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M-ERA.NET Transnational Call 2013


Full Proposal

Project Acronym: ENPIEZO

Project Coordinator:

(Organization and country):

Jožef Stefan Institute

Slovenia

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Content:

Page1. Summary 3

Publishable Abstract 4

Project Summary 4

2. Consortium Description 6

3. Project Description 11

4. Work Plan 14

5. Cost Calculation 20

6. Dissemination and Exploitation 23

7. Ethical Issue 26

8. CV’s for Key persons 28

9. Checklist for Proposers 37

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1. SUMMARY

Acronym/Short name ENPIEZO

Proposal Full Name Enabling technology for high-quality piezoMEMS

Project CoordinatorName: Matjaž Spreitzer

e-mail: [email protected]

Coordinator Organization(full name in original language/ name in English)

Original Language: Institut “Jožef Stefan”English: Jožef Stefan Institute

Country/ Region Slovenia

AddressJamova 39 Tel: 0038614773705

Fax: 0038612519385Postal code (CEDEX) 1000City Ljubljana www: www.ijs.si

Total Project Costs(Euro) 1199645 Requested Funding

(Euro) 1169645

Planned Starting date 1.9.2014 Duration

(in months) 36 Total person months 257

Call Topic

Integrated Computational Materials Engineering (ICME)Design of New Interfaces, Surfaces and CoatingsComposite TechnologyMaterials for HealthMaterials for Sustainable and Affordable Low Carbon Energy Technologies

Keywords (best describing the proposal´s content)

piezoelectric thin films, interfaces, energy harvesting, MEMS, pulsed laser deposition, aerosol deposition

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Publishable Abstract ENPIEZO aims to develop piezoelectric-based energy-harvesting (EH) devices to provide a remote source of electricity from waste vibrations with countless applications. For instance, EH devices can be powered by a heartbeat to operate pace-makers or it can provide electricity for sensors at remote locations like wind-turbine air blades. Fabrication-friendly pulsed-laser deposition of high-quality Pb(Mg1/3Nb2/3)O3-PbTiO3 thin films on silicon will be developed, based on the delicate engineering of silicon-oxide interfaces. The study will be performed on laboratory- and industrial-scale systems, the first of its kind in the world, which is believed to result in a breakthrough for the production of EH devices with state-of-the-art performance. In the project, aerosol deposition and environmentally friendly Na0.5Bi0.5TiO3-based piezoelectric alternatives will also be investigated. The project brings together four partners with expertise in a very diverse field of research and development.

Project SummaryEnergy harvesting (EH) using piezoelectric materials has gained tremendous attention in the past decade for running low-powered electronics. It provides a remote source of electricity from waste vibrations with countless applications. For instance, increased public safety can be provided by EHs implanted in the human body. They can be powered by a heartbeat to operate pace-makers or by body motion to operate various drug sensors. Furthermore, EHs can provide electricity to pressure sensors inside car tires or other environmental sensors at remote locations like airplane wings and wind-turbine air blades. In a new report IDTechEx found that piezoelectric energy harvesting investments will grow to $145m in 2018.State-of-the-art EH performance with a figure of merit (FOM) as high as 50 GPa is based on a Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) piezoelectric layer on silicon using a buffer layer of SrTiO3 (STO) and a SrRuO3 bottom electrode. This high FOM is obtained for a hetero-epitaxially grown structure with extraordinary crystal-quality of all the layers, which is extremely difficult to achieve since an intimate contact between the oxides and silicon is intrinsically instable. The problem has been overcome using molecular beam epitaxy (MBE) with a very delicate growth sequence. The method is unfortunately inappropriate for industrial fabrication, mainly due to extremely slow growth rates and the instability of the process itself.

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Fig. 1: Principle of piezoelectric

EH. Source: Arveni.


EH. Source: Arveni.


EH. Source: Arveni.


EH. Source: Arveni.


EH. Source: Arveni.


EH. Source: Arveni.


The main objective of our work is thus to use another industrially acceptable technology for growing epitaxial layers of piezoelectric material on silicon with the quality needed for reaching a high FOM for EH. Pulsed laser deposition (PLD) is an alternative method for the high-speed/high-quality growth of thin films and has high potential to successfully solve MBE-related drawbacks by engineering the silicon-oxide interface. The selection of PLD as a thin-film growth method is due to the combination of required growth control and the availability of a commercial large-area tool for device fabrication. The buffered silicon will be covered with a corresponding bottom electrode and functionalized using PMN-PT layers for devices that require higher energy densities. Alternatively, PMN-PT films will be grown using aerosol deposition, which proved to be successful for the rapid fabrication of Pb(Zr,Ti)O3 films for EH applications. Due to environmental issues, lead-free heterostructures based on Na0.5Bi0.5TiO3 (NBT) will also be investigated to identify potential substitutes for lead-containing compounds with a minimal environmental impact. Within the scope of the project, both small-area and large-area systems will be used, with up-scaling up to 6-inch wafers. Considering the electromechanical response of as-grown heterostructures micro-electromechanical (MEM) transducers will be designed and fabricated using standard MEMS fabrication processes in the Stiftelsen SINTEF piezoMEMS competence centre (www.piezomicrosystems.com) and the National Taiwan University NEMS center (nems.ntu.edu.tw) before testing at the Jožef Stefan Institute. The energy extraction interfacing circuit of the EH devices will be optimized and studied, and then tested on real environmental systems. In the final stage of the project the EH device will be integrated with a remote senor and validated on the device level, while on each step of the project commercialization of the development will be considered.

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http://nems.ntu.edu.tw/

http://www.piezomicrosystems.com/


2. CONSORTIUM DESCRIPTIONCONSORTIUM OVERVIEW

Org

anis

atio

n

Partner name(Full name)

Coordinator (P1)Jožef Stefan Institute

Partner 2:Stiftelsen SINTEF

Partner 3:National Taiwan University

Partner 4:COSYLAB, Laboratorij za

kontrolne sisteme, d.d.Type of the project? B B B ALegal Status1 RES RES HE SMEMain focus2 basic research basic research basic research applied researchWebsite http: www.ijs.si www.sintef.no www.ntu.edu.tw www.cosylab.siRegion/ Country Slovenia Norway Taiwan SloveniaCompany registration number

SI55560822 NO948007029MVA 03734301 SI55936768

Size (Employees) 3 65Turnover (K€) 4 8.149.666,53 EUR (in 2012)

Con

tact

Pe

rson

Title/Name Dr. Matjaž Spreitzer Dr. Frode Tyholdt Prof. Dr. Wen-Jong Wu Damjan GolobTelephone +38614773705 +4791758274 +886233665764 +38614776676

e-mail [email protected] [email protected] [email protected] [email protected]

Fund

ing

Org

aniz

atio

n

Person contacted in the funding organisation

Doroteja Zlobec Aase Marie Hundere Peter Wu Doroteja Zlobec

Funding Programme (full name)

Programs of International Scientific Cooperation

Nanotechnology and Advanced Materials (NANO2021)

National Program on Nano Technology (NPNT), National Science Council

Programs of International Scientific Cooperation

1 HE-University, RES-Research Organization, SME-Small medium enterprise, IND-large companies, OTH-Others. (according national rules)2 Main focus of research activity within the project (basic research or applied research)3 only for companies

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http://www.cosylab.si/

http://www.ntu.edu.tw/

http://www.sintef.no/

http://www.ijs.si/


2.1. Role of each partner team in the project and their qualification in the field of proposal, including their past experiences and expertise (last 5 years) and a qualification profile (condensed CVs or presentation) of the involved personnel

Partner 1 (Coordinator): Jožef Stefan Institute (JSI)Role in the project: Advanced Materials Department at Jožef Stefan Institute will be in charge for project management, scientific coordination and results dissemination, as well as for small-area PLD growth of piezoelectric materials on silicon and their structural and electromechanical characterization. Protocols for optimized growth will be subsequently tested by SINTEF on large-area PLD system.Team qualification in the field of proposal:Advanced Materials Department has investigated synthesis procedures and structural peculiarities of lead-free piezoelectric materials for about 10 year and published number of scientific articles within different national and international research projects. Research on sol-gel derived PMN-PT films has been initiated recently in the scope of MNT-ERA.NET project4, while state-of-the art PLD studies of oxide layers has been enabled by Center of excellence in Nanoscience and Nanotechnology5,6, which we cofounded in 2010.The project will be coordinated by Dr. Matjaž Spreitzer, who finished his doctoral degree in 2008 at the University of Ljubljana in the field of Na0.5Bi0.5TiO3-based voltage-tunable materials. As a postdoctoral researcher he worked at the Inorganic Materials Science Group, chaired by Prof. Dr. Guus Rijnders, at the University of Twente in Netherlands. Currently he works as research associate on pulsed laser deposition of oxide thin films. He has published 21 scientific articles and 7 proceeding papers, while results of his research work have been presented at 52 international conferences with 10 invited contributions. Prof. Danilo Suvorov will support scientific coordination and results dissemination. He is a head of Advanced Materials Department and has published more than 160 scientific papers. Research interest of Prof. Danilo Suvorov is dedicated to synthesis and characterization of advanced materials, such as nanoparticles, thin films, and bulk ceramics and coordinated number of basic and applied research projects.

