year

8300 1 year

8500 1 year

8510 1 year

9600 1 year

9700 1 year

1020R 1 year

IS-1000 1 yearCTI On-Board Waterpumps

Model Warranty

8F 1 year

10 1 year

REPAIRS & EXCHANGES05

CTI On-Board IS Line

Model Warranty

IS-8 1 year

IS-8F 1 year

IS-250F 1 year

IS-320FE 1 year

Visit www.ptbsales.com for rebuild and repair service,



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CRYOPUMP TESTING

REPAIRS & EXCHANGES 06

Cryopump Testing

• Pump is fully charged with 99.999% ultra pure helium.

• Pump is tested over a 24 hour period.

• Cryo is put through two full regens.

• All electronics are tested on On-Board and IS cryopumps.

• Pumps are tagged to reflect work done and test data.

CREPAIRS & EXCHANGES07

TURBO PUMP REBUILD SERVICE

Turbo Pump Rebuild Service

PTB Sales does not rebuild turbo pumps or repair controllers organically; however, the company has successfully offered this service dating back to 2002.

We have a robust network of partners who perform these rebuilds and repairs as well as an equally strong network of suppliers providing new equipment. In

addition, our experience over the last decade gives us a thorough knowledge of which companies provide the best workmanship and quality on the different

turbo pump types by OEM. The warranty period is up to twelve months on all rebuilds/repairs.

Quality and reliability standards to comply with customers requirements:

• All products delivered are free from defects in design, materials, workmanship and fabrication.

• All services performed will be performed at OEM service levels and tested to OEM standards.

• The rebuilt turbo pumps will conform fully to applicable specifications, drawings and other criteria specified by OEM and/or customer.

Turbo pump rebuild service includes:

• Diagnostic check of motor, electromagnets, sensors and memory prior to tear down.

• Complete decontamination of internal and external parts.

• Disposition of toxic material in accordance with environmental regulations.

• Inspection of critical stress points on all major and minor components.

• All stainless bolts, seals, and O-rings replaced with new.

• Use of new OEM bearings.

• A report of any replacement of parts required that are not included in a standard repair (i.e. broken blades, bent shaft, damaged rotor, etc).

• Motor balancing to meet or exceed OEM specifications.

• Vibration analysis.

• Leak check.

• Extended testing in customer specified orientation.

• Pumps cleaned and polished for clean room application.

• All labeled with instructions for safety and 100% startup.

• Custom crating and packaging.

• Complete failure analysis report upon request.


Visit www.ptbsales.com, or call toll free 866-332-0500 option 3.



TURBO CONTROLLER REPAIR SERVICE

DRY SCROLL PUMP REBUILD SERVICE

DRY PUMP REBUILD SERVICE

Dry Pump Rebuild Service

We rebuild the popular brands of dry pumps. Dry pump rebuilds come with up to a one year parts and labor warranty. All dry pumps are completely torn

down and inspected for OEM tolerances. Dry pump rebuild service includes:

• All seals and sleeves are replaced, new.

• All O-rings and gaskets are replaced, new.

• All bearings are replaced, new.

• All claws and spacers are Teflon coated (for rotary lobe blowers).

• Parts are cleaned and inspected to meet OEM specifications for proper clearances.

• Pumps are tested overnight.

• Pumps are painted and tagged with appropriate labels.

• iQDP electronics are tested and the maintenance hours reset.

Turbo Controller Repair Service

Turbo controller repair service includes:

• Run diagnostic check.

• Repair and replace all bad components.

• Repair trace and board damage.

• Replace batteries.

• Run test on subassemblies to ensure OEM specifications are met.

• Test for tuning and levitation for magnetically levitated pump types.

• Test under maximum load.

• Tune and match to pump and cable set.

• Test interface operation.

Dry Scroll Pump Rebuild Service

We rebuild the popular brands of dry scroll pumps. Dry scroll pump rebuilds come with up to a one year parts and labor warranty. All dry scroll pumps are

completely torn down and inspected for OEM tolerances. Dry Scroll pump rebuild service includes:

• All seals and tip seals are replaced, new.






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Ion Pump Rebuild Service

We rebuild Agilent/Varian and Perkin-Elmer ion pumps. Ion pump rebuilds come with up to a one year parts and labor warranty. Service requires only the

pump chamber and not the exterior magnets to be sent in to us.

Ion pump rebuild service includes:

• Remove, disassemble and clean the elements and pump.

• Replace titanium and tantalum parts.

• Reassemble, helium leak check, bake out and seal off pump.

• Qualify with known ion pump controller.


DIFFUSION PUMP REBUILD SERVICE

ION PUMP REBUILD SERVICE

Diffusion Pump Rebuild Service

We rebuild Agilent/Varian VHS, HS and NHS diffusion pumps. Diffusion pump rebuilds come with up to a one year parts and labor warranty. All diffusion

pumps are completely torn down and inspected for OEM tolerances.

Diffusion pump rebuild service includes:

• Washing and bead blasting of the internal parts and body.

• Waterflow check of the cooling lines after descaling and flushing.

• Helium leak check of the body.

• Heater elements are replaced with the customers specified voltage.

• Thermal switch and plug are replaced.

• Pump exterior is refinished.

Visit www.ptbsales.com for rebuild and repair service,




ROTARY LOBE BLOWER REBUILD SERVICE

ROTARY PISTON PUMP REBUILD SERVICE

Rotary Lobe Blower Rebuild Service

We rebuild the popular brands of rotary lobe blowers (roots, boosters). Rotary lobe blower rebuilds come with up to a one year parts and labor warranty. All

rotary lobe blowers are completely torn down and inspected for OEM tolerances.

Rotary lobe blower rebuild service includes:


• All seals are replaced, new.

• All sleeves are replaced, new (Edwards only).

• All O-rings are replaced, new.

• Timing of gears is reset.

• Impellers are shimmed for proper clearances.

• Parts are cleaned and blower is painted and tagged with appropriate labels.

Rotary Piston Pump Rebuild Service

We rebuild the popular brands of rotary piston pumps. Rotary piston pump rebuilds come with up to a one year parts and labor warranty. All rotary piston


Rotary piston pump rebuild service includes:


• All valves and valve springs replaced, new.




• Pumps are tested for 48 hours.


• Stokes freeze plugs are replaced.




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Rotary Vane Pump Rebuild Service

• A decade of rebuilding experience.

• Largest inventory of pumps and spare parts.

• Factory trained technicians.

• Midway point and end point quality inspection to root out sub-quality parts.

Minor Rebuild Service

In a minor rebuild the outer shaft seal, sleeve, O-rings and gaskets are replaced. However, the module is flushed with oil, but not rebuilt. This rebuild is less

costly and may be appropriate depending on the condition of the pump.

Most manufacturers recommend a minor rebuild every six months to extend the life of your pump (more often if there is process related buildup). A minor

rebuild comes with a 90 day parts and labor warranty.

Major Rebuild Service

• Complete teardown.

• Chrome oxide coating of worn shaft surfaces (increases life of seals).

• Complete cleaning and degreasing of parts.

• Replacement of marginal parts (extra charge, requires customer approval).

• Use of only highest quality components.

• Total replacement of seals, gaskets, valves, O-rings, springs and vanes.

• Pump is tested overnight.

• Painting and tagging to reflect work done and test data (base pressure, temperature, motor amps and time tested).

The procedure for single and two stage oil sealed rotary vane pumps is the same.


ROTARY VANE PUMP REBUILD SERVICE

VALVE REBUILD SERVICE

Valve Rebuild Service

We rebuild the major name brand gate, angle and throttle valves: VAT, MKS, HVA and Edwards. Rebuilt valves are shipped boxed and strapped to a pallet

with instapak foam, for heavy items.

Valve rebuild service includes:

• Replace seals.

• Clean/replace bearings, clean to high vacuum specification.

• Tune-up actuation alignment.

• Leak test.

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Power Generator Repair Service

We repair the major name brand RF and DC power generators: Advanced Energy, Comdel, HiTek Power, MKS ENI and RFPP. Power generators are shipped

boxed and strapped to a pallet with instapak foam, for heavy items. We have a dedicated power generator repair facility located in Irwindale, CA.

• Largest inventory of spare parts for trouble shooting and repair.

• Power generators are repaired tested and calibrated.

• Thoroughly tested under load before shipping.

• 90 day parts and labor warranty.

• Test report included.

REPAIRS & EXCHANGES 12

Exchange Program

PTB Sales offers an exchange program from our extensive inventory for

those who do not wish to wait while their equipment is being refurbished.

If we have an identical model in inventory, we will exchange it for a re-

buildable core. Please call for pricing and pump/compressor availability.

Pick-Up & Delivery Services

PTB Sales will pick up your used equipment, bring it back to OEM speci-

fication, and return it to your facility anywhere in Southern California. We

cover an area ranging as far north as Santa Barbara and as far south as

San Diego.

POWER GENERATOR REPAIR SERVICE

EXCHANGE PROGRAM

PICK-UP & DELIVERY SERVICES

GreenChipSM Services

Expect the high quality, responsiveness, and attention to your needs that you would expect from a Blue

Chip sized company, but with significantly better economic value, reducing your operating costs! Since

we recognize each customer is different, PTB’s GreenChipSM Service Programs are highly customizable to

fit the specific needs of your operating style and installed base.

You can incorporate, to name just a few options:

• Repair and exchange services across multiple product types.

• Consignment inventory and logistics management.

• On-site labor services and technical support.

Our Goal: To take our “What YOU need, when YOU need it!” SM approach right into your site and to

partner with you to deliver the same installed base services you could receive from an OEM, but at a

much more affordable cost to you! PTB Sales uses the following approach to customize our GreenChipSM

Service Programs to meet our customer’s needs:

• We review with you the type of service option you need in the categories of repairs, consignment and

technical support.

• We evaluate the types of equipment needed for this service such as power generators and turbos

• We assemble the service program that is right for you.

Contact us to inquire as to how we can work with you today to set up the GreenChipSM Service Program

that is right for you.

Asset Management





CGREENCHIPSM SERVICES

GREENCHIPSM SERVICE MATRIX

REPAIR & EXCHANGE SERVICES

Repair & Exchange Services

PTB Sales offers a customizable approach to structure our repair services into a GreenChipSM Service Program for our customers. We can provide these

repair services on as needed basis or in periodic manner that evaluates the needs of your installed base size and specific configuration. Our approach is to

offer our customers the flexibility and value they need to incorporate our repair services into their operating model. These repair programs can also include

our logistics service to take advantage of our extensive inventory and maximize both your time and cost savings bringing our philosophy of “What YOU

need, when YOU need it!” SM right into your site.

Additionally, we can also structure exchange programs where the replacement components are either staged on-site with our customers, taking advantage

of our logistics expertise or located at our facility and allocated specifically for you. We can combine the repairs and exchange approach and customize it

for our customers as well in the event that some replacements are more critical than others. Our objective is to remove your concerns about down time or

unavailable manufacturing capacity by applying our repair and exchange programs to protect you.

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Equipment Cryos Turbos Rough Pumps Power Generators Valves Compressors

Refurbishment

Repairs

Exchanges

Logistics

Consignment

Logistics Management

E & O Disposition

Remote Purchasing

Labor

On-Site Support

Technical Support

Installation & Removal

Training

GreenChipSM Service Matrix


CONSIGNMENT

LOGISTICS MANAGEMENT

EXCESS & OBSOLETE

REMOTE PURCHASING

Consignment

We realize that in order to ensure our customers’ down time is as low as possible and has a minimum impact on productivity we can structure a managed

pool of inventory consigned at your location to minimize the impact to your operating model. This can be seeded with both customer material, PTB stocked

material as well as items from other suppliers and we offer to manage this jointly with our customers to ensure that there is complete alignment on balance

levels to protect your manufacturing operations. We take our “What YOU need, when YOU need it!” SM approach right into your site!


In addition to our consignment services we offer logistics service integration, one key example is our turbomolecular pump support offering. As there are

many manufacturers and models, PTB Sales recognizes as well as it’s customers do that serving the turbo pump support needs across an installed base

can be very challenging and require the customer to source material from multiple suppliers. PTB Sales has developed a proprietary database over the

years that removes the questions and quality variance. We know which suppliers provide the most reliable and best priced repairs and refurbishment for

turbos in North America. With this knowledge we are able to integrate their services and deliver to you seamless support from one vendor to meet your

repair and spares needs. If there is a consignment aspect to the service program, one of the value added services we can offer, is the management of the

on site consignment. This becomes especially beneficial to a customer if we are providing services across more than just one type of equipment.

Excess & Obsolete

PTB Sales has served multiple manufacturing industries in North America for almost two decades and we understand that companies frequently have

needs to dispose of excess and obsolete equipment. Most companies seek the services of a scrapper to do this. For our equipment partners we offer a

much more useful program whereby PTB Sales will manage the disposition of your E & O on a quarterly basis. Because of our core competency in material

acquisition, reconditioning and disposition, we have a much broader view of the marketplace and where material may be needed by other companies. This

not only allows you a more consistent outlet for E & O equipment and parts but also allows the partner to achieve a better economic return.

Remote Purchasing

PTB Sales knows where to get the components, spares and repairs you need. Typically offered to our international customers we can organize a program for

you where you provide us with the equipment, conditioning specs, pricing threshold and volume you need on a periodic basis. We source the material for

you and can combine this with our other logistics or support programs to reduce your supplier base and save you both time and money.

15

C

ON-SITE SUPPORT

TECHNICAL SUPPORT

EQUIPMENT INSTALLATION & REMOVAL

TRAINING

PREVENTIVE MAINTENANCE

GREENCHIPSM SERVICES

On-Site Support

PTB Sales Service Engineer conducts routine periodic on-site visits to check status of existing installed base products covered under the program with the

customer. The frequency and scope of the visits are determined by the scope of work and adjustable as the customer sees fit.

Technical Support

PTB Sales Service Engineer serves as the first point of contact for troubleshooting/technical support of the supported installed base equipment. This can be

performed at the customer site or remotely.

Equipment Installation & Removal

PTB Sales Service Engineer coordinates with customer maintenance team to schedule removal, exchange and installation of new components as defined

in the scope of work and the contract can be structured as well for the PTB Sales Service Engineer to do the removal, installation as well as logistics and

shipping coordination.

Training

PTB Sales offers technical training for cryogenic vacuum pumps and systems. This training can be performed on-site for multiple days as a separate and

distinct event and can also be performed as part of an ongoing service program with multiple training sessions spread throughout the term of the contract.

Preventative Maintenance Management

This is our premier Labor service and encompasses part or all of the items mentioned above. PTB Sales Service Engineer provides a monthly status report

to the customer on the installed base equipment condition. This report identifies equipment recommended for PM, itemizes the installations and repairs

that have been conducted during the period. The report also details all tech support diagnostics escalations that have occurred during the month.

16


CASE STUDY 1

Case Study 1

Existing cryopump and compressor repair customer was experiencing an increase in production volume and needed a solution that went beyond transac-

tional repair of their core units. This problem affected three different fab locations and was causing them unwanted down time in repair cycle time and the

added expense of buying more spare units from the OEM was not attractive. PTB Sales assessed the needs of this customer and proposed a GreenChipSM

Program that would minimize their time loss and remove their need to expend valuable funds to purchase spares. We implemented a multi-site consign-

ment and logistics management program where PTB Sales manages the entire cryopump repair loop for the installed base at all three sites. In this program

we rapidly filled their minimum stocking levels and also added significant material beyond this as a safety buffer. As a result the customer’s unscheduled

downtime was dramatically reduced as pumps were consistently on hand per the required stocking level. Additionally, the management of Preventative

Maintenance cycles was greatly improved because of PTB’s industry leading <7 day repair cycle time.

17


Refurbishment

Repairs

Exchanges

Logistics

Consignment


E & O Disposition

Remote Purchasing

Labor

On-Site Support

Technical Support


Training

XXX

XX

X

X

XX

Visit www.ptbsales.com for GreenChipSM Service,



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Case Study 2

International customer was experiencing loss of sales to competitors for refurbished equipment sales due to sourcing time and shipping time from multiple

suppliers of cores and refurbished equipment. This customer was certain they could outperform competition if they could overcome these delays. PTB

Sales worked closely with the customer to understand the market needs they had for both cryogenic vacuum pumps and associated compressors and

power supplies. In the past the customer had sourced from PTB Sales as well as other providers and there was both quality and delivery variance as a

result. We established an advanced exchange and consignment program with this customer that allows them to forecast their future demand with one

supplier and have the needed equipment staged and ready to serve the end user customer. As a result of this program, within just a couple of months the

customer was able to double the previous years sales on equipment supported by PTB Sales as part of this program.

