sensing | our worldmeptec.org/resources/1 - gemelli.pdf · bst/bud | may 2015 | © bosch sensortec...

BST/BUD | May 2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. 1 Bosch Sensortec

The future of MEMS sensors in our Connected World Marcellino Gemelli, Bosch Sensortec

Sensing | our World Motion, Humidity, Pressure, Temperature, Sound, Light

BST/BUD | May 2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights.

2 BST/BUD | May 2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights.

Bosch | The future of MEMS Sensors

Bosch Sensortec

Technological Background

The three waves of MEMS proliferation

From sensor signals to user experience

MEMS as enabler of new markets and applications

Tomorrow’s requirements and conclusions

Outline



Bosch Sensortec

Growth of very thick layers of polysilicon, “Epipoly”

High-precision and fast deep trench etching,

“Bosch DRIE-process”

Vapor phase etching for release of structures

Encapsulation for hermetical sealing

APSM process – exact vacuum cavities in silicon (Advanced Porous Silicon Micromachining)

FlipCore geomagnetic field sensing in a thin-film semiconductor process

6 Key technologies developed by Bosch



Bosch – the MEMS technology leader

Pioneering innovations Extensive MEMS IP portfolio with > 1000 patent families

Proven track record Bosch produced more than 5 billion sensors

Best products according to customers needs Bosch Sensortec is strongest growing company in Consumer

MEMS sensors

Bosch Sensortec


The Three Waves of MEMS Sensor Proliferation

Bosch Sensortec

1990 2000 2010 2020

1st wave

Automotive

3rd wave Internet of Things and Services (IoTS)

2nd wave Consumer Electronics

2015

6

First Adoption Wave – Automotive

Bosch Sensortec

More than 50 MEMS sensors in a car of today


MEMS Sensors for: Engine Management

Barometric Air Pressure BAP

Diesel particulate filter

Mass flow sensor …

Vehicle Dynamics Control Yaw rate sensor

High pressure sensor

IMU and low g sensors …

Safety Systems

Rollover sensor gyroscope

Occupant weight sensor iBolt

Pedestrian Contact Sensor (PCS)

Upfront Sensor (UFS)

Peripheral Pressure Sensor (PPS)

… Vehicle Dynamics Control

Safety Systems Engine Management


7

Second Adoption Wave – Consumer Electronics

Bosch Sensortec

First triaxial acceleration sensor

World’s smallest digital pressure sensor

World’s smallest digital acceleration sensor

Full portfolio of acceleration and pressure sensors

First 2x2 mm2 acceleration sensor

6-axis eCompass in 3x3 mm2

World’s smallest triaxial gyroscope in 3x3 mm2

Complete 6-14 bit acceleration sensor portfolio in 2x2 mm2

Smallest triaxial acceleration sensor in 1.2x1.5 mm2

9-axis system (incl. µController) in 5.2x3.8 mm2

Strongest growing consumer acceleration sensor company

2005 2006 2007 2008 2009 2010 2011 2012 2013 2014


World’s first integrated environmental unit

First IMU sub 1mA in 2.5x3 mm2




Bosch Sensortec

Smartphone tipping-point… Rome, Via Della Conciliazione 2005 Rome, Via Della Conciliazione 2013

Source: DPA / AP Sensors in mobile devices increased from 10 million in 2007 to 3.5 billion in 2012

World wide smart phone market exceeded 1 billion shipments in 2013

source: dpa/ap



Bosch Sensortec

Smart phone: our everyday’s companion

Smart phones : strongest driver of new MEMS sensor development today

Motion analysis Step counting Activity monitoring Power management

Pedestrian navigation Dead reckoning (heading & distance) Floor level tracking with altimeter Location based services

Position detection Portrait / landscape Upside down Free speech profile

User interface Gaming input Menu navigation Gesture recognition

10


Bosch Sensortec

MEMS: innovation drivers

Continuing shrinking of sensor footprint / size

and power consumption (e.g. accelerometer, IMU)

Size / power

Integration of multi-axis sensors + µC + SW in combo package

(e.g. motion / orientation)

Integration / µC + SW

Rise / emergence of novel sensor clusters

(e.g. environmental cluster T, p, H, …)

New measurands


MEMS technology is ready for more applications




Bosch Sensortec

Multitude of technologies combined with intelligent processing for application specific solutions

Sensor Data Fusion

Yaw rate

Acceleration

Magnetic field

Pressure

Temperature

Gas, Humidity

IMU

9

DoF

in

door

nav

igat

ion

envi

ronm

ent

Software

Processor

Connectivity

Multitude of applications

12

Third Adoption Wave – IoT

Bosch Sensortec

New Markets segmenting...out of Smart phone

New Market

New Market

New Market

Market

Higher Power Budget

Lower Power Budget

Wearable Devices (integrating sensors)

