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Page 1: Flash - University of Mohaghegh Ardabili · J PECVD-RIE PECVD(P1asma Enhanced Chemical vapor Deposition) 4.3 IE(Reactive Ion Etching) I .5±3 e

Page 2: Flash - University of Mohaghegh Ardabili · J PECVD-RIE PECVD(P1asma Enhanced Chemical vapor Deposition) 4.3 IE(Reactive Ion Etching) I .5±3 e

Page 3: Flash - University of Mohaghegh Ardabili · J PECVD-RIE PECVD(P1asma Enhanced Chemical vapor Deposition) 4.3 IE(Reactive Ion Etching) I .5±3 e

Page 4: Flash - University of Mohaghegh Ardabili · J PECVD-RIE PECVD(P1asma Enhanced Chemical vapor Deposition) 4.3 IE(Reactive Ion Etching) I .5±3 e

Page 5: Flash - University of Mohaghegh Ardabili · J PECVD-RIE PECVD(P1asma Enhanced Chemical vapor Deposition) 4.3 IE(Reactive Ion Etching) I .5±3 e

Page 6: Flash - University of Mohaghegh Ardabili · J PECVD-RIE PECVD(P1asma Enhanced Chemical vapor Deposition) 4.3 IE(Reactive Ion Etching) I .5±3 e

Page 7: Flash - University of Mohaghegh Ardabili · J PECVD-RIE PECVD(P1asma Enhanced Chemical vapor Deposition) 4.3 IE(Reactive Ion Etching) I .5±3 e

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