2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Parylene microvalve

Presenter : Chia-Min Lin (9535811)

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Outline

Motivation Design concept / Fabrication process Results Summary Reference

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Motivation

As used in drug delivery a dualvalved device can more accurately deliver a dose and prevent overdelivery of medication when the fluidic pressure is higher than the regular range.

Such a configuration can also be fully integrated in lab-on-a-chip systems for refined flow regulation in life science analysis and research.

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Parylene deposition mechanism

Parylene C Parylene D Parylene N

Young’s modulus(GPa)

4 3.8 3.5

Melting point(℃)

290 380 420

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Generation #1

X.-Q. Wang et al., IEEE MEMS’99.

Operation mechanism

s-shape beam orifice

Fabrication process

smooth

PR

roughen

20μm

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Cont’dFabrication results Flow results

25 ml/min

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Generation #2

J. Xie et al., IEEE MEMS’01.

Operation mechanism Fabrication process

O2 plasma

NC

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Cont’dFabrication results Flow results

250 nl/min

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Generation #3

P. -J. Chen et al., JMEMS, 2007.

Design concept

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Cont’dFabrication process

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Cont’dFabrication results and test setup

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Cont’dTesting results

4.0 l/min

16 l/min

1.3 l/min

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Generation #4

P. –J. Chen et al., IEEE MEMS’07.

Design concept

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Cont’dFabrication process Fabrication results

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Cont’dTesting results

7 l/min

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Summary

G1 G2 G3 G3 G4

Valve type NO NC NO NC Floating disk

Cracking pressure(psi)

0.1 1 0.1 0.3 0

Breakdown pressure(psi)

87 30 25 25 44

Main structure material is parylene ,and the device is biocompatibility.

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Reference X. –Q. Wang, Q. –Lin, and Y. –C. Tai, ”A parylene micro chec

k valve,” 12th IEEE MEMS Conference, 1999, pp177-182. J. Xie, X. Yang, Q. X. Wang, and Y. –C. Tai, ”Surface microm

achined leakage proof parylene check valve,” 14th IEEE MEMS Conference, 2001, pp539-542.

P. –J. Chen, D. C. Rodger, E. M. Meng, M. S. Humayun, and Y. –C. Tai, ” Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation,” JMEMS, 16, pp223-231, 2007.

P. –J. Chen, and Y. –C. Tai, ”FLOATING-DISK PARYLENE MICRO CHECK VALVE,” 20th IEEE MEMS Conference, 2007, pp453-456.

2007/11/21 Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin

Thanks for your attention !