CASE STUDY 2

GREENCHIPSM SERVICES 18


Refurbishment

Repairs

Exchanges

Logistics

Consignment


E & O Disposition

Remote Purchasing

Labor

On-Site Support

Technical Support


Training

XX

X

X

X

X

X

X

X


Visit www.ptbsales.com or call toll free 866-332-0500 option 3.


• Flange type and orientation

• Single or three phase power

• Standard or enhanced arrays

• Software version – system interface

• Maintenance logging of hours run – temperature readings

Refurbished Equipment

Cryopumps

Cryogenic pumps are the most widely used high vacuum pumps in PVD processes. This is due to high

pumping speed, dry operation and low maintenance requirements. Cryopumps work by cooling internal

arrays down to cryogenic temperatures. The first stage array is cooled to approximately 77° Kelvin,

condensing the water vapor and nitrogen while the other, colder array, cooled to approximately 15° Kelvin

and coated with activated carbon, condenses and adsorbs the other gases. When the activated carbon

reaches saturation, the pump needs to be regenerated. This cycle typically takes three hours. Regen

times vary depending on the type of pump and if it has a heated purge. (Note: CTI On-Board/IS pumps

have the shortest regen cycle).

Cryopumps are considered hearty because they are not as susceptible to damage caused by

overpressure or accidental venting of the pump to atmosphere. All that normally happens when the

pressure gets too high is that the pump warms, temporarily losing its ability to pump and goes into

regeneration. Cryopumps do not pump helium well and do create vibrations that may interfere with some

experiments. 3 phase low vibration cryopumps are available when vibration is an issue. Cryopumps have

become the pumps of choice for the semiconductor and aerospace industries.

PTB Sales has the largest inventory of remanufactured cryopumps and compressors in the US.

Cryopumps and compressors come with up to a one year parts and labor warranty. PTB Sales rebuilds

are exclusively remanufactured in-house. PTB Sales has the most compressive rebuilding procedures of

any third party rebuilder. All of our rebuilds meet or exceed OEM specifications. Please refer to our cryo

rebuilding section in this catalog (page 4) for information on the rebuilding and testing procedures.

CCRYOPUMPS

CTI CRYO-TORR LINE

CTI ON-BOARD LINE

CTI ON-BOARD IS LINE

CTI ON-BOARD WATERPUMPS

HELIUM LINES & DRIVE CABLES

CTI Cryo-Torr Line

Model Inlet Flange Air Pumping Speed

100 6” CF, ISO-100 350 l/s

7 10” CF, 6” ASA 1,000 l/s

8 10” CF, 6” ASA, ISO-200 1,500 l/s

8F 10” CF, 6” ASA, ISO-200 1,500 l/s

250F 12” CF, ISO-250 2,000 l/s

10 14” CF, 10” ASA, ISO-320 3,000 l/s

400 16” CVC, 16” ASA, ISO-400 6,000 l/s

500 20” ASA, ISO-500 10,000 l/s

Helium Lines & Drive Cables - NEW

PTB Sales sells new helium lines and drive cables. Standard lines are

sold in 10 foot lengths. PTB Sales will build custom lines to fit your indi-

vidual needs upon request.

Helium Line (Standard 10 ft /$10 per additional ft)

Drive Cable (Standard 10 ft /$1 per additional ft)

Helium Manifold (2 port)

Helium Manifold (3 port)

CTI On-Board Line


4, 4F 6” CF, ISO-100 370 l/s

8, 8F 10” CF, 6” ASA, ISO-200 1,500 l/s

8F Enhanced 10” CF, 6” ASA, ISO-200 1,500 l/s

250F 12” CF, ISO-250 2,000 l/s

10 14” CF, 10” ASA, ISO-320 3,000l/s

10F 14” CF, 10” ASA, ISO-320 3,000 l/s

400 16” CVC, 16” ASA, ISO-400 6,000 l/s

P300 10” CF, ISO-200 2,000 l/s

CTI On-Board Line

Temperature Monitors

Temperature Monitor Cables

Splitter Boxes

On-Board Keypad Displays

On-Board Network

Note: Please specify software revision for the model number for all

network models

CTI On-Board Waterpumps

Model Inlet Flange Water Pumping Speed

4” WP 6” CF, ISO-100 1,100 l/s

6” WP 8” CF, ISO-160 2,500 l/s

8” WP 10” CF, ISO-200 4,000 l/s

10” WP 12” CF, ISO-250 7,000 l/s

16” WP 10” ASA 16,000 l/s

Note: Inline or apendage configurations available

Call for more information on in situ pump flanges & pumping speeds

CTI On-Board IS Line


IS-8, 8F 10” CF 1,500 l/s

IS-250F ISO-250 2,200 l/s

IS-320FE ISO-320 3,300 l/s

20

• Air or water cooled

• Single or three phase power

• Single or multiple pump capacity

• Control of On-Board or IS pumps

Cryo Compressors & Arrays

Cryo compressors are necessary for cryopumps to function. They supply compressed room temperature

helium to the cryopump where it is expanded to complete the refrigeration cycle. Helium compressors

can supply enough compressed helium for one or multiple cryopumps, depending on the compressor or

cryopump used. PTB Sales sells reconditioned compressors that have been rebuilt and recharged with

new 99.999% ultra pure helium. These compressors will meet manufactures’ specifications for helium

flow and performance.

Arrays are the parts of the cryopump that do the work in creating high vacuum. PTB Sales sells

new charcoal and condensing arrays that meet manufactures’ specifications for appearance and

performance. Replacement arrays are easily changed out and may improve performance in cryopump

temperature, ultimate pressure and capacity.

Cryo compressor rebuild service includes:

• Replacement of valve plate, valves and adsorber (new).

• Recharge with 99.999% ultra pure helium.

• Clean and purge helium lines.

• Leak check.

• Replacement of marginal mechanical and electronic parts (extra charge, requires customer approval).

CCRYO COMPRESSORS & ARRAYS

CTI COMPRESSORS

CTI 15K CHARCOAL ARRAYS

CTI 80K CONDENSING ARRAYS

CTI Compressors

Model Cooling Type Compressor Capacity Cooling Type (No. of cryos and models)

1020R Air or Water 1 Cryo-Torr series pump (10, 400, 500) or up to

3 Cryo-Torr series pumps (100, 7, 8, 8F)

8200 Air or Water 1 On-Board/Cryo-Torr series pump (100, 7, 8, 8F)

8300 Water 1 On-Board/Cryo-Torr series pump (100, 7, 8, 8F)

8500 Water 1 Cryo-Torr series pump (10, 400, 500) or up to

3 Cryo-Torr series pumps (100, 7, 8, 8F)

8510 Water 1 On-Board/Cryo-Torr series pump (10, 400, 500) or up to

3 On-Board/Cryo-Torr series pumps (4F, 8, 8F, 250F)

9600* Water 1 On-Board/Cryo-Torr series pump (10, 400, 500)

or up to 3 On-Board/Cryo-Torr series pumps (4F, 7, 8, 8F, 250F)

9700* Water Ideal for multiple On-Board or Cryo-Torr cryopumps

IS-1000* Water IS series On-Board pumps

* Capable of running 3 phase motors.

CTI 15K Charcoal Arrays

Model PTB Sales Part #

CT/OB-8 00815KPTB

CT-8F CT8F15KPTB

OB-8F OB8F15KPTB

CT-250F CT250F15KPTB

OB-250F OB250F15KPTB

OB-8F Enhanced OB8FE15KPTB

CT/OB-10 001015KPTB

CT/OB-400 Inner 0040015INPTB

CT/OB-400 Outer 00400150TPTB

Array models include 15K condensing top, except for the CT/OB-400s

CTI 80K Condensing Arrays

Model PTB Sales Part #

CT/OB-8 00880KPTB

CT-8F CT8F80KPTB

OB-8F OB8F80KPTB

CT-250F CT250F80KPTB

OB-250F OB250F80KPTB

OB-8F Enhanced OB8FE80KPTB

CT/OB-10 001080KPTB

CT/OB-400 0040080KPTB

22

• Fast defrost

• Power line voltage

• Capacity

Polycold Cryogenerators

The Polycold water vapor cryogenerator effectively captures water vapor, which comprises 65% to 95% of

the residual gas in high-vacuum systems. Water vapor is typically the most reactive contaminant present.

The advantages of cryogenerators are:

• -100°C to -150°C coil temperature.

• Fast start, fast defrost (PFC only).

• High-vacuum pumpdown time cut by 25% to 75%.

• High-speed pumping of water vapor: 10,000 to 200,000 l/s in the workspace.

• Increased product throughput of 20% to 100%.

• Typical payback time is less than 1 year.

• Lower water vapor partial pressure during processing for higher quality, better adhesion and more

reproducible deposition.

PTB Sales sells used Polycold cryogenerators rebuilt. These units come with up to a 120 day parts and

labor warranty and are guaranteed to meet all factory performance specs. Call us to see if a Polycold will

work for your application.

C

24

PFC

PFC REFRIGERANT CHARGES

POLYCOLD CRYOGENERATORS

PFC Refrigerant Charges

P-20

P-75

PGC-100

PFC-100

P-100

PGC-150

PFC, P-200A

PFC, P-200

PCT-200A

PCT-200

PFC, P-200HC

PFC, P-200AHC

PFC-330, 340ST

PFC, P-400LT

PFC, P-400ST

PFC, P-500 & 550ST

PCT-500 & 550

PFC, P-500 & 550HC

PFC, P-550LT

PFC, P-650ST

PFC, P-650TUV & 660ST

PCT-650

PCT-660

PFC, P-650HT/HC

PFC, P-650TUV & 660, 670HC

PFC-1000 & 1100ST

PFC-1000 & 1100HT

PFC-1000 & 1100LT

PFC-1100HC

PFC

Model Description

PFC-100 100 watt maximum load, 14,900 l/s max. pumping speed, 5x10-8 Torr ultimate operating pressure, 4 minute defrost time, air

cooled condenser and 1ø power.

PFC-550 1,000 watt maximum load, 74,500 l/s max pumping speed, 6x10-10 Torr ultimate operating pressure, 4 minute defrost time,

requires water for cooling condenser and 3ø power.

PFC-660 1,500 watt maximum load, 104,300 l/s max. pumping speed, 6x10-10 Torr ultimate operating pressure, 4 minute defrost time,


PFC-1100 1,500 watt maximum load, 149,000 l/s max. pumping speed, 5x10-9 Torr ultimate operating pressure, 4 minute defrost time,


PFC-1103 1,500 watt maximum load, 149,000 l/s max. pumping speed, 5x10-9 Torr ultimate operating pressure, 4 minute

defrost time, requires water for cooling condenser and 3ø power.

• Line voltage and phase

• Ultimate pressure

• Pumping speed

• Water or air cooled

Dry Pumps

We have a robust stock of EBARA, Edwards iH, IPX, iQ and scroll, ANEST IWATA ISP and Agilent/Varian

scroll pumps. We also have limited quantity of Adixen/Alcatel and Oerlikon Leybold DryVac pumps.

Dry lobe pumps or hook and claw pumps are essentially multi-stage rotary lobe pumps that utilize

elaborate techniques to isolate the oil-lubricated gears from the pumping surfaces. These pumps are

ideal for “dry” applications that require higher pumping speed and throughput. Dry lobe and hook and

claw pumps have pumping speeds up to 200 cfm and reach ultimate pressures of up to 5x10-4 Torr.

Dry lobe and hook and claw pumps work well when used in conjunction with rotary lobe pumps. These

pumps are normally sold prepared for corrosive and oxygen service.

Dry diaphragm pumps are used for small scale vacuum applications where there is a need for

contamination free “dry” vacuum. Dry diaphragm pumps use the suction of a membrane, which is

elastically distorted to move the gas from the inlet to another diaphragm stage or the exhaust. There is

no oil used anywhere on the vacuum side. Dry diaphragm pumps can reach a pressure of 1x10-1 Torr at

pumping speeds of up to 4 cfm. Dry diaphragm pumps work well in conjunction with molecular drag and

turbo drag hybrid high vacuum pumps. Dry pump rebuild service includes:

• All seals and sleeves are replaced, new.



• All claws and spacers are Teflon coated (for rotary lobe blowers).




• iQDP electronics are tested and the maintenance hours reset.

C

EBARA

Model Inlet Flange CFM

50x20 N/A 8.8

80x25 N/A 17.6

A70 N/A 17.6

A07/V/V-B KF-40 29

A10S KF-40 42

A25S KF-40 106

A30W KF-50 127

A70W KF-50 297

A150W KF-100 636

AAL10 KF-40 46

AA10/H/N-H KF-40 46

AA20/H/N-H KF-40 71

AA30/H/N-H KF-50 106

AA40/W/N-H KF-50 148

AA70/W/N-H KF-50 247

AA100/W/-H ISO-100 353

AA200/W ISO-100 636

AA10S/N KF-40 46

AA20S/ N KF-40 71

AA40SWN KF-50 148

AA70SWN KF-50 247

AA100SWN ISO-100 353

AAS200WN ISO-100 636

DRY PUMPS

ADIXEN/ALCATEL

EBARA

EDWARDS

DRY PUMP & BLOWER PACKAGES

26

Adixen/Alcatel


ACP-15 KF-25 8.2

ACP-28 KF-25 16

ACP-40 KF-40 22

ACP-120/G KF-50 66

IPUP-A100L KF-50 55.8

Edwards


DP-40 KF-40/63 8.8

QDP-40 KF-40/63 17.6

iQDP-40 KF-40/63 17.6

DP-80 KF-40/63 8.8

QDP-80 KF-40/63 8.8

iQDP-80 KF-40/63 8

EPX-180/L/NE ISO-63 105

EPX-500/L/NE ISO-160 295

GV-80 NW-40 57

GV-160 ISO-63 106

GV-250 ISO-100 186

GV-400 ISO-100 252

GV-600 ISO-100 318

IPUP-E100/L KF-40 59

IPX-100/A KF-40 59

IPX-180/A ISO-63 106

IPX-500/A ISO-160 295

iH-80 ISO-63 61

iH-600 ISO-100 353

iH-1000 ISO-100 589

iH-1800 ISO-160 1,061

iH-160 ISO-63 97

iF-1800 ISO-160 1,060

L-70 ISO-63 49

iL/N-70 ISO-63 49

iL/N-600 ISO-100 353

Dry Pump & Blower Packages

Most pumps and blowers are rebuilt and prepped for hydrocarbon fluid

use. Please call for pricing of “as-is” pumps and blowers and PFPE

prepped rebuilds.

• Type of oil



• Pumping speed


• Belt driven or direct drive

Dry Scroll Pumps

Dry scroll pumps are used for small-scale vacuum applications where there is a need for contamination

free “dry” vacuum. Dry scroll pumps use a tight tolerance, rotating scroll to squeeze gas from the inlet

to another stage or an exhaust. There is absolutely no oil used anywhere in this pump. Dry scroll pumps

can reach a pressure of 7x10-3 Torr at a pumping speed of up to 20 cfm. Dry scroll pumps can be used

for corrosive and oxygen service. Dry scroll pumps are not recommended for applications where a lot of

water vapor is pumped.

The scroll pump is unique in design from other dry pumps so PTB Sales has developed independent

procedures with these pumps to insure that our refurbishment meets or excedes OEM specifications.

• Factory specified tooling for precise alignment.

• Factory training for proper refurbishment techniques.

• OEM consumable parts are used in reassembly.

• PFPE grease for bearings insures no hydrocarbon contamination.

• Pumps are run overnight and cleaned and re-greased as part of the re-break-in period.

• The ultimate pressure is re-tested and adjustments made.

