wmtech materials for micro- and nanotechnologies...

H.-J. Fecht, NST2B workshop, Warsaw Feb. 7.-9., 2007

WMtechMaterials for Micro- and NanotechnologiesExample of a public – private partnership

Hans FechtUlm University

Institute of Micro- and NanomaterialsAlbert-Einstein-Allee 47, 89081 Ulm, Germany

&Research Center Karlsruhe

Institute of Nanotechnology INT, Karlsruhe, Germany

[email protected]


Overview

General Remarks

Example Science Park Ulm

WMtech – Materials center for micro & nanotechnology

Examples for Applications

Conclusions


GENERAL REMARKS

Emerging / Enabling Technologies (NBIC): 1995

Nanotechnology

Biotechnology (new pharmaceuticals)

Information and communication technology (www)

Plenty of Research Funding

Breakthroughs and Killer Applications ?


Source: M. Roco, NNI, E. Tomellini, EU, M. Werner, NMTC


Key Question: Does working on Technologiessolve Problems?

Research Focus: 2006+

Energy

Health

Urban Sustainability (Automotive, Environment …)

What is the contribution of Nanotechnologies?What is Nano?Is Nano always Nano?


Results / Success Stories ?

Biotech industries

Pharmaceuticals

Agricultural Chemistry

Very Focussed Applications, considered important

Same for ICT


Nanotech

more „People Magazine“:sports, cosmetics, clothing,cars, coatings …

than„Wall Street Journal“

However:„10% of something is more than 100% of nothing“


How about Nanotech industries

47% of Nanotech market are Nanomaterials

New trends, CNT, other nanotubes, nanocomposites...

Nanotools

Products based on nanotech

U.S. patent office: search nanomaterials, chemicals- no electronics, no pharmaceutical


NanoTech „glamorous“ applications ?

feeds traditional markets

long lead time (10-15 ys.)

no fundamentally new products

improved performance

improved lifetime

marginal improvement unlike biotech


VC‘s generally do not understand markets

IT – health ok (telephone, cancer research)

Problems encountered:

No evaluation of nanotech was available at the startof the nano-hype

Patent situation confusing (interdisciplinary)

Segmented and often small markets

VC does not invest


Conclusion / Solution

Financing by conventional means

Sales

Angels – Private Investors

Cooperation

Public Funding


Procedure

1-2 Nanotech patents: Nanomaterials, Nanotools

Application of Nanotech

Specific device

Method of Fabrication

Use of device based on nanotech

Sales - $$


AdvancedMaterialsSystems

InformationTechnology withNanoelectronic

Systems

Nanotechnology

Microoptics

„NaMiX“Nano-Micro

Interface

Polymer Systems

Nanostructured MaterialsMolecular Electronics

MicrosystemTechnology

Moreover: Nanotech is interdisciplinary


Concept Science City Ulmclose cooperation with industry

University campusScience park I

DaimlerChryslerResearch Center

Sciencepark II a

Science park II b

Science park III(future expansion)

Sharing ofResources

! ! !


Nano forIndustrial sectors• Automotive

• (Bio-) Medical

• Materials

• Micro electronic

• Medical

• Telecommunications

• Consulting

Science Park II a

DaimlerChrysler research center


DaimlerChryslerSiemensNokiaTakata Europeamc AEG mobile communicationBombardierRückerAtmel Wireless & Microcontrollers

Schlumberger SemaVodafoneBeam AGNortel NetworkU-L-M PhotonicsGFD Gesellschaft für DiamantprodukteDeutsche TelekomDoxa Certex ...

Companies at the

Science Park Ulm

Energon building in Science park II b


UNIVERSITY of ULM

Abt.Elektronische

Bauelemente u.Schaltungen EBS

Institute ofMicro and Nanomaterials

ZentralinstitutBiomedizinische

Technik ZIBTAbt. Biomaterialien

KompetenzzentrumWerkstoffe derMikrotechnik

WMtech

MicroTecSchwaben e.V.