4 http://www.mnt-era.net/mnt-era-net-success-stories/2010-17-NAFERBIO.pdf5 http://www.nanocenter.si/index.php?page=pulsed-laser-deposition-pl d 6 http://www.nanocenter.si/index.php?page=empyrean-diffractometer-2

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Fig. 2: UHV cluster with a PLD system.Fig. 2: UHV cluster with a PLD system.Fig. 2: UHV cluster with a PLD system.Fig. 2: UHV cluster with a PLD system.Fig. 2: UHV cluster with a PLD system.

http://www.nanocenter.si/index.php?page=empyrean-diffractometer-2

http://www.nanocenter.si/index.php?page=pulsed-laser-deposition-pld

http://www.mnt-era.net/mnt-era-net-success-stories/2010-17-NAFERBIO.pdf


Transmission electron microscopy (TEM) investigations will be performed at JSI microscopy center and in collaboration with Prof. Johan Verbeeck from Electron microscopy for materials research group, University of Antwerp.Furthermore, Mr. Dejan Klement, a PhD candidate at Jožef Stefan International Postgraduate School, will perform PLD studies, as well as reciprocal space mapping of as-prepared films. In his doctoral work he investigates Sr-induced reconstruction of silicon within PLD system using reflection high-energy electron diffraction.

Partner 2: Stiftelsen SINTEF (SINTEF) Role in the project: SINTEF will upscale the PLD deposition processes developed on small scale at JSI to 150 mm silicon wafers for preparation of energy harvester technology demonstrators. This will also include fabrication of the resulting electromechanical transducer. Team qualification in the field of proposal: SINTEF has worked with piezoelectric microsystems (piezoMEMS) for over 10 years and has through several projects developed piezoMEMS fabrication processes and demonstrators for end-users. SINTEF have been coordinator for 2 EU projects7,8 on the topic of which the recent FP7 piezoVolume8 were promoted as a success story.9 SINTEF is internationally recognized for being in front in piezoMEMS technology and is hosting a piezoMEMS competence centre.10 It may be noted that two, first of its kind, piezoFlare 1200 deposition tools for piezoelectric thin films on up to 200 mm wafers were installed at SINTEF in 2012-2013.11,12

Dr. Frode Tyholdt will be the project responsible at SINTEF and will have the responsibility for upcaling the deposition by PLD. He was the coordinator of FP7 piezoVolume and a core research scientist in FP6 MEMS-pie. He has a doctoral degree in deposition and characterization of piezoelectric and multiferroic thin films. He is the holder of 14 scientific papers and 3 patents.Dr. Per Martin Rørvik has a doctoral degree in ferroelectric nanostructures and is working with deposition of thin films of functional oxides for piezoelectric MEMS and solid oxide fuel cells.Dipl. Ing. Andreas Vogl’s technological background is both electronic design and microtechnology. His main competences are design, modeling and simulation (both finite-7 FP6 MEMS-pie (http://www.sintef.no/Projectweb/MEMS-pie/)8 FP7 piezoVolume (www.piezovolume.com)9 FP7 Success stories: http://ec.europa.eu/research/industrial_technologies/success-stories_en.html10 SINTEF piezoMEMS competence centre (www.piezomicrosystems.com)11 Solmates, PiezoFlare 1200 (http://www.piezoflare.com/news/17/SolMateS_sells_first_PZT_deposition_machine_PiezoFlare_1200__to_SINTEF.html)12 solar-semi, MC 204 (www.solar-semi.com)

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Fig. 3: Photolithography at SINTEF.Fig. 3: Photolithography at SINTEF.Fig. 3: Photolithography at SINTEF.Fig. 3: Photolithography at SINTEF.Fig. 3: Photolithography at SINTEF.

http://www.solar-semi.com/

http://www.piezoflare.com/news/17/SolMateS_sells_first_PZT_deposition_machine_PiezoFlare_1200__to_SINTEF.html

http://www.piezoflare.com/news/17/SolMateS_sells_first_PZT_deposition_machine_PiezoFlare_1200__to_SINTEF.html

http://www.piezomicrosystems.com/

http://ec.europa.eu/research/industrial_technologies/success-stories_en.html

http://www.piezovolume.com/

http://www.sintef.no/Projectweb/MEMS-pie/


element and on a system level with VHDL-AMS) and technology integration of microsystems and in particular piezoMEMS. He was a core research scientist in FP7 piezoVolume.M.Sc. Hannah Tofteberg has been the main responsible for piezoMEMS fabrication in the cleanroom since 2006. Her main tasks has been lithography and micromachining for fabrication of piezoMEMS and silicon MEMS in addition to SEM characterization.

Partner 3: National Taiwan University (NTU)Role in the project: In this project Department of Engineering Science and Ocean Engineering at NTU will be in charge of PMN-PT aerosol deposition, the MEMS EH transducer designing, and the optimization of energy extraction interfacing circuit for the prototyped EH.Team qualification in the field of proposal: Prof. Wen-Jong Wu finished his Ph.D degree in 2003 at Institute of Applied Mechanics, National Taiwan University (NTU). Later in 2003, he joined Department of Engineering Science and Ocean Engineering in NTU as assistant professor and has been associate professor since 2010. From 2007 to 2008, he has been with Sibeley School of Mechanical and Aerospace Engineering, Cornell University as visiting scientist and co-worked with Prof. Enphrahim Garcia on the energy extraction and storage interfacing circuit research for EH. He has published for about 40 refereed journal papers and over 60 conference papers. He also held over 30 patents. He is currently associate editor of Smart Materials and Structures (IoP) and International Journal of Distributed Sensor Networks (Hindawi). For the past 10 years, he has been dedicated on energy harvesting researches including the micro EH fabricated with MEMS processes and also the energy extraction interfacing circuits. He also wrote a book chapter “Piezoelectric MEMS Power Generators for Vibration Energy Harvesting” in the book Small-Scale Energy Harvesting published by Intech. In the latest paper he published in Smart Material and Structure this April, it has been demonstrated that the output power of an 8 by 6 mm micro generator can reach 240μW under 1.5g excitation at 120Hz, which is considering the state-of-the-art of current MEMS EH.

Partner 4: Cosylab, Laboratorij za kontrolne sisteme, d.d. (Cosylab)Role in the project: In the project Cosylab will investigate integration of EH with other electrical components like energy storage modules, pressure sensors, and wireless system for various functional systems with applications ranging from automotive industry to environmental protection.Team qualification in the field of proposal: Cosylab is a specialized provider of control systems for large experimental physics facilities, such as nuclear particle accelerators and is a world-wide market leader in this niche market. Cosylab has extensive experience with managing control system integration projects at the system-level, involving both hardware and software, and integrating other systems with the control system, in particular safety and machine protection systems.

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Cosylab has experience in I&C development of medical facilities. Apart from ISO 9001, Cosylab’s processes are also certified against ISO 13485 standard for “production of control and information systems for therapeutic and diagnostic medical devices”.

2.2. Added value provided by transnational cooperation (for consortium and for each partner)The project proposes development on very different scientific fields, which exceeds background and experiences of individual partners and therefore collaboration is required to effectively fulfil the project objectives. Project partners from three different countries will participate in consortium; meanwhile two partners are from the same country. They were selected according to their expertise in the field, ranging from thin film growth to system integration. The same quality of consortium cannot be assured on the local or national level and therefore transnational approach is required. The project will fund each partner profoundly to focus on specific research objectives, which will indeed compose the overall progress of the project through intense collaboration and assure the proposed impact.

2.3. Management structure and procedureThe overall coordination of the proposed project is in the hand of Dr. Matjaž Spreitzer from JSI, who will take care of scientific, financial, and administrative matters. Decision making processes will be supported by Prof. Danilo Suvorov, also from JSI. The next level in the management structure is the executive board, which will be responsible for any decisions concerning changes in the strategy of the project, distribution of funds, and other important issues. The executive board will be composed of Dr. Matjaž Spreitzer from JSI, Dr. Frode Tyholdt from SINTEF, Prof. Wen-Jong Wu from NTU, and Mr. Damjan Golob from Cosylab. Representatives from all the project partners will be responsible for progress and decision processes of each partner, as well as for corresponding financial and administrative reporting.

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Fig. 4: A miniature controller that fitsinto the glow plug. Developed at Cosylab.


