Role of Nano-technology for Integrated Power Electronics System

Hiromichi Ohashi

Energy Technology Research InstituteNational Institute of

Advanced Industrial Science and Technology

Outline • Background : More electrified society

– Power consumption and CO2 emission– Horizon of more electrified society

• Electronics enabling efficient power use– Power electronics as Negawatt– Introduction of Negawatt cost

• Technology scheme of next generation power electronics• Technology scheme of next generation power electronics

• Role of Nano-technology for Integrated PE system

• Conclusion

This presentation is based on the 200７ and 2008 NEDO survey researches 「Green electronics technologies for energy saving society toward 2050」

電力消費／電力化率

2,000

2,500

3,000

3,500

4,000

電力

消費

[PJ]

15.0%

20.0%

25.0%

電力

化率

電力消費

電力化率

Elec

tric

ity c

onsu

mpt

ion

[Pet

aJo

ule]

Electrified ratio of the final energy

Trend of electricity consumption in Japan

Electrifiedratio

Electricity consumption

Demand for electrical power

• Electricity is clean, safe and convenient energy source

Demand for electricity is continuously increasing with economical growth

• Increase in ICT power consumption

Back ground of the demand

0

500

1,000

1,500

2,000

1965 68 71 74 77 80 83 86 89 92 95 98 2001 2004

電力

消費

[PJ]

0.0%

5.0%

10.0% 電力

化率

図 2-2 日本の電力消費と電力化率

Elec

tric

ity c

onsu

mpt

ion

[

Electrified ratio of the final energy

IEA data also assums that world demandfor electricity will be double by 2030

• Increase in ICT power consumption

• More electrical power will besupplied by renewable energy

• Expansion of heat pumping usage

• EV, HEV, PHEV

Long Term Energy Vision of Japan by METI

30,000

40,000

50,000

PJ ＃１＃１,＃２：Energy saving amount

Others: Created energy by correcting thermal energy with

• Increase of electrical power ratio in final energy

Basic strategy

・Promotion of renewable energy introduction ・Big amount of energy saving

50% reduction in CO2 emission by 2050

10,000

20,000

30,000

0

OthersWater power

Nuclear

Renewableenergy

Coal

＠2050

Oil &Gas

Others

＃１

＃２

Primary(1st ) Energy

Final (2nd)energy

Oil &Gas

Electricity

＠2100

＃２

Primary(1st ) Energy

Final (2nd)energy

Others

Renewableenergy

Others

Water power

Nuclear

Coal

Electricity

correcting thermal energy with heat pumping and so on

Water power

Coal

Oil &Gas

Coal

Primary(1st ) Energy

Final (2nd)energy

＠2000

Nuclear

Oil &Gas

Electricity

What we can do for more electrified society

2

2.5

3

3.5

4

4.5

emis

sion

/ 1

M$

GD

P （

Mt)

Russia

India

China

More electrified society make possible sustainable development

0

0.5

1

1.5

0 1 2 3

KoreaJapan

UK

USAGermany

France

Power consumption/GDP ( Twhr/B$)

CO2

emis

sion

India

Brazil

② Total energy saving as whole in a society

Two issues to achieve more electrified society① Reduction of power consumption /person

Kuznets Barrier

Kuznets Barrier

Kuznets Barrier

emis

sion

/per

son Kuznets Barrier

Elec

tric

ity

cons

umpt

ion/

pers

on

Power consumption /Person of advanced countries is still high

Issues of advanced countriesin energy saving

Kuznets barrier peak can be madelower by introducing high efficient

Income

Kuznets Barrier

CO

2 em

issi

on /p

erso

n

Kuznets Barrier

Kuznets Barrier

Elec

tric

ity

cons

umpt

ion/

pers

on

Low income people Rich people

lower by introducing high efficient PE apparatus ubiquitously withaffordable price for lower incomepeople

Key factor of energy saving by PE

Efficiency Improvement × Prevalence

(cost reduction)

Transport efficiency（Tanker、Railway） Transmission

efficiencyGeneration efficiency

99% 39% 95% PowerconverterUPS

Air conditioner

Data center case

Power electronics as Negawatt

5.1~5.9 Total efficiency of this section :36.6%

Crude oil

converter

CPU

88~93% 68~75%

Initial inputenergy

Final energyusage

1.0

40～50％ of inputOil can be used for for anther power

generation

3.0 95% 95%Efficiency

improvement 1.0Total efficiency of this section :36.6%

Amount of energy saving by PE =Electrical power generation

NegaWatt Proposed byAmory Lovins in 1989.

