kla-tencor p7 stylus profiler p7.pdf · kla-tencor p7-121016-05 3 5/19/17 use the appropriate...

KLA-Tencor P7-121016-05 1 5/19/17

Wisconsin Center for Applied Microelectronics

1550 Engineering Drive Phone: 608/262-6877

Madison, WI 53706 Fax: 608/265-2614

KLA-Tencor P7 Stylus Profiler

Material Restrictions: All materials on your sample must be on the “allowed materials list” for this tool before using it. NO EXCEPTIONS. It is the user’s responsibility to make sure that the material(s) they are putting in a tool is on the allowed materials list for that tool. Here is how to check the Allowed Materials list for WCAM tools:

1. Go to WCAM’s website at: http://wcam.engr.wisc.edu/

2. Click on the “Chemicals in the Lab” link.

3. Click on the link at the top of the page “LIST OF APPROVED MATERIALS”.

4. Scroll thru the document to find the tool you want to check the materials list for or hit Ctrl + F to bring up a search bar for the document and type in the tool’s name that you want to check the materials list for.

5. If the material(s) that you want to use in a tool are not on the approved list for that tool you may not put your sample in the tool. If you have no other way to process your sample and think it makes sense to use a particular material in a tool you may request that it be added to that tool’s material list by filling out the form on the “Chemicals in the Lab” webpage listed as “New Material Request Form”. Then email your material request form along with a MSDS for the material to the WCAM lab manager. The request will be reviewed by the WCAM advisory committee and you will get an email back from the lab manager approving or denying your material request for a particular tool.

http://wcam.engr.wisc.edu/

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1INSTRUMENT OVERVIEW

The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution.

The P7 system in WCAM is equip’d with the Standard head configuration.

The MicroHead V SR (standard range) has a vertical range of 327 um and is capable of scanning at forces between 0.5 and 50 mg.

The WCAM unit has a 2um radius tip with a 60° angle installed that limits the maximum force to 2 mg.

The system includes manual theta stage with stops at 45° increments and a fine theta adjustment of

± 5°.

Measurement of film stress is not supported at this time. Please use the Film Stress Tool.

Safety:

The unit has all moving parts enclosed. Do not operate the tool with the load door open.

Do not open the load door while the stage is moving.

Do not reach into the tool except to place your sample on the chuck. Do not put your

hands under the scan head, you could damage the stylus.

The Status Message Bar on the bottom of the screen may alert you to issues related to

safety.

Tool Limitations:

The performance of the tool is dependent on proper operation by the user and by not exceeding the

tool capability by trying to measure something that does not match the tool specs/capability. Do not

try to measure samples that are too thick and big in size for the instrument. Do not measure steps

heights that are beyond the range of the tool. Do not move the stage with the tip lower than the

sample top surface.

Sample Size requirements/restrictions:

Vertical range 0-327um

2um diamond stylus with a 60 degree cone angle.

Substrates sizes from 3mmx3mm up to 150mm in diameter

Maximum substrate thickness of 3mm. This would include the thickness of a sample holder used to position the sample on the chuck.

Maximum scan length of 150 mm. Limitations on materials. No uncured su8, no uncured PDMS, uncured PR, no soft

material that might stick to the stylus.

Do not measure any cantilevers or thin membranes, you may damage stylus.

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Use the appropriate sample locators or jigs for your sample. If you find that your sample does not work with the established sample locators and jigs, contact the Staff tool owner to discuss your needs. A method to measure your samples will be worked out with you and then approved for use. DO NOT attempt to measure your sample using methods that have not been approved. You will lose your access to the tool if you do not follow procedures.

For the Small Samples Holders, the 2”x3” glass plate is about 1mm thick so the sample on it cannot

exceed 2mm for a total thickness <3mm (1mm + samples thickness < 2mm).

2PROTECTING THE STYLUS ARM ASSEMBLY

2System Provisions for Stylus Protection

The P7 Profiler incorporates several design features that protect the stylus from damage. (See Stylus Arm

Assembly Protection)

Tabl e 2. 2 Stylus Arm Assembly Protection

Protection Name Stylus Arm Protective Measure Description of Result

Data Point Saturation During an ascending scan, the scan is

terminated when the stylus reaches its

upper limit of travel (when it has pivoted

up as high as it can go)

The stylus automatically retracts and the scan

is terminated. In the Scan window, the trace

ascends and flat lines at the top of its range.

Lowest Elevator

Position

As a safety factor, the elevator can be

programmed to lower only to a preset

limit.

With the Lowest Elevator Position properly set,

when the measurement head is lowered, it

only goes as far as the setting allows, thus

protecting the stylus and sample from

damage.

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2Potential Stylus Damage During Scans

Despite precautionary features, there are still circumstances where damage can occur.

