tes@inrim for simp - agenda (indico) · pisa 18/06/2019 simp meeting– tes@inrim m.rajteri 17/20...

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Pisa 18/06/2019 SIMP meeting TES@INRiM M.Rajteri 1/20 TES@INRIM for SIMP Strada delle Cacce 91 10135 Torino - Italy M. Rajteri Quantum Metrology and Nanotechnologies Division

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Page 1: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 1/20

TES@INRIM for SIMP

Strada delle Cacce 9110135 Torino - Italy

M. Rajteri

Quantum Metrology and Nanotechnologies Division

Page 2: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 2/20

SIMP request:

Target: E = 0.02 meV @ 0.4 meV (100 GHz)

Sviluppi per 2019:

Fabbricazione di film con TC ridotta a 40-50 mK

Miglioramento del sistema di misura:

schermi e filtri

Test dc-squidnell’ADRFabbricazione di

nanostrip e Caratterizzazione con

misure a 4 fili

Page 3: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 3/20

SIMP request

Target: E = 0.02 meV @ 0.4 meV (100 GHz)

Sviluppi per 2019:

Fabbricazione di film con TC ridotta a 40-50 mK

Miglioramento del sistema di misura:

schermi e filtri

Test dc-squidnell’ADRFabbricazione di

nanostrip e Caratterizzazione con

misure a 4 fili

Page 4: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 4/20

Before deposition: surface ion etching 30” Pressure base < 10 -7 Pa

Ti deposition by e-beam:V=6 kV, I=50 mA, Rate: 0.2-0.3 nm/s, Pressure: 2x10-5 ÷ 5x10-6 Pa

Au evaporation by heater:Rate: 1.5 nm/minPressure < 5x10-6 Pa

Page 5: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 5/20

Ti Films• Ti films show, for

thickness > 20 nm, asuperconductingbehaviour.

• Below 20 nm Tc fall downthe base temperature ofADR < 30 mK.

• Similar trend wasobserved on Ti growth inother UHV system.

Page 6: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 6/20

Ti film of 23 nm proximized by

increased Au films.

Ti Film thicknessconstant vs Au

Page 7: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 7/20

Tc of TiAu vs Ti thicknessfor a constant Au layer of27 nm.

Lowest Tc=42 mK wasobtained with a TiAubilayer of:Ti=11 nm and Au=27 nm

The red curve iscalculated by Usadelequation.

Au Film thicknessconstant vs Ti

Page 8: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 8/20

Page 9: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 9/20

SIMP request

Target: E = 0.02 meV @ 0.4 meV (100 GHz)

Sviluppi per 2019:

Fabbricazione di film con TC ridotta a 40-50 mK

Miglioramento del sistema di misura:

schermi e filtri

Test dc-squidnell’ADRFabbricazione di

nanostrip e Caratterizzazione con

misure a 4 fili

Page 10: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 10/20

Large area TES 100 m2 - 400 m2

• Positive process 110 C x 3’• Ion etching 400 V x 4’30” or • Chemical etching KI+I2 (Au) and 1% Hf (Ti) • Wiring Nb, Al or Ti by sputtering and lift-off

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Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 11/20

20 m x 20 m

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Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 12/20

EBL Mask for TEST

6x6x3 nanowire for TESTStrip width 150 nm ÷ 1 m Titanium deposition 25 nm

Page 13: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 13/20

SIMP request

Target: E = 0.02 meV @ 0.4 meV (100 GHz)

Sviluppi per 2019:

Fabbricazione di film con TC ridotta a 40-50 mK

Miglioramento del sistema di misura:

schermi e filtri

Test dc-squidnell’ADRFabbricazione di

nanostrip e Caratterizzazione con

misure a 4 fili

Page 14: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 14/20

Expected in July 2019

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Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 15/20

Test board for 4-wire measurement

Page 16: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 16/20

Up to 7 Low Pass Filters:

5 GHz1.45 GHz80 MHz300 kHz

LC Filters

RC Filters

Page 17: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 17/20

To be tested with nanostrip

Page 18: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 18/20

SIMP request

Target: E = 0.02 meV @ 0.4 meV (100 GHz)

Sviluppi per 2019:

Fabbricazione di film con TC ridotta a 40-50 mK

Miglioramento del sistema di misura:

schermi e filtri

Test dc-squidnell’ADRFabbricazione di

nanostrip e Caratterizzazione con

misure a 4 fili

Page 19: TES@INRIM for SIMP - Agenda (Indico) · Pisa 18/06/2019 SIMP meeting– TES@INRiM M.Rajteri 17/20 To be tested with nanostrip. Pisa 18/06/2019 SIMP meeting

Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 19/20

2.7 K 35 mK

• The V() curve is «modulated» and noisy at 35 mK

• After the test some wire bonding have been damaged and a new squid holder is under development

V

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Pisa 18/06/2019 SIMP meeting – TES@INRiM M.Rajteri 20/20