PYJ Co.,Ltd.

Metrology system support

( KLA/Tenco, Veeco )

SEMICONDUCTOR LEADING SERVICES

PYJ Co.,Ltd.

Metrology system support

( KLA/Tenco, Veeco )

Business area

“Best Service” for Measurement & Inspection Systems Service Provide Audit, De-installation and Installation Refurbishment Spare parts & modules Part repair, retrofit & modification process

Machine Sales As Is & Working Condition

Guaranty Process Performance Service Contract Standard Wafers & Manuals

SEMICONDUCTOR LEADING SERVICES

Business area

“Best Service” for Measurement & Inspection Systems Service Provide Audit, De-installation and Installation Refurbishment Spare parts & modules Part repair, retrofit & modification process

Machine Sales As Is & Working Condition

Guaranty Process Performance Service Contract Standard Wafers & Manuals

Business area – Target business

• Installation & relocationEOS contractLabor service• Component & jig processingParts sourcing

• Used metrology Equipment :

SEMICONDUCTOR LEADING SERVICES

Parts sourcing

• Used metrology Equipment :

Support Tool List

Maker : KLA-Tencor- OP Series, TP Series

- AS200, AS500, ASIQ

- P1.2.10,11,12,15,16,20,22,240

- HPR-220,240

Maker : Veeco- DT3, DT6M, V200, V300

- D3000,5000,7000,9000

- Vx210,330,340

SEMICONDUCTOR LEADING SERVICES

Maker : KLA-Tencor- OP Series, TP Series

- AS200, AS500, ASIQ

- P1.2.10,11,12,15,16,20,22,240

- HPR-220,240

Maker : Veeco- DT3, DT6M, V200, V300

- D3000,5000,7000,9000

- Vx210,330,340

Capability – Service for KLA-Tencor

Bright Field Equipment

KLA 2138,2139 KLA 2350,2360,2365 KLA 2367

SEMICONDUCTOR LEADING SERVICES

KLA 2138,2139 KLA 2350,2360,2365

Dark Field Equipment

AIT 1 AIT 2 AIT XP AIT UV

KLA 2367

Capability – Service for KLA-Tencor

UV & F5x Series Equipment

UV1050 UV1250 & UV1280SE F5x,F5x100,F5x200,SFx200

SEMICONDUCTOR LEADING SERVICES

Resistivity Measurement Equipment

RS35 RS55 RS75TCA RS100

Capability – Service for KLA-Tencor

Surface of Metrology Equipment

AS500 & ASIQ P-10,P11,P12 P22 & HRP200,HRP220 HRP340,HRP350

SEMICONDUCTOR LEADING SERVICES

Stress measurement Equipment

FLX2320 FLX5400

Capability – Service for KLA-Tencor

Non Pattern Inspection Equipment

SP1 CLASSIC SP1 TBI

SEMICONDUCTOR LEADING SERVICES

SP1 CLASSIC SP1 TBI

Automated Optical Overlay metromogy

Archer 10

Capability – Service for Rudolph

Film Thickness Measurement Equipment(Non Metal)

FE-4 FE-7 S200

SEMICONDUCTOR LEADING SERVICES

Film Thickness Measurement Equipment(Metal)

MetaPulse200

Capability – Service for HITACHI

CD-Measurement SEM Equipment

SEMICONDUCTOR LEADING SERVICES

S4500 & S5000

S9200 & S9220Se

S8840

S9380 & S9380II

Capability – Service for AMAT

CD-Measurement SEM Equipment

S8840

SEMICONDUCTOR LEADING SERVICES

SEMVision Cx SEMVision G2

Capability – Service for AMAT

CD-Measurement SEM Equipment

S8840

OEM Application ToolFamily ToolDetails Remark

Pattern/NonPattern

ParticleInspection BrightField 21XXseries,23XXseries,&28XXseries Pattern

DarkField SFS7XXXseries,AITseries

FilmThickness FaST

PrometrixUVseries

RSseries(Resistivitymeasurement)

F5,F5x,SFx100,SFx200

SurfaceofMetrology SMD

AS500,ASIQ,Profilerseries

HRPseries

SP1Classic,SP1TBI,FLX2350,2908,5200,5400

Capability – service for KLA-Tencor,Rudolph

SEMICONDUCTOR LEADING SERVICES

KLA-Tencor Pattern/NonPattern

SurfaceofMetrology SMD SP1Classic,SP1TBI,FLX2350,2908,5200,5400

Overlay OMD Archerseries

Rudolph FilmThickness Non-metalFilm FEseries,S200 Pattern/NonPattern

MetalFilm MP200

OEM Application ToolFamily ToolDetails Remark

Pattern/NonPattern

KLA-Tencor

Overlay OMD 5XXX,5300XP

OutsourcingOnly

FilmThickness

TP OLD,5XX

500

OP 2XXX,3XXX,5XXX

Hitachi CDSEM SEM S8XXX&S9XXX

AMAT Review&CDSEM SEM VeritySEM,SEMVisionCx

Performance of 2011

Deinstallation & Audit :Area : Yokkaichi, Japan. Customer : ToshibaItems : Support 8 inch FAB Closing.Equipment Model : P-8, Fe-7, NRM1000, P-2, RS35, Verity SEM, Opti5, Compass,