CDRY SCROLL PUMPS 28

Agilent /Varian


DS-300 KF-25 8.8

DS-600 KF-40 17.6

PTS-300 KF-25 8.8

PTS-600 KF-40 17.7

SH-100 KF-25 3.5

SH-110 KF-25 4

ANEST IWATA


ISP-250B KF-25 8.8

ISP-500B KF-40 17.6

Edwards


ESDP-12 KF-25 8.8

ESDP-30/GVSP KF-40 17.6

XDS-5/C KF-25 3.5

XDS-10/C KF-25 6.5

XDS-35i KF-40 21

Oerlikon Leybold


SC-5D KF-25 3.8

SC-15D KF-25 10.6

SC-30D KF-40 21.2

SC-60D KF-40 42.4

AGILENT/VARIAN

ANEST IWATA

EDWARDS

OERLIKON LEYBOLD

• Type of oil



• Pumping speed


Rotary Vane Pumps

Rotary vane pumps are used for most basic vacuum applications that require high pumping speeds

and throughput. Rotary vane pumps use an eccentrically mounted rotor to sweep the gas through an

ever-decreasing volume to either another stage or an exhaust. Oil is used as both the lubricant and the

sealant. Pumping speeds for a rotary vane pump range from .5 cfm to 300 cfm and the pumps can

reach as low as 1x10-4 Torr. Rotary vane pumps can be prepared for corrosive and oxygen service.

We have been selling and servicing rotary vane and piston vacuum pumps for a decade to build

our reputation for reasonable lead times and costs for the highest quality rebuilt pump. This is done

with factory trained technicians utilizing the proper tools and our own time tested quality standards:

manufacturers’ specifications are met during inspection, assembly and test.

Major Rebuild Service

• Complete teardown.

• Chrome oxide coating of worn shaft surfaces (increases life of seals).

• Complete cleaning and degreasing of parts.

• Replacement of marginal parts (extra charge, requires customer approval).

• Use of only highest quality components.

• Total replacement of seals, gaskets, valves, O-rings, springs and vanes.

• Pump is tested overnight.

• Painting and tagging to reflect work done and test data (base pressure, temperature, motor amps and

time tested).

The procedure for single and two stage oil sealed rotary vane pumps is the same.

CROTARY VANE PUMPS 30

Adixen/Alcatel

Model Type Stage CFM

2002A Direct drive 2 2

2004A Direct drive 2 3.2


2008AC Direct drive 2 7

2010SD Direct drive 2 7

2012AC Direct drive 2 11


2021 Direct drive 2 14.6

2030 Direct drive 2 17.7

2033 Direct drive 2 27

2033C Direct drive 2 27





Edwards


E2M1.5 Direct drive 2 1.3

E1M8 Direct drive 1 15

E2M8 Direct drive 2 6.7








RV3 Direct drive 2 2




ADIXEN/ALCATEL

EDWARDS

CROTARY VANE PUMPS

OERLIKON LEYBOLD

Oerlikon Leybold


D2A Direct drive 2 2.2


D4B Direct drive 2 4.5

D8A Direct drive 2 7

D8B Direct drive 2 7

D10E Direct drive 2 9.3



D16BCS Direct drive 2 14.1

TI16B Direct drive 2 14.1










D65BCS Direct drive 2 53

D90A Direct drive 2 55

SV16 Direct drive 1 11

SV25B Direct drive 1 18


SV40B Direct drive 1 28

SV40BI Direct drive 1 28









SV630F Direct drive 1 495

31

CROTARY VANE PUMPS

AGILENT/VARIAN

WELCH

32

Agilent /Varian


DS-102 Direct drive 2 3.5



DS-1002 Direct drive 2 31

SD-40 Direct drive 2 1.2


SD-91 Direct drive 2 4









Welch


1374 Belt drive 2 23

1375 Belt drive 2 35.4



1395 Belt drive 2 71










• Type of oil



• Pumping speed



Rotary Piston Pumps

Rotary piston pumps are used for most large-scale vacuum applications. Rotary piston pumps have a

sliding sleeve through which the gas enters. The gas is then drawn into a cylindrical chamber and then

squeezed out through an exhaust by a rocking piston plunger. These pumps are very hardy and have

pumping speeds that range from 15 cfm to 2,000 cfm and the pumps can reach a pressure of 1x10-4

Torr. Rotary piston pumps can be prepared for corrosive and oxygen service.

We have been selling and servicing rotary vane and piston vacuum pumps for a decade to build

our reputation for reasonable lead times and costs for the highest quality rebuilt pump. This is done

with factory trained technicians utilizing the proper tools and our own time tested quality standards:

manufacturers’ specifications are met during inspection, assembly and test.

We rebuild the popular brands of rotary piston pumps. Rotary piston pump rebuilds come with up to a

one year parts and labor warranty. All rotary piston pumps are completely torn down and inspected for

OEM tolerances. Rotary piston pump rebuild service includes:


• All valves and valve springs replaced, new.






• Stokes freeze plugs are replaced.

CROTARY PISTON PUMPS 34

KINNEY/TUTHILL

OERLIKON LEYBOLD

STOKES

Kinney/Tuthill


KTC-60 Belt drive 2 60

KTC-112 Belt drive 2 112

KT-150 Belt drive 1 150








Stokes


146-H11 Belt drive 1 30







Oerlikon Leybold


E75 Direct drive 1 75




DK50 Direct drive 2 32



Rotary Lobe Blowers

Rotary lobe blowers (Roots, boosters) are used to boost the pumping speed of most rough pumps. Rotary

lobe blowers have two counter rotating lobes which essentially “dove tail” or mesh without touching.

These lobes continuously transfer gas from the inlet to the exhaust at a rate of 50 cfm to 100,000 cfm

at a pressure of .1 to 10 Torr. There is a certain clearance that must be gauged during refurbishing,

between the rotors and between each rotor and the stator wall. This clearance allows the pump to

operate without mechanical wear and without the need for lubrication inside the swept volume. A benefit

of the rotary lobe blower is that it reduces back streaming of oil from the rough pump that it is boosting.

A rotary lobe blower requires a backing pump that has a rating of at least 10% its pumping speed. Rotary

lobe blowers can be prepared for corrosive and oxygen service. PTB Sales can configure most any pump

and blower into a package. Please talk to our sales representative to have a blower package configured to

meet your needs.

We rebuild the popular brands of rotary lobe blowers. Rotary lobe blower rebuilds come with up to a one

year parts and labor warranty. All rotary lobe blowers are completely torn down and inspected for OEM

tolerances. Rotary lobe blower rebuild service includes:



• All sleeves are replaced, new (Edwards only).

• All O-rings are replaced, new.

• Timing of gears is reset.

• Impellers are shimmed for proper clearances.

• Parts are cleaned and blower is painted and tagged with appropriate labels.

• Type of oil



• Pumping speed


• Belt, standard direct, canned or hydrokinetic drive

CROTARY LOBE BLOWERS

ADIXEN/ALCATEL

EDWARDS

KINNEY/TUTHILL

OERLIKON LEYBOLD

STOKES

WET PUMP & BLOWER PACKAGES

Oerlikon Leybold


WA-150/151 3” ASA 104

WA-250/251 3” ASA 169

WA-500/501 3” ASA 341

WA-1000/1001 4” ASA 665

WA-2000/2001 6” ASA 1,342

WAU-150/151 3” ASA 104

WAU-250/251 3” ASA 169

WAU-500/501 3” ASA 341

WAU-1000/1001 4” ASA 665

WAU-2000/2001 6” ASA 1,342

WS-150/151 3” ASA 104

WS-250/251 3” ASA 169

WS-500/5011 3” ASA 341

WS-1000/1001 4” ASA 665

WS-2000/2001 6” ASA 1,342

WSU-150/151 3” ASA 104

WSU-250/251 3” ASA 169

WSU-500/5011 3” ASA 341

WSU-1000/1001 4” ASA 665

WSU-2000/2001 6” ASA 1,342

Wet Pump & Blower Packages

Most pumps and blowers are rebuilt and prepped for hydrocarbon fluid

use. Please call for pricing of “as-is” pumps and blowers and PFPE

prepped rebuilds.

36

Stokes


306 3” ASA 245

310 4” ASA 400

607 6” ASA 600

615 8” ASA 1,300

622 8” ASA 2,000

Adixen/Alcatel


RSV-150 ISO-63 180

RSV-151 ISO-63 180

RSV-300 ISO-63 360

RSV-301 ISO-63 360

RSV-600 ISO-100 720

RSV-601 ISO-100 720

Edwards


EH-250 ISO-40, ISO-63 220

EH-500 ISO-63, ISO-100 355

EH-1200 ISO-100, ISO-160 845

EH-2600 ISO-100, ISO-160 1,830

Kinney/Tuthill


KMBD-200 3” ASA 200

KMBD-400 4” ASA 400

KMBD-540 4” ASA 540

KMBD-720 4” ASA 720

KMBD-850 6” ASA 850

KMBD-1600 6” ASA 1,600

KMBD-2000 8” ASA 2,000

• Pumping speed

• Fluids

• Input voltage

Diffusion Pumps

Diffusion pumps are the most economical high vacuum pumps available. They offer the highest pumping

speed of any high vacuum pump. For that reason, they are common pumps for large chambers and

coating processes that do not require an ultra clean environment.

Diffusion pumps are passive (no moving parts) throughput high vacuum pumps. They work by heating

oil in the boiler section and sending this stream of heated oil vapor through jets aimed down toward the

foreline exhaust. Gas molecules enter the inlet randomly and the imparted momentum from the oil vapor

stream towards the exhaust. The pressure at the exhaust is typically 10 to 200 microns. A mechanical

pump, commonly referred to as a backing pump, maintains the low pressure and pumps the molecules

out of its exhaust.

We rebuild Agilent/Varian VHS, HS and NHS diffusion pumps. Diffusion pump rebuilds come with up to

a one year parts and labor warranty. Refer to page 91 of this catalog for diffusion pump oil. All diffusion


Diffusion pump rebuild service includes:

• Washing and bead blasting of the internal parts and body.

• Waterflow check of the cooling lines after descaling and flushing.

• Helium leak check of the body.

• Heater elements are replaced with the customers specified voltage.

• Thermal switch and plug are replaced.

• Pump exterior is refinished.

C

Edwards

Model Inlet Flange Cooling Type Pumping Speed

Diffstak 100 ISO-100 water 500 l/s

Diffstak 160 ISO-160 water 1,410 l/s

38

AGILENT/VARIAN

EDWARDS

CVC

DIFFUSION PUMPS

Agilent /Varian


HS-2 2” ASA water 175 l/s

HS-10 10” ASA water 4,000 l/s




M2 2” ASA water 285 l/s

M4 4” ASA water 800 l/s

M6 6” ASA water 1,500 l/s

NHS-35 35” ASA water 50,000 l/s

VHS-4 4” ASA water 1,200 l/s



VHS-250 ISO-250 water 3,700 l/s

VHS-400 16” CVC water 8,000 l/s

CVC


PMCS-2V 2” ASA water 100 l/s

PMC-4 4” ASA water 700 l/s

PMC-6 6” ASA water 1,400 l/s


PVM-16 16” ASA water 16,000 l/s



• Conductance limitation

• Safety considerations regarding LN2

Traps & Baffles

LN2 traps and baffles are used to prevent the backstreaming of oil from the diffusion pump to the

vacuum chamber. The low temperature of LN2 maintains a vapor pressure below 1x10-11 Torr for the

diffusion pump oil trapped on the cold surface of the baffle. We recommend LN2 traps for the cleanest

environment when using a diffusion pump.

Water baffles have the same function as an LN2 trap but are less effective in trapping and condensing oil.

Water baffles can also be used as a radiant shield for cryo and turbo pumps. Baffles and traps decrease

conductance resulting in longer pumpdown times.

Traps and baffles are leak checked and come with a 90 day warranty. Our stock changes daily; please

check our website for current availability, and contact our sales department for sizing and type of baffle or

trap for your application.

C

40TRAPS & BAFFLES

AGILENT/VARIAN

CVC

GRANVILLE-PHILLIPS

CVC

Model Flange Flange Construction Type

BC41 4” ASA stainless steel LN2

BCN61 6” ASA aluminum LN2

BC61 6” ASA stainless steel LN2, H2O, Polycold

BC101 10” ASA stainless steel LN2

Granville-Phillips


278 6” ASA stainless steel LN2

Agilent /Varian


332/M2 2” ASA stainless steel H2O, Polycold

325 2” ASA, 6” CF stainless steel LN2

316-4 4” ASA stainless steel LN2





362-6 6” ASA, 10” CF stainless steel LN2

330 10” ASA stainless steel H2O, Polycold



Visit www.ptbsales.com for current inventory,



• Diode, noble diode or triode

• Pumping speed

• Flange size

• Mounting and support

Ion Pumps & Controllers

Ion pumps are the mainstay for UHV applications (10-11 Torr range). They are clean, bakeable, vibration

free, use low power and have long operating lives. Ion pumps work on the principle of sputtering a

reactive metal (normally Ti) from a cathode strip to an anode. The reactions which cause the pumping

are chemical reactions, ion burial and neutral burial. Ion pump elements are available in diode, noble

diode and triode configurations. To select the appropriate configuration please call a PTB sales engineer.

PTB Sales sells used ion pumps and controllers. Our stock changes daily; please check our website at

www.ptbsales.com for current availability or call our sales department if you are looking for a pump or

controller that is not listed below.

For Agilent/Varian and Perkin-Elmer ion pumps, service requires only the pump chamber and not the

exterior magnets to be sent in to us.

Ion pump rebuild service includes:

• Remove, disassemble and clean the elements and pump.

• Replace titanium and tantalum parts.

• Reassemble, helium leak check, bake out and seal off pump.

• Qualify with known ion pump controller.


C

42ION PUMPS & CONTROLLERS

AGILENT/VARIAN

PERKIN-ELMER

Agilent /Varian

Model Pumping Speed Type Flange

911-5005 8 l/s diode VacIon, 1 element 23/4” CF

911-5030/6 20 l/s diode/ triode VacIon, 1 element 23/4” CF

919-0235 20 l/s triode StarCell VacIon, 1 element 23/4” CF

911-5032 30 l/s triode VacIon, 1 element 41/2” CF

911-5033/7 30 l/s diode/ triode VacIon, 1 element 41/2” CF

911-5034/8 60 l/s diode/ triode VacIon, 2 elements 6” CF

912-7006 110 l/s triode VacIon, 1 element 8” CF

912-7000 140 l/s diode VacIon, 1 element 8” CF

912-7014 220 l/s triode VacIon, 2 elements 8” CF

912-7008 270 l/s diode VacIon, 2 elements 8” CF

912-7022 400 l/s triode VacIon, 4 elements 8” CF

912-7016 500 l/s diode VacIon, 4 elements 8” CF

Perkin-Elmer

Model Pumping Speed Type Flange

PE-60 60 l/s diode, 4 elements 6” CF





PE-TNBX 220 l/s diode, 8 element 16” OD, 11” ID

set up for 12” diameter bell jar or 16” CF inlet

Perkin-Elmer

Model Ion Pump Controlled

Digitel 500/G 25-270 l/s

Digitel 1500 220-500 l/s

Agilent /Varian

Model Ion Pump Controlled

921-0062 8, 20, 30, 60 l/s

921-0066 120,140, 220, 270, 400, 500 l/ s

Multicell StarCell pumps

• Bearing type (mag lev, ceramic, steel)

• Lubrication (hydrocarbon, fomblin, grease)

• Pump orientation

• Process conditions

• Foreline pressure

• Water or air cooling

Turbomolecular Pumps

Turbomolecular pumps are used for a myriad of high vacuum applications. Turbomolecular pumps utilize

rapidly spinning rotors that are composed of angled blades. These blades impart momentum to gas

molecules in the direction of the exhaust.

Molecular drag pumps and hybrid pumps (a combination of molecular drag and turbo) are variations

of turbomolecular pumps. These pumps use helical grooved rotors and stators to “drag” the molecules

toward the exhaust. Molecular drag and hybrid pumps do not require low foreline pressure, therefore

they are ideal pumps when used in conjunction with dry diaphragm or other higher pressure dry pumps.

Another added benefit of the molecular drag and hybrid pumps is that they are capable of handling

higher gas bursts at the inlet than the conventional turbomolecular pumps.

An important thing to keep in mind when selecting turbomolecular pumps, molecular drag pumps and

hybrid pumps is that there are different types of bearings and lubricants available, often for the same

model pump. Please contact one of the PTB’s sales engineers to discuss your specific application so that

the appropriate type of pump along with the appropriate type bearings and lubricants are selected.

Our stock changes daily. Please check our website at www.ptbsales.com for current availability or contact

our sales department.

