EMD Performance Materials is a business of Merck KGaA, Darmstadt, Germany.

Savethe DaTe:

We are participating in the Virtual Sessions - Don’t miss it!

5:45pm - 7:00pm

Monday, June 29

Poster Session: Atomic Layer Deposition of Niobium Nitride Thin Film with NbCl5 and NH3Dr. Moo-Sung Kim, Merck Performance Materials Korea – Poster Code: AF-MoP20

Advancing Semiconductors

ALD/ALE 2020

5:45pm - 7:00pmPoster Session: Understanding Fundamental Structure and Reactivity Relationships of Aminosilanes Based onTheir Sticking CoefficientDr. Haripin Chandra, EMD Performance Materials – Poster Code: AF-MoP41

5:45pm - 7:00pmPoster Session: Atomic Layer Deposition of Yttrium Oxide Using a Liquid Yttrium Precursor‚ Y-08Ming Fang, EMD Performance Materials – Poster Code: AF-MoP38

5:45pm - 7:00pmPoster Session: Thermal ALD Growth of Ir and IrOx Films Using (MeCp)Ir(COD) and OxygenDr. Guo Liu, EMD Performance Materials – Poster Code: EM-MoP12

EMD Performance Materials is a business of Merck KGaA, Darmstadt, Germany.

Savethe DaTe:

We are participating in the Virtual Sessions - Don’t miss it!

1:45pm - 2:00pm

Tuesday, June 30

Oral Presentation: Deposition of Inherently Ferroelectric Films by ALD Using ZrD-04 and HfD-04Dr. Vijay K. Narasimhan, Intermolecular – Presentation Code: AA-WeA04

Advancing Semiconductors

ALD/ALE 2020

5:30pm - 7:00pmPoster Session: Area Selective Atomic Layer Deposition of Molybdenum Films on Nanoscale Metaland Metal Nitride PatternsSe-Won Lee, Merck Performance Materials Korea - Poster Code: AS-TuP13

5:30pm - 7:00pmPoster Session: Mechanism of Leakage Variation with Aspect Ratio in ALD High-k ZrO2 and HZO DielectricsMartin McBriarty, Intermolecular - Poster Code: AA-TuP70

11:45am - 12:00pmOral Presentation: Super-Conformal ALD of Metallic Mo Films by Simultaneous Deposition and EtchJean-Sebastien Lehn, EMD Performance Materials – Presentation Code: LI3-WeM14

Wednesday, July 1