sugar: a mems simulation programbindel/present/2002-06-sun.pdfsugar: near-term development finish...
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SUGAR:A MEMS Simulation Program
David Bindel
UC Berkeley, CS Division
MSM 2002 SUGAR Tutorial – p.1/29
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SUGAR contributorsFaculty Grad students Undergrads
A. Agogino (ME) D. Bindel (CS) W. Kao (CS)
Z. Bai (Math/CS) J.V. Clark (AS&T) A. Kuo (EE)
J. Demmel (Math/CS) D. Garmire (CS) E. Zhu (CS)
S. Govindjee (CEE) B. Jamshidi (CEE)
M. Gu (Math) R. Kamalian (ME)
K.S.J. Pister (EE) S. Lakshmin (CS)
J. Nie (Math)
N. Zhou (ME)
MSM 2002 SUGAR Tutorial – p.2/29
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Overview
� Background, target applications, grand vision
� Simple cantilever beam example
� A bigger example: analysis of a micromirror
� Ongoing work: measurement feedback,synthesis, web-based simulation
MSM 2002 SUGAR Tutorial – p.3/29
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Levels of simulation
� Solve continuum equations (momentumconservation, Maxwell’s, etc.)
� Solve simplified equations of beam and platetheory (structural elements)
� Solve network equations (e.g. modified nodalanalysis in SPICE; Simulink models)
� These approaches are not mutually exclusive!
� Share similar software structures
MSM 2002 SUGAR Tutorial – p.4/29
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Where does SUGAR fit?
� Primarily simulates electromechanicalsystems
� Has element models at the structural andnetwork levels
� Provides a flexible language for devicedescription
� Performs static, frequency-response, modal,and (some) transient analysis
� Can build quick models that get high-levelbehavior
MSM 2002 SUGAR Tutorial – p.5/29
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Where does SUGAR fit?
� Freely available and open source
� www.sourceforge.net/project/mems
� sugar.millennium.berkeley.edu
� Useful for education and prototyping
� Building block for higher-level operations
� e.g. Design synthesis and optimization
� Part of work to “close design loop”
� Simulation (SUGAR)
� Measurement instruments
MSM 2002 SUGAR Tutorial – p.6/29
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SUGAR architecture
System assembly
Models
Solvers
Matlab Web Library
Static analysis
Transient analysis
Results
Netlist Steady−state, modal analysis
User interfaces(Matlab)Extension interfaces
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SUGAR: Recent evolution
� Early 01: SUGAR 2.0 released
� Summer 01: Initial involvement of SUGARgroup with Matisse
� Summer 01: Development of first publicversion of M&MEMS
� Fall 01: M&MEMS used for EE 245
� Winter 02: Initial version of SUGAR 3.0
� Winter 02: N. Zhou finished thesis (GAsynthesis of MEMS)
� Spring 02: SUGAR 3.0 public release
MSM 2002 SUGAR Tutorial – p.8/29
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SUGAR: Near-term development
� Finish non-Matlab SUGAR 3.0 version
� Rebuild M&MEMS with SUGAR 3.0
� Build optical measurement comparisonframework
� Finish several models in development (plates,improved electrostatics)
� Move “user” codes to SUGAR 3.0(e.g. simulated annealing synthesis code andMonte-Carlo based sensitivity analysis code)
MSM 2002 SUGAR Tutorial – p.9/29
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Running a simple analysisnet = cho_load(’cantilever.net’);cho_display(net);dq = cho_dc(net);cho_display(net, dq);dy = cho_dq_view(dq,net,’tip’,’y’)
� Load and display device description
� Analyze and display static displacement
� Get y-displacement of tip
MSM 2002 SUGAR Tutorial – p.10/29
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Deflected cantilever
MSM 2002 SUGAR Tutorial – p.11/29
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A bigger example
� Micromirror design due to Matt Last
� Model has roughly 11K degrees of freedomMSM 2002 SUGAR Tutorial – p.12/29
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Micromirror SEM
MSM 2002 SUGAR Tutorial – p.13/29