CTURBOMOLECULAR PUMPS

ADIXEN/ALCATEL

PFEIFFER

Adixen/Alcatel

Model Inlet Flange Pumping Speed

ATP-80 ISO-63 80 l/s

ATP-100 ISO-100 100 l/s

ATP-150 ISO-100 140 l/s

ATP-400 ISO-160 400 l/s

ATP-900 ISO-200, 10” CF 900 l/s

ATP-1500M/C ISO-250 1,500 l/s

ATP-5400 ISO-100, ISO-160, 8” CF 400 l/s

ATP-5400CP ISO-100, ISO-160, 8” CF 400 l/s

ATP-5401 ISO-160 400 l/s

ATP-5401CP ISO-160 400 l/s

ATP-5900 ISO-200, 8” CF 880 l/s

ATP-5900CP ISO-200, 8” CF 880 l/s

ATS-200 ISO-100, 6” CF 200 l/s

ATH-20/40 41/2” CF 20/40 l/s

ATH-30+ 41/2” CF 30 l/s

ATH-300 ISO-100, ISO-160 300 l/s

ATH-400M ISO-100, ISO-160 410 l/s

ATH-500M ISO-160 500 l/s

ATH-1000M ISO-100, ISO-200 1,000 l/s

ATH-1300M ISO-200, ISO-250 1,300 l/s

ATH-1600M ISO-200, ISO-250 1,600 l/s

ATH-2300M ISO-200, ISO-250 2,100 l/s

ATH-2800M ISO-250 2,050 l/s

ATH-3200M ISO-320 2,600 l/s

MDP 5011 ISO-63 7.5 l/s

MDP 5080 ISO-63, 41/2” CF 80 l/s

MDP 5081 ISO-63, 41/2” CF 80 l/s

MDP 5101 ISO-100, 6” CF 80 l/s

MDP 5150 ISO-100 140 l/s

MDP 5150CP ISO-100 140 l/s

MDP 5400 ISO-160, 8” CF 400 l/s

MDP 5400CIS ISO-160, 8” CF 400 l/s

MDP 5401 ISO-160 400 l/s

MDP 5401CP ISO-160 400 l/s

MDP 5402CP ISO-160, 8” CF 400 l/s

Pfeiffer


TPU/TPH-020 ISO-40, ISO-63, 41/2” CF 20 l/s



TPU/TPH-050 ISO-63, 41/2” CF 50 l/s

TPU/TPH-060 ISO-63, 41/2” CF 56 l/s

TPU/TPH-062 ISO-63, 41/2” CF 62 l/s

TPU/TPH-064 ISO-63, 41/2” CF 63 l/s

HP-80 ISO-63, 41/2” CF 71 l/s

TPU/TPH-170 ISO-100, 6” CF 170 l/s

TPU/TPH-180HC ISO-100, 6” CF 180 l/s

TPU/TPH-190 ISO-100, 6” CF 190 l/s

TPU/TPH-240 ISO-100, 6” CF 230 l/s

HP-300 ISO-100, 6” CF 250 l/s

TPU/TPH-330 ISO-100, 6” CF 330 l/s

HP-400 ISO-100, 6” CF 350 l/s

TPU/TPH-510 ISO-160, 8” CF 500 l/s

TPU/TPH-520M ISO-160, 8” CF 500 l/s

HP-700 ISO-160, 8” CF 630 l/s

TPU/TPH-1201 ISO-200, 10” CF 1,250 l/s

TPU/TPH-1500 ISO-250, 12” CF 1,300 l/s

TPU/TPH-2100 ISO-200, ISO-250, 10” CF, 12” CF 2,000 l/s

TPU/TPH-2101PC ISO-200, ISO-250, 10” CF, 12” CF 1,900 l/s

TPU/TPH-2200 ISO-200, ISO-250, 10” CF, 12” CF 2,100 l/s

TPU/TPH-2301 ISO-250, 12” CF 1,900 l/s

TPU/TPH-5000 ISO-400, ISO-500 5,500 l/s

TMU/TMH-065 ISO-63, 41/2” CF 56 l/s

TMU/TMH-071P ISO-63, 41/2” CF 60 l/s

TMU/TMH-110 ISO-100, 6” CF 100 l/s

TMU/TMH-200M ISO-100, 6” CF 180 l/s

TMU/TMH-260 ISO-100, 6” CF 210 l/s

TMU/TMH-261 ISO-100, 6” CF 230 l/s


TMU/TMH-520 ISO-160, 8” CF 500 l/s


TMU/TMH-521 ISO-160, 8” CF 500 l/s

44

CTURBOMOLECULAR PUMPS

PFEIFFER

EBARA

EDWARDS

OERLIKON LEYBOLD

Edwards


EXT75DX ISO-63 61 l/s

EXT70/CF/H ISO-63 65 l/s

EXT250/H/HI ISO-100 220 l/s

EBARA


ET-300WS ISO-100 270 l/s

ET-300WS-A ISO-100 270 l/s

ET-450WS ISO-160 460 l/s

ET-600WS ISO-160 600 l/s

ET-800WS ISO-200 800 l/s

ET-1301WS ISO-200 1,300 l/s

ET-1600WS ISO-250 1,500 l/s

ET-2500WS ISO-320 2,500 l/s

ET-3300WS ISO-400 3,300 l/s

Pfeiffer


TMU/TMH-521P ISO-160, 8” CF 500 l/s

TMU/TMH-521SG ISO-160, 8” CF 500 l/s

TMU/TMH-521UP ISO-160, 8” CF 500 l/s

TMU/TMH-1000M ISO-200 980 l/s

TMU/TMH-1001P ISO-200, 10” CF 1,000 l/s

TMU/TMH-1600 ISO-200, ISO-250, 10” CF 1,500 l/s

TMU/TMH-1600C ISO-200, 10” CF 1,500 l/s

TMU/TMH-1600PC ISO-200, 10” CF 1,500 l/s

TMU/TMH-1600M ISO-250 1,400 l/s

TMU/TMH-1601P ISO-250, 1” CF 1,500 l/s

HIMAG-2400 ISO-250 2,100 l/s

Edwards


EXT255H/HI/DX ISO-100 220 l/s

EXT260 ISO-100 220 l/s

EXT406PX ISO-100, ISO-160 380 l/s

EXT556H ISO-160 540 l/s

45

Oerlikon Leybold


TMP-50 ISO-63, 41/2” CF 55 l/s

TMP-55 ISO-63 30 l/s

TMP-150/151 ISO-100, 6” CF 145 l/s

TMP-340/341 ISO-100, ISO-160, 6” CF 220 l/s

TMP-360/361 ISO-160, 6” CF 345 l/s

TMP-1000/C ISO-200, ISO-250, 8” CF, 10” CF 1,100 l/s

TMP-1100/C ISO-250 830 l/s

TMP-1500 ISO-250 1,550 l/s

TW-70H ISO-63, 41/2” CF 60 l/s

TW-250 ISO-100, 6” CF 230 l/s

TW-300 ISO-100, 6” CF 240 l/s

TW-700/701 ISO-160, 8” CF 680 l/s

TW-1600 ISO-200, ISO-250, 10” CF 1,420 l/s

MAG W 400iP ISO-160, 8” CF 365 l/s

MAG W 600iP ISO-160, 8” CF 570 l/s

MAG W 830iP ISO-160, 8” CF 760 l/s

MAG W 1200 ISO-200, 10” CF 1,200 l/s

MAG W 1300/C ISO-200, ISO-250 1,220 l/s

MAG W 1500/CT ISO-200, ISO-250 1,220 l/s

MAG W 2000/CT ISO-250 1,550 l/s

MAG W 2010C ISO-250 1,650 l/s

MAG W 2200C ISO-200, ISO-250 2,000 l/s

MAG W 2700 ISO-250 1,630 l/s

MAG W 28OOC ISO-250 2,650 l/s

MAG W 3200 ISO-320 3,200 l/s

C

OSAKA

SEIKO SEIKI

SHIMADZU

AGILENT/VARIAN

TURBOMOLECULAR PUMPS

Osaka


TG56F ISO-63 44 l/s

TG200 ISO-100 200 l/s

TG220F ISO-100 200 l/s

TG350F ISO-100 330 l/s

TG450F ISO-160 450 l/s

TH532 ISO-160 500 l/s

TG550 ISO-160 500 l/s

TG800F ISO-160 850 l/s

TG1000 ISO-200 1,000 l/s

TG1100F ISO-200 1,100 l/s

TG1103M ISO-200 1,000 l/s

TG1300M ISO-200 1,300 l/s

TG2400M ISO-250 2,400 l/s

Shimadzu


TMP-1003LM ISO-250 1,080 l/s

TMP-2001 ISO-250 1,500 l/s

TMP-2003 ISO-250 1,500 l/s

TMP-3203LMC ISO-250 2,000 l/s

TMP-3403LMC ISO-250 2,300 l/s

TMP-3403LMTC ISO-250 2,300 l/s

Agilent /Varian


V60 ISO-63 58 l/s

V70 ISO-63, 41/2” CF 68 l/s

V70LP ISO-63, 41/2” CF 68 l/s

V70D ISO-63, 41/2” CF 68 l/s

V80A ISO-63, 41/2” CF 77 l/s

V150HT ISO-100, 6” CF 150 l/s

V200A ISO-100 220 l/s

V250 ISO-100 250 l/s

V300HT ISO-100, ISO-160, 8” CF 250 l/s

V450 ISO-160 470 l/s

V550 ISO-160, 8” CF 550 l/s

V700HT ISO-200, 10” CF 690 l/s

V1000HT ISO-200 1,000 l/s

V1000 ICE ISO-200 1,000 l/s

V1800 ISO-250 1,600 l/s

V1800A ISO-250 1,600 l/s

V2000HT ISO-250, 10” CF 2,000 l/s

TV2KG ISO-250 1,600 l/s

TV81 ISO-63 77 l/s

TV301 ISO-100, 6” CF 250 l/s

TV551 ISO-160, 8” CF 550 l/s

TV701 ISO-160, 8” CF 700 l/s

TV1001 ISO-200, 10” CF 1,000 l/s

Seiko Seiki


STP-300/301CB1 ISO-100 290 l/s

STP-400/C ISO-100 400 l/s

STP-451/C ISO-160 480 l/s

STPIX-455 ISO-100, ISO-160 450 l/s

STP-600/C ISO-160 600 l/s

STP-H600/C ISO-160 600 l/s

STP-603/C ISO-160 600 l/s

STP-A803/C ISO-200 800 l/s

STP-1000/C ISO-200, 6” ASA 1,000 l/s

STP-H1000/1001/C ISO-200, 6” ASA 1,000 l/s

STP-H2000/2001/C ISO-250 2,000 l/s

STP-H2002/C ISO-250 2,000 l/s

STP-A2203PV ISO-250 2,000 l/s

STP-F2203/C ISO-250 2,000 l/s

STP-A2503PV ISO-320 2,500 l/s

STP-XA2703/C ISO-250 2,650 l/s

46

• Line voltage

• Pump size

• Flange type

• Valving

• Gauging

• Dry or wet

Turbo Pumping Stations

Turbo pumping stations are self-contained high vacuum pumping systems. They integrate a turbo pump,

backing pump and controller into one easy to use high vacuum pumping package. They may also

include gauging and valve control capability. Turbo stations can be equipped with a dry backing pump for

clean operation.

There are many combinations available. Please check our website for current availability of OEM systems

or contact our sales department for a PTB Sales custom built system. PTB Sales has a large inventory of

turbo pumps and can build a system for your specific needs.

Typical Applications:

• Gauge calibration

• RGA differential pump

• Dry regen of cryopump

• Vacuum jacketing

• General purpose high vacuum

• Removable load lock

C

AGILENT/VARIAN/PTB SALES CUSTOM

ADIXEN/ALCATEL

PFEIFFER

TURBO PUMPING STATIONS

Adixen/Alcatel

Model Turbo Pump Backing Pump Controller

Drytel 25 MDP 5010, 715 l/s Dry Diaphragm OEM PCB Card




Drytel 34C MDP 5011, 715 l/s Dry Diaphragm OEM PCB Card

Drytel 42 ATH-30, 715 l/s Dry Diaphragm OEM PCB Card

Drytel 44 ATH-30, 30 l/s Dry Diaphragm OEM PCB Card


Drytel 100C MDP 5030, 27 l/s Dry Diaphragm OEM PCB Card

Pfeiffer


TSH/TSU-170 TPU/TPH-170 Rotary Vane TCP-380

TSH/TSU-260 TMU/TMH-260 Rotary Vane or Dry Diaphragm TCP-380


TSH/TSU-520 TMU/TMH-520 Rotary Vane or Dry Diaphragm TCP-380


Agilent /Varian/PTB Sales Custom


Turbo Dry 65 V60 Dry Diaphragm OEM PCB Card

Turbo Dry 70 V70D Dry Diaphragm OEM PCB Card

PTB Sales V70 Custom Package V70D, HT, LP Scroll, Diaphragm or Rotary Vane V70

PTB Sales V150 Custom Package V150HT Scroll, Diaphragm or Rotary Vane V150






48

• Line voltage

• Mounting

Turbo Controllers

Turbo controllers are essentially frequency converters which change the line voltage into a high frequency

optimized for the specific turbo pump. Some controllers have additional functions such as interlocks,

auto-venting and heater control.

Turbo controllers are sold as repaired and come with a 90-day warranty. Our stock changes daily.

Please check our website for current availability. Contact our sales department to ensure you have the

appropriate controller for your turbo pump.

Turbo controller repair service includes:

• Run diagnostic check.

• Repair and replace all bad components.

• Repair trace and board damage.

• Replace batteries.

• Run test on subassemblies to insure OEM specifications.

• Test for tuning and levitation for magnetically levitated pump types.

• Test under maximum load.

• Tune and match to pump and cable set.

• Test interface operation.

C

50TURBO CONTROLLERS

ADIXEN/ALCATEL

EBARA

EDWARDS

OERLIKON LEYBOLD

OSAKA

SHIMADZU

Adixen/Alcatel

Model Adixen/Alcatel Turbos Controlled

CFF-100 MDP 5010, MDP 5080, MDP 5100

CFF-450 MDP 5030, MDP 5150, MDP 5400, MDP 5402

CFV-100 MDP 5011, MDP 5081, MDP 5101

CFV-900 MDP 5900

CFV-3000 ATP-1500M

ACT-600M ATH-400

ACT-1000M ATH-1000

ACT-1300M ATH-1300, ATH-1600

Osaka

Model Osaka Turbos Controlled

TC200 TG200

TC440 TG440

TC550 TG550

TC3500 TG3500

TD2001 TD2001

EBARA

Model EBARA Turbos Controlled

ET-300W ET-300WS

ET-600W ET-600WS

ET-804W ET-800WS

ET-1604W ET-1600WS

ET-1606W ET-1600WS

Edwards

Model Edwards Turbos Controlled

ETC-300 EXT-250/H/I, 255/H/I, 260

EXC-100L EXT-70/H/CF

Oerlikon Leybold

Model Oerlikon Leybold Turbos Controlled

NT-20 TMP-150, 151, 360, 361, 600, 1000, 1100

NT-50 TMP-35, 50, 55

NT-150/360 TMP-150, 151, 360, 361

NT-151 TMP-151

NT-200 TMP-200

NT-340M 340 Mag-Lev, 400 Mag-Lev

NT-341 340 Mag-Lev, 400 Mag-Lev

NT-450 TMP-360, 361, 450

NT-1000/1500 TMP-600, 1000, 1500

Mag Drive 1000/L Mag 1000, Mag 1200

Fas Drive Digital Mag 2700

Mag 2000 Mag 2000

Turbo Drive S TW-250, 300, 700

TC-300 SL-80, 300

TD-400 TW-220

TC-700 SL-700

Shimadzu

Model Shimadzu Turbos Controlled

EI-2003M TMP-2003

EI-3203MD 3203-LMC

EID-3403M 3403-LMC/LMTC

Oerlikon Leybold

Model Oerlikon Leybold Turbos Controlled

NT-10 TMP-50

NT-12 TMP-50

NT-13 TMP-50

C

51

SEIKO SEIKI

AGILENT/VARIAN

TURBO CONTROLLERS

Seiko Seiki

Model Seiko Seiki Turbos Controlled

SCU-21D Universal

SCU-301C STP-301C

SCU-H301C STP-H301C

SCU-400 STP-400

SCU-600 STP-600

SCU-603 STP-603

SCU-750 Universal

SCU-1000 STP-H1000

SCU-1000C STP-H1000C

SCU-1000L STP-H1000L

SCU-1000WA STP-H1000WA



SCU-1500 Universal




SCU-A803C STP-A803C

SCU-A1303CV2 STP-A1303CV2

SCU-A1603C STP-A1603C

SCU-A2203C STP-A2203C

SCU-A2203P STP-A2203P

SCU-A2503PV STP-A2503PV

SCU-XH2603P STP-XH2603P

SCU-XA2703CV STP-XA2703CV

SCU-XA3203CV STP-XA3203CV

SCU-XH2603P STP-XH2603P

SCU-XL800 STP-XL800

Agilent /Varian

Model Agilent /Varian Turbos Controlled

V60 V60

V70 V70

V80 V80

V150 V150

V200 V200

V250 V250

V300 ICE V300 ICE

V301/NAV V301/NAV

V450 V450

V550 V550

V700 HT/ICE V700 HT/ICE

V1000 V1000

V1800 V1800

V2000 HT/ICE V2000 HT/ICE

The Turbo-V controllers are frequency converters with self diagnostic and

protection features. The half rack unit has a multifunction alphanumeric

display for pump status and error code diagnostics. It displays rotational

speed as the pump starts up and indicates when full speed is reached. At

any time during the operation of the pump, the speed, current, power and

bearing temperature can be displayed. Its microprocessor acts as a pump

cycle log, and can display the number of vacuum cycles, the cycle time for

the current cycle and the total operating hours on the pump.