Source: Enerdata 2006

toe 2000

2500

3000

(“Negajoule; energy saving calculated on the basis of 1971 energy intensity)

Nega-joulesBiomass

Primary energy demand of EUsupplied mainly by Nega-joule

Target:20% improvement

by 2020

出所：EEAP6（Action Plan for Energy Efficiency）：Realizing the PotentialCommission of the European Communities, COM(2006)545 final,2006

1971

1973

1975

1977

1979

1981

1983

1985

1987

1989

1991

1993

1995

1997

1999

2001

2003

2005

Meg

a-to

e

500

1000

1500BiomassOther electricityNuclear

GasOilCoal

Negawatt cost definition as index for wide use of PE technology

(kWhr) timeOperation enegy Savedcost Runningcost System costNegawatt

×+

=

Negawatt cost comparison

Payback time of power electronics equipments is sufficiently compete with another renewable energy

PE Ｎｅｇａ Ｗａｔｔ cost 10.6 US-cent/kWh（2.8kW Air-conditioner）

• Coal Steam GN. (500MW) 4.3 US-cent/kWh

• PV(5MW) 41.6 US-cent/kWh

• PV(300W) 56.1 US-cent/kWh

• Wind turbine (100MW) 5.8 US-cent/kWh

• Wind turbine(100kW) 19.7 US-cent/kWh

PE system integration as means of Negawatt cost down

Weight

Volume

Power loss(Efficiency) Cost HEV

1

10

100 OPD=Output power/power converter volume

HVDC

2011/6/1 AIST H .Ohashi （SEMI Forｕm 2011）

Power density : Po/Volume [W/cm3]

Watt cost：Po/cost[W/$]

0.01

Same analogy with VLSI prevalence Bit density, Bit cost

0.1

1

1970

1980

1990

2000 2010 20201990

Inverter forair conditioner

Board type S.R.

Package type S.R.General purpose

inverter

H. Ohashi JAPP、73 N0.１2 （2004)1571.H. Ohashi IEEJ、122 No.3（２００２）168

Power density has been increasing by 3 of figure in the last 40 years

10kWRectifier

ECPE

Integrated PE system is now actually prevailing in market

Bip. M: 270M$IGBT M:900M$IPM:780M$

Eupec/InfineonToshiba high power

converter unit

TOYOTAPower control

UnitECPE

High power density power module

Integrated PE system

IPM:780M$Integrated M:200M$

56%

10%

9%5% 4%

Market growth :25％

Market growth:19％

Market data：ISPSD’08 by T. Stockmeier

Motor Drive

Traction

ConsumerRenewable

Automobile

Definition of Next generation Power Electronics

Power

Electronicsan interdisciplinary technology

Nanomaterials

ICTMicro-

electronics

Control

Next GenerationPower Electronics

Electronics(Power

Conversion)

(Green Electronics)

an interdisciplinary technologyintegral of disciplines of electricalengineering; PE, microelectronics,electronics material and ICT forefficient and effective useof electricity.

