I° microEO meeting 122/01/2014

MICRO-COOLING CONNECTORS

I° microEO meeting 222/01/2014

STANDARD PEEK CONNECTORS - IDEX - NanoPorts

Gluing to silicon surface:- with glue ring standard from IDEX- with Araldite 2020 or Araldite 2012

Leak tightness

made from a

plastic o-ring

I° microEO meeting 322/01/2014

Gluing problems!

In va

cuum

vess

el at

nigh

t:

Gluing to hold high CO2 pressure

I° microEO meeting 422/01/2014

RAPHAEL DESIGN CONNECTOR – for CO2 high pressure

- Used with snake 1 prototype (2.5mm thickness)- Copied for the ATLAS micro-channel design used for pressure tests with Si-Pyrex

I° microEO meeting 522/01/2014

SOLDERING CONNECTORS – Ferrules

- Based on the paper: ‘Solder-based chip-to-tube and chip-to-chip packaging for microfluidic devices Edward R. Murphy et al., The Royal Society of Chemistry, 2007’

- First trials with Swagelok ferrules

Stainless steel ferrule

Brass ferrule

Stainless steel tube

Silicon plate

Solder

1/16’’ tube Stainless steel ferrule Brass ferrule

Tested up to 250 bar!!!

I° microEO meeting 622/01/2014

SOLDERING CONNECTORS – KOVAR inserts- KOVAR: FeNiCo alloy with a CTE coefficient comparable with the CTE of silicon (~ 3 10-6/K) in

order to avoid mechanical stresses due to temperature gradients

- Kovar inserts and stainless steel tubes Cu plated

- Soldering in vacuum oven at 200°C

Au 100nmNi 350nmTi 200nm

A.Mapelli

Kovar

SnPb0.1 mm Foil

Silicon

Cu Plating

Tested up to 700 bar!!!

Stainless steel tube (Ø1.6mm)

I° microEO meeting 722/01/2014

- ‘Lamage’ in KOVAR to perform the soldering with the tube

- X-ray picture of the interface: small voids!

Silicon

Kovar-Si interface

Solder

Small voids

I° microEO meeting 822/01/2014

Masks used to pattern the silicon metalization!

Soldered samples embedded in resin and polished pictures of the hole

Optimized connector for material budget reduction

I° microEO meeting 922/01/2014

KOVAR connectors for the new LHCb Snake prototype

I° microEO meeting 1022/01/2014

LATEST IDEA (from yesterday!) – NA62 project

- Small Kovar insert with a through hole and bending of the tube!

Au 100nmNi 350nmTi 200nm

A.Mapelli

Kovar

SnPb0.1 mm Foil

Silicon

Cu Plating

Stainless steel tube (Ø1.6mm)