semi networking day italy group semi networkin… · semi networking day italy ... led │mems...

20th September 2012

proven technology for a new world

SEMI Networking Day Italy

© 2011 OEM Group, Inc. proprietary. The information herein is the property of OEM Group and is for informational purposes only.

Systems │Upgrades │ Services │ Spares │ Foundry

LED │MEMS │Wireless │Energy Harvesting │WLP │ Data Storage │Logic

Who we are

OEM Group Today

OEM Group is a global company that serves both traditional

semiconductor fabs, as well as emerging technologies with

focus on MEMS and LED applications. Fully-integrated

solutions, world-class service, and applications development–

–from one cost-effective partner.

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OEM Today - A Global Company

Gilbert, AZ

OEM Group Headquarters

Salzburg, Germany

Yokohama, Japan

OEM Group Japan KK

Hsinchu, Taiwan

OEM Group Taiwan

Sales Software engineering Field Service Parts Distribution

EUROPE

Sales Field Service Parts Distribution Assembly Repair Service System remanufacturing

ASIA

Sales Tool Manufacturing/remanufacturing Foundry Services Design Engineering Applications Lab Field Service Parts Distribution R&D

NORTH AMERICA

Coopersburg. PA


OEM Group Today Global Manufacturing Global Service Global Spare Part Distribution Global Procurement Proven Technology

― LEGENDS™: 11 “best-in-class” product lines ― Install base of 33,000+ supported systems

Proprietary IP – Patent portfolio from eight game-changing

companies ― 30+ years experience in each

Organization – 250 employees in 10 countries – Combined team of the brightest, most

dedicated experts from each acquisition – The faces you remember, with new resources

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LEGENDS™: A proven and game-changing portfolio

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LEGENDS™ intellectual property owned

exclusively by OEM Group

Serving both mature and emerging-

markets

Custom equipment design

Software licensing, application

development

Productivity enhancements

Process and field support

Global service infrastructure

http://expo.semi.org/West2010nN/Public/Booth.aspx?IndexInList=70&Upgrade=&FromPage=nz_ALExhibitorSearch.aspx&BoothID=163341&Task=ProductsDetails&PRODID=6427


Etch, PVD

900-Series Etch

6500-Series Etch

SFI Endeavor™ PVD

AMS™ PVD

AGHeatpulse

4100

8108

8800

RTP Etch

AutoEtch

490 Oxide

590 Poly

690 Metal

790 Tungsten

PVD

Eclipse

Star

Mark II

Mark IV

Ion implant

120XP

160XP

350D

E-Series

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Product Options


Semitool manual-batch process equipment is now part of our Chemical Process Technology™ (CPT) group.

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Product Options (Cont.ed)

Capable of meeting any wet

application demand, CAD-

designed Cintillio™ products

break new technological

ground in 25/50 wafer batch

process. – Convenient side access

– Innovative and proprietary

Enhanced Spray Technology™

Up to six rows of nozzles ensures

high throughput reliable wafer surface

wetting

Our Newest

From left: Cintillio™ Spray Solvent Tool (SST), SST Dual Chamber, Spray Ozone Tool (SOT),

and Spray Acid Tool (SAT)

First time in North America and Asia

Semitool was the world leader in wet-chemical applications for 30+ years


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Classics™: recognized equipment, sustained and optimized

for today’s applications and productivity demands

Leveraging our own OEM experience to help customers with their equipment needs

For 12+ years, OEM Group has been the world leader in remanufactured equipment

≤ 200mm, repurposed for new applications

Customer-driven innovation

Sustaining support and development

Commercially-creative solutions


Etch

Rainbow

TCP

Alliance

CVD

Concept One

Concept Two

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Strip, Lite Etch, CVD

Aspen II Diode

Aspen II Triode

Aspen II ICP

CVD, PVD, Etch, RTP, Epi

P5000

Centura 5200

Endura 5500

Mirra

Product Options


Global Manufacturing Facilities

Headquarters: Phoenix, Arizona

Coopersburg, Pennsylvania


Eclipse Mark IV PVD

Endeavor AT PVD

Tegal 6500 etch

AG Heatpulse

Tegal 980

Foundry services / applications development

Application Lab Capabilities

Cross-platform capable

Extended Capabilities AMAT P5000 SiO2 and Si3N4 CVD (2 percent SiH4/H2)

Cintillio™ SST/SAT

Applications Development Results-oriented solutions Fully integrated across all our systems/platforms

Demonstrated in our global Apps Labs

Academic and government R&D partnerships

A complete collaborative network

Field-proven technology DNA from world-class pedigrees


Global Service and Support

On-Site Technical Support

Man On-Site Contracts

Telephone Support

Platform Training

System Repurposing, De-installation,

and Reinstallation

Upgrades Services

System Size Conversions

Preventative Maintenance

Audit Services with diagnostic reports

to assess overall system health


Systems │Upgrades │ Services │ Spares │ Foundry

LED │MEMS │Wireless │Energy Harvesting │WLP │ Data Storage │Logic

Mission

OEM Group Today

By acquiring branded “best-in-class” equipment / IP, and

offering it globally from a centralized source, OEM Group will

continue to serve both traditional semiconductor fabs, as well

as emerging technologies. Enhanced fully-integrated

solutions, world-class service, and applications development–

–from one cost-effective partner.

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Thank you!

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