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Fraunhofer Institute for Photonic Microsystems
Maria-Reiche-Strasse 2
01109 Dresden / Germany
Email: [email protected]
Web: www.ipms.fraunhofer.de
© Fraunhofer IPMS
Smart Photonic Systems for healthy and secure living
Dr. Michael Scholles Head of “Business Development & Strategy”
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 2 For internal use only
1992 Foundation of the Dresden part of the Fraunhofer Institute for Microelectronic Circuits and Systems (IMS)
2003 Foundation of the Fraunhofer Institute for Photonic Microsystems (IPMS)
2007 Opening of a new clean room 2011 Budget: 19.5 Mio € (9.7 Mio € by direct industrial commissions) Staff: 200 employees & scientific assistants
Fraunhofer IPMS at a glance
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 3 For internal use only
1500 m², class 10, industry-type (MES)
complete 6” Wafer line for CMOS & MEMS
R&D and fabrication
3 shift (5 x 24) operations
ISO 9001:2008 certification since 2003
Infrastructure
MEMS Technologies Dresden
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 4 For internal use only
Vision:
Fraunhofer IPMS is the international leading R&D service provider in the fields of Photonic Microsystems, Micro Systems Technologies, and Microsystems for Wireless Transmission.
Main Business Model:
Product Development
Full Value Chain:
R&D Prototyping Pilot Fabrication Volume Manufacturing
Customer driven
We offer MEMS foundry service
Business Model
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 5 For internal use only
Consulting service & feasibility studies
Simulation & design
Development of complete processes
Fabrication of demonstrators & prototypes
Characterization & Test
Pilot-Fabrication of small and medium volume
Fraunhofer IPMS offers services from R&D to fabrication
MEMS- Cleanroom •Department Engineering •Department Fabrication
MEMS scanner for: •Rotation& Translation •1D& 2D-scanner •Bar code Scanner •Projection displays •Optical path length modulator •…
Spatial Light Modulators
µMirror arrays for: •Microlithography •Mask writing systems •Piston type mirrors for phase shift for image correction •…
MEMS Foundry / External Customers
Active Micro Optical Components and
Systems
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 6 For internal use only
column lines m m+1 m+2 m+3
row line n-1
row line n
counter
electrode address
electrode
mirror
electrode
Spatial Light Modulators: Chip and Mirror architecture
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 7 For internal use only
Address- Electrode
Counter- Eletrode
Mirror- Electrode
Hinge
Mirror
counter
electrode address
electrode
mirror
electrode
1-Level Mirror
2-Level Mirror
Al-alloy mirrors alternative c-Si
Mirror architectures
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 8 For internal use only
Analog addressing DRAM-like architecture (analog storage cells)
200 x 240 pixel
40 µm pixel size
up to 1.0 µm stroke
mirror planarity < 10 nm RMS
Parallel programming of sub-arrays allows frame rates > 5 kHz
Phase-Shift Micro Mirror Arrays
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 9 For internal use only
Goal:
Real-Time Compensation of
Dynamic Wavefront
Distortions
Principle of AO image correction
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 10 For internal use only
Vision Correction of the Human Eye Objective measurement by
SHS wavefront sensing
RMS = 293 nm
RMS = 47 nm
Pupil: 5.4 mm
Correction of an average
complex eye aberration
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 11 For internal use only
SLM development and manufacturing led to extensive know-how in:
CMOS-MEMS integration
Surface micromachining
Sacrificial layer technology
Easy set-up for design and manufacturing of other (also non-photonic) MEMS
First example: CMUTs (Capacitive Micromachined Ultrasound Transducers)
Application know-how by key customers
Several medical applications of CMUTs
Exploitation of Technology Know-How
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 12 For internal use only
Micro Scanning Mirror Variants and Applications
1D rot.
translatory
2D rot.
Linear Scan
Grating
? Your Device
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 13 For internal use only
a) b) c) d)
diameter: 8 mm
glas fiber cover
glas fiber
(illumination)
MEMS scanner
optical
dome
MEMS scanner
substrate
Micro laser camera: Optical set-up
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 14 For internal use only
Source: Microvision
Scan-head: Ø 8 mm
SVGA resolution
full colour
frame rate: 30 Hz
112° x 84° optical scan
range
16 kHz / 1 kHz scan
frequency
Performance
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 15 For internal use only
Laser Micro Endoscope: Optical System Design
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 16 For internal use only
Microscope Tip diameter: 8mm
Image resolution: 200 x 200 pixels
Scan area: 3 mm x 3 mm
Lateral resolution: 15 µm per pixel
Frame rate: 20 Hz
Laser Micro Endoscope: Microscope Tip Assembly
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 17 For internal use only
SPECIFICATIONS
3D Fluorescence Microscope
17
■ Wavelength: λ = 488nm
■ Resolution: Δxy = 1.5μm
Δz = 3.0μm
■ Field of view: 600μm x 600μm
■ Objectiv: NA = 0.48
■ Size: 32cm x 20cm x 8cm
■ Weight: ~1.8kg
MEMS
Mirror
Kollimator
Mirror
Z-Shifter
Detector
Pinhole
Lens
Lens 2
Lens 1
Dichroic
Device
Objective
Mobile Authentification by Retina Scanning
M A R S
Cooperative Project adressing „Biometrics“ call of
R&D Program „Research for Civil Security“
Managed by VDI Technologiezentrum GmbH, Düsseldorf
Duration 1.1.2012 - 31.12.2014
Coordinated by M A R S Mobile Authentication by means of Retina Scanning
Project Goals
Enhanced methods for personal authentication
e-Banking
(e-Commerce)
Access to high security areas (airports, …)
Access to critical infrastructure und information
Security for private areas (Apartment, house, …)
Prevention of theft (cars, …)
…
Coordinated by M A R S Mobile Authentication by means of Retina Scanning
Biometric Modality: Blood vessels of human eye
„Retina Scanning“
Pattern of blood vessels as „finger print“
FAR = 1 : 1 Million with limited computing power
(mobile device !!)
Retina Scanning tamper-proof but non-invasive
Mobile device for retina scanning by MEMS optical
scanner of Fraunhofer IPMS (Image acquisition close
to the eye, Scanning through eye pupil)
Integration with Virtual Retinal Display (VRD) easily
possible in order to project information directly onto
the retina
VRD ensures cooperation of the user
Coordinated by M A R S Mobile Authentication by means of Retina Scanning
Simplified optical concept
Optics and required electronics will fit into mobile device
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 22 For internal use only
Fraunhofer IPMS business model:
Full value chain from R&D
to pilot fabrication
Customers have one partner for research, development, manufacturing
Several best practice examples with strategic key customers
Technologies:
Bulk micromachining
Surface micromachining
CMOS & „Active Silicon“
Summary
© Fraunhofer IPMS
Michael Scholles I July 12, 2012 I slide 23 For internal use only
THANK YOU FOR YOUR ATTENTION!
Michael Scholles; phone: +49-351-8823-201; email: [email protected]
PLEASE VISIT US AT BOOTH D20 !!