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Simulated frequency response
0 1000 2000 3000 4000 5000 6000 7000 8000 9000 1000040
60
80
100
120
140
Frequency (Hz)
Gai
n (d
B)
Bode plot
0 1000 2000 3000 4000 5000 6000 7000 8000 9000 10000−200
−100
0
100
200
Frequency (Hz)
phas
e(de
gree
)
MSM 2002 SUGAR Tutorial – p.14/29
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Measured frequency response
MSM 2002 SUGAR Tutorial – p.15/29
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First resonant mode
MSM 2002 SUGAR Tutorial – p.16/29
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Second resonant mode
MSM 2002 SUGAR Tutorial – p.17/29
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Third resonant mode
MSM 2002 SUGAR Tutorial – p.18/29
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Existing models
� Mechanical: anchor, beam2d, beam3d, f2d,f3d, rigid, constraint
� Electrical: L, R, C, Isrc, Vsrc, opamp, vcvs
� Coupled: comb2d, gap2dforce, gap3dforce
� Subnets: beam2de, beam3de, gap2de,gap3de
MSM 2002 SUGAR Tutorial – p.19/29
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Models under construction
� Plates
� Simple hinges and sliders
� Anisotropic beams
� Nonlinear beams
� Thermal circuit analogues
� Electrothermal and thermomechanical
MSM 2002 SUGAR Tutorial – p.20/29
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Future models
� Contact models
� Improved damping
� Wrappers around FEAP models
� Controllers
MSM 2002 SUGAR Tutorial – p.21/29
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Analyses
� Current
� Static equilibrium
� Steady-state frequency-response analysis
� Modal analysis
� Transient analysis (2.0)
� Future
� Sensitivity (various flavors)
� Bifurcation analysis
MSM 2002 SUGAR Tutorial – p.22/29
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Ongoing numerical work
� Have adopted standard sparse solverpackages for linear solves and modal analysis
� Reduced order modeling techniques (used formirror steady-state response analysis)
� Incorporating newest DAE solvers (IDA);parameter sensitivity for DAEs
� Bifurcation analysis of DAE systems
� CIS algorithm for large-scale bifurcationanalysis
� Dealing with multi-scale problems
� Building test case libraryMSM 2002 SUGAR Tutorial – p.23/29
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Closing the design loop
� Integrate measurement and simulationfacilities
� R. Muller, R. Kant, C. Rembe, M. Youngworking on measurements at UCB
� Other groups at CMU, MIT, Sarnoff
� Feedback measured data into simulation,design
� Compare simulation and reality
� Parameter extraction, sensitivity studies
� Make facilities available as a “virtual lab”
MSM 2002 SUGAR Tutorial – p.24/29
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M&MEMS: SUGAR on the Webhttp://sugar.millennium.berkeley.edu/
MSM 2002 SUGAR Tutorial – p.25/29
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M&MEMS
� Hosted on UCB Millennium cluster
� Used in Introduction to MEMS course, Fall2001
� Accounts available for outside users
� Currently offline while upgrading to SUGAR3.0
MSM 2002 SUGAR Tutorial – p.26/29
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Design synthesis and optimization
� Genetic algorithms to evolve new designs
� Also simulated annealing approach
� Specializing designs from a library
� N. Zhou, B. Zhu, A. Agogino, and K. Pister:“Evolutionary Synthesis of MEMS(Microelectronic Mechanical Systems)Design” (ANNIE 2001). First Runner-up forNovel Smart Engineering System DesignAward.
MSM 2002 SUGAR Tutorial – p.27/29
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Functional decomposition and GA
MSM 2002 SUGAR Tutorial – p.28/29
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Conclusion
� Web links
� bsac.eecs.berkeley.edu/˜cfm
� www.sourceforge.net/project/mems
� sugar.millennium.berkeley.edu
� SUGAR is actively used
� Educationally
� For prototyping and exploring
� As a testbed for larger projects
MSM 2002 SUGAR Tutorial – p.29/29