3. PROJECT DESCRIPTION

3.1 Objectives of the project and expected resultsThe main objective of the project is to develop fabrication friendly PLD-based deposition of high-quality PMN-PT piezoelectric thin films on silicon for EH with state-of-the-art performance. Alternatively, PMN-PT thin films will also be grown using aerosol deposition, which has been proved successful for EH devices based on Pb(Zr,Ti)O3 (PZT). Both growth methods will be tested on laboratory- and industrial-scale systems. As an environmentally friendly substitute for PMN-PT lead-free piezoelectric systems based on NBT will also be investigated on the basic level. In order to develop EH devices with desired performance transducer and interfacing circuit designing are crucial and will be precisely considered in the project. In the final stage of the project, as-prepared EHs will be integrated and validated with various devices like pressure sensors for remote operation with on-site powering.

3.2 Current State of art and progress beyond the state-of-the-artEpitaxial PMN-PT layers provide state-of-the-art transverse piezoelectric coefficient, which is presented in Figure 5 together with values for other piezoelectric materials, like PZT and lead-free alternatives. Based on as-prepared PMN-PT layers EH have also demonstrated record performance, as presented in Figure 5 by FOM values. However, as PMN-PT is a relaxor material it needs to be deposited in a polarized state. If this can be done, as by Beak et al, PMN-PT retains outstanding piezoelectric response in the form of thin film in case its structure is single crystalline, which is extremely difficult to achieve on silicon substrate due to its intrinsic instability with oxides. However, complete control of interface between silicon and oxides has been achieved using MBE systems with Sr-based buffers and delicate procedures, which are very time consuming and thus industrially inappropriate. Initial oxide layer is in most of the cases STO and serves as a temple for epitaxial growth of various oxides. For lead-free piezoelectric systems outstanding response has been demonstrated for epitaxial NBT with 9%BaTiO3 recently, which was prepared on MgO (110) substrate using RF magnetron sputtering.13 Crystal structure of as-prepared films was distorted to orthorhombic symmetry,

13 H. Adachi, et al., Applied Physics Express, 4, 051501, 2011.

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Fig. 5: Figure of merit for micromachined actuators and energy harvesters. S.H. Baek et al., Science, 958, 334, 2011.






which has not been detected for bulk ceramics. This film exhibit very high values for transverse piezoelectric coefficient d*

31 along the orthorhombic b-axis with -221 pC/N, which even surpass conventional values for PZT. The piezoelectric response of this system has not been tested on silicon substrate yet, which will be performed in the proposed project.By applying proposed buffer materials and system modifications discussed below abrupt interface between silicon and oxides is expected to form in PLD-derived thin films, which is required for heteroepitaxial growth of all the layers. The full width at half maximum from rocking curve of the corresponding oxide layers is expected to be below 0.8°, which has not been achieved using PLD system yet. Such growth quality is believed to result in outstanding piezoelectric performance with –e31,f above 30 C/m2 for PMN-PT system. Furthermore, based on targeted piezoelectric response a proper transducer design and interfacing circuit will result in a major breakthrough for a number of applications in terms of achieved power level.

3.3 Originality and/or innovation of the proposed approach We propose to use SrO targets in PLD system to engineer the silicon-oxide interface for high-quality growth of oxides on silicon, in addition to system modifications with near-IR lasers for substrate heating and ultra-high vacuum pumps, required for high-temperature silicon treatment. Such experimental conditions have not been tested in PLD system yet; however, they are crucial for controlled growth at silicon interfaces, as determined by MBE studies. Our preliminary results confirmed complete control of silicon surface using metallic Sr, which induced gradual transformation of clean 2x1 to 1x2 reconstruction and correspond to 0 and ½ monolayer (ML) of Sr, respectively (Figure 6).

In the project we intend to develop state-of-the-art EH using PLD technology, which can be used in industrial environment nowadays due to stable deposition process and tunable material flux. As a result, variation of experimental conditions normal for industrial environment will not considerably effect the synthesis compared to MBE with at least an order of magnitude increased growth speed and will thus successfully solves MBE related drawbacks. In the project a

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Fig. 6: Evolution of silicon surface reconstruction during deposition of Sr-based material, changing from 2x1 for pure silicon to 1x2 for ½ monolayer coverage, which corresponds to SrSi2. Source: D. Klement, private communication, JSI.






PiezoFlare 1200 system will be used for large-area deposition, which is the first automated PLD system in the world installed at SINTEF in 2012-2013.Development of the epitaxial STO template by PLD will also open up for epitaxial growth of other oxides, such as ferroelectric K0.5Na0.5NbO3, mixed electron and oxide ion conducting La1-xSrxMnO3 and La1-xSrxCo1-yFeyO3, magnetoresistive La0.67Ca0.33MnO3, and super-conducting YBa2Cu3O7-x.

3.4 Expected impact for each partner at the European/international level Based on collaboration between partners results developed on laboratory PLD system at JSI will be up-scaled and brought close to the final device by fabrication of EH device and its integration. Such development is very important for JSI to prove relevance of created knowledge.The proposed project will enable SINTEF to improve its expertise in thin film deposition of piezoelectric materials for MEMS. This project will be important to utilize the new large-area PLD in the up-scaling of SINTEF's fabrication facilities. This will make SINTEF an attractive partner for European industry looking for pilot-scale production of piezoMEMS energy-harvesters and related technologies, and SINTEF will also be an attractive research partner in new European/international research projects within energy-harvesting and piezoMEMS.NTU has been involved in designing EH devices with polycrystalline PZT piezoelectric thin films so far. This project will enable NTU to study aerosol deposition of PMN-PT films with higher performance as well and also to redesign the system to up-scale the deposition area.In addition to hardware development for particle accelerators, Cosylab also developed embedded systems and hardware for various applications, including sails surface-pressure measurements system, SmartPlug diesel engine controllers, electronics for nanoparticale counter, etc. The project will enable Cosylab to spread their expertise from large experimental facilities towards consumer electronics even stronger, which will strengthen their role also in hardware designing of different applied products with, ranging from medicine to energy.

3.5 Market analysisToday's MEMS technology has come a long way what concerns the maturity of sensor principles and extent of these in the market. All smart phones now have one or more MEMS sensors embedded. A market forecast shows that the MEMS market continues to grow at high growth rate, which totals 10% for 2012 and accounts for $11bn market.14 This is especially impressive when compared with the entire semiconductor market, which decreased for 2% in 2012. A growth in Smart Systems of 20–40% is forecast until 2020,15 implying a similar growth in micro- and nanotechnology from the 2010 level of 8€bn. The need for EH will grow correspondingly as a share of these smart systems will need to be self-powered.

14 Yole Développement, the MEMS Annual Report, April 2013, www.yole.fr15 Strategic Research Agenda of the European Technology Platform on Smart Systems Integration (EPoSS), 06/2013

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http://www.yole.fr/


In a new report on the EH market, IDTechEx finds that piezoelectric EH investments will grow to $145m in 2018. Thereafter, it will create a $667m market by 2022.16

4. WORK PLAN

Work package list:

WP no.

Work package titleMain content

(keyword)

Total effort

(Person-months)

Work package leader

Participating project

partners

1 Small-area growth PMN-PT and NBT-based film on Si, interface control

51 JSI JSI, NTU

2 Up-scaling Large-area PLD and aerosol deposition, PMN-PT on Si

54 SINTEF SINTEF, NTU, JSI

3 MEMS transducer Transducer design and fabrication, electromechanical test

58 NTU NTU, SINTEF, JSI

4 Device integration EH circuit design and test, validation of EH with remote sensors

66 NTU NTU, Cosylab

5 Management Dissemination, coordination, reporting

28 JSI All

Work package time schedule: Work Package 1st year 2nd year 3rd yearWP1WP2WP3WP4WP5

16 Piezoelectric Energy Harvesting 2013–2023: Forecasts, Technologies, Players. IDTechEx.

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Work package description:

WP1: Small-area growthIn WP1 basic studies on small-area growth will be performed to deliver protocols, which will be exploited in WP2 related to up-scaling. In the first part growth of epitaxial piezoelectric thin films on silicon using PLD will be performed, but initially interfaces between deposited oxides (mainly SrO and STO) and silicon substrates will be investigated since control over interfacial reactions is essential for epitaxial growth. As-prepared oxides will serve as a template and will be subsequently overgrown with different piezoelectric materials. For EH with state-of-the-art performance high-quality PMN-PT will be deposited with a bottom oxide electrode. Furthermore, due to EU restriction on hazardous substances there is a great need to replace lead in piezoelectric materials. Therefore growth of most promising lead-free piezoelectric materials based on NBT will be studied to substitute PMN-PT in EH devices. Heterostructures will be prepared in the form of thin films using a laboratory scale PLD system. Growth will be in-situ monitored with number of advanced techniques. Since fully epitaxial piezoelectric materials on silicon substrates have not been prepared using PLD system yet these objectives requires many PMs. In the second part of the WP, PMN-PT heterostructures will be prepared using aerosol deposition method, which has proven successful in growing polycrystalline piezoelectric films, also for EH devices. Aerosol deposition is expected to deliver samples promptly due to its simplicity, while PLD is expected to deliver samples with best piezoelectric coefficients, but with time consuming growth sequence.

