INTERNATIONAL

ELECTROTECHNICAL

COMMISSION

© IEC:2007

Dr. Norbert Fabricius

Karlsruhe Institute of Technology

Secretary IEC/TC 113

Secretary CLC/SR 113

Obmann DKE/K 141

IEC/TC 113: NANOTECHNOLOGY STANDARDIZATION FOR

ELECTRICAL AND ELECTRONIC PRODUCTS AND SYSTEMS

Standards for Electrotechnical Applications of Nanotechnologies

Standards and standardization as a tool for the dissemination and implementation of research results

Brussels, 2010-12-14

2

National and International Nanotechnology Standardization

© 2005 DIN Deutsches Institut für Normung e. V.

TC 229 (UK)NA 062-08-17 AA TC 352 (UK)

TC 113 (DE)SR 113 (DE)K 141

3

Overview nano-standardization within IEC and ISO

IEC/TC 113 ISO/TC 229

Health, safety

environment

Measurement,

characterization

Terminology,

nomenclature

Performance

assessment

IEC Delegate

A-liaison

Material

specification

AG Health, safety, environment

Reliability,

(material) FMEA

AGPrinted

electronics

2010-11: published / unpublished

8 / 241 / 7 3 / 10

4

Nano-enabled electrotechnical products (IEC/TC 113)

5

SEMI

IEEE

ISO/TC 229

TC

TC

TC

TCTC

IEC/TC 40Capacitors

and resistors forElectronicequipment

IEC/TC 47Semiconductor

devices

IEC/TC 48Electromechanicalcomponents andMech. structures

for electronicequipment

IEC/TC 56Dependability

IEC/TC 82Solar photovoltaic

energy systems

IEC/TC 86Fibre optics

IEC/TC 105Fuel cell

technologies

IEC/TC 110Flat panel

displaydevices

IEC/TC 111Environmental

standardization forelectrical and

electronic productsand systems

IEC/TC 21Secondary cells

and batteries

IEC/TC 33Power

capacitorsand their

applications

IEC/TC 34Lamps

and relatedequipment

IEC/TC 113Nanotechnology

standardization forelectrical and

electronic productsand systems

SEMI

IEEE

ISO/TC 229

TC

TC

TC

TCTC

ISO/TC 229

TC

TC

TC

TCTC

IEC/TC 40Capacitors

and resistors forElectronicequipment

IEC/TC 47Semiconductor

devices

IEC/TC 48Electromechanicalcomponents andMech. structures

for electronicequipment

IEC/TC 56Dependability

IEC/TC 82Solar photovoltaic

energy systems

IEC/TC 86Fibre optics

IEC/TC 105Fuel cell

technologies

IEC/TC 110Flat panel

displaydevices

IEC/TC 111Environmental

standardization forelectrical and

electronic productsand systems

IEC/TC 21Secondary cells

and batteries

IEC/TC 33Power

capacitorsand their

applications

IEC/TC 34Lamps

and relatedequipment

IEC/TC 113Nanotechnology

standardization forelectrical and

electronic productsand systems

IEC/TC 40Capacitors

and resistors forElectronicequipment

IEC/TC 47Semiconductor

devices

IEC/TC 48Electromechanicalcomponents andMech. structures

for electronicequipment

IEC/TC 56Dependability

IEC/TC 82Solar photovoltaic

energy systems

IEC/TC 86Fibre optics

IEC/TC 105Fuel cell

technologies

IEC/TC 110Flat panel

displaydevices

IEC/TC 111Environmental

standardization forelectrical and

electronic productsand systems

IEC/TC 21Secondary cells

and batteries

IEC/TC 33Power

capacitorsand their

applications

IEC/TC 34Lamps

and relatedequipment

IEC/TC 113Nanotechnology

standardization forelectrical and

electronic productsand systems

Current and potential liaisons for IEC/TC 113

6

NIS

T/I

EC

:

Inte

rnati

on

al S

urv

ey o

n S

tan

dard

s

for

Nan

o-e

lectr

ote

ch

no

log

ies

IEC

/TR

(to

be u

pd

ate

d e

ve

ry 2

years

):

Ro

ad

map

fo

r N

an

o-e

lec

tro

tech

no

log

ies

IEC Nanoelectronic Standards Roadmap

Electrotechnical applications of CNTs

Luminescent nanomaterials

Printed electronics

Nanoenabled batteries

Nanoenabled photovoltaic

Nanoscale contacts and interconnects

Reliability of nanoelectronic products

IEC

/TR

Nan

oscale

ele

ctr

ical

co

nta

cts

an

d in

terc

on

nects

(E

xp

ert

s w

an

ted

)

7

Standardization = Global Consensus AchievementExample IEC/TC 113

South Atlantic Ocean South Pacific Ocean

North Pacific Ocean

North Atlantic Ocean

Indian Ocean

Arctic Ocean

North Pacific Ocean

Hongkong

Taiwan

EconomiesEngineering Equipment P-Member

O-Member

8

National participation in IEC/TC 113

North Amerika

23%

Europa / DE

9% DE

5%

Asia

42%

Russ. Fed.