FLX2418, RIGAKU3630.OEM : KLA-Tencor,Rudolph,AMATArea : SAS, USAItems : DeinstallationEquipment Model : AXI 930OEM : Rudolph company

Relocation :

SEMICONDUCTOR LEADING SERVICES

Performance of 2011

Deinstallation & Audit :Area : Yokkaichi, Japan. Customer : ToshibaItems : Support 8 inch FAB Closing.Equipment Model : P-8, Fe-7, NRM1000, P-2, RS35, Verity SEM, Opti5, Compass,

FLX2418, RIGAKU3630.OEM : KLA-Tencor,Rudolph,AMATArea : SAS, USAItems : DeinstallationEquipment Model : AXI 930OEM : Rudolph company

Relocation :Area : Iwate, Japan. Customer : ToshibaItems : RelocationEquipment Model : SEMVision Cx , SEMVision G2OEM : AMAT

Performance of 2011

Refurbishment & Installation :Area : Buchon, Korea. Customer : Fairchild KoreaItems : 8 inch FAB Project.Equipment Model :

1. Fe-7, 3EA2. SP1 Classic, 1EA3. MetaPulse 200, 1EA4. AITXP, 2EA5. P-11, 1EA6. RS75, 2EA

OEM : KLA-Tencor,Rudolph.Total : 10EA

SEMICONDUCTOR LEADING SERVICES

Performance of 2011

Refurbishment & Installation :Area : Buchon, Korea. Customer : Fairchild KoreaItems : 8 inch FAB Project.Equipment Model :

1. Fe-7, 3EA2. SP1 Classic, 1EA3. MetaPulse 200, 1EA4. AITXP, 2EA5. P-11, 1EA6. RS75, 2EA

OEM : KLA-Tencor,Rudolph.Total : 10EA

Performance of 2011

Service History :Area : Japan, Korea.Customer : Magnachip, Dong bu, Fairchild Korea, SAMSUNG, Toshiba, and etc.Items : Replacement of Parts, Troubleshooting, Preventative Maintenance.Equipment Model : AIT1, AITXP, SP1 CLASSIC, UV1250SE, KLA2360,HRP340, P-240,

RS35, RS55, MetaPulse 200, P-22, P-2, F5x, RS75, Archer10,SEMVision Cx, SEMVision G2,P-11, S9200,S9220S, S8840,etc.

OEM : KLA-Tencor, Rudolph, AMAT, HITACHI.

SEMICONDUCTOR LEADING SERVICES

Performance of 2011

Service History :Area : Japan, Korea.Customer : Magnachip, Dong bu, Fairchild Korea, SAMSUNG, Toshiba, and etc.Items : Replacement of Parts, Troubleshooting, Preventative Maintenance.Equipment Model : AIT1, AITXP, SP1 CLASSIC, UV1250SE, KLA2360,HRP340, P-240,

RS35, RS55, MetaPulse 200, P-22, P-2, F5x, RS75, Archer10,SEMVision Cx, SEMVision G2,P-11, S9200,S9220S, S8840,etc.

OEM : KLA-Tencor, Rudolph, AMAT, HITACHI.

Project Location Customer Remarks

De-installation&Audit Japan(Yokkaichi) T社Support8"FABclosingMachinemodel:P-8,FE-VII,NRM1000,P-2,RS35,VERITYSEM,OPTI5,COMPASS,COMPLUS,SEM-VISIONCX,S-5XXX,SFS-6420,FLX-2418,SYSTEM-3630

De-installation&Audit America(SAS)

S社 AXI930de-installation

FC8"FABProject(Refurbishment&sales)

Korea(Bucheon)

FC社 FE-VII(3ea),SP1classic(1ea),MP200(1ea),AITXP(2ea),UV1280SE(3ea),P-11(1ea)

Refurbishment&Installation Japan(Odawara)

H社 Refurbished&installatedforArcher10150mmDualOpenHandlermachine

Performance summary– 2011

SEMICONDUCTOR LEADING SERVICES

Relocation Japan(Iwate)

T社 SEMVISIONCXandG2relocation

AITXP6"Retrofit SouthKorea(Bucheon)

FC社 Retorifited8"AITXPto6"

Servicehistory

Japan(Yasu)

O社 AIT1Laserreplacement,AODreplacement,andstageissue

Korea(Sangwoo)

D社 SP1Tbiaperturereplacement

Korea(Kumi)

J社 KLA2360TDIrepair&replacement

Japan(Tokyo)

T社 UV1250opticalignment&detectorreplacement

Korea(Yongin)