WP number: 1WP title: Small-area growthLeader: JSIPartners involved: JSI (45PM), NTU (6PM)Start date: 1.9.2014End date: 30.11.2016Objectives: 1.1. Growth of piezoelectric material using PLD

1.2. Growth of piezoelectric material using aerosol depositionType of activities: Basic ResearchDescription activities 1.1.1. Deoxidation of silicon substrate with SrO using PLD (JSI)

1.1.2. Preparation of STO template using PLD (JSI)1.1.3. Growth of epitaxial PMN-PT film on Si using PLD (JSI)1.1.4. Growth of epitaxial NBT-based film on Si using PLD (JSI)1.2.1. Growth of high quality PMN-PT film on Si using aerosol deposition (NTU)

Expected results and 1.1.1. Protocol on deoxidation of silicon substrate with SrO

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deliverables: 1.1.2. Protocol on growth of STO template1.1.3. Conditions for growth of epitaxial PMN-PT film on Si (PLD)1.1.4. Conditions for growth of epitaxial NBT-based film on Si (PLD)1.2.1. Conditions for growth of high quality PMN-PT film on Si (aerosol d.)

Milestones Heteroepitaxial growth of piezoelectric materials on silicon substrates with FWHM from rocking curve below 0.8°.

WP2: Up-scalingIn WP2 the protocols developed in WP1 for small scale deposition of PMN-PT will be used to upscale the deposition to 6 inch wafers using the large-area SolMates Piezoflare 1200 PLD at SINTEF and using aerosol deposition at NTU. Focus will be on optimizing the conditions to ensure homogeneous deposition across the large wafer. For large-area deposition LaNiO3 may be more suitable as bottom electrode than SrRuO3 due to the high cost of the latter material; the use of LaNiO3 will thus be investigated.

WP number: 2WP title: Up-scalingLeader: SINTEFPartners involved: SINTEF (16PM), NTU (30PM), JSI (8PM)Start date: 1.3.2015End date: 31.5.2017Objectives: 2.1. Large-area growth using PLD

2.2. Large-area growth using aerosol depositionType of activities: Basic ResearchDescription activities 2.1.1. Large-area PLD system preparation (SINTEF)

2.1.2. Preparation of STO template (SINTEF)2.1.3. Growth of high-quality PMN-PT film on Si using PLD (SINTEF)2.1.4. Structural characterization using TEM (JSI)2.2.1. Growth of high quality PMN-PT film on Si using aerosol deposition (NTU)2.2.2. Structural characterization using TEM (JSI)

Expected results and 2.1.1. Tailored large-area PLD system

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Fig. 7: piezoFlare 1200 at SINTEF. Fig. 8: Aerosol deposition system at NTU.Fig. 8: Aerosol deposition system at NTU.Fig. 8: Aerosol deposition system at NTU.Fig. 8: Aerosol deposition system at NTU.Fig. 8: Aerosol deposition system at NTU. Fig. 7: piezoFlare 1200 at SINTEF. Fig. 7: piezoFlare 1200 at SINTEF. Fig. 7: piezoFlare 1200 at SINTEF. Fig. 7: piezoFlare 1200 at SINTEF.


deliverables: 2.1.2. Procedure to grow large-area PMN-PT thin film using PLD with homogeneity and polarization comparable to the film with dimensions below 1 inch

2.2.1. Procedure to grow homogeneous and well polarized large-area PMN-PT thin film using aerosol deposition

Milestone Homogenous piezoelectric properties on 6 inch wafer.

WP3: MEMS transducerIn order to design a PMN-PT and NBT-based transducer simulations by COMSOL modeling tool will be performed in the WP 3. Based on electromechanical properties the thickness of piezoelectric layer will be optimized, which finally controls the output voltage of the transducer. Initially device structures with the same design to our previous transducers will be fabricated for the comparison. The cantilever type for transducer design will be selected, and the cantilever beam will be deposited with a piezoelectric layer. When the cantilever beam is subjected to vibrations, mechanical stress is produced in the PMN-PT layer due to the inertial force provided by the proof mass, which is used to adjust the resonant frequency of our device and to improve the output power. The mechanical stress is converted into electrical energy via the direct piezoelectric effect and electrodes and harvest the generated charge. Figure 9 shows the finished piezoelectric EH of research team at NTU, and the output power of this device is 240 μW under 1.5g acceleration.

WP number: 3WP title: MEMS transducerLeader: NTUPartners involved: NTU (48PM), SINTEF (3PM), JSI (7PM)Start date: 1.6.2015End date: 31.8.2017Objectives: 3.1. Development of lead-containing EH

3.2. Development of lead-free EHType of activities: Basic ResearchDescription activities 3.1.1. PMN-PT transducer designing (NTU,SINTEF)

3.1.2. Fabrication of transducer from PLD derived thin film (SINTEF)3.1.3. Fabrication of transducer from aerosol derived thin film (NTU)3.1.4. Electromechanical characterization (JSI)3.2.1. NBT-based transducer designing (NTU)3.2.2. Fabrication of transducer from best thin film obtained using small-area PLD

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Fig. 9: Finished piezoelectric EH.Fig. 9: Finished piezoelectric EH.Fig. 9: Finished piezoelectric EH.Fig. 9: Finished piezoelectric EH.Fig. 9: Finished piezoelectric EH.


system (NTU)3.2.3. Electromechanical characterization (JSI)

Expected results and deliverables:

3.1.1. Optimum design for PMN-PT transducer3.1.2. PMN-PT transducer from PLD derived thin film3.1.3. PMN-PT transducer from aerosol derived thin film3.2.1. Optimum design for NBT-based transducer3.2.2. NBT-based transducer from small-area PLD thin film

Milestone FOM for EH device as high as 40 GPa.

WP4: Device integrationThis schematic diagram in Fig. 10 represents our experimental setup. The piezoelectric MEMS generator is clamped an39d mounted on a shaker. The shaker acts as a vibration source to the generator. The shaker is controlled by a function generator through a power amplifier, which provides a sinusoidal waveform, thus we can measure the output voltage. By parallel load impedance, we can also measure the power output. In the WP self-powered switching-type interface circuit design will be implemented to enhance the performance of the EH device to save the electrical power. Such design can provide a boost in output power and output voltage from the EH device, but only when it reaches a certain voltage threshold. The current flow generated from the EH is namely too low to drive the rectifying circuit and the switch itself. This means that even if the output voltage from the EH device is high enough for use in common micro-processors, we still need to overcome the voltage threshold, which is the minimum requirement for the current output to be significant. The key here is to operate within the linear gain region to acquire the best results from the switch. Further investigation will be focused on the reduction of loss, often associated with the usage of diodes, resistors, and capacitors utilized in the switch and rectifier design.

WP number: 4WP title: Device integrationLeader: NTUPartners involved: NTU (48PM), Cosylab (18PM)Start date: 1.9.2015End date: 31.8.2017Objectives: 4.1. Development of EH circuit

4.2. Validation of EHType of activities: Applied and Basic ResearchDescription activities 4.1.1. EH interfacing circuit designing (NTU)

4.1.2. Integration of transducer (NTU)4.1.3. EH testing (NTU)4.2.1. Overall circuit designing (Cosylab)

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Fig. 10: The experimental setup.Fig. 10: The experimental setup.Fig. 10: The experimental setup.Fig. 10: The experimental setup.Fig. 10: The experimental setup.


4.2.2. Integration of EH circuit with remote sensors (Cosylab)4.2.3. Validation testing (Cosylab)


4.1.1. Optimum design for EH circuit4.1.2. Results on EH testing4.2.1. Design for integration of EH device with different remote sensors4.2.2. Validation report

Milestones Demonstration of autonomous device with EH and integrated remote sensors.

WP5: ManagementDissemination of results will have an important place in the WP5. Its main purpose is to enhance the knowledge transfer and comprises of patent applications, communication with relevant industrial companies, and organization of dissemination workshop.With scientific coordination we will take care of sufficient communication between project partners, as well as of the action planning and its supervising, on-time reporting of partners, assessment of progress, and organization of project meetings. Such coordination will ensure progress of the project according to the proposed plan. Mainly for PhD students and postdocs, as well as for other interested participants we will organize one summer school for training in the main research fields to bridge very diverse expertise. The goal of the management is to properly manage financial and administrative matters as well. It is responsible to mediate and take decisions in case of problems beyond everyday management and to represent results of the project and its progress on the webpage.