Institut fürdynamische

MaterialprüfungIdM

Zentrum fürSonnenenergie- und

Wasserstoff-ForschungZSW

Abt.Optoelektronik

OE

FraunhoferInstitut für

Zuverlässigkeit u.Mikrointegration

IZM

WMtech Interdisciplinary Cooperation

(founded 2001)

U-L-M Photonics2002

MicroGaN2003 GFD IdM


Ulm

AmaTech Electronic Components Manufacturing GmbHPfronten

FhG-IZM, Zentrum fürVerbindungstechnik in der ElektronikOberpfaffenhofen

Electronic Parts and ComponentsMünchen

Robert Bosch GmbH Waiblingen

Microtec Schwaben e.V. Kaufbeuren

Sensor-Technik Wiedemann GmbH Kaufbeuren

PolyMaterials AG Kaufbeuren

DaimlerChrysler AG -MTU-München

DaimlerChrysler AG Ulm

DaimlerChrysler Aerospace Ulm

Wieland-Werke AG Ulm

Siemens AG MünchenUniversität Ulmund Aninstitute

Center of Excellence: Micro- and Nanomaterials

Regional Distribution of industrial partners in the

States of Baden-Wurttemberg and Bavaria

Schlötter GmbH Geislingen

OSRAM Opto Semiconductors Regensburg

Richard Wolf GmbH

GFDmbH Ulm


Center of ExcellenceMicro and Nano MaterialsUniversität Ulm

Objectives

• To establish links for technology and know-how transfer between industry,university, associated institutes and investors

• To develop dedicated solutions and materials

• To develop market-oriented innovative products by utilising the know-howof the partners

• To offer services such as consulting, analysis and training


Sponsoring (2001 – 2006)

• Industrial Partners: 2.5 Mio. €

• Federal Government: 2.5 Mio. € (Matching Funds)

• State of Baden-Württemberg: 1 Mio. € (Capital Equipment)

• Ulm University: 0.5 Mio € (Infrastructure etc.)

In 2008 start of a new program financed by the state of

Baden-Württemberg with 47 Mio. € (New Materials for

Micro-/Nanotechnologies)


New advanced Materials

• Nano-CVD-Diamond plus microstructuring / surface termination (P. Gluche, GFD)

• Materials under extreme conditions (temperature, environment, wear conditions)

• Organic Materials (printable electronics)

• New metallic Alloys (Bulk Metallic Glass)

• Layered materials, thin films (magnetics, optoelectronics)

• Intelligent Materials

• Functionalized surfaces

• etc.

Academic developments at highest level (#1, unique)

Industrial needs


Fabrication of Nano-CVD-Diamond- superhard materials -

• Films were grown in a CemeCon CC800/Diahot-filament CVD reactor (Ulm, Germany)

• Methane in hydrogen at 5 mbar; 1% oxygenperiodically inserted for nanocrystalformation by growth inhibition

• Bias applied to substrate before depositionto achieve high nucleation density

• Substrates (WC, Si) heated to ~750 °C bythermal radiation from W filaments

• Average growth rate 165 nm/hr: 80 μm filmdeposited in 483 hours


02468

101214161820222426

Sta

nd

ze

itin

Wo

ch

en

Hard metal TiN Ceramic Diamaze PSD

05

10152025303540455055606570

rel.

Sta

nd

ze

it

Hard metal Diamaze PSD

1

63

Applications: Life time of cutting tools (in weeks)

Plastics (Foil with nx-Ti-oxide)

Glass

150 Tests

Significant improvement of lifetime


• Nanotechnology concepts(bottom up, CVD)+

• Microsystem Technology(top down)Patterning / StructuringTechniques (Mask Layout,Lithography

• Micro-components

made of nanodiamondwith new functionalities(comparison with human hair)

Next step

P. Gluche, GFD


Diamond untreated

Oxygen(cell growth)

Hydrogen Fluorene(bacteria disappear)

Bio AspectSurface terminationCell growth, neurons


Bulk Metallic Glass

(1) Advantages: Tunable Properties

Mechanical strength, elastic limit,specific weight, Young’s modulus,low wear / scratch resistance,low coefficient of friction …

(2) Problems related to applications

(3) Examples

- Zr-based alloys- Composites- …


0

500

1000

1500

2000

2500

0 1 2 3

Elastic Limit(%)

Engineering PolymersWoodWindow

Glass

Tita

niu

mA

lloys

Ste

el A

lloys

Zr-BMG Alloys

BMG has

higher elasticity

than all other

metals & alloys

BMG has

higher strength

than engineering

polymers

Strength vs. Elasticity- no internal friction: ideal spring -

Elastic Limit F / E (%)

Mech

.str

en

gth

F

(MP

a)


Advantages: electronic casings

• With approximately 2.5 times the strength of commonly usedtitanium alloys and 1.5 times the hardness of commonly usedstainless steel

• Enables thinner, smaller designs while providing greater protectionfor internal components (antenna)

• Permits thinner walls while providing greater strength

• Allows larger, wider screens for expanded features and capabilities

• With precision net-shape casting, Liquidmetal alloys can be readilyfashioned into intricate, innovative designs resulting in a uniqueaesthetic advantage