The Navigator series, NAV on the tag, mounts directly onto the bottom of

the turbo pump. It has no display since it is meant to be linked into your

system's process control.




C

Model

020

035

040

050

060

062

064

100

110

140

170

180H

190

200

240

260

330

450H

510

520

520M

1000

1500

1600

2200

5000

010

•

•

•

015

•

•

•

•

•

020 035

•

•

•

040

•

•

•

•

100

•

120

•

•

•

•

•

•

•

•

•

•

•

121

•

•

•

•

•

•

•

•

•

•

•

200

•

270

•

•

•

•

•

•

•

•

300

•

•

•

•

•

•

•

•

•

305

•

•

•

•

•

•

•

•

•

310

•

•

•

•

•

•

•

•

•

•

380

•

•

•

•

•

•

•

•

•

•

•

•

•

600

•

•

•

•

•

•

•

•

•

•

•

•

•

5000

•

•

•

52TURBO CONTROLLERS

PFEIFFER COMPATIBILITY CHART

Pfeiffer Compatibility Chart

Pump Frequency Converter

• Input power

• Water cooled or air cooled

• Interface to system

• Matching network

Power Generators

Power generators are used for many applications. PTB Sales sells deposition power generators for

sputtering, electron beam evaporation, ion beam and ion beam assisted deposition. Sputtering is

normally done using DC or RF power generators depending upon the material being deposited. Etching

or ashing is normally done using RF power. The size of the cathode or the deposition/etch rates desired

normally dictate the size of the power generator.

PTB Sales carries three types of DC power generators for sputtering: DC magnetron, DC biased and DC

pulsed. DC magnetrons are the most common power generators for depositing metals. DC pulsed are

newer and more sophisticated power generators that work well on both dialectrics and metals. Both DC

magnetron and DC pulsed range in power from 500 watts to 30 kW. Either can be equipped with remote

interfaces or front panel displays.

PTB Sales also carries RF power generators for RF sputtering, RF biased, RF etch/ashing and induction

heating. RF sputtering generators are typically set at 13.56 mHz. They are an excellent source for

sputtering dialectrics. Many are solid state; however less expensive tube types are available. Power

ranges from 100 W to 5 kW for solid state generators and tube supplies can go to 40 kW. Some

applications require low frequency power generators. Most run from 50 to 460 kHz. Induction heating

power generators are available. They are high power (7.5 kW to 40 kW) and run at 450 kHz. Most are

tube type.

Power generators are sold with a 90 day warranty. Call our sales staff for the appropriate power generator

for your application.

C

54

ADVANCED ENERGY

MKS ENI

POWER GENERATORS

DC Magnetron Power Generators

Advanced Energy

Model Output Front Panel Cooling

MDXII-15K 15 kW active/passive air

MDXII-30K 30 kW active/passive air

MDX-1K 1 kW active/passive air





MDX-L6 6 kW active/passive air

MDX-L12 12 kW active/passive air

MDX-L12M 12 kW active/passive air

MDX-L12M-650 12 kW active/passive air

Pinnacle 5 kW 5 kW dual/10 kW active/passive air

Pinnacle 6 kW 6 kW active/passive air

Pinnacle 6 kW/6 kW 6 kW dual/6 kW active/passive air

Pinnacle 6 kW/10 kW 6 kW dual/10 kW active/passive air




Pinnacle Plus (DC pulsed) 6 kW dual/12 kW active/passive air

MKS ENI


DCG-100 10 kW, 50-60 Hz active air





DCG-200Z 40 kW, 50-60 Hz active air

RPG-50 (DC pulsed) 5 kW, 25-50 kHz active air

RPG-100 (DC pulsed) 10 kW, 25-50 kHz active air

C

Ametek-Sorensen


DCR 10-170B 0-10 V, 0-170 A active ambient



DCR 20-25B2 0-25 V, 0-25 A active ambient

DCR 32-155T 0-32 V, 0-155 A active ambient







DCR 160-62T 0-160 V, 0-62 A active ambient

DCR 300-1.5B 0-300 V, 0-1.5 A active ambient



DCR 600-.75B 0-600 V, 0-.75 A active ambient

DCR 600-1.5B 0-600 V, 0-1.5 A active ambient

DCR 600-1.5B2 0-600 V, 0-1.5 A active ambient

DCS 8-25 0-8 V, 0-25 A active ambient




DCS 32-125M86 0-32 V, 0-125 A active ambient

DCS 33-33E 0-33 V, 0-33 A active ambient

DCS 33-33EM13M9C 0-33 V, 0-33 A active ambient

DCS 33-33EM47 0-33 V, 0-33 A active ambient



DCS 40-25M37 0-40 V, 0-25 A active ambient

DCS 40-25M9A 0-40 V, 0-25 A active ambient






POWER GENERATORS

AMETEK-SORENSEN

55

C

AMETEK-SORENSEN

HITEK POWER

ADVANCED ENERGY

COMMONWEALTH

POWER GENERATORS

Ametek-Sorensen



DCS 300-3.5 0-300 V, 0-3.5 A active ambient

DHP 150-166 0-150 V, 0-166 A active ambient

DHP 200-50 0-200 V, 0-50 A active ambient

DHP 300-6.6 M9D 0-300 V, 0-6.6 A active ambient

SRL 20-25 0-20 V, 0-25 A active ambient




XTD 30-2 0-30 V, 0-2 A active ambient

XTQ 30-2 0-30 V, 0-2 A active ambient

XTS 30-2 0-30 V, 0-2 A active ambient

Advanced Energy

Model Ion Beam

ID-2501

ID-3500

ID-3501

Commonwealth

Model Ion Beam

IBS-250

IBS-600

Mark II

PBES

8542

56



HiTek Power

Model Output

MH100 50 kV

OL400 6 kV

OL6000/HV 200 kV, 6 kW

OL8000/HV 200 kV, 8 kW

OL10K 10 kW

OLS10K/D 10 kW

OL20K 20 kW

Ion Implant Power Generators


C

57 POWER GENERATORS

ADVANCED ENERGY

RF Plasma Power Generators

Advanced Energy


Apex 1513 1.5 kW, 13.56 mHz active water

Apex 3013 3 kW, 13.56 mHz active water

Apex 5513 5 kW, 13.56 mHz active water

Apex 7 kW/13 7 kW, 13.56 mHz active water

Apex 10 kW/13 10 kW, 13.56 mHz active water

Atlas 2012 2 kW, 13.56 mHz active water

PDX-500 .5 kW, 325-375 kHz active air

PDX-900-2V .9 kW, 325-375 kHz active air

PDX-1200 1.2 kW, 325-450 kHz active air




PDX-5000 5 kW, 330-460 kHz active air

PDX-8000 8 kW, 360-460 kHz active air

PE-1000 1 kW, 40±1 kHz active air

PE-2500 2.5 kW, 40±1 kHz active air

PE-5000 5 kW, 40±1 kHz active air

PE-10K 10 kW, 40±1 kHz active air

PE-20K 20 kW, 40±1 kHz active air

PDW-2200 2.2 kW, 400 kHz active air

PDP-2500 2.5 kW, 450 kHz active air

RFDS-1250-A 1.25 kW, 13.56 mHz passive water

RFDS-2000-2V 2 kW, 13.56 mHz passive water

RFG-1250 1.25 kW, 13.56 mHz passive water

RFG-1250 HALO 1.25 kW, 13.56 mHz passive water

RFG-1251 1.25 kW, 13.56 mHz passive water

RFG-3000 3 kW, 13.56 mHz passive water

RFG-3002 3 kW, 13.56 mHz passive water

RFX-600 .6 kW, 13.56 mHz active water

RFX-1250 1.25 kW, 13.56 mHz active water

RFXII-1200 1.25 kW, 13.56 mHz active water

RFX-2500 2.5 kW, 13.56 mHz active water

RFXII-3000 3 kW, 13.56 mHz active water

C

58

COMDEL

MKS ENI

POWER GENERATORS

Comdel


CDX-2000 1 kW, 13.56 mHz, 2 mHz active water

CLF-5000 5 kW, 350-450 kHz active water

CLX-10 10 kW, 340-460 kHz active water

CLX-2500 2.5 kW, 350 kHz active water

CPS-500 .5 kW, 13.56 mHz active air

CPS-1000 1 kW, 13.56 mHz active water

CPS-1001 1 kW, 13.56 mHz active water

CPS-1001S 1 kW, 13.56 mHz active water

CPS-3000 3 kW, 13.56 mHz active air

CX-10K 10 kW, 13.56 mHz active water

CX-600/S/AS .6 kW, 13.56 mHz active water

CX-1250S 1.25 kW, 13.56 mHz active water

CX-2500 2.5 kW, 13.56 mHz active water

CX-3500 3.5 kW, 13.56 mHz active water

CX-5000 5 kW, 13.56 mHz active water

MKS ENI


ACG-3/XL .3 kW, 13.56 mHz active air



ACG-10 1 kW, 13.56 mHz active air

ACG-10B 1 kW, 13.56 mHz active air

DPGD-10 1.25 kW, 250 kHz active/passive water

DPGS-10 1.25 kW, 250 kHz active/passive water

HF-300 .3 kW, 250 kHz active air

HF-650 .6 kW, 250 kHz active air

GHW-12A 1.2 kW, 13.56 mHz active water


GHW-50A 5 kW, 13.56 mHz active water



C

POWER GENERATORS

MKS ENI

MKS ENI



GMW-25A 2.5 kW, 50-60 Hz active water

GMW-25Z 2.5 kW, 50-60 Hz active water

GMW-50A 5 kW, 50-60 Hz active water

LPG-6A .6 kW, 90-460 kHz active water

LPG-12A 1.2 kW, 90-460 kHz active water

Nova-25A 2.5 kW, 2.0 mHz active water

Nova-50A 5 kW, 2.0 mHz active water

OEM-6 .650 kW, 13.56 mHz active water

OEM-6A .650 kW, 13.56 mHz active water

OEM-6B .650 kW, 13.56 mHz active water

OEM-12 1.25 kW, 13.56 mHz active water

OEM-12A 1.25 kW, 13.56 mHz active water

OEM-12A XL 1.25 kW, 13.56 mHz active water

OEM-12B 1.25 kW, 13.56 mHz active water

OEM-12B3 1.25 kW, 13.56 mHz active water



OEM-25A 2.5 kW, 13.56 mHz active water


OEM-25XL 2.5 kW, 13.56 mHz active water


OEM-2000 2 kW, 13.56 mHz active water

OEM-50 5 kW, 13.56 mHz active water

OEM-50XL 5 kW, 13.56 mHz active water

Plasmaloc 1-HF .75 kW, 90-460 kHz active air

Plasmaloc 2-HF 2 kW, 90-460 kHz active air

Plasmaloc 3-HF 3 kW, 90-460 kHz active air

Quanta 10 .9 kW x2, 350 kHz active air

Spectrum B-3013 3 kW, 1.8-2.17 mHz active air

Spectrum B-5002-02 5 kW, 1.8-2.17 mHz active air

Spectrum B-10513 10.5 kW, 1.8-2.17 mHz active air

Spectrum 11002-00 11 kW, 1.8-2.17 mHz active air

59

C

RFPP


LF-5 .5 kW, 50-460 kHz active air

LF-10 1 kW, 50-460 kHz active air/water

LF-20 2 kW, 50-460 kHz active water

LF-30 3 kW, 50-460 kHz active water

RF-5S .5 kW, 13.56 mHz active air

RF-10L 1 kW, 13.56 mHz active air

RF-10M 1 kW, 13.56 mHz active air

RF-10MWC 1 kW, 13.56 mHz active air

RF-10S 1 kW, 13.56 mHz active air

RF-20 2 kW, 13.56 mHz active water

RF-20R 2 kW, 13.56 mHz active water

RF-20RWC 2 kW, 13.56 mHz active water

RF-20M 2 kW, 13.56 mHz active water

RF-20S 2 kW, 13.56 mHz active water

RF-25M 2.5 kW, 3.8-4.2 mHz active water



RFPP

MKS ENI

POWER GENERATORS

Match Networks

MKS ENI

Model Power Cooling

MWH-5 .5 kW air

MW-5D .5 kW air

MW-5D-01B .5 kW air

MW-5D-M12 .5 kW air

MW-10D 1.0 kW air

MW-25D-05M1 2.5 kW water

MW-25-LD 2.5 kW air

MW-50 5.0 kW air

MH-1001A 1.0 kW air

MH-2002A 2.0 kW air

60

• Input power

• Water cooled or air cooled

• Interface to system

• Matching network and grounding

E-Beam Power Generators & Guns

E-beam power generators are high voltage DC power generators which are used in conjunction with an

E-beam gun for evaporation of materials. They range in power from two to 15 kW and run at voltages

between six and 10 kV. Most can be equipped with a beam sweep which moves the beam in the pocket

to distribute power evenly across the pocket. Sweeps are normally used for the evaporation of non-

conductive materials. All power generators have interlocks for high voltage safety as well as an interface

for control from a deposition monitor/controller. Some E-beam power generators can run more than one

gun or system.

PTB Sales carries 270° E-beam guns only. All E-beam guns are water cooled. Multi-pocket guns come in

4- or 6-pocket configurations and range in pocket size from 7 to 30 ccs. Maximum power for a multi-

pocket E-gun is 8 kW.

E-beam power generators and guns are sold with a 90 day warranty. Please check our website for current

availability and contact our sales department for the appropriate E-beam equipment for your application.

C

62E-BEAM POWER GENERATORS & GUNS

TELEMARK

TEMESCAL

Temescal Power Generators

Model Power Function Cooling

CL-2A/B 2 kW Glow discharge power supply air

CV-8 8 kW XY sweep, gun control air

CV-10 10 kW XY sweep, gun control water

CV-14 14 kW XY sweep, gun control water

Simba 2 15 kW XY sweep, gun control, interfacer air

Filament Transformer

Temescal Guns

Model Type Pocket Size # of Pockets Power Rating

STIH-1CK 270° rotary crucible 7 cc 4 8 kW

STIH-2CK 270° rotary crucible 7–177 cc 4–6 8 kW

SFIH-1 270° fixed pocket 7 cc 1 10 kW



Telemark Power Generators

Model Power Function Cooling

TT-6 6 kW E-beam air



Telemark Guns

Model Type Pocket Size # of Pockets Power Rating

271 270° rotary crucible 4-383 cc 1-8 10 kW

295 270° rotary crucible 40-1,486 cc 1-10 15 kW

Systems & Spares

Leak Detectors & Rentals

Leak detectors (helium mass spectrometers) are the tools of choice to detect leaks in vacuum systems,

process piping, hermetically sealed packages and virtually any leak tight item. These devices detect the

spectra of helium either from the inside out - sniffing - or from the outside in - standard leak detection.

