approach to satisfy the requirement of factory automation · 2018-06-11 · approach to satisfy the...

DISCO CORPORATION All rights reservedDISCO CONFIDENTIAL – for customers only 2016/03/03

Approach to satisfy the Requirement of Approach to satisfy the Requirement of

Factory AutomationFactory Automation

Yuki Takayama

Sales Planning Department

Asia Pacific Sales Division

DISCO CORPORATION

DISCO CORPORATION All rights reservedDISCO CONFIDENTIAL – for customers only

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Contents

Company profile

Approach to Automation

Machine Vender’s Role

Summary


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Company Profile Company Profile oof DIf DISSCOCO


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Company History ～Over 75 years of experience in abrasive technologies～

First Dicing Saw

DAD-2H

Fully Automatic Dicing Saw

Head Office & R&D

Center

New Building, Kuwabata Plant


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Dicing Saw Grinding/Polisher Laser Saw

Precision

Equipment

Precision

Tooling

Dicing BladesGrinding Wheels

Dry Polishing PadLaser Head

Development, Manufacturing, and Sales of Precision EquipmentDevelopment, Manufacturing, and Sales of Precision Equipment and Precision Toolingand Precision Tooling

DISCO Production

(Image)

Bringing faraway science to comfortable living through advanced “Kiru”,”Kezuru”,“Migaku” technologies

Mission


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Approach to AutomationApproach to Automation

～～OEE ImprovementOEE Improvement～～


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Image of Industrial 4.0


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What is Automation


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Automation or automatic control, is the use of various Control System for

operating equipment such as machinery, processes in factories, steering and

stabilization of ships, aircraft and other applications with minimal or

reduced human intervention


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What is Control System


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Control System, is a device, or set of devices, that manages,

commands, directs or regulates the behavior of other devices

or systems.

InformationGathering Response

ThinkingJudgment


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First step to Automation : OEE improvement

OEE: Overall Equipment Efficiency

Definition:

Yield rate× Utilization of Equipment

Improvement of OEE:

Improvement of Yield

� Stabilize Quality of Final Product

Improvement of Utilization

� Increase Machine Productivity


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Approach to the improvement of OEE: EES

EES: Equipment Engineering System

Definition : Information collection / management system of factory

Management by EES

Machine Behavior

Alarm Management

Condition Report

Quality of Final Product

Quality Inspection

Data Acquisition and Analysis

SPC FDC

FDC: Fault Detection and ClassificationSPC: Statistical Process Control


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SPC: Statistical Process Control

Quality control with Statistical Methods

Based on the analysis of data from inspector

Stabilize/ optimize process to improve final quality

FDC: Fault Detection and Classification

A prediction mechanism of equipment condition to reduce

risks (Ex. Machine Alarm and Process Log)

About SPC & FDC

Alarm part!!

Fin

al th

ickn

ess

(us)

SPC : Quality stabilization (Yield Improvement)+ = OEE Improvement

FDC : Risk reduction (Utilization Improvement)


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Image of Factory managed by EES

Processing

Management by EES

Machine Behavior

Alarm Management

Condition Report

Quality of final product

Quality Inspection

Data Acquisition and Analysis

SPC FDC

FDC: Fault Detection and ClassificationSPC: Statistical Process Control

Central Server （EES）

Inspector Tester

Factory

Fundamental of automation is OEE optimization by the implementation of EES, before hardware construction (AGV, OHT etc)

Inspection


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Hierarchical relationship of SPC/FDC and APC

“Advanced Process Control”A systematic approach to control feed-back / feed-forward of process variation caused by

grouped equipments

The approach to APC (smart production) is based on the fundamental of SPC and

FDC

EDA

SPC/FDC

APC

APC: Advanced Process ControlR2R: Run to RunVM: Virtual Metrology

OEE: Overall Equipment EfficiencyFDC: Fault Detection and ClassificationSPC: Statistical Process Control

EDA: Equipment Data AcquisitionEES: Equipment Engineering System


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Automation based on EES

Automation in semiconductor industry , is realized by using of Control System (EES) for operating equipment with minimal or reduced human intervention

Management by EES

Machine Behavior

Alarm Management

Condition Report

Quality of final product

Quality Inspection

Data Acquisition

Production Automation

Host Management(GEM)

Automation Transportation

Quality information

Machine Condition Scheduling


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Machine venderMachine vender’’s roles role

FDC Function providerFDC Function provider


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FDC System(Embedded Or Optional)

FDC System(Embedded Or Optional)

Host on Customer's site

Ideal FDC function provided by equipment vender

Provides different levels of risk alarm for risk reduction

Provides necessary status information for SPC analysis (combing

with data from inspector)

Role of equipment vender in automation: FDC function

EDA

FDC

APC

FDC reports current machine

to the host


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Levels of Machine Condition Management

Level 1:Inherent alarm code Different alarm levels are pre-setup-ed when made

Mainly those represent the 1st machine condition management

Level 2:Extra machine/ process condition monitoring (SPC)Realized by information collection (Host site) of machine condition and inspection result

Level 3:Risk Management (FDC)Advanced machine alarm/ report function by real-time judgment of process condition

Some model adoption might have process dependences (modification required)

Spindle Driving Current Alarm!!

Water Flow abnormalEDA

FDC

APC


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Summary

Way to Smart Manufacturing

Optimize OEE with the implementation of EES

Cooperation network: Accumulation of experience

Equipment Vender

Smart condition report function (FDC)

Device Maker/ OSAT:

Fundamental Software environment construction (EES)

Build the SPC model based on the defect (from inspection)

approach to satisfy the requirement of factory automation · 2018-06-11 · approach to satisfy the...

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