Furnaces and wet benches

Savitha P

• Entry submitted for KLA Tencor contest: “Very informative and precise entry”, as per KLA– Thank you Prof. Akshay Naik

• All first nano furnaces and wet benches working fine after the maintenance

• RTP gas line hook up scheduled next week– Waiting for the pump delivery

• Tempress furnace under maintenance– Problems with the thermocouple, heating element– Replace? (~Rs.50,000 & Rs.4,90,000/- respectively)– Difficulty in finding a source for a small POCl3 bubbler

Update

Current status• Will try to make all tubes operational with the

available resources– Boron diffusion (BN disc), Metal anneal, dielectric

anneal/oxidation, Phosphorus diffusion?– Manage offsets– Painting and power coating to improve appearance– Option of a solid source for Phosphorus deposition

(active component Silicon Pyrophosphate (SiP2O7) carried on an inert porous Silicon Carbide (SiC) substrate – single disc $111).

Current Status

Some pics

Wooden legs covered with Al films

Stainless Steel legsBefore After

Cleaning

Thank you