Leak detectors have their own self-contained vacuum system which can be either diffusion pumped or

turbo pumped. Some leak detectors require LN2 to reduce system contaminants by trapping them on a

cryo surface. Leak detectors can reveal leaks as small as 10-12 atm ccs/sec. They are also available in

dry versions where the roughing and holding pumps are either dry scroll or diaphragm pumps. Dry leak

detectors are used extensively in semiconductor manufacturing and other applications where cleanliness

is critical. Leak detectors come in portable models, convenient for field service or multiple system leak

testing, as well as cabinet models which are primarily used for leak testing parts or components.

PTB Sales has over a decade of experience in refurbishment and sales of leak detectors and now offers

leak detector rentals in partnership with Agilent Technologies (Varian Vacuum acquired by Agilent).

• Safe and affordable program if you need a leak detector but are not prepared to make the acquisition

investment.

• Convenient monthly rental program tailored to your specific needs.

• High quality, industry leading Varian leak detectors.

• 24x7 Technical Support available from Agilent Technologies.

• Backed by our “What YOU need, When YOU need it!” SM philosophy.

Agilent /Varian VS Series Rentals: VSPD031, VSMR151, VSMD301

• Bench top or with a cart

• Rough pump pumping speed

• Rough pump: dry or wet

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64

AGILENT/VARIAN

ADIXEN/ALCATEL

OERLIKON LEYBOLD

VEECO

FLAPPER BOXES - NEW

LEAK DETECTORS & RENTALS

Flapper Boxes - NEW

Flapper boxes speed up production on small and medium sized parts. Flapper boxes come in a variety of adapters to fit your leak detector. The main

body is one piece for vacuum integrity and the hinge lid is spring loaded for quick and easy operation. Flapper boxes are made from 7075-T6 aluminum.

Stainless steel is available at additional cost. They come with a variety of adapters to fit your leak detector. Custom flapper boxes available on request

PTB Sales P/N Description

FB 1704-4 4” ID x 3” tall

FB 1706-4 6” ID x 4” tall

Rebuilt leak detectors come with a 90 day warranty. If it’s a major rebuild, the mechanical pump has up to a one year warranty.

Agilent /Varian

Model Description

VSPD031 VS Series Rentals

VSMR151 VS Series Rentals

VSMD301 VS Series Rentals

938-41 Manual operation, turbo pumped, portable

947 Fully automatic, diffusion pumped

948 Fully automatic, diffusion pumped, LN2

956 Fully automatic, diffusion pumped

959-50 Fully automatic, turbo pumped, portable

960 Fully automatic, turbo pumped, LN2

979 Fully automatic, turbo pumped, portable

990-dCLD Component-type spectrometer unit

Adixen/Alcatel

Model Description

ASM 10 Manual, diffusion pumped, portable

ASM 110 Turbo CL Manual, turbo pumped, portable

ASM 120 H Fully automatic, turbo pumped, portable

ASM 121 H Fully automatic, turbo pumped, portable

ASM 180 T/TD Fully automatic, turbo pumped, portable

ASM 181 TD2 Fully automatic, turbo pumped, portable

ASM 182 TD+ Fully automatic, turbo pumped, portable

Oerlikon Leybold

Model Description

UL-200 Fully automatic, turbo pumped, portable

UL-500 Fully automatic, turbo pumped, portable

L-300 Fully automatic, turbo pumped, portable

Veeco

Model Description

MS-17 Fully automatic, turbo pumped, portable




Aerospace Equipment

Aerospace is a category that is as diverse as it is complex. PTB Sales supports most vacuum applications

as they relate to and are used by the Aerospace Industry. Military, Commercial, Defense, Academic and

Government institutions have trusted PTB Sales to save themselves valuable time and money for their

projects and maintenance.

PTB Sales sells and supports aerospace vacuum systems and components. From used and new vacuum

and thermal vacuum systems to turbo and cryogenic pumping carts we offer:

• Upgrades to older systems.

• Avionics and electronics vacuum and thermal cycling systems.

• Cryopump and cold head rebuilding service and sales.

• Helium compressor service and sales.

• Conversion to totally dry pumping.

• Instrumentation upgrades.

• System automation.

• Leak detectors.

• High vacuum bakeout systems.

• New and reconditioned thermovac/cycling systems.

• Support for existing systems.

• TQCM and witness plates.

Whether you need to update or reconfigure your existing facility or are considering replacing or adding to

your capacity we have solutions large, small or in-between.

• Chamber material: stainless steel, aluminum, mild steel

• Ports and openings

• Internal and external dimensions

CAEROSPACE EQUIPMENT 66

Thermovac System

• Stainless steel bell jar.

• Mild steel frame with steel panels and formica top.

• Hot/cold sample stage.

• Watlow digital temperature controller.

• Douglas type electrical feedthroughs.

• Viewports.

• CTI On-Board 10 cryopump with 8510 compressor.

• CVC auto system pumpdown with system controller.

THERMOVAC SYSTEM

VACUUM CHAMBERS

Vacuum Chambers

PTB Sales keeps an inventory of used vacuum chambers on hand. Normally made from stainless steel, carbon steel, aluminum or glass; vacuum chambers

can range in size from several cubic inches to thousands of cubic feet. Interior and exterior finishes range from plate finish to mechanically polished, electri-

cally polished or bead blast finishes. Smaller vacuum chambers are normally used in laboratory settings for vacuum outgassing or sample coating whereas

large chambers are used for thermo-vac space simulation or production deposition. PTB’s used chambers can normally be modified to fit the customer’s

specific need. PTB Sales also manufactures custom chambers built to the customer’s exact specifications. Call a PTB sales engineer for specifications on

our used chambers or for a quote on a custom built chamber.

Chamber Applications:

• Vacuum bakeout.

• Part degassing.

• Environmental testing.

• Ion etching.

• Optical coating.

• Metallizing.

• Miscellaneous pharmaceutical applications.

• Propulsion testing.

• Semiconductor processing.

• Space simulation.

• Sputtering.

Cryo Shrouds, LN2 Baffles & Cold Plates

PTB Sales also has in inventory thermal cryo shrouds, LN2 traps, baffles and cold plates. We can also provide thermal conditioning units built to meet your

heating and cooling requirements.

• Flange type: ISO, ASA, conflat

• Material: stainless steel or aluminum

• Type of actuation: electric, pneumatic, manual

• Overall valve dimension: Will the valve fit in the system?

• Valve conductance: Will there be enough conductance for the application?

Gate Valves

Gate valves are the most widely used valve style in the industry. They are the valve of choice for high

vacuum pump isolation. They offer a low profile design minimizing conductance and optimizing pumping

speed. There are many configurations of gate valves available. Most are of stainless steel construction.

However, aluminum bodies are available and are an economical alternative. Gate valves typically range

from 50 to 400 mm bore. Flange types can be ISO, ASA or conflat (stainless only). Gate valve activation

can be manual, pneumatic or servostepper motor.

Valves are sold rebuilt with a 90 day warranty. Please check our website for current availability and

contact our sales department to ensure the valve is configured properly for your application.

Gate valve rebuild service includes:

• Replace seals.

• Clean/replace bearings.

• Clean to high vacuum specification.


• Leak test.

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68

EDWARDS

HVA

GATE VALVES

Edwards

Model Flange Construction Actuator

GVA-040P 4” ASA stainless steel manual



GVC-100P 10” CF stainless steel manual

GVI-040 KF-40 stainless steel manual

GVI-050M KF-50 stainless steel manual

GVI-063M ISO-63 stainless steel manual

GVI-063P ISO-63 stainless steel manual

GVI-080 ISO-80 stainless steel manual

GVI-100M ISO-100 stainless steel manual





HVA


122-0401 4” ASA stainless steel pneumatic




125-0400 4” CF stainless steel pneumatic



11225-1070R 103/4” CF stainless steel pneumatic

11210-0203R ISO-50 stainless steel pneumatic

21250-0256Z ISO-63 stainless steel pneumatic

11110-0406 ISO-100 stainless steel pneumatic

21211-0803 ISO-200 stainless steel pneumatic

21251-1003Z ISO-250 stainless steel pneumatic

11210-1603R ISO-400 stainless steel pneumatic

C

69 GATE VALVES

AGILENT/VARIAN

MDC

TEMESCAL

VRC

MDC


GV-4000M 4” CF stainless steel pneumatic

GV-6000V 6” CF stainless steel manual

GV-8000M 8” CF stainless steel manual

KGV-1500V KF-40 stainless steel pneumatic

GV-4000V ISO-100 stainless steel pneumatic

Temescal


3” Fig 5030 3” ASA aluminum manual

4” Fig 5030-R 4” ASA aluminum pneumatic

6” Fig 5010-R-3 6” ASA aluminum manual

6” Fig 5030-R 6” ASA aluminum pneumatic

Agilent /Varian


VGA6AEP 6” ASA aluminum pneumatic


VGA250IEP ISO-250 aluminum pneumatic

VRC


VRCLP3 3” ASA aluminum manual

VRCLP4 4” ASA aluminum pneumatic




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70

VAT

GATE VALVES

VAT


Series 10 6” ASA stainless steel pneumatic

6” CF stainless steel pneumatic




ISO-63 stainless steel pneumatic


Series 12 ISO-100 aluminum manual

ISO-160 aluminum pneumatic


Series 14 6” ASA stainless steel pneumatic

10” ASA stainless steel pneumatic








Series 20 10” CF stainless steel pneumatic





Series 64 6” ASA stainless steel pneumatic/servo

10” ASA stainless steel pneumatic/servo

8” CF stainless steel pneumatic/servo




ISO-100 stainless steel pneumatic/servo





• Flange type and size

• Actuation method

Angle Valves

Angle valves are typically used as foreline valves, rough valves, purge valves and vent valves. Where

conductance is not an issue, they are an inexpensive and practical alternative to gate valves. Angle valves

normally have bellows seals, and are activated manually or pneumatically. Most smaller angle valves

(25 to 100 mm) are made of stainless steel. They can be equipped with metal seals for UHV and high

temperature applications.

Larger angle valves, commonly called poppit valves, are also available for applications where gate valves

are cost prohibitive. They are typically differentially pumped, O-ring sealed, and pneumatically actuated.

They are generally available in aluminum and mild steel. Flange sizes range from 4” to 48” ID. Most use

ASA type flanges. These large angle valves are commonly used on extremely large coating machines.

Angle valves are sold rebuilt with a 90 day warranty. Please check our website at www.ptbsales.com for

current availability and contact our sales department to ensure the angle valve is configured properly for

your application.

Angle valve rebuild service includes:

• Replace seals.




• Leak test.


CANGLE VALVES 72

VAT

MKS

HVA

HVA

Model Flange Construction Actuation

200-150MSB 23/4” CF stainless steel pneumatic

161-0103-2 KF-25 stainless steel pneumatic

132-0200 KF-50 stainless steel pneumatic

VAT


Series 24 ISO-63, 80, 100 aluminum air

Series 26 KF-16, 25, 40, 50 aluminum air

28332-GE21 23/4” CF stainless steel air

26140-GE21 6” CF stainless steel air

26328-KA11 KF-25 aluminum air

26328-KE11 KF-25 stainless steel air

26332-KA71 KF-40 aluminum air

F28-70313 KF-40 stainless steel air

24140-QA41 ISO-100 aluminum air

MKS


151-0016K KF-16 stainless steel pneumatic




LPV-40-N1-COVS KF-40 stainless steel pneumatic

LPV-50-TK-COKS KF-50 stainless steel pneumatic

153-1063P ISO-63 stainless steel pneumatic

155-0100P ISO-100 stainless steel pneumatic

163-1063P-24VDC ISO-200 stainless steel pneumatic

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73 ANGLE VALVES

AGILENT/VARIAN

EDWARDS

HUNTINGTON

Agilent /Varian


NW25H/O 3/4” pipe brass hand

1254-3/4 3/4” pipe brass air

NW16H/O KF-25 stainless steel hand

NW16A/O KF-25 aluminum air

1252-85265-326 15/8” pipe brass air

951-5013 23/4” CF stainless steel hand

951-5090 23/4” CF stainless steel air

NW40H/O KF-40 stainless steel hand



Edwards


283-41-V2 KF-16 aluminum pneumatic

PV16MKS-ST/ST KF-16 aluminum pneumatic

287-12-B3 KF-25 aluminum pneumatic



PV40EKS KF-40 aluminum pneumatic

Huntington


EV-073 KF-16 stainless steel pneumatic

EV-100-SF KF-16 stainless steel pneumatic

PV-0370-SF KF-16 stainless steel pneumatic

EVI-150 23/4” CF stainless steel pneumatic

PV-150 23/4” CF stainless steel pneumatic

PV-150-SF KF-40 stainless steel pneumatic

PV-250-SF ISO-63 stainless steel pneumatic

C

74

MDC

NOR-CAL/V-TEX

SMC

ANGLE VALVES

MDC


KIV-075-P KF-16 stainless steel pneumatic

KAV-050-SP KF-16 stainless steel pneumatic

KAV-100 KF-25 stainless steel pneumatic

KIV-100-P KF-25 stainless steel pneumatic

KAV-100-P KF-25 stainless steel pneumatic

AV-150M-P 23/4” CF stainless steel pneumatic

IV-150-P 23/4” CF stainless steel pneumatic

KAV-150-P KF-40 stainless steel pneumatic

LAV-250-PAA ISO-63 stainless steel pneumatic

KAV-600-P ISO-160 stainless steel pneumatic

Nor-Cal /V-Tex


XLAV-16G-M9BA-5LZ KF-16 aluminum pneumatic

XLAV-40 KF-40 aluminum pneumatic

AIVP-2002-NWB KF-50 aluminum pneumatic

ESVP-1502-NW KF-40 aluminum pneumatic

ESVP-2002-NWB KF-50 aluminum pneumatic

ESVP-2502-CF 41/2” CF stainless steel pneumatic

SMC


XLH-16 KF-16 aluminum pneumatic

XLAV-16G KF-16 aluminum pneumatic

XLC-25 KF-25 aluminum pneumatic

XLAV-40G KF-40 aluminum pneumatic

XLA-80 KF-80 aluminum pneumatic

XLA-100 KF-100 aluminum pneumatic

XLA-160DA-F9BA KF-160 aluminum pneumatic

• Flange type

• Actuation method

• Automatic or manual pressure control

• Internal clearance

Throttle Valves

Throttle valves are conductance plates and often work in conjunction with a gate valve. They are normally

used in etching or sputtering systems where a process gas is introduced into the process chamber, and

pumping speed and throughput need to be controlled. These valves can be louvered plates, rotating

plates or servostepper gate valves.

Throttle valves are sold rebuilt with a 90 day warranty. Please check our website at www.ptbsales.com for

current availability and contact our sales department to ensure the throttle valve is configured properly for

your application.

Throttle valve rebuild service includes:

• Replace seals.




• Leak test.


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76

VAT

MKS

EDWARDS

THROTTLE VALVES

VAT


Series 17 ISO-63 stainless steel servo stepper

Series 61 6” ASA stainless steel servo stepper

64046-CE48 10” CF stainless steel stepper motor

64248-UE52 12” CF stainless steel stepper motor

64250-CE52 320 CF stainless steel stepper motor

64250-UE52 320 CF stainless steel stepper motor

MKS


153D-14690 KF-40 stainless steel servo stepper

253B-11020 KF-40 stainless steel servo stepper

683A-2040 KF-40 stainless steel servo stepper

653B-2-50-2 KF-50 stainless steel servo stepper

153D-60-63-2 ISO-63 stainless steel servo stepper

253B-11328 ISO-63 stainless steel servo stepper

253B-3-80-2 ISO-80 stainless steel servo stepper



253A-6-160-2 ISO-160 stainless steel servo stepper


653B-14728 41/2” CF stainless steel servo stepper

653B-16251 8” CF stainless steel servo stepper

253A-6-6-2 6” ASA stainless steel servo stepper

Edwards


1850 ISO-250 stainless steel servo stepper

250-05B ISO-250 stainless steel servo stepper

Throttle Valve Controllers

Throttle valve controllers are used to control individual valves to adjust pumping speed throughput. These

throttle valve controllers can also accept data from measuring devices to automatically control process

chamber pressures.

System Valve Controllers

System valve controllers are easy-to-use centrally located vacuum system controllers. They allow

automatic and manual control of all valves typically used in a vacuum system. Many include interlock

capability to prevent improper operation.

Many OEM valve controllers are specific to a particular system; PTB Sales carries remanufactured

controllers as exact replacements. If no replacements are available, we can repair your controller.