18%

Others

3%

North Amerika

25%

Europa / DE

19%

DE

10%

Asia

40%

Russ. Fed.

4%

Others

2%

12/200852 Experts

12/2010154 Experts

European participation decreases from 29% to 14%: Action required!

9

Progress by QM / Material and Process Control: Ramp up for DRAMs faster and faster

Need for standards which supports nanofabrication

10

Nano Enabled Product

Prof. Young Hee Lee,

Sungkyunkwan University, KO

Samsung

Example:

Flat Panel Displays made

from CNT

Value Adding Chain for Nano-Electronics

11

NanoScience

NanoMaterials &Processes

NanoSubassembly

Nano Enabled Product

System Integration

Subassembly#1

Subassembly#N

Prof. Young Hee Lee,

Sungkyunkwan University, KO

Samsung

Key Control Caracteristic:

An electrical property

describing the CNT raw

material for this application

Value Adding Chain for Nano-Electronics

12

The Value Adding Chain

NanoScience

NanoMaterials &Processes

NanoSubassembly

Nano Enabled Product

NanoscaleDrivenFailureModes

KCCs

Key Control Caracteristics

System Integration

Subassembly#1

Subassembly#N

TC 113's role inside IEC

Reliability

Nanomanu-

facturing

14

Standards for Nanofabrication

A B C D nano-subassembly outraw material in

IEC 62565

Material

Specifications

IEC 62607

Key

Control

Characteristics

IEC 62659

Nano

Manufacturing

Process

IEC 62xxx

Equipment

A B C D nano-subassembly outraw material in A B C D nano-subassembly outraw material in

IEC 62565

Material

Specifications

IEC 62607

Key

Control

Characteristics

IEC 62659

Nano

Manufacturing

Process

IEC 62xxx

Equipment

15

Material Specifications and Key Control Characteristics

A B C D Subassembly N+1Subassembly N

C‘ Test DeviceNano-Material

Property 1...

Property N

Hidden

Parameters

KCC 1

KCC 2

Process C‘ = Control Process C

16

V+ V-I+ I-

L

tCNT Ribbon

w

V+ V-I+ I-V+ V-I+ I-

LL

ttCNT RibbonCNT Ribbon

ww

Ha-Jin Lee, Korea Basic Science Institute, Jeonju Center, Project Leader IEC 62607

Key Control Characteristics: IEC/TS 62607

IEC 62607-2-1: Nanomanufacturing – Key control characteristics

Part 2-1 Carbon nanotube materials - Film resistance

Method to prepare a "ribbon" made from Carbon Nano Tubes and

perform measurement and report results:

Description of the properties measured by the method

Recommendation for sample preparation

Outline of the experimental procedures

Interpretation on results and discussions on data analysis

Case studies

17

IEC 62607-2-1: Nanomanufacturing – Key control characteristics

Part 2-1 Carbon nanotube materials - Film resistance

Method to prepare a "ribbon" made from Carbon Nano Tubes and perform measurement and report results:

Description of the properties measured by the method

Recommendation for sample preparation

Outline of the experimental procedures

Interpretation on results and discussions on data analysis

Case studies

15.1± 2.2114.4416.4318.2412.6014.00ρs (Ω/sq.)

36.138.252.136.038.9R (Ω)SWNT (E)

1.53± 0.151.791.521.531.401.43ρs (Ω/sq.)

6.47.67.479.55R (Ω)SWNT (D)

85.50± 5.3583.0778.8992.5389.0983.92ρs (Ω/sq.)

202.6225.4210.3185.6226.8R (Ω)MWNT (C)

656.17± 35.7679.5616.0620.0672.0693.3ρs (Ω/sq.)

13101680186019202080R (Ω)MWNT (B)

5.43± 0.025.435.425.415.455.45ρs (Ω/sq.)

20.3820.8327.0427.2719.03R (Ω)MWNT (A)

Av54321UnitsCNT

15.1± 2.2114.4416.4318.2412.6014.00ρs (Ω/sq.)

36.138.252.136.038.9R (Ω)SWNT (E)

1.53± 0.151.791.521.531.401.43ρs (Ω/sq.)

6.47.67.479.55R (Ω)SWNT (D)

85.50± 5.3583.0778.8992.5389.0983.92ρs (Ω/sq.)

202.6225.4210.3185.6226.8R (Ω)MWNT (C)

656.17± 35.7679.5616.0620.0672.0693.3ρs (Ω/sq.)

