us-japan technology management seminar,stanford university (nov.18,1999) k.shimohigashi,hitachi ltd....

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US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro Shimohigashi General Manager Semiconductor Technology Development Division Semiconductor & Integrated Circuits Hitachi,Ltd.

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Page 1: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Transformation of Semiconductor R&D

Dr. Katsuhiro ShimohigashiGeneral Manager

Semiconductor Technology Development DivisionSemiconductor & Integrated Circuits

Hitachi,Ltd.

Page 2: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

OUTLINE

1. Semiconductor Industry - History , Technology , and Market

2. Industry Vicissitude - Historical Perspective of Semiconductor Industry

3. Transformation of Semiconductor Industry

4. Transformation of Semiconductor R&D

5. A Measure of R&D Effectiveness

6. R&D History at Hitachi CRL

Page 3: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

OUTLINE

1. Semiconductor Industry - History , Technology , and Market

2. Industry Vicissitude - Historical Perspective of Semiconductor Industry

3. Transformation of Semiconductor Industry

4. Transformation of Semiconductor R&D

5. A Measure of R&D Effectiveness

6. R&D History at Hitachi CRL

Page 4: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

1950

ULSIS

VLSIS

LSISICS

Mar

ket

Siz

e

Ge discretes

Si discretes

Transistor radios

Transistor TVs

Consumer

Calculators

Personal PCs

Notebook PCs

Computer

Communication

Cordless Phones

PDAs

CCC MarketConvergence

1960 1970 1980 1990 2000

The History

Page 5: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

1970 1980 1990 2000

10

100

'9050B$

'7910B$

'98126B$'94

100B$ 2000 162B$

CAGR

B$/Year

Car-Navigation

CordlessPhone

NotebookPC

PC

CalculatorTV

18% 14% 12%'99141B$

PDA

'70–'80 '80–'90 '90–'00

The Market

Page 6: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Letter(A4) 1page

1K

1M

1970 1980 1990

1K

4K

16K

64K

256K

1M4M

16M

64MDensity

(Bit)

Newspaper 4pages

Dictionary

DICTIONARY

2000

1G 256M

1G10

1.0

0.1

Geometry (µ m)

Geometry

Density

CD(70Min. HiFi recording)

The Technology

Page 7: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

OUTLINE

1. Semiconductor Industry - History , Technology , and Market

2. Industry Vicissitude - Historical Perspective of Semiconductor Industry

3. Transformation of Semiconductor Industry

4. Transformation of Semiconductor R&D

5. A Measure of R&D Effectiveness

6. R&D History at Hitachi CRL

Page 8: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

0

20

40

60

80

100

120

140

1940 1945 1950 1955 1960 1965 1970 1975 1980 1985

Semiconductor Market Comparedto Steel Production

ST

EE

L P

RO

DU

CT

ION

(M

t/Y

ear)

〔 60 〕 〔 70 〕 〔 80 〕 〔 90 〕 〔 00 〕YEAR FOR SEMICONDUCTOR

U.S.

JAPAN

CHINA

KOREA

SEMICONDUCTOR

Page 9: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

OUTLINE

1. Semiconductor Industry - History , Technology , and Market

2. Industry Vicissitude - Historical Perspective of Semiconductor Industry

3. Transformation of Semiconductor Industry

4. Transformation of Semiconductor R&D

5. A Measure of R&D Effectiveness

6. R&D History at Hitachi CRL

Page 10: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Semiconductor Industry Trend‘70 ‘80 ‘90 ‘00

10B$ 40B$ 150B$

Infra-Structure

Market

Application

ASP($)

Business Style

R&D

Develop

Scarce

Mainframe

106 ~ 105

IDM

CRL

(Equipment)