Controllers are sold repaired and come with a 90 day warranty. Please check our website at www.

ptbsales.com for current availability and contact our sales department to ensure the controller is

configured properly for your application.

Asset Management







C

System Valve Controllers

Models

Agilent/Varian system valve controllers

Temescal system valve controllers

CHA system valve controllers

CPA and D & W system valve controllers

CVC system valve controllers

78

THROTTLE VALVE CONTROLLERS

SYSTEM VALVE CONTROLLERS

THROTTLE & SYSTEM VALVE CONTROLLERS

Throttle Valve Controllers

Manufacturer Model Features

MKS 146A/B/C Controls MKS throttle valves, MFCs and pressure devices

MKS 152 Controls MKS throttle valves, MFCs and pressure devices

MKS 246/B Controls MKS throttle valves, MFCs and pressure devices

MKS 247B/C Controls MKS throttle valves, MFCs and pressure devices

MKS 250B/C/E Controls MKS throttle valves, MFCs and pressure devices

MKS 252A/C Controls MKS throttle valves, MFCs and pressure devices


MKS 651C Controls MKS throttle valves, MFCs and pressure devices


VAT PM-2 Series 61 butterfly valve control, remote interface only

VAT PM-3 Series 61 butterfly valve control, local and remote interface

VAT PM-4 Series 64 gate valve control, remote interface only

VAT PM-5 Series 64 gate valve control, local and remote interface

VAT PM-6 Series 65 pendulum valve control, remote interface only

VAT PM-7 Series 65 pendulum valve control, local and remote interface

VAT PM-7E Series 65 pendulum valve control, remote interface only




• Number of I/Os

• Co-deposition

Deposition Rate Monitors

Deposition rate monitors measure rate and final thickness for physical vapor deposition processes. They

measure extremely thin films of material by using an in situ oscillating crystal sensor. The frequency of

the oscillating crystal changes as the deposited material builds up on the crystal. Deposition monitors

convert the change of frequency into rate and final thickness. Films and rates are measured in

angstroms. Some programming is required to compensate for the location of the sensor relative to the

substrate being coated and the type of material deposited.

Deposition controllers have all the capabilities of a deposition monitor plus added control. Depending on

the number of I/Os it can control power generators from ramp up to cool down, shutters, fixture rotation,

E-gun rotation and other equipment. Some have co-deposition capabilities and process program storage.

Monitors and controllers come with a 90 day warranty. Call PTB Sales to help you determine which

controller is right for your application. Oscillators sold separately.

C

80DEPOSITION RATE MONITORS

OERLIKON LEYBOLD

MAXTEK

SYCON

TEMESCAL

Oerlikon Leybold

Model Description

IC-6000 Controller, 8 process layers / 4 processes / 3 I/Os

IC-4 Controller

IC-5 Controller, co-dep, 250 process layers / 50

processes / 28 I/Os

XMS-1 Rate monitor

XMS-3 Rate monitor, 3 process layers / 1 process / 3 I/Os

XTC Rate monitor, 2 process layers / 1 process / 2 I/Os

XTM Rate monitor

XTM/2 Rate monitor

Maxtek

Model Description

MDC-360 The current model that is able to control up to four

single or multi-pocket sources, control and interface

with up to four single, dual or multi-crystal sensors.

It has up to 99 process layers, 999 layer definitions,

16 I/Os and 32 complete material definitions, a list

of material and system parameters including mul-

tiple rate ramps. It is fully programable with 2.5 to

10 MHz sensor crystal support.

Temescal

Model Description

FDC-8000 Thin film deposition controller that provides auto-

matic control of single or multi-layer film deposition

in either a production or development environment.

Sycon

Model Description

STM-100 Precision mass and film thickness measurement

instrument for use in thin film deposition processes

and other quartz crystal microbalance applications.

STC-200 Utilizes the time tested 6 MHz quartz crystal as the

sensor device. It’s CRT display allows the clear pre-

sentation of data and deposition status. Both

numeric and graphical data are used. The Run Time

display is the main operating display. All the criti-

cal process information is shown on this display. A

graphic portion of the screen allows either rate, rate

deviation or deposition power to be displayed.




Thin Film Systems

In addition to pump refurbishment and component integration we also buy and sell system cores for:

• Vapor deposition

• Lithography

• MEMS

• Interconnect

• Transistor

PTB Sales carries a selection of inspection equipment. Profilometers are used to measure step profiles

of metal films on a substrate. This type of measurement is a destructive process. Probers are used for

analysis and characterization of wafers during production and in quality control.

We carry various wafer handling robots, elevators and factory interface equipment.

Lower your costs without affecting the deposition performance by having a backup. The listed systems

give an idea of the breadth of our offerings.

Asset Management





C

82THIN FILM SYSTEMS

Vacuum Systems

Applied Materials AMAT Endura PVD chamber

Applied Materials Centura 5200/5300

Applied Materials Precision 5000 (P5000)

Balzers BAK 1350 C

Centrotherm E 1200 HT 260-3 furnace

CHA Mark 50

CHA SE-1000

CHA SE-600

CHA Vacuum deposition system 18” glass bell jar

Cooks Vacuum CVE 301

CVC 601 sputtering system w/ elect. towers

Denton Integrity 26 system: 26” wide, 38” high, 30” deep chamber

Edwards Auto 306

Grieve CLD-500 cleanroom oven system

Innotec VS24C sputter system

Ion Tech ITAVS system & chamber

KDF 603 sputter system

March Instruments Jupiter III reactive ion etcher: O2, CF4

MRC 822 sputter sphere

MRC 903 sputter system

MRL Cyclone 1224, two tube 300mm horizontal furnace

Novellus Concept 2 Dual Altus mainframe

Nuvac Galiso MRP-201 ELC hot gas sweep

Oerlikon Leybold 1100 A evaporator

Oerlikon Leybold deposition system

VACUUM SYSTEMS

Oxford ion beam deposition system

Packard 9200 hydrogen generator

Perkin-Elmer 4410 sputter system

Perkin-Elmer Lambda 900

Plasma-Therm 790 PECVD system

Plasma-Therm System VII

SFI Endeavor 8600

Sonic Mill AP10-HCV

SPI evaporator system with Vacu Prep II

Stokes vacuum bakeout system

Technics EMS Hummer Hu VI SEM sample sputtering system

Technics PE IIA system

Technics PE 500 II plasma cleaning system

Temescal BJD-2400

Temescal BJD-1800

Temescal FC-1800 E-beam system

Temescal FCE-3200

Varian 980-1111

Varian 3117 turbo pump option

Varian 3120 horizontal chamber

Veeco 776

YES R1 plasma cleaner

Xiron RC600M

We also carry baseplates and reducers for custom system configurations.

Process Equipment




CTHIN FILM SYSTEMS83

BROOKS AUTOMATION

GENMARK AUTOMATION

ASYST

KENSINGTON

RORZE

YASKAWA

Brooks Automation

Model Description

FX-3000 Factory interface

GX-5000 Factory interface

MagnaTran 7 Vacuum robot

MagnaTran 8 Vacuum robot

Reliance Atmospheric robot

VacuTran 5 Atmospheric robot

Series 8 Robot controller

002-8700-01 Wafer load port



Hybridge-OC200 Wafer load port

Fixload 6 Wafer load port

Fixload 25 Wafer load port

Genmark Automation

Model Description

Gencobot 4P (GB4P) Vacuum robot

Gencobot 7S (GB7S) Vacuum robot

Gencobot 8/3L (GB8/3L) Vacuum robot

Gencobot 8-MT (GB8-MT) Vacuum robot

Large Series Robot controller

Small Series Robot controller

L2P86R5GP Robot controller

S08RP Robot controller

S08R5GP.D Robot controller

Remote Pre-Aligner RPA, robot add-on

Kensington

Model Description

25-3700-1425-05 Vacuum robot

25-3700-1725-50 Vacuum robot

25-3780-6050-00 Vacuum robot

35-3700-1725-50 Vacuum robot

4000C-7/D Servo positioning controller

YASKAWA

Model Description

XU-RC400M-A00 Vacuum robot

XU-AT152L-C10 Wafer load port

RC/ELC1 Robot controller

Semistar-M TL1515 Wafer load port

Wafer Handling Robots & Controllers

ASYST

Model Description

IsoPort Wafer load port

VersaPort 2200 Wafer load port

RORZE

Model Description

RR701L90-Z20-011 Vacuum robot

RR717L1521-3A6-211-1 Vacuum robot

CTHIN FILM SYSTEMS 84

VEECO

ELECTROGLAS

KLA TENCOR

MICROMANIPULATOR

RUCKER & KOLLS

OTHER EQUIPMENT

Profilometers & Probers

Veeco

Model Description

Dektak IIA CRT automatic control

Dektak III PC automatic control

Dektak 8 PC automatic control

Dektak V200Si PC stand alone unit

FPP-5000 Automatic calculation and display of sheet

or slice resistivity, V/I, metallization thick-

ness, and P-N type. Automatic geometric

correction using two-probe configuration

technique minimizes errors due to varia-

tion in probe tip spacing.

Electroglas

Model Description

1034X 3-6” wafer prober

2001X 3-6” automatic wafer prober

4085X 4-8” automatic wafer prober

KLA Tencor

Model Description

Alphastep 100 Manual control (no CRT)

Alphastep 200 CRT automatic control

FT-530e Film thickness mapping system

P-1 Long Scan CRT automatic control

P-12 Long Scan CRT automatic control

SurfScan CRT automatic control

Micromanipulator

Model Description

MM6100 An economical analytical probe station for

wafers or packaged devices. Fast X-Y

stage movement controls allows 5” wafers

(6” optional) to be scanned. Conversa-

tion from a wafer prober to a packaged

device prober or hot/cold stage (and back

again) can be accomplished using the op-

tional socket stage adapter. The vacuum

stage is permanently planarized at the fac-

tory, so no adjustments are needed when

it is replaced.

Other Equipment

PTB often receives equipment not related directly to the vacuum

industry. We often purchase equipment in lots and as a result we end

up with equipment not in our primary business. We offer these items at

significantly discounted prices. Typical items in this category are:

Oscilloscopes Power tubes

Analyzers Microwave wave guides

Machine tools Electronic test equipment

Amplifiers Polishing equipment

Ovens Capacitors

Variacs

Rucker & Kolls

Model Microscope Description

RK 250 Stereo Zoom 3” w/probe card

RK 260 Stereo Zoom 4” w/probe card

RK 680 Series Micro Zoom 5–6” semi-auto

All probers have vacuum or magnetic platents.

Schreiber Chillers

Why invest in a Schreiber chiller? Because it pays for itself! When you calculate the difference between

the cost of electricity compared to water, you realize that a chiller pays for itself in a short period of time.

Moreover it provides solid protection for your processing equipment 24 hours a day, 7 days a week.

It also helps reduce the number of rejected parts while increasing the number of parts produced. A

Schreiber chiller is a self-sustaining source of properly chilled water, and maintains the required load.

Its continuous closed loop system is contaminate free and constructed with non-ferrous components.

By recycling the water, a significant reduction in water usage is made possible. The proper chiller must

be matched to one’s load requirements. An undersized chiller will always be a problem and will never

properly cool the process equipment.

The following equation can be used to help calculate the load requirements:

BTU = Constant (weight of water) x GPM x Temperature Differential

Multiply the fluid flow (GPM) by 500. Multiply the result by the temperature differential or rise (return

water temp. minus the input temp.). Divide the result by 12,000 and you have the required rating.

Chiller Applications:

• Hydraulic cooling

• Inducted heating systems

• Laser cooling equipment

• Plasma cutting

• Plastics

• Process equipment

• Seam welders

• Spot welders

• Load requirements

• Air or water cooling

• Options

C

86 SCHREIBER CHILLERS

SCHREIBER CHILLERS

CHILLER OPTIONS

Schreiber Chillers

Model Capacity BTU/hr Water Pump GPM

50 1/2 ton 6,000 1/2 hp 20

100 1 ton 12,000 1/2 hp 20

150 11/2 ton 18,000 1/2 hp 20

200 2 ton 24,000 1 hp 20

300 3 ton 36,000 1 hp 20

400 4 ton 48,000 2 hp 20

500 5 ton 60,000 2 hp 20

750 71/2 ton 90,000 2 hp 20

1000 10 ton 120,000 3 hp 20

1001 10 ton 120,000 3 hp 20

1250 121/2 ton 150,000 3 hp 20

1500 15 ton 180,000 5 hp 20

2000 20 ton 240,000 5 hp 20

2500 25 ton 300,000 5 hp 20

Schreiber Engineering touts its chillers to be the best of US manufacture, and perhaps the world. Schreiber chillers cool water to the ARI national rating

standard of 44°F at an ambient temperature of 95°F, unlike some chiller manufacturers whose specifications call for 50°F or higher.

Chiller Options

Option Description Applicable Models

Automatic water level control Automatically maintains water level of reservoir All models

Back flow control kit Prevents backflow when chiller is off All models

Casters Swivel 31/2 casters with brake lock All models

Digital electronic controls Digital controls for compressor, water pump and high temp alarm Option in model 50-400

Electronic remote control unit Return water filter, includes two cartridges All models

Low water level warning light Activates by means of a float switch All models

Discharge pressure gauge Indicates water pressure and mounts on water discharge line Summit series

Manual bypass Typically used for low flow requirements All models

Pumps A variety available All models

Inland Vacuum Oils & Greases

PTB Sales sells Inland Vacuum virgin fluids. Please call for current pricing, specification sheets and

MSDs for all of the items listed. Call PTB Sales to see what fluid or grease will be best for your application.

Mechanical Pump Fluids

By offering Inland Vacuum products, PTB Sales offers a complete line of mechanical pump fluids

for all pump types and applications. Inland’s mechanical pump fluids are vacuum distilled paraffinic

hydrocarbons containing no aromatics or viscosity improvers that are lost during filtration. Compared to

undistilled vacuum pump fluids, Inland’s pure vacuum distilled mechanical pump fluids provide excellent

lubrication, oxidation resistance, lower vapor pressure, and four to 10 times longer fluid life. Inland’s

stringent quality control procedures guarantee a product that is recommended by major vacuum pump

manufacturers. Inland also has a line of Fomblin PFPE fluids and Halovac inert vacuum pump fluids.

There is great value in using the proper mechanical pump oil.

We have found that when users changed to an oil more suited to their application, they accrued the

following benefits:

• Reduced pumping times.

• Longer oil service life.

• Less total maintenance cost.

• Higher yields on reclamation of diffusion pump fluids.

Diffusion Pump Fluids

The ideal diffusion pump fluid should be thermally stable, non-volatile, chemically inert and non-toxic.

Real diffusion pump fluids, on the other hand, represent compromises between these properties; no one

fluid does it all. PTB Sales offers a broad range of Inland vacuum pump fluids, including hydrocarbon,

inert PFPE, polyphenyl ether and silicone fluids for a wide range of applications. The benefits of selecting

the proper fluid include:

• Use of the most cost-effective fluid for a given application.

• Better pumping speed.

• Reduced maintenance.

• Increased reliability.