WP number: 5WP title: ManagementLeader: JSIPartners involved: JSI (10PM), SINTEF (1PM), NTU (12PM), Cosylab (5PM)Start date: 1.9.2014End date: 31.8.2017Objectives: 5.1. Dissemination

5.2. Scientific coordination5.3. Management

Type of activities: CoordinationDescription activities 5.1.1. Writing patent application

5.1.2. Presentation of results5.2.1. Annual action planning5.2.2. Organization of two annual meetings5.3.1. Managing of financial and administrative matters


5.1.1. Issued patents5.1.2. Dissemination workshop5.1.3. Summer school5.2.1. Annual scientific reports5.2.2. Regular meetings5.3.1. Webpage

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5.3.2. Final reportMilestones Patent applications, number of scientific articles in peer-reviewed journal

5. COST CALCULATION Total costs are divided into subcategories according to proposed work plan and national eligibility rules. They are precisely justified below for each partner of the project. 5.1. Personnel costFor all the project partners most of the budget relates to personal costs.JSI (201030 EUR): For JSI 70 PMs are proposed and are assigned to 4 WPs. Most of the effort (45 PMs) is foreseen for WP1 to study epitaxial growth of lead and lead-free piezoelectric materials on silicon substrate using laboratory PLD system. 8 PMs is proposed for WP2 for structural characterization across large-area wafers and 7 PMs are assigned for electromechanical property measurements of MEMs transducers in WP3. As coordinator we purpose 10 PMs for dissemination, scientific coordination and management.SINTEF (209100 EUR): For SINTEF 20 PMs are proposed. The main effort will be devoted to WP2 on up-scaling. The high personnel cost per PM reflects the high costs of Norway and that the work will be done by permanently employed research scientists and not by PhD students or post docs.NTU (50400 EUR): For NTU 144 PMs are proposed and are assigned to 5 WPs. The 144 PMs consist of 2 master student and 2 PhD students for 12 months per 3 years. 6PMs are distributed to test the deposition of the PMN-PT thin film using our system in WP1. In WP2, we need more effort (30PM) to continue research from WP1, on large scale. In order to fabricate the MEMS transducer and design the interface circuit of EH device, most of the effort (48PM for each) is in need for WP3 and WP4. In WP5, we propose 12 PMs for dissemination, scientific coordination and management.Cosylab (67010 EUR): Cosylab has 23 PMs, which are mainly devoted to WP4 on device integration. In addition to that, Cosylab will also be involved in dissemination of result, which is part of WP5.

5.2. EquipmentJSI (51329 EUR): Depreciation of electromechanical characterization system (optic-based vibration sensor).

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SINTEF (0 EUR): Depreciation is not anticipated in this project.NTU (60120 EUR): Depreciation of systems for aerosol deposition and some fabrication and measurement instruments (self-made deposition chamber and measurement instruments).Cosylab (17110 EUR): Depreciation of systems for electrical measurements (Keithley 4200, Agilent Technologies).

5.3. ConsumablesJSI (100994 EUR): Many costs are proposed for consumables. In WP1 there are costs related to maintenance of vacuum in PLD system, distribution chamber, chamber for temperature programmed desorption (10000 EUR for regular service for 4 turbomolecular pumps and 5 roughing pumps), other vacuum related consumables like gaskets, grease, clean-room tissues (about 6000 EUR), vibration isolation of PLD system (6500 EUR), service of excimer laser (3500 EUR), laser premix gas (4500 EUR) and N2, O2, Ar process gases (2500 EUR), pure Ta and Mo substrate holders (7500 EUR), resistive heater (5500 EUR), various PMN-PT, NBT, Sr, SrO and STO targets (6500 EUR), single-crystalline substrates (3500 EUR), maintenance of F2

sensor (4500 EUR), replacement of RHEED screen and electron-gun filaments (1800 EUR). In WP2 costs relate to replacement of one X-ray tube (7000 EUR), AFM tips and holder (1500 EUR). In WP3 costs relate to tips for electrical measurements (3500 EUR), standards (3800 EUR), cables (900 EUR). In WP5 costs are proposed for web page (2000 EUR), organization of summer school (10000 EUR), organization of dissemination workshop (10000 EUR).SINTEF (83300 EUR): Lab rent for clean room including PLD deposition, instrument rent for characterization equipment (XRD, SEM, etc.), PLD targets for large-area deposition (SrO, STO, PMN-PT), SOI wafers and chemicals.NTU (65000EUR): In WP1 and WP2, there are costs related to the maintenance of vacuum in aerosol deposition system (12000 EUR for regular service), and nozzles (4000 EUR). We need consumables, like tape and gloves (4000 EUR), and vacuum related components, like gases, grease, clean-room tissues (about 6000 EUR). Expenses used for cleaning and maintenance for our lab and machinery will be included (14000 EUR). Targets for deposition such as silver, copper, aluminum, gold, and platinum are calculated (12000 EUR), in addition to electrical measurement appliances and cables, probes and other tools (9500 EUR). In WP4, we also need some electrical element such like resistance, capacitor, inductor, and some wires. Other consumable materials used as substrate components are silicon or silicon dioxide (6000 EUR).Cosylab (32880 EUR): Consumables for Cosylab in WP4 are various temperature, pressure, and humidity sensors, wireless systems, cables and kits (about 18000 EUR). In WP5 costs are proposed for 3 patent applications (15000 EUR).

5.4. TravelCosts are proposed for 4 project meetings in Slovenia, Norway and Taiwan, participation at international conferences and meetings with industry.JSI (6647 EUR), SINTEF (8500 EUR), NTU(22000 EUR), Cosylab(3000)

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5.5. SubcontractingSubcontracting is not foreseen for any partner.

5.6. Other costs (Indirect costs)JSI (0 EUR), Cosylab (0 EUR): Indirect costs are not eligible.SINTEF (193745 EUR): Indirect costs for SINTEF are 92.67% of the personnel cost, based on negotiated rates with the Research Council of Norway.NTU (27480 EUR): Indirect costs charged by the university is 20% of the personal costs, consumables, and travel.

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Table: Total project costsTotal Costs are filled in the first line and the Requested Funding is filled in the second line.

PartnerPe

rson

mon

ths

Pers

onne

l cos

t

Equ

ipm

ent

Con

sum

able

s

Tra

vel

Sub-

cont

ract

ing

Indi

rect

cos

ts

Tot

al C

osts

Req

uest

ed

Fund

ing

Euro Euro Euro Euro Euro Euro Euro Euro

Partner 1(JSI):

70201030 51329 100994 6647 0 0 360000

201030 51329 100994 6647 0 0 360000

Partner 2 (SINTEF): 20

209100 0 83300 8500 0 193745 494645

209100 0 83300 8500 0 193745 494645

Partner 3 (NTU): 144

50400 60120 65000 22000 0 27480 225000

50400 60120 65000 22000 0 27480 225000

Partner 4 (Cosylab): 23

67010 17110 32880 3000 0 0 120000

50257 12832 24661 2250 0 0 90000

Total: 257527540 128559 282174 40147 0 221225 1199645

510787 124281 273955 39397 0 221225 1169645

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6. DISSEMINATION AND EXPLOITATION

6.1. Expected results and impact (globally and for each partner), including market impact Energy harvesting is an enabling technology that allows powering sensor systems in remote and inaccessible locations. Effective solution for such technological obstacle is thus expected to impact economic benefits of project partners and involved industrial enterprises considerably. However, such benefits are enabled by fundamental scientific progress only. Furthermore, several societal benefits are also expected with research training opportunities for PhD students and post-docs in the partners groups, in addition to the summer school on the relevant research topics.Impact for JSI: The project will enable JSI to study silicon-oxide interfaces using PLD, which control direct structural and electrical properties of functional piezoelectric layers on silicon platform. Epitaxial growth of oxides on silicon with the atomic control is delicate scientific problem, which can be resolved by JSI due to unique experimental set-up. Such understanding will promote JSI in the piezoMEMS community.Impact for Norway and SINTEF: ENPIEZO will contribute to the vision of Norway as an innovative user of advanced materials.17 This requires increased integration of nano-materials, ICT, and medical- and biotechnologies. Such integration is fully in line with the strategic background of the Nano2021 program18,19 and the Norwegian Government's R&D Strategies for Nanotechnology and Biotechnology.20,21

SINTEF is developing sensor solutions for energy harvesting towards several markets that need monitoring in remote and inaccessible locations. E.g. SINTEF is currently working together with the wind generator industry in the Centre for Environmentally Friendly Research, NOWITECH, and EHs are vital for realizing sensors networks on the blades in off-shore turbines. EH is also important for autonomous sensors for environmental monitoring. Even though the materials are developed with EH in mind they can also be used in MEMS actuators that have a very wide field of applications. Lead free alternatives to PZT such as NBT is very important to SINTEF in order to provide environmentally friendly technology. Impact for NTU: NTU is engaged in the development and optimization of EH devices and related circuits. Due to collaboration with other project partners as-developed circuits will also be tested other relevant piezoelectric system, which are in addition also full epitaxial. Such comparison will further promote NTU in the field of EH devices.Impact for Cosylab: Integrated EH devices with different sensors, wireless units, and other electronic components will be tested and optimized in real circumstances, including environmental monitoring in remote locations. This will make as-developed systems ready for production and can be therefore well commercialized.

