a monolithic cmos microhotplate-based gas sensor system
DESCRIPTION
A Monolithic CMOS Microhotplate-Based Gas Sensor System. Muhammad Y. Afridi John S. Suehle Mona E. Zaghloul David W. Berning Allen R. Hefner. Elliott Cooper-Balis. MEMS Overview. - PowerPoint PPT PresentationTRANSCRIPT
A Monolithic CMOS Microhotplate-Based Gas Sensor
SystemMuhammad Y. Afridi
John S. Suehle
Mona E. Zaghloul
David W. Berning
Allen R. Hefner
Elliott Cooper-Balis
MEMS Overview
The integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro-fabrication technology
Gas Sensor Motivations
• Use existing CMOS technology
• Low power
• Low cost
• Reliable detection
• Applications :
• Detection of harmful substances in public places
• Detection of freshness of food
• Detection of toxic leaks in manufacturing facilities
Microhotplate Gas Sensor
Key Features :
• Suspended trampoline structure
• Polysilicon resistor heating element (2-kΩ)
• Metal-oxide film-based sensing element (Tin or Titanium)
Microhotplate Gas Sensor
Gas Sensor System
Gas Sensor System
Gas Sensor System
Gas Sensor System
Gas Sensor System
Thank You!