C

88INLAND VACUUM OILS & GREASES

MECHANICAL PUMP FLUIDS


Mechanical Pump Fluids Description Application

Inland TW & HVTW • Longest lasting hydrocarbon • Low vapor pressure • Nitride deposition ion • Plasma etch

• Ideal for corrosive • USP grade • LPCVD • Ion implant

• Replaces Fomblin and Krytox in many applications • Recommended for mechanical and piston pumps

Inland 19 • Ideal for non-corrosive • Reduced backstreaming • Mass spectrometers • UHV systems

• Hydrocarbon fluid • Much longer fluid life • Electron microscopes • Freeze dry systems

• Molecularly distilled • Excellent vapor pressure

Invoil 20 • Double distilled hydrocarbon • Extended fluid life • Plasma systems • LPCVD

• High resistance to corrosives • Reduced backstreaming • Plasma etch • Metallization

• Recommended for mechanical, diffusion and turbo pumps

Inland 21 • Hydrocarbon fluid with additives • For corrosive applications • Thin film sputtering • Leak detection

• Increased fluid life • Low vapor pressure • Freeze dry • EB welders

• Resist oxidation and decomposition

Inland 33 & 35 • Hydrocarbon fluid • High thermal stability • Metallization • UHV systems

• Corrosive service • Reduced backstreaming • Chemical pumping • Mass spectrometer

• Additive package • Oxidation resistance

Inland 43 • Our least expensive hydrocarbon, • Custom blended from • TV tubes • Chemical pumping

for use where large volumes of advanced feedstocks • Distillation • Packaging

fluids are required • Ideal for rotary vane pumps • EB welders

Inland 45 & 45Z • Synthetic hydrocarbon fluids • Low vapor pressure • Mass spectrometer • UHV systems

• High thermal stability • Ease at cold start • Thin film sputtering • Leak detection

• Works with Buna-N, Neoprene and Viton seals • Electron microscopes

Inland 77, 87 & 97 • General use hydrocarbon fluids • Ideal for piston pumps • Furnaces • Boosters

• High viscosity • Non-corrosive applications • EB welders • Metallization

• Excellent sealing and lubrication properties

Inland 98 & 99 • Inland 98 synthetic hydrocarbon • Low vapor pressure • Applications involving liquid ring pumps

for chemical resistance • Increased fluid life

• Inland 99 hydrocarbon base fluid • Less required maintenance

CINLAND VACUUM OILS & GREASES

MECHANICAL PUMP FLUIDS

DIFFUSION PUMP FLUIDS

89


Mechanical Pump Fluids Description Application

Inland 220, 300 & 550 • Phosphate fluids • Fire resistant • Oxidation resistance • High thermal stability

• Good thermal stability • Inexpensive alternative to • Lower cost option than inert • High flash point

• Oxidation resistance inert fluids fluids for many applications

Halovac Inert • Inert fluids • Extended fluid life • Plasma etch • Chemical pumping

• Safe for oxygen service • Resists corrosive acids • Oxygen pumping (Lewis acids)

• Suitable for vane and piston mechanical pumps

Fomblin YL-Vac Inert • Non-flammable • Resists corrosive gasses • Semiconductors • LPCVD

• Safe for oxygen service • Low vapor pressure • Chemical pumping • Reactive ion etch

• Good radiation stability • Extended service life (Lewis acids) • Plasma etch

• Chemical inertness • High dielectric strength

Fomblin YL-Vac RP Inert • Inert fluid with antitrust additive • Less maintenance • Semiconductors • LPCVD

• Less or no corrosion • Increased lubricant • Chemical pumping • Reactive ion etch

• Cleaner vacuum operation properties (Lewis acids) • Plasma etch

Fomblin SV Inert • Inert fluids • Excellent viscosity index • Semiconductors • LPCVD

• Virtual zero backstreaming • Extreme inertness • Chemical pumping • Reactive ion etch

• Good lubricant properties (Lewis acids) • Plasma etch


Diffusion Pump Fluids Description Application

Invoil & Invoil S • Designed for leak detectors • Low pressure maintained • Mass spectrometer • Distillation systems

• Ultimate pressure below 3x10-6 Torr for long operating periods • Leak detectors • Electron microscopes

Invoil 20 • Double distilled hydrocarbon fluid • Reduced backstream • Thin film sputtering • Metallization

• High resistance to corrosive attack • Recommended for • Furnaces • Mass spectrometer

• Low vapor pressure mechanical, diffusion and turbo pumps

CINLAND VACUUM OILS & GREASES 90




Invoil 30 • High decomposition resistance • High viscosity • Metallizaing • Sputtering

• Double distilled hydrocarbon fluid • Highly stable against • Optical coatings • Metallurgy

oxidation • Microelectric coatings

Invoil 37 • Ester based fluid • Specifically designed for • Thin film sputtering • EB welders

• High oxidation resistance vacuum booster diffusion • TV tubes • Metallization

• Quick pumpdown pumps and large ring jet

• High auto ignition temperature booster pumps

Invoil 40 • Double distilled hydrocarbon fluid • Designed to handle high • Metallurgy • Furnaces

• Designed specifically for temperature and gas loads

metallurgical applications

Invoil 44 • Hydrocarbon fluid • Excellent vapor pressure • Vapor booster • Metallization

• Quick pumpdown • Designed for use in

• High resistance to oxidation booster diffusion pumps

Invoil 46 • Combines properties of polyphenyl • Non-toxic, non-corrosive • CRT evacuation • Vacuum metallurgy

ether and silicone fluids • Good with elastomer seals • Optical coatings • Leak detection

• Low ultimate pressure, 10-8 Torr • Synthetic fluid • Evaporation • Mass spectrometry

• Sputtering

Santovac 5 & 5P Ultra • Polyphenyl ethers • Excellent thermal stability • Laboratory • Optical coatings

• Ultimate pressure, 10-10 Torr • High tolerance to pressure • Analytical • Space simulation chamber

• Lowest backstreaming bursts • Research operation • Vacuum production

Invoil 940 • Silicone based fluid • Oxidation and explosion • Vacuum coatings • Thin film sputtering

• Thermal stability • Quick pumpdown • Metallurgy • EB welders

• Superior vapor pressure • Replacement for Dow

Corning 704

Invoil 702 • Silicone based fluid • Quick pumpdown • TV tubes • Metallization

• Resistance to oxidation • Thermal stability • EB welders



TURBO PUMP FLUIDS

GALDEN HEAT TRANSFER FLUIDS

VACUUM GREASES & WAXES

91

Galden Heat Transfer Fluids

HT-70

HT-90

HT-110

HT-135

HT-170

Turbo Pump Fluids

Invoil 20

20 Ultra

Invoil S

Inlube

TP500

TP501

Vacuum Greases & Waxes

Excellin 1

Excellin 2

Excellin 3

Yvac 3

RT-15



Invoil 704 • Silicone based fluid • Thermal stability • Vacuum coatings • Thin film sputtering

• Superior vapor pressure • Quick pumpdown • Metallurgy • EB welders

• Resistant to oxidation

Invoil 705 • Silicone based fluid • Little or no backstreaming • UHV systems • Surface analysis

• Extremely low vapor pressure • Ultra high, ultra clean • TV tubes • Mass spectrometer

vacuum

Fomblin YH-Vac Inert • Inert fluid • O2, F2, UF4 compatible • Scanning electron and • Particle acceleration

• Non-flammable • Chemical inertness transmission microscopes • Ion implantation

• Mass spectrometer • Plasma and vapor

deposition

Galden Heat Transfer Fluids

HT-200

HT-230

HT-250

HT-270

Vacuum Greases & Waxes

UT-18

OT-20

Apiezon H

Apiezon L

Apiezon M

Apiezon N

Apiezon T

AP-100

AP-101

DC-976

Inseal

Wax W40

Wax W100

Wax W

Apiezon Sealing Compound Q


VACUUM PUMP FLUID CAPACITY CHART

Vacuum Pump Fluid Capacity Chart

Model PFPE Quarts

Adixen/Alcatel

2002A/B/BB 1 0.37

2004A 2 0.75

2005/C 2 0.78

2008A/AC 2 1.0

2010/C 2 0.90

2012A/AC 2 0.85

2015/C 2 0.90

2020A/CP 2 0.85

2030/2030C 4 2.0

2030C w/ filter 7 2.8

2033/C/CP 6 3.8

2060/C 11 5.5

2063/C/CP 14 7.1

2100A/AC 19 9.0

RSV150 1 0.42

RSV300 2 0.75

RSV500 2 0.75

RSV600 2 0.75

RSV1000 3 1.5

Edwards

E2M1 1 0.35

E2M2 2 0.60

E2M5 2 0.60

E2M8 2 1.0

E2M12 2 1.0

E2M18 3 1.25

Model PFPE Quarts

Edwards

E2M40 7 4.25

E2M80 12 6.6

EH250/F 4 2.0

EH500/F 4 1.9

EH500A/AF 5 2.1

EH1200/F 9 4.4

DP80 2 0.75

DP180 3 1.2

Oerlikon Leybold

D2A/AC 1 0.50

D4A/AC 2 0.75

D4B 2 0.85

D8A/AC 2 1.0

D8B 2 0.95

D16A/AC 3 1.25

D16B/BCS 2 1.1

D25B/BCS 3 1.5

D16BCS w/CFS 5 2.2

D25BCS w/CFS 5 2.6

D30A/AC 7 3.5

D60/D90A/AC 8 4.0

S60A/AC 6 3.0

D40B/BCS 6 2.6

D40BCS w/CFS 12 5.4

D65/BCS 7 3.4

D65BCS w/CFS 12 6.1


OIL CROSS REFERENCE CHART

93

Oil Cross Reference Chart

Inland Adixen Stokes Edwards Oerlikon Varian Kinney

Inland 15 101

Inland 19 100/119 V Lube J Supergrade A HE-175 GP Type A

Invoil 20 200 V Lube L 20 HE-200 CS

19 Ultra Supergrade 19



Inland 21 104

Inland 23 OCR

Inland 25 HE-100 LT

Inland 33 121 HE-125FG

Inland 43 15 HE-125 Type L/AX

Invoil 44 AP-201

Inland 45 & 45Z 45 HE-275

Invoil 46 Neovac SY

Invoil 48 Neovac SX

Inland 51 POE

Inland 55 HE-600

Inland 70 HE-700

Inland 77 102 V Lube B 16 HE-150 KV-100

Inland 87 V Lube G

Invoil 90 Diffen Light & Med

Inland 97 V Lube H

Inland 99 & 99S LR

Inland 220 Kinlube 220

Inland 300 Fyrquel 300

Inland TW 300 V Lube T TW HE-400

Inland TP500 HE-500


OIL CROSS REFERENCE CHART

INLAND VACUUM OIL SALES

Oil Cross Reference Chart

Inland Adixen Stokes Edwards Oerlikon Varian Kinney

Inland 500 S500 Oil

Inland 270 HE-270

Invoil Octoil

Invoil 702 DC-702

Invoil 704/940 DC-704 Mcghan Nusil D7040

Invoil 705x DC-705 Mcghan Nusil D7050

Santovac 5 Santovac 5 HE-300 Santovac 5

Fomblin 06/6 Fomblin 06/6 HE-1400

Fomblin 14/6 Kryotox 1514 HE-1600

Fomblin 25/6 Kryotox 1525 HE-2500

Inseal Kinseal

Inland Vacuum Oil Sales

Southern California Distributor

By offering Inland Vacuum oil, PTB Sales offers a complete line of fluids for all pump types and applications. Prices are subject to change. Please call for

current pricing and to see what fluid or grease will be best for your application.

Some of our oils allow you to incorporate the same fluid in both high vacuum and mechanical pumping units. This advantage allows one to establish a

homogeneous system which eliminates those problems generally associated with the cross contamination of dissimilar fluids. Some of these oils have the

added benefit of reclaimability, reducing total costs and eliminating the disposal problem.




CINDEX

INDEX BY MANUFACTURER

95

Index by Manufacturer

Adixen/Alcatel ................................... 25, 26, 30, 32, 36, 44, 48, 50, 64

Advanced Energy ............................................................ 12, 54, 56, 57

Ametek-Sorensen ........................................................................ 55, 56

ANEST IWATA ............................................................................. 25, 28

Applied Materials .............................................................................. 84

ASYST .............................................................................................. 85

Brooks Automation ............................................................................ 85

Centrotherm ...................................................................................... 84

CHA ............................................................................................ 78, 84

Comdel ....................................................................................... 12, 58

Commonwealth ................................................................................. 56

CPA .................................................................................................. 78

CTI ................................................................. 3, 4, 5, 6, 19, 20, 22, 66

CVC ...................................................................................... 66, 78, 84

Denton .............................................................................................. 84

Douglas ............................................................................................ 66

EBARA ........................................................................... 25, 26, 45, 50

Edwards ........ 10, 11, 25, 26, 28, 30, 35, 36, 38, 45, 50, 68, 73, 76, 84

Electroglas ........................................................................................ 86

Genmark Automation ........................................................................ 85

Granville-Phillips ......................................................................... 40, 80

Grieve ............................................................................................... 84

HiTek Power ................................................................................ 12, 56

Huntington ........................................................................................ 73

HVA ................................................................................ 11, 68, 72, 73

Inland Vacuum .......................................................... 89, 90, 91, 92, 93

Innotec ............................................................................................. 84

Ion Tech ............................................................................................ 84

Kensington ........................................................................................ 85

Kinney/Tuthill .............................................................................. 34, 36

KLA Tencor ....................................................................................... 86

March Instruments ............................................................................ 84

Maxtek .............................................................................................. 82

MDC ........................................................................................... 69, 74

Micromanipulator .............................................................................. 86

MKS ENI ..................................... 11, 12, 54, 58, 59, 60, 72, 76, 78, 80

MRC ................................................................................................. 84

MRL ..................................................................................................... 84

Nor-Cal/V-Tex ........................................................................................ 74

Novellus ............................................................................................... 84

Oerlilkon Leybold .................................. 25, 28, 31, 34, 36, 45, 50, 64, 82

Osaka ............................................................................................. 46, 50

Oxford .................................................................................................. 84

Packard ................................................................................................ 84

Perkin-Elmer ............................................................................... 9, 41, 84

Pfeiffer .......................................................................... 44, 45, 48, 52, 84

Plasma-Therm ...................................................................................... 84

Polycold .......................................................................................... 23, 24

RFPP .............................................................................................. 12, 60

RORZE ................................................................................................. 85

Rucker & Kolls ...................................................................................... 86

Schreiber Chillers ............................................................................ 87, 88

Seiko Seiki ...................................................................................... 46, 51

Shimadzu ....................................................................................... 46, 50

SMC ..................................................................................................... 74

Sonic Mill .............................................................................................. 84

Stokes ...................................................................................... 34, 36, 84

Sycon ................................................................................................... 82

Technics ............................................................................................... 84

Telemark ............................................................................................... 62

Temescal ................................................................ 62, 69, 78, 80, 82, 84

Thermovac ........................................................................................... 66

Varian ........... 9, 25, 28, 38, 40, 42, 46, 48, 51, 63, 64, 69, 73, 78, 80, 84

VAT ............................................................................... 11, 70, 72, 76, 78

Veeco ....................................................................................... 64, 84, 86

VRC ...................................................................................................... 69

Watlow .................................................................................................. 66

Welch ................................................................................................... 32

Xiron ..................................................................................................... 84

YASKAWA ............................................................................................. 85

YES ...................................................................................................... 84

CNOTES 96

NOTES

C

Map of our Locations

Foothill Blvd

Arrow Hwy

Irwindale Ave

Gladstone St

Todd Ave

Mountain View Circle

Azusa Ave/H

wy 39

10th St

Vernon Ave

210

Sierra M

adre Ave

San Gabriel Ave

Huntington Dr

Main Facility

1331 Mountain View Circle

Azusa, CA 91702

Power Generator Facility

5352 Irwindale Ave. Suite C

Irwindale, CA 91706

Cryogenic Pump Facility

916 10th St.

Azusa, CA 91702

Contact us for further directions. We are located in Azusa and Irwindale, in southern California near Los Angeles, 10 miles east of Pasadena, where 210 and

605 freeways meet.

605

210

Los Angeles

PasadenaAzusa

N

Main Facility

Power Generator Facility

Cryogenic Pump Facility

Azusa

Irwindale

MAP OF OUR LOCATIONS

MAP OF OUR LOCATIONS

97

C

Asset Management with Global Reach

• We have sales people in several states to be able to meet at your facility to see in person what solutions are a match.

• We have partnerships with overseas companies to meet your international needs.

• We purchase used equipment and offer credit for trade in cores.

• We can evaluate your excess and obsolete equipment over the phone or in person.

Terms & Conditions

• PTB Sales offers standard payment terms upon credit approval; we offer outside financing/leasing.

• PTB Sales accepts Visa, Mastercard, American Express credit cards as well as PayPal.

• As with all used equipment all used items listed are subject to prior sale.

• Consult the website for specific terms and conditions.

Contact

Phone: 626-334-0500

Fax: 626-334-2151

Toll Free: 866-332-0500

Press 1 for sales, 3 for purchasing your equipment.

Customer Service: [email protected]

Inside Sales: [email protected]

Shipping: [email protected]

Purchasing: [email protected]

Warranty Information

• Warranty covers all parts and labor only.

• Additional charges may apply for missing parts or hard part damage.

• All shipping charges to be borne by customer.

• Consult the website for specific warranty levels.

CONTACT 98

CONTACT

ASSET MANAGEMENT WITH GLOBAL REACH

TERMS & CONDITIONS

WARRANTY INFORMATION

mailto:[email protected]




products & services catalog - ptb salesptb-sales.com/xtra/ptbcatalog.pdf · repairs &...

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