17 Foresight 2020 Avanserte materialer i Norge Innovated in Norway norMat18 Veien Videre 202019 Programplan Nano202120 NHD + 9 other ministries K-0723B Regjeringens FoU-strategi for Nanoteknologi 2012-2021, 201221 Nasjonal strategi for bioteknologi 2011 - 2020 KD F-4271 B, 2011

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6.1.a. Economic benefits: The potential for value creation is high, since the products target a growing market as described in chapter 3.5 Market analysis. Based on capacities of two project partners, SINTEF and Cosylab, small production of EH is already available within the consortium and can facilitate implementation of first project results. Furthermore, establishment of a spin-off company will be considered. Beyond that, rapid knowledge transfer to semiconductive industry worldwide will be possible since the developed materials are compatible with current production in MEMS fabs. The startup company Microgen System based in New York has recently revealed a series of EH utilizing small scale piezoelectric material deposited on cantilever beam structures. This marks the first ever commercialized MEMS EH available in the market. This cantilever beam design boasts a relatively low resonant frequency of around 100 Hz and the output voltage is 17 V peak to peak when tuned at optimal parameters. The Germany lab X-FAB is responsible for developing such devices aforementioned. We believe that the technology and fabrication techniques used has not matured fully, therefore it may not replace the conventional chemical batteries currently found in the market. FP7 and US NIH has recently funded potential product research such EH application in pace makers. The paper published in PNAS by Dagdeviren et al showed promising results for pace maker application.22 However, we are confident that with our advanced fabrication method we can produce EH devices with better performance.

6.1.b. Scientific benefits: A major scientific breakthrough is expected in the field of heteroepitaxial growth of oxides on silicon using PLD technology. This is due to experimental conditions that have been so far applied to MBE technology only, but enable controlled epitaxial growth of the interfacial material and subsequent piezoelectric with best electromechanical response. Results of the growth will be up-scaled and exploited for fabrication of state-of-the-art EH devices. Furthermore, MEMS transducers from aerosol deposited PMN-PT thin films will also be investigated, which has not been done so far yet despite current advances of the method for PZT derived harvesters. Considerable scientific progress interesting for the community is expected due to collaboration of scientists from diverse and interdisciplinary research fields. Therefore special care will be taken to publish results in high-impact journals and present them on thematic conferences, after protection of intellectual-property rights.

6.2. Measures for the dissemination and exploitation of project resultsThe dissemination of the project is part of WP5 and will be performed by all partners. ENPIEZO will address its efforts to disseminate the project results to different target groups. The partners will publish the project’s results in high-quality peer-reviewed international journals and at relevant scientific conferences to market the research to university groups and research institutes. The promotion towards European and international industry will be done through the partners' existing formal and informal networks and through publications in application-focused technical journals and presentations at industry exhibitions. At the end of the 22 http://www.pnas.org/content/early/2014/01/15/1317233111.full.pdf.

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http://www.pnas.org/content/early/2014/01/15/1317233111.full.pdf


project we will also organize dissemination workshop to present achievements for industrial community. Last but not least the partners will seek to disseminate the results to the generic audience (citizens), interested in the project and its concepts, through newspapers/magazines, outreach activities such as the EU Researchers’ Night and school class visits, etc., when possible, to show how the public funds have being spent to good effect, spreading the education and generating the enthusiasm for science for new generations of students. Exploitation of project results: The consortium members are well established companies and organizations that have, through many years of experience, acquired the knowhow and the expertise to ensure that the projects results will be successfully exploited.SINTEF is working in close collaboration with SolMates who has delivered the large-area PLD system and progress in the large-area deposition will be discussed with them for bringing this technology further to industrial production. Prototyping and small scale production is possible through piezoMEMS and NEMS Competence Center at SINTEF and NTU, respectively, for companies to test their products before moving into large-scale production.

6.3. Management of intellectual propertyResults of the project will be initially presented in confidential reports and estimated for patent application. In this way we will manage intellectual property carefully and protect it, where appropriate. In the project participants will do their best to develop materials and devices towards final applications as much as possible, which will assure rapid transfer of knowledge into industrial environment, within or outside consortium. Besides partners’ responsibilities, decision processes and management issues related to intellectual property rights will be specified in the Consortium Agreement, implemented by the executive board.

6.4. Plans for the commercialization of resultsPartner 1 (JSI): Based on long-term research collaboration with electronic component company Epcos JSI will inform representatives regularly about project progress. Furthermore, we will inform our contacts in Murata and Samsung as well.Partner 2 (SINTEF): Currently, SINTEF has several industry projects with in total 10 Norwegian companies using piezoMEMS technology as well as collaboration and contacts with several European enterprises. New materials technology can optimize these piezoMEMS systems to give an even better competitive edge for European SMEs and enterprises. Due to the already large industrial involvement the results of the project will hence have a high probability for being included in new innovation in a quite short time frame. SINTEF has a high focus on piezoMEMS micro-optics and bioMEMS and the new materials are very well suited to be implemented into such systems. Partner 3 (NTU): Depending on the results, NTU will try to develop collaboration with local semiconductor industry, interested in EH devices.Partner 4 (Cosylab): Depending on the results, Cosylab will consider starting a pilot production for integration of MEMS transducers into final devices after project termination.

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7. ETHICAL ISSUE

ETHICAL ISSUES YES PAGE

Informed ConsentDoes the proposal involve children?Does the proposal involve patients or persons not able to give consent?Does the proposal involve adult healthy volunteers?Does the proposal involve Human Genetic Material?Does the proposal involve Human biological samples?Does the proposal involve Human data collection?Research on Human embryo/foetusDoes the proposal involve Human EmbryosDoes the proposal involve Human Foetal Tissue / Cells?Does the proposal involve Human Embryonic Stem Cells?PrivacyDoes the proposal involve processing of genetic information or personal data (eg. health, sexual lifestyle, ethnicity, political opinion, religious or philosophical conviction)Does the proposal involve tracking the location or observation of people?Research on AnimalsDoes the proposal involve research on animals?Are those animals transgenic small laboratory animals?Are those animals transgenic farm animals?Are those animals cloning farm animals?Are those animals non-human primates?Research Involving Developing CountriesUse of local resources (genetic, animal, plant etc)Benefit to local community (capacity building i.e. access to healthcare, education etc)Dual UseResearch having potential military / terrorist applicationI CONFIRM THAT NONE OF THE ABOVE ISSUES APPLY TO MY PROPOSAL

YES

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Strategy for dealing with environment, health and safety issues (EHS)PLD-based production process has no hazardous impact on environment, health and safety. The process occurs inside the vacuum chamber and thus operator is not in contact with any chemicals. The ablation process in chamber is induced by UV laser, which can be harmful in case of direct contact with eyes. To minimize the risk the laser path is shielded and in addition laser operator is equipped with safety goggles. For the production of EH devices various lithography tools will be used, which involve operation with chemicals. In order to minimize environmental impact chemicals will be recycled or safely destroyed. Furthermore, all necessary safety precautions will be followed during the work in a clean room, including application of safety equipment, as well as work in corresponding fume hoods. The SINTEF MEMS lab is ISO9001 certified ensuring that proper routines are followed.Two different groups of materials will be prepared for EH devices. Lead containing EH for highest energy conversion, as well as NBT-based as a lead free alternative. A PMN-PT thin film contains a small amount of lead which is substantially below the limits set in the RoHS II directive of 0.1 wt%. Piezoelectrics such as PZT have also so far been exempted from this limit and large amounts of PZT is currently used in fuel injectors, medical ultrasound, sonars, inkjet, lighters and small speakers. The reason for this is twofold. The first reason is that there is as yet no alternative material without lead. The second reason is that Pb is passivated in the perovskite oxide and has thus low toxicological activity. In some products, such as for example ink-jet printers, the replacement of bulk PZT with piezoMEMS has started by Epson and others. This will reduce the Pb content from several grams to a few milligrams. An example of other new products with PZT is the autofocus lens by poLight (www.polight.com). It is, however, important to have procedures for handling lead-containing materials during production.

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8. CV’s FOR KEY PERSONS

CV’s of Key Persons involved in the activities of the project8.1. Coordinator (Partner 1): JSI

1st Key Person: Dr. Matjaž Spreitzer (1 page)2nd Key Person: Prof. Dr. Danilo Suvorov (1 page)

8.2. Partner 2: SINTEF1st Key Person: Dr. Frode Tyholdt (1 page)2nd Key Person: Dr. Per Martin Rørvik (1 page)

8.3. Partner 3: NTU1st Key Person: Prof. Wen-Jong Wu (1 page)2nd Key Person: Prof. Chih-Ting Lin (1 page)

8.4. Partner 4: Cosylab1st Key Person: Mr. Damjan Golob (1 page)2nd Key Person: Mr. Dušan Slavinec (1 page)

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8.1. CV’s FOR KEY PERSONS for Coordinator, JSI

1st Key Person of JSIFirst Name: Matjaž Surname: SpreitzerTitle: Dr. e-mail: [email protected]: +386 1 477 3705 Fax: +386 1 251 93 85Organizational web page of key person: http: www.ijs.siPersonal web page: http://www-k9.ijs.si/

A. Relevant activities:Relevant activities in the field of thematic area: Synthesis-property relationship of lead-free piezoelectric materials based on NBT represents one of the major research activities of Dr. Matjaž Spreitzer, initiated already during his PhD study. Later on he has been also investigating PLD growth of oxides and interfacial reactions between as-deposited material and underlying silicon substrates in order to epitaxialy grow piezoelectric layers on top of the silicon substrates and consequently maximize their electromechanical response. Relevant activities in the field of the project: Dr. Matjaž Spreitzer will coordinate the overall project, its output and impact. In addition to management, scientific coordination and dissemination he will also be responsible for WP1 and will control implementation of tasks on small-area growth of lead and lead-free piezoelectric materials on silicon through epitaxy.

