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Semiconductor manufacturing vs. Industry 4.0: Is the glass half-full or half-empty? Philippe Vialletelle Senior Member of Technical Staff STMicroelectronics Crolles

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Semiconductor manufacturing vs. Industry 4.0:

Is the glass half-full or half-empty?

Philippe VialletelleSenior Member of Technical Staff – STMicroelectronics Crolles

The term "Industrie 4.0"

was revived used in 2011

at the Hannover Fair.

In October 2012 the Working Group on

Industry 4.0 presented a set of Industry

4.0 implementation recommendations

to the German federal government.

4th Industrial Revolution– Cyber-Physical Systems

– Internet of things

– Cloud computing

– Big Data

– Virtualization

– Augmented reality

– Additive manufacturing

Semiconductor Manufacturing

Source: IC Insights June 2014 Market Drivers report, 2016 edition

In the realm of High Volume…

In a Low Mix / High Volume context

– Few products

– Few technologies

– Numerous (identical) tools

Fab Type LMHV HMLV

(Litho) Tools ~160 15

Masks Levels ~40 45

ML per Tool 1 – 4 3 à 20

Tools per ML 4 - 16 1 à 5

Low Mix / High Volume

LMHV

Because size (scale) really matters…

In a High Mix / Low Volume context

– Several hundreds of products

– Typically 5 to 10 technological generations

– Smaller (heterogeneous) toolset

Fab Type LMHV HMLV

(Litho) Tools ~160 15 - 30

Masks Levels ~40 25 – 45

ML per Tool 1 – 4 10 – 30

Tools per ML 4 - 16 1 - 5

High Mix / Low Volume

HMLV

Mathematics are merciless

LMHV Low Mix / High Volume

High Mix / Low Volume

HMLV

Number of “identical”

Machines

Equipment Utilization Rate

Variability Factor

Flow Factor =

Average CT vs. Theoretical

And other industry players CLAIM it…

(source TSMC web site)

Tool Time & Efficiency Monitoring

• Wait Time Waste analysis

Very high granularity available for precise analysis of WTW

Capacity Planning

• We also developed some very nice

tools for production

& (finite) capacity planning

• It’s called OPERA

• And our capacity models are

updated based on statistics

extracted from ToTEM

An integrated environment with fully interfaced

tools, working on standardized data schemes

WIP Management• Priority Intervention Tool

• “Wippers” (SW + Human) Introduce new practices

• Dispatch rules Automate them

• Scheduling Optimize factory flows

Factory Automation

• AMHS

• Pre-routing

• Load balancing

• Simulation

Management of Crisis Situations

in a Large Unified AMHS of a Semiconductor Manufacturing Facility .

(Ndiaye M., Dauzère‐Pérès S., Yugma C., Rullière L, Lamiable G. 2016)

Best Student paper award ASMC‐2016

And this also stands true for process control!

• SPC

• FDC, APC

• Run to Run

• Virtual Metrology

• Predictive Maintenance

• Advanced analytics

• FDC fingerprint

• Smart OCAP

• …

The McKinsey Digital Compass

maps Industry 4.0 levers to the 8 main value drivers

Here, from the Alpswe have a different view

All industry players know that it takes time…

• To qualify the right (number of) equipment

• To update rules & procedures

• To adapt control system

Source: IC Insights June 2014 Market Drivers report, 2016 edition

Semiconductor manufacturing vs.

Industry 4.0: Is the glass half-full

or half-empty?

Source: EETimes

“Semiconductor manufacturing” vs. “Industry 4.0”

Half Full!

• Regarding work done

in SC Manufacturing

vs. other industries…

It’s for sure more

than half full!

IPHW, SW

ICcomponent

SubSystem

FinalProduct

OEMSystem Integrator

After Sale

Services

Brands,Retailers,Operators

Tier1Suppliers

Tier2Suppliers

Co

nsu

mer

Global supply chain

End-to-End engineering

Materials Technology

Solutions

Academics& Research Institutes

SW editors& Integrators

Challenge1: More stringent requirements in terms of traceability & data exploration

Challenge2: More flexibility & agility for factory infrastructure & control systems

Equipment Vendors

Equipment

Second stage challenges

• Global optimization

• Interoperability

• Traceability

• Complex decision making

• Advanced Diagnostic &

Prognostic

Fortunately, Maths are still there to help!

A lot of collaborative opportunities ahead!

• Regarding work done in SC

Manufacturing vs. other

industries…

It’s for sure more than half full!

• Regarding perspectives

and potential advances

well… let’s say there are

lots of exciting

opportunities ahead!

Semiconductor manufacturing vs. Industry 4.0:

Is the glass half-full or half-empty?

Philippe VialletelleSenior Member of Technical Staff – STMicroelectronics Crolles