• Excellent durability; scratch and corrosion resistant


Battery Cover –

Sub-frame

Electronic Casings: Vertu Ascent Collection

ProductsProducts--ApplicationsApplications


Liquidmetal Hinges

Precise Net-Shape Casting, High Reliability, Low Friction

Samsung SPHSPH--E3200E3200


BMG: Characteristic Properties

• Processing like polymers (injection molding)

• Mechanical strength like ceramics

• Good corrosion and wear resistance

• Net-shape forming of metallic components

(no shrinkage, no recalescence)

Applications

• Cutting blades (WMF)

• Sport goods: Golf (Bridgestone), Tennis (HEAD),

Ski (HEAD) …

• Electronic casing: large, thin (Samsung, Motorola)

• Micromechanical components

• Medical implants / stents

• Fiber / glass composites (National Defense U.S.)


Conclusion

NanoMaterialsplus

NanoToolsplus

a Product based on Nanotech

NanoEffects for the micro- and macroworld


Materials Innovation AwardGerman Engineering Foundation

- Thanks -

DFGLandesstiftung BW

GFD mbH


- THANK YOU -for your kind attention


Why does it work: public – private partnership

Academic know-how not existing in industry

Measurements not possible with that precision inindustry

Outsourcing of R&D in major companies

Reduction of risk for new projects with long lead times

Start-ups: receive funding through cooperative projects

…


Micro technology

Nano technology

Nanotech: The Tiny Revolution , CMP Cientifica (2001)

NANOTECHNOLOGY

LENGTH SCALES

Shrinking down into the micro-/nanoregime using appropriatedeposition and patterningtechniques(top-down)

The ability to work at theatomistic level to create largestructureswith fundamentally newproperties and functions(bottom-up)


Source: Microtechnology Innovation Team Deutsche Bank

Nanotechnology Market Segmentation

20002001200220032004

Other

Biotech

Nanomaterials

ToolsDevices

Electronics

0

50

100

150

200

250

300

Mark

et

Siz

e($

Billio

n)

Year

2002: 22.6 $ Bn2006: 32.4 $ Bn


Market 2002Nanomaterials Market Share (%)

NanosizedParticles

64 %

Carbon Nanotubes2 %

NanomaterialsMarket 2002:$ 21.8 Bn

Other2 %

Carbon Black32 %

Dyes andOrganic Pigments

55 %

Zeolites11 %

Polymer Nano-composites

2 %

Source: WMTech Study, 2003


Forecast 2006Nanomaterials Market Share (%)

Nanomaterials Market 2006:$ 28.8 Bn(increases by 7 % AAGRbetween 2002 and 2006)

CarbonNanotubes

38 %

Polymer Nano-composites

34 %

NanosizedPowders

28 %

Zeolites9 %

Other11 %

Dyes andOrganic Pigments

52 %

Carbon Black28 %

Source: WMTech Study, 2003


Possible Routes of Nanoelectronics(M. Werner)

Individual advantages / disadvantages of the different technologies

Parallel existence of the different future technologies foreseeable

Nanoelectronics

Conventional DownScaling

PolymerElectronics

MolecularElectronics

CNT basedElectronics


Problem polymerelectronics:extremely low viscosity, toluene as solventFrequency Dependence of the ViscositySamples: P121, S1123, S719, water, wine (IdM home build device)


Active Squeegee: Redesign – No. 6 (II)Slit width of less that 100 microns, resulting filmthickness about 50 nm, needs to be homogeneous

Pump


- NanoMaterials -Dimensionality and Fields of Application

• Catalysis

• Ferrofluids

• Composites with

increased el. conductivity

• Sensors / Actors

• Magnetoelectronics

• Reading / Writing

Heads

• Optical Applications

• Structural Nanomaterials

• Superplastic Ceramics

• Filter

• Hard Coatings

• Low temperature co-fired

ceramics (LTCC)Source: H. Hahn / INT


Center of ExcellenceMicro and Nano MaterialsUniversität Ulm

WMtech

ProductionProcessingApplicationConsulting

Training


Technology / Areas of competence WMtech

1. Development and Production of „New advanced Materials“

2. Development and improvement of production processing

3. Development of prototypes, sales of prototypes

4. Analysis, Simulation

5. Coordination, Technology transfer

6. Sales, marketing, licensing


Metrology: Measurement Techniques forNano / Microstructures

...up to 1 meter9 ord

ersof magnitu

de

...from 1 nm


Recommendations

Contact potential customer, not necessarily largecompanies, small comp. are more flexible

Non-disclosure

Check market / competition

wmtech materials for micro- and nanotechnologies...

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