a More than Moore Deposition technology

Arjen Janssens CEO SolMateS bv

arjen.janssens@solmates.nl www.solmates.nl

General introduction

Pulsed Laser Deposition

About SolMateS

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• Paul van Attekum

SVP strategic business dev. ASML

• Rob Santilli

CEO AML Applied Microengineering Ltd.

Board of directors

• Job Elders

Senior VP Strategic Alliance

• Nard Sintenie

Partner at Twente Technology Fund

CTO

Matthijn Dekkers PhD.

CEO Arjen Janssens MSc. MBA

COO

Kristiaan Böhm MSc.

• PPM Oost

Venture capital fund 100+ investments

• Twente Technology Fund

Independent venture capital fund, specialised in

new technological developments

Investors

SolMateS

Sales Director

Jan Visser

Process R&D

Hardware R&D

Production & Service

Marketing & Sales

Strategy ,Finance,

stakeholders

• Based in Enschede Netherlands • Own demo lab cleanroom class 10000 • Access to MESA+ lab • Strong academic and prof. network • Agents in Japan, China & Korea

Definition Pulsed Laser Deposition (PLD) • PLD is a method of applying thin films to various substrates by means of an UV

Excimer laser

• PLD is somewhat similar to Sputtering except that the material plasma is generated with an excimer laser instead of accelerated ions

• Due to the ultra high energy laser spot, all target material enlightened is transformed into a plasma, achieving one-to-one transfer of target stoichiometry to substrate

• The instantaneous laser shot generates an ultra dense (super saturated) plasma with very high energy species which provides the capability to produce films that are far from the equilibrium phase

• This in combination with a reactive background gas, makes PLD very suitable for the growth of (Crystaline) Complex Metal Oxides on silicon

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Experimental experience on <1” Experience on waferscale

Shortlist of Materials 3

Pulsed laser deposition has many advantages, especially for the “More than Moore” materials

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High and stable piezo electric properties

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e31 and d31 coefficients across wafer

200 nm

Cross section SEM;

High density PZT

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Tool enables high flexibility on choice of piezo compound, electrodes and substrates

20 30 40 500

500

1000

PZ

T(2

00

)

PZ

T(1

10

)

Inte

nsity (

co

un

ts)

2-Theta (o)

PZ

T(1

00

)

• Predominanty (001) textured PZT on • TiN electrodes • Oxide electrodes (LNO, SRO) • Au electrodes • Mo (Molybdenum

• Glass • Quartz • Titanium metal

High quality PZT demonstrated on alternative substrates…..

….and PZT demonstrated on alternative electrodes……

…..alternative PZT compounds demonstrated

• PMN-PT • Nb doped PZT • Fe doped PZT • PLZT • …..

PZT on Quartz

PZT on TiN

• Stable oxides on III-V

• Doped Complex oxides on Si

• High mobility channel materials

• Transparent conductive oxides

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Roadmap

Lead free PZT

Cubic Epitaxial template on Si Ionic conductors on membranes

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SolMateS serving world leading MEMS parties

Shipped Feb. 2013

shipped Jul 2013

See press release for more details

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