Damage occurs whenever the stylus is down and a vertical wall that is fixed to the stage moves against the stylus shaft.

The stylus can be damaged whenever it encounters an obstacle higher than the bevel height of the stylus tip (higher than 440 µm (17 mils) for the MicroHead L-style stylus.

The stylus can be damaged by a shorter object if it has sharp corners or burrs that bite into the stylus tip.

If the stylus is lowered or a scan is started when the sample is not directly under the stylus, damage to the stylus could occur.

This is most likely to happen when lowering the measurement head such that the stylus drops into the center hole of a hard disk or misses the edge of the sample. Then when the stage is moved, the stylus is damaged.

For small samples in WCAM you will use a holder to locate the small sample to a reference edge

and then place this holder in a specified spot on the chuck. In addition you will pick a sample size

from a menu that will help limit the travel of the stage to the sample size and help you navigate on

the die size that you are using. Please understand how this is done and apply caution so that the

probe tip is not damaged.

If you feel that you do not have the holder you need for your sample, STOP and get staff support.

Staff can help to address the problem including making a new fixture for you sample needs.

Scan Direction

Damage can

occur with steps

higher than the

bev el height.Bev el Height

Bev el Height is

440 µm (17 mil) f or

MicroHead L-sty li

CAUTION:

Do not start a scan unless the stylus is directly over the sample or damage to the stylus or head could

occur.

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Samples and Sample Chuck:

The P-7 has a universal chuck to accommodate wafer and wafer stress applications for either 2, 3, 4, 5 or 6 inch samples. The chuck has a series of holes that accept pins to provide precision alignment of the sample. The pair of holes are used for aligning the wafer flat or for non-flatted wafer, the edge of the sample. The single hole is for aligning the other edge of the sample. To switch between wafer sizes, move the pins between wafer holes.

Wafer Precision Locators:

-in. for Wafer with Flat/Square Substrate



-in. for Wafer with Notch





WAFER Examples:

3” wafer mounted on Chuck

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100mm wafer mounted on Chuck

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Moving the pins to desired location:

A tool with a magnetic tip is used to pick-up and hold the pin from the storage container or the

current location on the chuck. The tool is used to move the pin for location to location.

CAUTION – Do Not get the tool close to the probe head or probe.

The pin is installed by locating the desired hole and lowering the pin into the hole.

Move the tool off to the side leaving the pin in the hole.

To help minimize the chance of moving off the sample surface and then hitting the edge of the

sample or alignment pin when moving the stage, the proper sample size must be chosen from the

Sample Configuration Menu.

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SMALL Samples:

A Small Sample holder is used to locate the small samples on the chuck. It is a glass plate with

references that will be placed on the center of the chuck after your sample has been placed on it.

There will be several holders available and the one to match your sample size must be used. The

glass plate is 50x75mm and will be referenced against three pins on the chuck.

Your sample will be placed on the holder with its edges against the Kapton tape reference edges.

When the chuck is loaded it will be positioned so that the center of the check is at (0,0) in the

coordinate system. This is where the first focus of the sample will take place.

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The chuck is 6” with an x-y coordinate system that is based on the center of the chuck being (0,0).

To help minimize the chance of moving off the sample surface and then hitting the edge of the

sample when moving the stage, the proper sample size must be chosen from the Sample

Configuration Menu.

Open the Menu Item.

Pick the correct configuration to match your sample and holder.

Set the configuration as Active.

Close the menu

(0, 0)

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A Table of what the options are and how they apply to User’s samples follows.

Menu Option Name Wafer Radius um

Origin (um,um)

X um Y um

WAFER_SIZE_2 2” Waf 25500 0.0





RECTANGLE_SIZE_1 3x3 mm 0.0 3000 3000

RECTANGLE_SIZE_2 10x10 mm 0,0 10000 10000




Examples of the different

fixtures to match your sample

size:

SIZE_1 (3x3 mm)

and SIZE_3 (20x20 mm)

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When you place your sample on the holder or chuck you should orient it so that the feature you want to scan

has edges that are vertical since the scan will be horizontal from left to right.

Your sample must match the size of the fixture and located against the reference edges.

The sample cannot be smaller than the required size or randomly placed on the holder.

The sample can be larger than the intended fixture as long as it can be referenced against the

edges. Only the area of the stated size of the fixture will be available to be scanned so your area of

interest must be in that area.

Example 1 Example 2 Example 3

Example 1) Sample is too small and not against the reference.

DO NOT USE THIS COMBINATION

Example 2) Sample matches the fixture and is against the reference edges.

Example 3) Sample is larger than the scan area and is against the reference edges. Area of sample

outside of the scan area will not be available for measurements.

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The Chuck can be rotated about the origin. Normally you would not have to rotate the chuck by 90 degrees.

