Slide # 1

ELCT 774: Advanced Semiconductor Characterization

Dr. Goutam Koley

Room 3A12, 777-3469, koley@engr.sc.edu

Lecture Hours: Mon & Wed 4.05 AM – 5.20 PMSWEARINGEN 2A18

Office Hours: By appointment only

Other information: To be posted on the website

Slide # 2

Course Information

Objective: To learn advanced semiconductor materials charcaterization techniques (special emphasis on nanoscale materials and their characterization)

Reference books: Semiconductor measurements and Instrumentation: W. R. Runyan and T. J. Shaffner, Second Edition, McGraw Hill, 1998. ISBN 0070576971

Semiconductor material and device characterization, Dieter K. schroder, 2nd Edition, John Wiley and Sons, New York, 1998, ISBN # 0471241393

Other notes and handouts will be given from time to time, or references posted on the course website

Slide # 3

Schedule and Grading

Grading: Midterm: 30 %Final: 30 %Project presentation and report: 40 %

Class: Aug 26 – Dec 4, 28 lecture days

Final Exam Week: Dec 9 - 16

Approximate Grades: A 90 - 100B+ 85 - 89B 80 - 84C+ 75 - 79 C 70 – 74

D+ 65 – 69 D 60 – 64 F <60

Slide # 4

Course Contents 1

Hall measurements and mobility (2) Optical characterization (2)

Photoluminescence Cathodoluminescence

Scanning probe microscopy (4) Atomic force microscopy Scanning tunneling microscopy

Scanning electron microscopy (2) Basic principles Electron beam induced current mapping Cathodoluminescence

Slide # 5

Course Contents 2 Transmission electron microscopy (2)

Modes of operation Scanning TEM Selective area diffraction

Auger Electron Spectroscopy Secondary Ion Mass Spectrometry Special characterization techniques for

nanoscale structures (3) Energy dispersive X-ray Spectroscopy Focused Ion Beam technique Raman spectroscopy Discussion on Graphene: the new nanomaterial

Slide # 6

Class schedule

• Lectures: 14 – 15 Classes

• Midterm: 1 Class

• Lab visits: 4 Classes (1 AFM, 1 SEM, 1 TEM, 1 Raman)

• Student Presentations: 8 Classes

• Final review: 1 Class

Note: A project report must be submitted by each of the students at the last day of classes (final review day)

Slide # 7

Project descriptions

• Projects must be related to Nano

• List of projects

1. Atomic force microscopy applications to Nanotechnology

2. Nanowire characterization using SEM micro-characterization (SEM, CL, EBIC, EDX)

3. Nanowire characterization using TEM micro-characterization (STEM, SAD, EDX)

Slide # 8

Project descriptions 2

5. Carrier Mobility/Hall effect in Graphene

6. Optical characterization of Nanostructures

7. Mechanical characterization of Nanostructures

8. Raman and EDX characterization of Graphene

9. Characterization of 2D materials beyond graphene

10. Characterization of Nanostructures using special AFM associated modes (surface potential, capacitance, current-voltage, etc.)

N.B. Please email me know your selected project topic latest by September 9

Slide # 9

Mobility 1

1. At high electric field, the velocity of electrons CANNOT increase linearly with voltage due to increased scattering from the lattice vibrations (electron loses the entire extra energy from electric field immediately)

2. At a particular electric field called the critical electric field, the mobility becomes almost zero (actually not defined anymore), and the velocity of the electrons become almost constant w.r.t. the electric field

En

Slope gives the mobility only at low electric field

Electron drift velocity saturates at high electric fields for Si.

is valid only at low field

• Mobility represents the ease of electrons and holes to flow through the crystal under an externally applied electric field.