B. Scientific activities:Relevant publications in the field of thematic area: 1. M. Spreitzer, et al., Pulsed laser deposition of SrTiO3 on a H-terminated Si substrate, J. Mater.

Chem. C, 1 (34), 5216, 2013.2. T. Šetinc, et al., Temperature stable dielectric behavior of SolGel derived compositionally

graded SrTiO3/Na0.5Bi0.5TiO3/SrTiO3 thin films, J. Am. Ceram. Soc., 96 (11), 3511, 2013.3. M. Otoničar, et al., Compositional range and electrical properties of the MPB in the

Na0.5Bi0.5TiO3-K0.5Bi0.5TiO3 systems, J.Eur.Ceram.Soc., 30 (4), 971, 2010.4. J. Koenig, et al., The thermal decomposition of K0.5Bi0.5TiO3 ceramics, J. Eur. Ceram. Soc., 29

(9), 1695, 2009.5. M. Spreitzer, et al., Sodium deficiency in Na0.5Bi0.5TiO3, J. Mater. Chem., 17, 185, 2007.Relevant projects in the field of thematic area: 1. Nanoengineering of self-assembled materials, Slovenian Research Agency, 2010-2013.2. Microwave Tunable Materials, Composites, and Devices, NATO Program, 2011-2014.Relevant Applied Activities (for Companies, e.g. product, processes, etc.): 1. Relaxor-based Tunable Materials, EPCOS OHG, 2008-2009.

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2nd Key Person of JSIFirst Name: Danilo Surname: SuvorovTitle: Professor e-mail: [email protected]: +386 1 477 3871 Fax: +386 1 251 93 85Organizational web page of key person: http: www.ijs.siPersonal web page: http://www-k9.ijs.si/

A. Relevant activities:Relevant activities in the field of thematic area: Professor Suvorov has published more than 160 original scientific papers in the field of electronic ceramics, including ferroelectrics, piezoelectrics and microwave materials. For MNT-ERA.NET project “Nanostructured Ferroelectric Films for Biosensors” he currently coordinated research on sol-gel derived PMN-PT thin films, which are the key compounds in the proposed project.Relevant activities in the field of the project: Since Professor Suvorov has more than 35 awarded international patents together with industrial partners his role in the project will be intensively related to dissemination of project resulted. He will also be involved in characterization of small- and large-scale thin films and corresponding MEMS transducers.

B. Scientific activities:Relevant publications in the field of thematic area: 1. Š. Kunej, et al., Sol-gel synthesis and characterization of Na0.5Bi0.5TiO3-NaTaO3 thin films, J.

Am. Ceram. Soc., 96 (2), 442, 2013.2. J. Koenig, et al., Influence of the synthesis conditions on the dielectric properties in the

Bi0.5Na0.5TiO3-KTaO3 system, J. Eur. Ceram. Soc., 31 (11), 1987, 2013.3. M. Otoničar, et al., Analysis of the phase transition and the domain structure in KBT

perovskite ceramics by in situ XRD and TEM, J. Am. Ceram. Soc., 93 (12), 4168, 2010. 4. T. Šetinc, et al., Hydrothermal synthesis of nanosized Na0.5Bi0.5TiO3, J. Am. Ceram. Soc., 94

(11), 3793, 2011.5. J. Koenig, et al., Uniaxial stress dependence of the dielectric properties in the Na0.5Bi0.5TiO3-

NaTaO3 system, J. Mater. Res., 25 (9), 1784, 2010.Relevant projects in the field of thematic area: 1. Contemporary inorganic materials and nanotechnologies, National research program.2. Nanostructured Ferroelectric Films for Biosensors, MNT-ERA.NET, 2011-2014.Relevant Applied Activities (for Companies, e.g. product, processes, etc.): 1. New materials for energy conversion, Gorenje Household Appliances, 2011-2014.2. Thermoelectric oxide materials, EPCOS OHG, 2011-2013.

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8.2. CV’s FOR KEY PERSONS for Partner 2, SINTEF

1st Key Person of SINTEF First Name: Frode Surname: TyholdtTitle: Dr e-mail: [email protected]: +47 91758274 Fax: +47 91758274Organizational web page of key person:

http://www.sintef.no/home/Information-and-Communication-Technology-ICT-old/Microsystems-and-Nanotechnology/

Personal web page: http://www.sintef.no/home/Contact-us/All-employees/?EmpId=1627

A. Relevant activities:Relevant activities in the field of thematic area: Dr. Tyholdt has been involved in development of processes for fabrication piezoelectric microsystems and testing of technology demonstrators for end-users through several R&D and applied projects since 2004. He was the Coordination of FP7 piezoVolume with focus on high volume fabrication of piezoelectric microsystems. Both hardware suppliers and technology end-users were participating. The project was promoted as a success story by the Commission.Relevant activities in the field of the project: Industrial projects on piezoMEMS, production processes and tools for piezoMEMS, ferroelectrics, piezoelectrics, functional oxides.

B. Scientific activities:Relevant publications in the field of thematic area: 1. F. Tyholdt, FP7 piezoVolume, CMMMagazine, 4, 32, 2013.2. D. Min, et al., Microwave dielectric properties of dual layer PZT/ZrO2 thin film deposited by

the chemical solution deposition, Phys. D: Appl. Phys., 44, 255404, 2011.3. T. Bakke, et al., A novel ultra-planar, long-stroke, and low-voltage piezoelectric micromirror,

J. Micromech. Microeng., 20, 064010, 2010.4. F. Tyholdt, et al., Chemically Derived Seeding Layer for {100}-textured PZT Thin Films, J.

Electroceramics, 19, 311, 2007.5. H. Ræder, et al., Taking piezoelectric microsystems from the laboratory to production, J.

Electroceramics, 19, 357, 2007.Relevant projects in the field of thematic area: 1. FP7 piezoVolume, 2010-2013. 2. 2. Lab4MEMS, 2013 – 2015, Call ENIAC-2012-2. 3. HiFPac, 2014 – 2017 – RCN BIA program. 4. MicroTunis, 2013 – 2016 – RCN Nano2021.Relevant Applied Activities (for Companies, e.g. product, processes, etc.):

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SINTEF is currently running applied projects using piezoMEMS technology with in total 10 Norwegian and international companies. Both specific products and processes are being developed.

2nd Key Person of SINTEFFirst Name: Per Martin Rørvik Surname: RørvikTitle: Dr e-mail: [email protected]: +47 93234039 Fax: +47 93234039Organizational web page of key person:

http://www.sintef.no

Personal web page: http://www.sintef.no/home/Contact-us/All-employees/?EmpId=4033

A. Relevant activities:Relevant activities in the field of thematic area: Dr. Rørvik defended his PhD in 2008 on "Synthesis of ferroelectric nanostructures", focusing on fabrication of one-dimensional nanostructures of PbTiO3 and BaTiO3. During the last years he has been focused on deposition of functional oxide thin films for solid oxide fuel cells and piezoelectric MEMS.Relevant activities in the field of the project: Functional oxide thin films, lead-free piezoelectrics, ferroelectrics.

B. Scientific activities:Relevant publications in the field of thematic area:1. P. M. Rørvik, et al., PbTiO3 nanorod arrays grown by self-assembly of nanocrystals,

Nanotechnology, 19, 225605, 2008.2. P. M. Rørvik, et al., Controlling the morphology of hierarchical PbTiO3 nanostructures on

SrTiO3 substrates, Crystal Growth & Design, 9, 1979, 2009.3. P. M. Rørvik, et al., One-dimensional nanostructures of ferroelectric perovskites, Advanced

Materials, 23, 4007, 2011.4. P. M. Rørvik, et al., Chemical solution deposition of thin films for protonic ceramic fuel cells,

Solid State Ionics, 2013, in press.5. C. Haavik and P. M. Rørvik, Conducting oxide thin films, in Chemical Solution Deposition of

Functional Oxide Thin Films, eds. T. Schneller et al., 2013, Springer.Relevant projects in the field of thematic area: 1. Lead-free piezomaterials for in vivo MEMS (internal SINTEF, 2012-2013). 2. Lab4MEMS, 2013 – 2015, Call ENIAC-2012-2.Relevant Applied Activities (for Companies, e.g. product, processes, etc.): SINTEF is running several development projects using piezoMEMS technology with in total 10 Norwegian and international companies. Most of these are confidential.