Grow

Develop

PC

104 ~ 103

IDM

CRL

Mega Competition

Grow Mega Competition

Oligopoly

104 ~ 103

Communication

Digital Consumer

IDM,Fabless,Foundry

?To be discussed today!Government-University-Industry

Partnership

Page 11: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Market Trend

Market Characteristics

1. Disappearance of Performance Oriented Segments (Mainframe Computer,…)

2. Downsizing (PC,HPA,…)

3. Multimedia Processing (Image,Voice)

Density → Price per Bit

System-On-ChipLow Energy Architecture

CPU → DSPHigh Bandwidth (SDRAM,R-DRAM)

Effects on R&D

Page 12: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Business Trend

Business Characteristics

1. Huge Investment

2. Decrease of ROI

3. Silicon Cycle

4. New Market Entry by Specialization

Manufacturing System becomes Focus of study

Alliance,Consortium

Product Portfolio→Segment Specialization (System Solution)

Synergistic Technology as a new leverage

Effects on R&D

Page 13: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Technology-Process and DeviceTechnology R&D Direction

1. Commoditization of Process Technology

● Precompetitive Domain

● Technology for Differenciation

● Consortium

● New Materials● Phase-Shift,OPC

2. Uncertainty of Post Optical Lithography

Large Diameter Wafer Processing

Semiconductor -Society-wide Cooperation for NGL

3. Low Cost Manufacturing

Page 14: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Technology-Continued4. Technology Maturity ●Acceleration of Miniaturization

●Multi-Value Storage and Logic●Module Level Integration

5. Nanometer Processing (Oxide Thickness < 3nm,Now!)

Optoelectronics

Atomic Layer ManipulationSelective Growth (Etching - free Process)

6. War with Invisible Defects

Contributing factors for 4 - times DRAM density increase in the ‘80s.

• Miniaturization • Memory Cell Improvement• Circuit Improvement• Chip Size Increase

×  2.2

×  1.2×    1.1×    1.4

7. Wiring Material Limit (Cu)

Molecular / Atomic Level Physicsand Analysis

Page 15: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

OUTLINE

1. Semiconductor Industry - History , Technology , and Market

2. Industry Vicissitude - Historical Perspective of Semiconductor Industry

3. Transformation of Semiconductor Industry

4. Transformation of Semiconductor R&D

5. A Measure of R&D Effectiveness

6. R&D History at Hitachi CRL

Page 16: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

R&D-Past,Present,and Future

Past: Research(R), Development(D), andProduction(P) were thought to bedifferent, and separately conducted.

Research Centers has been brokenapart, and the distinction between Dand P has been vanishing.

How should we organize these threefunctions?

Future:

Present:

Page 17: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Transformation of R&D,and Production Relationship

PAST

PRESENTR

D

P1

3

2R ?

DP

R: Research,D: Development,P: Production

Tim

e to

Pro

du

ct (

Yea

r)

Merging

Page 18: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Technology Transfer MethodologyIn Hitachi

MaterialUnit ProcessEarly Integration

Integration Productization

MaterialNew Unit Process

Integration & ProductizationCross Functional Team

Issues• Weakened Long-Range Research• Development Cost Reduction• Methodology for Managing

Large Cross Functional Team

R

R

D

D

P

P

OLD

NEW

Page 19: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Diversification of R&D (Internal & External)

Long RangeLong Range

StandardizationStandardization

AllianceAlliance

Core CompetenceCore Competence

UniversitiesGovernment

SEMATECH/SELETE

JEDEC/Defacto

Joint Development

External

Internal

Pre -Competitive

Pre -Competitive

R&DR&D

InfrastructureInfrastructure

CompetitiveCompetitive

Page 20: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

OUTLINE

1. Semiconductor Industry - History , Technology , and Market

2. Industry Vicissitude - Historical Perspective of Semiconductor Industry

3. Transformation of Semiconductor Industry

4. Transformation of Semiconductor R&D

5. A Measure of R&D Effectiveness

6. R&D History at Hitachi CRL

Page 21: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

20's 30's 40's

My Patent Productivity

0

20

40

YEAR

TOTAL: 286

72 78 84 90 9675 81 87 93

NUMBER OF PATENTS

Page 22: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Think About!