By H. Ohashi Proceeding of EPE 2010

Renewable energy

Power systemTechnology scheme for Next Generation PE

DistributedPower supply

Application tech.domain

PE system for

Powerstation

DistributedPower supply

HVDCHVAC Smart grid network

Seed tech. domain

Next Generation Power Electronics

More Si

More than Si

BeyondSi

domainPE system for

home and office

PE system for Green IT

PE system forsocial infrastructure

PC

Digital

IntelligentOffice

apparatus

PE system for Green IT

Electronics function diversity

Riko HP

HP HP

Sharp HP

.iPodWearable

ICT terminal

Digitalappliance

NTT-F HP

DataCenter

High endserver

function diversity

ミニグリッド

Various electronic functionsAre Installed in side of

ICT instrumentsPower management

inside of ICT instrumentsis becoming more complex

PE system for home and office

Renewable energy system

Next generation power supply system

Airconditioner

Motor

Other14.7%

Heat

ＩＴ4.7%

Next generationmotor system

Next generation lightingLow power loss flat display

FED Survey report (2008)2005（1T kWh）

Super HFHeat pump system

Boiler withH.P. system

Motor57.3%

Lighting13.6%

Heat9.5%

PE system for social infrastructure

BEMS/HEMANew grid

Micro-grid, Smart grid

Next generationMotor drive for

industry

Modal shift

Driving force• Higher power density• Lower watt cost

Approach

• Standardized compacthigh power converter

Seed

• High voltage low loss power device• high frequency magnetic • material s

More than Silicon

Next gen.IGBT

More

Sili

con

Heterogeneous Integration TechnologiesBre

akth

rough in S

i Pow

er

PENow

Technology map for green electronics

High reliability

Integrated DesignTechnology

3D. PKG Reliability physics

HyperCooling

Magneticmaterial

Dielectric material and Insulator

Interconnectionmaterial

UbiquitousPower

ElectronicsBeyond Silicon

IGBT

More

Sili

con

Next gen.MOSFET

SiC GaN

DiamondHetero-epi.

wafer

AdvancedCMOS

Large φthin wafer

Bre

akth

rough in S

i Pow

er

Integrated power device

AC SwitchPE system

Design platform

SensorNew circuittopology

Control

PowerSiP/SoC

SOIPassive

component

１００

１０００

resi

stan

ce [m

Ωcm

2 ］Trend of advanced power devices

Comparison in on-resistance

: LMOS: SJ MOS

: IGBT (incremental) Silicon

SiCMOSBJT

Source: International Symposium on Power Devices & ICs (2006-2009)

y x( )

x１０ １００ １０００ １００００

0.1

1

１０

Spec

ific

On-

resi

stan

ce [m

Ωcm

Break-down voltage [v]

Si-IGBT Calculated limitation

SiC-SIT JFET

BJT

ＳＩＪＦＥＴ

Normally on/offGaN

GaNHEMT/MOS/SBD

Wide band-gap semiconductorPlatform (SiC:2015～、GaN:2015 ～Diamond:2025～）

SiCMOS/SIT/SBD

SiCIGBT/PiN

DiamondFET/ BJT/PiN/Field

emitter

Silicon platform (～2030）

Hybrid pair platform of Si-switchingdevice and SiC diode (2013～2035）

Road map of advanced power devices

PowerIntegratedCircuit area

HEMT/MOS/SBD

Blocking voltage [v]1 10 100 1k 10k

CMOS, MOSFET (SJ)/SBD, PiN

IGBT, Thyristor/PiN

Si-MOS(SJ)SiC-SBD

Si-IGBTSiC-SBD, SiC-PiN

Si

SiSilicon MOSFET (CMOS)

GaAs-FET

Approaches for Si-Ultimate IGBT

p＋

Narrow & Deep TrenchIdeal IGBT performanceby active layer flat carrierdistribution

Field Stop (n+)

Thin n－wafer

(Active layer)

Transparent p-emitter

•Several tens nm trench technology• Reduction of atomic scale complex defect•Perfect quality large size thin wafer

Monolithic GaN power system covers most of PE application of Home and office apparatuses

GaN power ICs High power (> 3kW) High speed switching (>10

MHz) High temperature operation

(>200 C)

Several hundreds Si Power ICs

Home grid by one-chip GaN

GaN conveter

Si/SiC inverter

Smart Grid

Passive components will be next significant issuesto be solved for Negawatt cost reduction

Drastic improvements of inductor, capacitor and transformer are expected in performance, volume, size and familiarity with semiconductor processing by Nano material technologies

Nano-material Technologies

semiconductor processing by Nano material technologies

Ferro-magnetic coupled particles

Magnetics Dielectric materials

From layer to3-D structure

Inter chip connectionby wireless transmission

Spin torque oscillator（By Prof. Sahashi ）

Conclusion• Highly electrified society can make possible low carbonated

society, keeping sustainable growth of society

• Power electronics as Nega watt makes great contribution for energy saving, by reducing Negawatt cost.

• Power electronics system integration is key approach for efficiency • Power electronics system integration is key approach for efficiency improvement and prevalence of PE electronics apparatus with Negawatt cost reduction.

• The emerging next generation power electronics is making up of ME, Nano- materials, ICT and conventional PE technologies

• Most of issues in the next generation PE will be mainly broken through limitation of semiconductor devices, passive components

We well come all of people who are involved in the Nano-technology to the next generation power Electronics world!