13101680186019202080R (Ω)MWNT (B)

5.43± 0.025.435.425.415.455.45ρs (Ω/sq.)

20.3820.8327.0427.2719.03R (Ω)MWNT (A)

Av54321UnitsCNT

Ha-Jin Lee, Korea Basic Science Institute, Jeonju Center, Project Leader IEC 62607

Key Control Characteristics: IEC/TS 62607

V+ V-I+ I-

L

tCNT Ribbon

w

V+ V-I+ I-V+ V-I+ I-

LL

ttCNT RibbonCNT Ribbon

ww

Ha-Jin Lee, Korea Basic Science Institute, Jeonju Center, Project Leader IEC 62607

18

IEC 62607-2-1: Nanomanufacturing – Key control characteristics

Part 2-1 Carbon nanotube materials - Film resistance

Method to prepare a "ribbon" made from Carbon Nano Tubes and perform measurement and report results:

Description of the properties measured by the method

Recommendation for sample preparation

Outline of the experimental procedures

Interpretation on results and discussions on data analysis

Case studies

15.1± 2.2114.4416.4318.2412.6014.00ρs (Ω/sq.)

36.138.252.136.038.9R (Ω)SWNT (E)

1.53± 0.151.791.521.531.401.43ρs (Ω/sq.)

6.47.67.479.55R (Ω)SWNT (D)

85.50± 5.3583.0778.8992.5389.0983.92ρs (Ω/sq.)

202.6225.4210.3185.6226.8R (Ω)MWNT (C)

656.17± 35.7679.5616.0620.0672.0693.3ρs (Ω/sq.)

13101680186019202080R (Ω)MWNT (B)

5.43± 0.025.435.425.415.455.45ρs (Ω/sq.)

20.3820.8327.0427.2719.03R (Ω)MWNT (A)

Av54321UnitsCNT

15.1± 2.2114.4416.4318.2412.6014.00ρs (Ω/sq.)

36.138.252.136.038.9R (Ω)SWNT (E)

1.53± 0.151.791.521.531.401.43ρs (Ω/sq.)

6.47.67.479.55R (Ω)SWNT (D)

85.50± 5.3583.0778.8992.5389.0983.92ρs (Ω/sq.)

202.6225.4210.3185.6226.8R (Ω)MWNT (C)

656.17± 35.7679.5616.0620.0672.0693.3ρs (Ω/sq.)

13101680186019202080R (Ω)MWNT (B)

5.43± 0.025.435.425.415.455.45ρs (Ω/sq.)

20.3820.8327.0427.2719.03R (Ω)MWNT (A)

Av54321UnitsCNT

Ha-Jin Lee, Korea Basic Science Institute, Jeonju Center, Project Leader IEC 62607

V+ V-I+ I-

L

tCNT Ribbon

w

V+ V-I+ I-V+ V-I+ I-

LL

ttCNT RibbonCNT Ribbon

ww

Ha-Jin Lee, Korea Basic Science Institute, Jeonju Center, Project Leader IEC 62607

Key Control Characteristics: IEC/TS 62607

21

Excerpt from the work programme

PWI/TR 62565: Nanomanufacturing - Material specifications

Part 1 - Basic concept

Part 2-1: Single-wall carbon nanotubes - Blank detail

specification

IEC/TS 62607-2-1: Nanomanufacturing - Key control characteristics

Part 2-1: Carbon nanotube materials - Film resistance

Part 3-1: Luminescent nanoparticles - Quantum efficency

IEC/IEEE 62659 Large scale manufacturing of nanoelectronics

PWI/TR 113-70: IEC nano-electronics standards roadmap

PWI/TR 113-69: Nanoscale electrical contacts

PWI 113-91: Guidelines of quality assessment for surface

engineered nano electrotechnical products

22

Participation of Academia in the Development of Standards

Requirements

Work items

Standards output

National level

IEC Technical Committees

National Committees

Expert

resources

Industry

Government

Academia

Users

Etc.

Increase the participation of academia in the standardization process

Mandatory evaluation of research projects regarding their impact on standardization

Benefit of participation in standardization for the academic career

Founding of travelling cost to international standardization meetings

Scientific

back bone

23

Importance of Nanotechnology Standardization in the Chinese

Scientific Community

24

Summary

EU commission should increase attention to commercial aspects of nanotechnology standardization!

Companies needs clear and easy to implement nanotechnology risk management processes!

Need for standards which supports nanofabrication!

European participation in nanoelectronic standardization decreases from 29% to 14%: Action required!

Research organizations shall act as a scientific backbone to support technical work!

Standardization requirements shall be evaluated in any research project!

25

"Summary" or "is there any Benefit from Standardization" ?