WHAT was

Hit Ratio?

Page 23: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

The Answer was 7% !

Page 24: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

The President Special Patent Award : 3

The President Patent Award : 7

The Strategic Patent Award-Gold : 5

The Strategic Patent Award-Silver : 4

The Strategic Patent Award-Copper : 1

Number of Patents Contributedto Business

Total Useful Patents : 20

Page 25: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Discussion     Session!

What is

Your   Impression?

Page 26: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

OUTLINE

1. Semiconductor Industry - History , Technology , and Market

2. Industry Vicissitude - Historical Perspective of Semiconductor Industry

3. Transformation of Semiconductor Industry

4. Transformation of Semiconductor R&D

5. A Measure of R&D Effectiveness

6. R&D History at Hitachi CRL

Page 27: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Consolidated(HITACHI Group)

31%

9%

24%

14%

22%

55%

10%

20%

8% 7%

Non-Consolidated(HITACHI, Ltd)

ServicesInformation &

Electronics

Materials

Power & Industrial Systems

ConsumerProducts

Consumer        ProductsPower Systems

Information &Electronics

Industrial Systems

TransportationSystems

Financial Year ending 31 March 1999, USD1=JPY121

1998 Sales Breakdown

\7,977 billion(US$65.9 billion)

\3,781 billion(US$31.2 billion)

Page 28: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

• Research & Development GroupBoard of Directors

Chairman

President• Power & Industrial Systems• Industrial Components & Equipment• Elevators & Escalators• Information & Telecomm. Systems• Digital Media• Consumer Products• Displays• Semiconductor & ICs• Automotive Products• Instruments

• Intellectual Property Group

• Corporate Staff

• Business Staff

• Business Development Division

• Corporate Export Regulation Divn.

Organization of Hitachi,Ltd. (as of April 1999)

Business Groups

Page 29: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Establishment: April 1942

Mission: Creating new technologies for the coming 10 to 20 years, as well as pursuing development work for today’s business.

HCRL in 1942 ODAIRA Namihei Founder

of Hitachi, Ltd.

BABA KumeoFirst General

Manager

Foundation

Page 30: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Period Feature/Focus Topics

Construction during WWII

Learning

Expansion

Quantity toQuality

‘42 Establishment of HCRL

Start of reactor research

Start of transistor research prototype

Presentation of the electron microscope (grand prize) and analog computer (gold award) at the International Exhibition in Brussels

‘54

‘56

‘58

‘66

‘69

Development of Japan’s first mainframe computer, HITAC 5020Development of world’s largest superconducting magnet

Development of the world’s first solid-state image-pickup deviceDevelopment of the 64 kbit DRAM

‘78

‘80

HCRL History

I1940‘s

II1950‘s

III1960‘s

IV1970‘s

Page 31: US-Japan Technology Management Seminar,Stanford University (Nov.18,1999) K.Shimohigashi,Hitachi Ltd. Transformation of Semiconductor R&D Dr. Katsuhiro

US-Japan Technology Management Seminar,Stanford University (Nov.18,1999)

K.Shimohigashi,Hitachi Ltd.

Creatingoriginal concepts& enhancingcore technologies

‘82

‘83

‘86

Development of electron holography technologyDevelopment of the supercomputerDevelopment of laser diodes in optical communicationProposal of high resolution TV systems (IDTV, EDTV)Development of the superconducting transistor

Becoming aleader intechnology for new business

‘91‘92

‘93

‘95

‘98

Development of the 2Gb/in2 magnetic diskDevelopment of the Single-Chip RISC Processor (SH Microprocessor)Development of high-speed DNA analysis & functional MRI technologiesDevelopment of the 1 Gbit DRAM & Video Authoring SystemOperation of 128Mb Single-Electron Memory at Room Temperature

HCRL HistoryPeriod Feature/Focus Topics

V1980‘s

VI1990‘s