There is a Fine Theta adjustment for the chuck that should be used for <5 deg adjustments.

When you place your sample on the holder or chuck you should orient it so that the feature you want to scan

has edges that are vertical since the scan will be horizontal from left to right.

A) Normal Load Position (detent at 0 deg.)

B) Rotated to 45 deg. Detent. Do not use this position. It would allow areas to be scanned that are

lower than the sample and off the sample surface. This could result in damage to the scanning tip.

C) Rotated 90 deg. (detent at 90 deg.) Do not use this position if your feature for measurement is

in the scan area and needs to be rotated. The system does not rotated perfectly about (0.0) so the

allowed scan area will not be correct and the tip may be off the sample surface.

A

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Theta Adjustment: +/- 5 deg.

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Measurement Procedure:

Outline

1) Log tool out in CRESS

2) Log on to the P7 tool.

3) Identify the method that will be used to hold your sample for measurement.

4) Open the Recipe Screen and then X-Y Screen

5) Load sample on Chuck and complete the Manual Load.

6) Pick the correct sample configuration for your sample and set it as Active.

7) Focus on Sample

8) Pick the Scan recipe that will be used.

9) Adjust parameters in the recipe.

10) Teach the recipe with your sample.

11) Make measurements

12) Do Measurement Analysis

13) Record results and/or save results.

14) Unload sample.

15) Log Off tool.

16) Log tool back into CRESS.

Log into CRESS and log out the tool.

Log into the KLA-Tencor P7

User name: Operator

Password: Operator

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When the program starts it open to the Profiler CATALOG Screen:

Highlight the OPERATOR recipes in the Recipe Path:

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Open the X-Y Screen:

Open the Sample Configuration and select the correct configuration for

your sample, Set it as Active.

Click on MAN LOAD to load your sample on the chuck:

The stage will move to the door. Open the door and place your sample on the stage in the proper

orientation.

Turn on the vacuum switch located on the inside left edge of the door. Close the door.

Click MAN LOAD to move the stage back under the system head.

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Close the X-Y window and go back to the Profiler Screen to pick a SCAN Recipe.

This Example will use the BASIC 2D recipe:

Click on the SCAN RECIPE to open the recipe options:

If you know that you want to change parameters in the recipe you can do it now. It can also be done

later.

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Open the X-Y Screen OR Press the Teach button.

With the sample loaded on the stage, Click the FOCUS button to null the stylus on the sample

surface and focus. The magnification can be changed as needed for your sample but it is best to

monitor movement of the stage using the lowest magnification.

When Focus is done you should see an image of your sample.

Verify that you have the correct sample configuration for your sample by opening the sample

menu and the configuration menu.

You will now need to navigate to the structure or feature that you want to measure.

To protect the stylus please follow a few basic rules:

Do not move the stage when you can no longer see your sample. Normally picking the correct

configuration will limit the stage travel to an area that will be on your sample.

If you can see the edge of the sample DO NOT continue to move OFF the sample.

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If you find that you are OFF the sample or do not know where you are on the sample…STOP. Raise

the head up before you move so that the tip does not hit an edge or structure that is too large and

will result in breaking the probe. The easiest way is to reload the sample and start in the loading

position (0, 0).

If you FOCUS when OFF the sample you will have lowered the tip and moving the stage at this time

is likely to break the probe …. STOP. Contact Staff for help.

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Moving around your sample is done using the Area Map or the arrow buttons along with the

movement speed buttons.

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Once you have your structure identified you can set up the scan that you want over the structure of

interest. In this example the blue line represents the scan an it has been set up to scan over two of

the features (right one and blue line is out of the field of view).

Push START and the Scan will begin;

CAUTION – Do not SCAN if you cannot see the device and features you want to measure.

And continue till the scan length is finished.

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The finished Scan will be displayed.

The scan can now be leveled using the Level function and moving the cursors over the areas that

you want to level by. When the cursors are in the correct location PRESS the CALC button.

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The features can be measured by placing the measurement cursors where you want to make the

measurement. The values based on the cursor positions will be displayed on the left side of the

screen.

When you are done with your measurements Press MANUAL LOAD to move your sample to the

unload position.

Wait for the stage to stop at the door.

Open the door.

Turn of the vacuum to the stage.

Remove your sample.

Close the door.

Close the X-Y window.

Close the Recipe window and do not save your recipe parameters. If you want the setup to be added

as a recipe, contact the staff to help do this.

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Logging OFF the tool as an Operator:

On the Catalog Screen, OPEN “File” and PICK “Logoff” from the menue

Clean up the area as needed.

Log off the tool in CRESS.

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Recipe Parameters:

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kla-tencor p7 stylus profiler p7.pdf · kla-tencor p7-121016-05 3 5/19/17 use the appropriate...

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