electrical engineering department presenter: robert mackinnon jr. advisor: prof. mustafa guvench
DESCRIPTION
Design of a Test System and Packaging of SOI-MEMS Resonators for High Temperature Characterization. Electrical Engineering Department Presenter: Robert MacKinnon Jr. Advisor: Prof. Mustafa Guvench Coauthor: Joshua Ward. MEMS Test Setup : HP 54504A Digital Oscilloscope - PowerPoint PPT PresentationTRANSCRIPT
Micro-Electro-Mechanical-Systems (MEMS) devices bring some of the
miniaturization that was portrayed in the 1966 classic film “Fantastic Voyage” to
reality. These tiny machines are being used as pumps, motors and sensors for a
variety of different applications. USM Professor Mustafa Guvench has recently
designed and fabricated a MEMS resonator for use in gas sensing and
frequency control applications. Ordinarily these types of devices can be tested
utilizing micro-manipulated electro-probing, however given the unique and
varied environmental conditions of the potential applications; a new means of
testing will need to be developed as part of chip research and development.
The scope of this project is the packaging and testing of the resonator at
high temperatures and under exposure to different gases and concentrations of
gases. Once successful tested under these conditions, the MEMS resonators
will provide a very inexpensive, reliable and miniature means of testing and
monitoring atmospheric conditions. Potential uses may include many health
and safety uses, as well as space exploration and defense applications.
Micro-Electro-Mechanical-Systems (MEMS) devices bring some of the
miniaturization that was portrayed in the 1966 classic film “Fantastic Voyage” to
reality. These tiny machines are being used as pumps, motors and sensors for a
variety of different applications. USM Professor Mustafa Guvench has recently
designed and fabricated a MEMS resonator for use in gas sensing and
frequency control applications. Ordinarily these types of devices can be tested
utilizing micro-manipulated electro-probing, however given the unique and
varied environmental conditions of the potential applications; a new means of
testing will need to be developed as part of chip research and development.
The scope of this project is the packaging and testing of the resonator at
high temperatures and under exposure to different gases and concentrations of
gases. Once successful tested under these conditions, the MEMS resonators
will provide a very inexpensive, reliable and miniature means of testing and
monitoring atmospheric conditions. Potential uses may include many health
and safety uses, as well as space exploration and defense applications.
Electrical Engineering DepartmentElectrical Engineering DepartmentPresenter: Robert MacKinnon Jr.Robert MacKinnon Jr. Advisor: Prof. Mustafa GuvenchProf. Mustafa Guvench
Coauthor: Joshua WardJoshua Ward
Electrical Engineering DepartmentElectrical Engineering DepartmentPresenter: Robert MacKinnon Jr.Robert MacKinnon Jr. Advisor: Prof. Mustafa GuvenchProf. Mustafa Guvench
Coauthor: Joshua WardJoshua Ward
Frequency Response of a
SOI-MEMS Resonator
Magnitude(yellow) & Phase(blue)
MEMS wire bonding diagram
SOI- MEMS chip, size 5 mm x 5 mm wire
bonded to a 44-pin J-LDCC gold package
MEMS Test Setup:
HP 54504A Digital Oscilloscope
HP 5335A Universal Counter
HP 4194A Spectrum Analyzer
KI 213 Programmable Source
Virtual temperature controller
Wire bonding machine
Design of a Test System and Packaging of SOI-MEMS Resonators Design of a Test System and Packaging of SOI-MEMS Resonators for High Temperature Characterizationfor High Temperature Characterization