atomic layer deposition: ald 101 - chip history · atomic layer deposition or ald •it’s much...

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Atomic Layer Deposition:

ALD 101

The Chip History CenterPreserving the History of Semiconductors for Future Generations

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Did you know that

chip makers

routinely make films

one atom at a time?





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Those atoms are better

organized than these tulips.





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It’s called:

Atomic Layer Deposition

or ALD• It’s much finer than either . . .

–Chemical Vapor Deposition (CVD)

–or Physical Vapor Deposition (PVD)





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CVD and PVD

throw down molecules haphazardly.





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ALD uses the natural bonds

on the base layer to self-assemble.





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Bonds in molecule ‘A’ hook up

with those on the green base layer.





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The bonds are like parking spaces for the A

atoms, filling up with more molecules.





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The A atoms also have bonds

for the yellow ‘B’ atoms.





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The atoms will not adhere . . .





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Unless they can find a bond.





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As more atoms flow over the surface of the

A atoms . . .





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The A level parking lot is filled up

with B atoms.





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Then it starts all over again.





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The A atoms are now linking to the open

bonds on the B atom layer.





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Soon the B level is filled up with A atoms

It won’t stop until the lot is saturated!





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But the atoms will only stick

were there are open bonds,





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making for perfectly uniform layers

a single atom thick.





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You can continue until the perfect film is

made to your exact specifications.





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And that’s ALD!





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Photography by

Dan Hutcheson

Story by

Jan & Dan Hutcheson

With many thanks for the support and

encouragement of

Aviza Technology





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The Chip History CenterPreserving the History of Semiconductors for Future Generations




atomic layer deposition: ald 101 - chip history · atomic layer deposition or ald •it’s much...

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