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8.3. CV’s FOR KEY PERSONS for Partner 3, NTU

1st Key Person of NTUFirst Name: Wen-Jong Surname: WuTitle: Associate Professor e-mail: [email protected]: +886 2 3366 5763 Fax: +886 2 3366 5764Organizational web page of key person: http://www.esoe.ntu.edu.twPersonal web page: N.A.

A. Relevant activities:Relevant activities in the field of thematic area: Professor Wen-Jong Wu has been working on the design and fabrication of MEMS EH for about 10 years, and already published more than 40 journal papers and 60 international conference papers in the related field. He has also been working on the PZT thin-film deposition process development and interfacing circuit for piezoelectric EH. Relevant activities in the field of the project: In this project, he will be responsible for the design, optimization, and fabrication of MEMS EH based on the thin-film processes developed in other WPs and also for the interfacing circuit of MEMS EHs. He will also support other WPs, like WP5 for results dissemination.

B. Scientific activities:Relevant publications in the field of thematic area: 1. S. C. Lin, W. J. Wu, Fabrication of PZT MEMS energy harvester based on silicon and

stainless-steel substrates utilizing an aerosol deposition method, J. Micromech. Microeng., 23, 125028, 2013.

2. H. J. Tseng, et al., P(VDF-TrFE) polymer-based thin films deposited on stainless steel substrates treated using water dissociation for flexible tactile sensor development, Sensors, 13, 14777, 2013.

3. Y. H. Su, et al., Study of a piezoelectric transformer based DC/DC converter with a cooling system and current-doubler rectifier, Smart Mater. Struct., 22, 095005, 2013.

4. C. H. Lee, et al., A printable humidity sensing material based on conductive polymer and nanoparticles composites. Japanese Journal of Applied Physics, 52, 05DA08, 2013.

5. S. C. Lin, W. J. Wu, Piezoelectric micro energy harvesters based on stainless-steel substrates, Smart Mater. Struct., 22, 045016, 2013.

Relevant projects in the field of thematic area: 1. Exploring the Next Generation High Performance Energy Harvesting Technologies, 2012-

2013 (internationl colloboration project with INSA de Lyon, France).

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2. The Design and Fabication of High Efficiency Piezoelectric MEMS Energy Harvester Using Synchronized Switch Power Boosting Interfacing Circuit, 2012-2015.

Relevant Applied Activities (for Companies, e.g. product, processes, etc.):

2nd Key Person of NTUFirst Name: Chih-Ting Surname: LinTitle: Associate Professor e-mail: [email protected]: +886 2 3366 9603 Fax: +886 2 2368 1679Organizational web page of key person: http://ee.ntu.edu.twPersonal web page: N.A.

A. Relevant activities:Relevant activities in the field of thematic area: Professor Chih-Ting Lin has published more than 30 journal papers and 70 international conference papers in the field of biomolecular detection, biochips, and organic thin-film electronics. Professor Lin has worked on wireless sensing devices and CMOS-based low-power sensor integrations. Relevant activities in the field of the project: In this project, he will assist research activities related to micro energy harvesting project. His role in the project will be related to integrate a remote sensor (WP4) with EH energy harvesting device (WP3). In addition, he will be also involved in the electrical characterization and miniaturization of the developed system.

B. Scientific activities:Relevant publications in the field of thematic area: 1. W. C. Chang, et al.,Photoconductive Piezoelectric Polymer Made From a Composite of

P(VDF-TrFE) and TiOPc, Ferroelectrics, 446, 9, 2013.2. C. W. Huang, et al., A CMOS wireless biomolecular sensing system-on-chip based on

polysilicon nanowire technology, Lab Chip, 13, 4451, 2013.3. S. C. Lin, et al., A low sample volume particle separation device with electrokinetic pumping

based on circular travelling-wave electroosmosis, Lab Chip, 13, 3082, 2013.4. C. W. Huang, et al., A Fully Integrated Wireless CMOS Microcantilever Lab Chip for

Detection of DNA from Hepatitis B Virus (HBV), Sensors and Actuators B, 181, 867, 2013.5. C. W. Huang, et al., A fully integrated humidity sensor system-on-chip fabricated by micro-

stamping technology, Sensors, 12, 11592, 2012.Relevant projects in the field of thematic area: 1. Development and system verification of optofluidic chip based impedance and optical

metrology instrument for point-of-care applications, 2012-2015.2. The development of poly-silicon nanowire sensor-system-on-chip for biomarkers in heart

failure diagnosis, 2011-2014.Relevant Applied Activities (for Companies, e.g. product, processes, etc.):

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8.4. CV’s FOR KEY PERSONS for Partner 4, Cosylab

1st Key Person of CosylabFirst Name: Damjan Surname: GolobTitle: Mr. e-mail: [email protected]: +386 1 477 67 59 Fax: +386 1 477 67 59Organizational web page of key person: http://www.cosylab.com/Personal web page: N.A.

A. Relevant activities:Relevant activities in the field of thematic area: At Cosylab Mr. Golob manages hardware development projects, in addition to on-site hardware installation and acceptance testing. Since 2002 he has been involved in microIOC products development (www.microioc.com), analog-digital and communication R&D projects for accelerators usage, embedded system design and device integration.Relevant activities in the field of the project: Due to experiences with various electronics circuit design development and production methods Mr. Golob will be involved in WP4 to manage device integration.

B. Scientific activities:Relevant publications in the field of thematic area: 1. I. Iskra, et al., Capacitive-type counter of nanoparticles in air, Appl. Phys. Lett., 96, 093504-1,

2010.2. M. Lozej, et al., Pressure distribution on sail surfaces in real sailing conditions, High

Performance Yacht Design Conference, Auckland, New Zealand, page 10, 2012. 3. M. Kobal, et al., High-voltage power supply distribution system, European Physical Society

Accelerator Group, Geneva, Italy, 3708, 2008. 4. J. Dedič, et al., Extremely low-jitter FPGA based synchronization timing system, Particle

Accelerator Conference, Albuquerque, USA, 296, 2007.Relevant projects in the field of thematic area: 1. 2011 FERMI@ELETTRA - production and installation management for 20 motion control

system based on Siemens S7 PLC.2. 2012 FAIR@GSI - design and development Vacuum control system based on Siemens S7

PLC.

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3. 2012 NSLS-II@BNL - design, development and installation of 8-axis EPU undulator motion control system based on Deltatau motion controller and Allen-Bradley PLC.

Relevant Applied Activities (for Companies, e.g. product, processes, etc.): Patents: 1. Sails surface pressure measurements system (concept tested by BMWORACLE racing team).2. Automotive electronics, SmartPlug diesel engine controller, 2 patents). 3. Electronics for nanoparticale counter (1 patent).

2nd Key Person of CosylabFirst Name: Dušan Surname: SlavinecTitle: Mr. e-mail: [email protected]: +386 31 326 432 Fax: +386 1 477 67 59Organizational web page of key person: http://www.cosylab.com/Personal web page: N.A.

A. Relevant activities:Relevant activities in the field of thematic area: Mr. Slavinec is a hardware developer at Cosylab, designing field-programmable gate array for timing systems and high-speed optical communications. He is also involved in field-programmable gate array applications for fast controller I/O boards using National Instruments LabView module and graphical user interface designing.Relevant activities in the field of the project: Based on digital signal processing skills and competences Mr. Slavinec will be involved in hardware and software designing of EH devices, integrated with remote sensors and their final validation in real systems.

B. Scientific activities:Relevant publications in the field of thematic area:

/Relevant projects in the field of thematic area: 1. 2011 FERMI@ELETTRA - production and installation management for 20 motions control

system based on Siemens S7 PLC.2. 2012 FAIR@GSI - design and development Vacuum control system based on Siemens S7

PLC.3. 2012 NSLS-II@BNL - design, development and installation of 8-axis EPU undulator motion

control system based on Deltatau motion controller and Allen-Bradley PLC.Relevant Applied Activities (for Companies, e.g. product, processes, etc.): 1. MySQL/PHP web application maintenance.2. Labview test GUI design.

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9. CHECKLIST FOR PROPOSERS*

The proposal conforms to the call guidelines.Every project partner has been in direct contact with his/her national or regional funding agency and has checked that their collaboration and their project contribution is eligible for funding.All partners who are not eligible for 100% funding are able to provide financial resources for their own contribution.The consortium is aware of the necessity to have an consortium agreement, including amongst others the agreements on intellectual property rights (IPR) and publication rules for a funded project (depending on the national/regional regulations, this could be a pre-condition for transferring the first payment).The national/regional applications have been submitted by all consortium partners to their local funding bodies, if necessary.

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