IoT Nodes (multiple sensors, µC and RF link)

IoT Tags (Sensor & RF-Link)

Smart Phone Sensors

Smart Switches (event type sensors)


Higher Integrated Functionality


13


Bosch Sensortec

Wellbeing

Fitness level Speed and style Calorie monitoring

Sports trainer for Running Swimming Golfing

Vital parameters Sleep monitoring Activity

classification (sitting / standing / walking / cycling / …)

Stress level detection

Fitness Context

User’s context In a meeting Outside Sitting and eating Transition from car

to walking -> find parking location

…


Comfort, Security, Health and Productivity


14


Bosch Sensortec

Connected smart, self-enabling sensor networks - integrated within one eco-system via Internet

Proprietary solutions within distributed networks


IoT - from monitoring to control

Today Tomorrow


15


Bosch Sensortec

IoT Sensors – senses of everyday commodities

Therefore you have to give the things new senses.

If you want to increase comfort, security, health, productivity, lifestyle… you have to create smart, interactive and sensitive systems.

BST/BUD | May 2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. BST/BUD | May 2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights.


From Sensor Signals to User Experience

Bosch Sensortec

Fusion of multiple sensor data creates new use cases and additional customer benefit.

Bosch Sensortec first published 2007 Solution in the high volume market since Nov 2011

Data fusion: more than the sum of its parts

+ Fast time

to first position

fix

pressure sensor

as altimeter


From Sensor Signals to User Experience

Bosch Sensortec

Indoor navigation Step counter and dynamic orientation sensor Path integration Pedestrian dead reckoning

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MEMS As Enabler of New Markets and Applications

Bosch Sensortec

BNO055 intelligently senses Absolute Orientation

Context awareness

Navigation Activity monitoring

Gaming Augmented Reality

Power management

Home automation

Logistics

First 9-axis sensor with µC + SW • 3-axis accelerometer • 3-axis gyroscope • 3-axis geomagnetic sensor • 32 bit µC Bosch Sensortec Sensor Data Fusion with optimized HW/SW Codesign • High accuracy 2° … 3° (static) • Low latency 20 ms • Robust to magnetic distortions System in Package (5.2 x 3.8 mm²)




Bosch Sensortec

Best overall offset, TCO and noise

figures

17% lower footprint than the next best competitor

70% less current

consumption than next best

competitor

BMI160 is the cutting edge IMU technology At the heart of sensor hubs




Bosch Sensortec

BHI160/BHA250 SmartHubs Ideal companions to Mobile and IoT devices Lowest power, Smallest Footprint Allows develops to create freely, focusing on application




Bosch Sensortec

BME280 – Integrated Environmental Unit world first in:

Humidity, Pressure and Temperature

Features

Tiny in size 2.5 x 2.5 mm²

Low power 15 µA @ 1.8 V

High accuracy tolerance ±3% rH

Fast response time τ = 1 s for humidity

High absolute accuracy ±1 hPa (typ.) for pressure

BNO055 plus a RF interface (WiFi, BT, etc.) is a key block of IoT based sensing Integrated Environmental Unit for Smart Phones, Wearables and IoT



Bosch Sensortec

Fast sequence in environmental sensing New combo sensors:

Sensing our World

2014

2013

2015

Quantify yourself Well-being recommendations Personalized environment Sport & fitness monitoring

Personalized control Environmental monitoring Personal weather forecast Home automation

Environmental measurement Pressure Humidity Temperature Gas

New drivers for new applications




Bosch Sensortec

Location based services Well-being recommendations

More advanced use-cases will drive next generation MEMS

Toda

y To

mor

row

System trends

Indoor position tracking Augmented reality

Activity classification Environmental monitoring

User Interface Gaming Image stabilisation


Bosch Sensortec

Bosch sensors can be found in every second smartphone worldwide today.

Conclusion

Modules with a multitude of sensors and integrated low power signal processing will change MEMS from the provision of raw data to meaningful data fusion output from sensor nodes for our connected world.

BST/BUD | May 2015 | © Bosch Sensortec GmbH 2015. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights. 25 Bosch Sensortec

Thank you! Disclaimer: With respect to any examples or hints given herein, any typical values stated herein and/or any information regarding the application of the device, Bosch Sensortec hereby disclaims any and all warranties and liabilities of any kind, including without limitation warranties of non-infringement of intellectual property rights or copyrights of any third party. The information given in this document shall in no event be regarded as a guarantee of conditions or characteristics. They are provided for illustrative purposes only and no evaluation regarding infringement of intellectual property rights or copyrights or regarding functionality, performance or error has been made.


sensing | our worldmeptec.org/resources/1 - gemelli.pdf · bst/bud | may 2015 | © bosch sensortec...

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