S社 HRP340,HRP240,RS75,RS55,P-22,P-2,AITXP,F5X,HITACHISeries

Performance of 2012

Deinstallation & Relocation :Area : Nagasaki, Japan. Customer : SONYItems : Relocation 8 inch FAB.Equipment Model :

1. KLA2360, 1EA2. AIT2, 1EA3. AITXP, 1EA4. MP200, 1EA5. SEMVision G2, 1EA6. F5x, 2EA7. UV1280SE, 1EA8. S9260, 3EA, S9220, 1EA10. FSM128, 1EA

OEM : KLA-Tencor,Rudolph,AMAT,HITACHITotal : 13EA

SEMICONDUCTOR LEADING SERVICES

Performance of 2012

Deinstallation & Relocation :Area : Nagasaki, Japan. Customer : SONYItems : Relocation 8 inch FAB.Equipment Model :

1. KLA2360, 1EA2. AIT2, 1EA3. AITXP, 1EA4. MP200, 1EA5. SEMVision G2, 1EA6. F5x, 2EA7. UV1280SE, 1EA8. S9260, 3EA, S9220, 1EA10. FSM128, 1EA

OEM : KLA-Tencor,Rudolph,AMAT,HITACHITotal : 13EA

Performance of 2012

Sale & Retrofit, Installation :Area : Ansung , Korea. Customer : KTCItems : Sale and Retrofit(200mm to 300mm), Installation for 300mm FAB.Equipment Model : AITXP with 300mm wafer.OEM : KLA-Tencor.

Area : Buchon, Korea. Customer : Dong Bu SemiconductorItems : Sale and Installation for 200mm FAB.Equipment Model : SL200 with dual SMIF Handler.OEM : Rudolph.

Area : Yongin, Korea. Customer : SAMSUNGItems : Sale and retrofit , installation for 200mm FAB.Equipment Model : Retrofit AIT1 for 1.5T wafer

Retrofit AIT1 for 4 inch, 6 inch, 8 inch wafer

SEMICONDUCTOR LEADING SERVICES

Performance of 2012

Sale & Retrofit, Installation :Area : Ansung , Korea. Customer : KTCItems : Sale and Retrofit(200mm to 300mm), Installation for 300mm FAB.Equipment Model : AITXP with 300mm wafer.OEM : KLA-Tencor.

Area : Buchon, Korea. Customer : Dong Bu SemiconductorItems : Sale and Installation for 200mm FAB.Equipment Model : SL200 with dual SMIF Handler.OEM : Rudolph.

Area : Yongin, Korea. Customer : SAMSUNGItems : Sale and retrofit , installation for 200mm FAB.Equipment Model : Retrofit AIT1 for 1.5T wafer

Retrofit AIT1 for 4 inch, 6 inch, 8 inch wafer

Performance of 2012

Service History :Area : Japan, India, Korea.Customer : Magnachip, Dong bu, Fairchild Korea, SAMSUNG, Toshiba, and etc.Items : Replacement of Parts, Troubleshooting, Preventative Maintenance.Equipment Model : AIT1, AITXP, SP1 CLASSIC, UV1250SE, KLA2360,HRP340, P-240,

RS35, RS55, MetaPulse 200, P-22, P-2, F5x, RS75, Archer10, SP1 TBI,SEMVision Cx, SEMVision G2,P-11, S9200,S9220S, S8840,S9200,etc.

OEM : KLA-Tencor, Rudolph, AMAT, HITACHI.

SEMICONDUCTOR LEADING SERVICES

Performance of 2012

Service History :Area : Japan, India, Korea.Customer : Magnachip, Dong bu, Fairchild Korea, SAMSUNG, Toshiba, and etc.Items : Replacement of Parts, Troubleshooting, Preventative Maintenance.Equipment Model : AIT1, AITXP, SP1 CLASSIC, UV1250SE, KLA2360,HRP340, P-240,

RS35, RS55, MetaPulse 200, P-22, P-2, F5x, RS75, Archer10, SP1 TBI,SEMVision Cx, SEMVision G2,P-11, S9200,S9220S, S8840,S9200,etc.

OEM : KLA-Tencor, Rudolph, AMAT, HITACHI.

Project Location Customer

Remarks

Relocation&de-installation Japan(Nagasaki)

S社 Relocation:KLA2360,AIT2,AITXP,SEMVisionG2,F5x,MP200,UV1280SE,S9260,FSM128De-installation:S9200,S9260

Audit&Installation India(Chandigarh)

S社 Archer10200mmDulaSmifHandlerauditandinstallation

Installation Korea(Bucheon)

D社 SL200Installaiton(200mmDualSmifHandler)

Retrofit&Sale Korea(Anseong))

K社 RetrofitedandinstallatedAITXPfor12"&8"wafers

Performance summary – 2012

SEMICONDUCTOR LEADING SERVICES

Retrofit&Sale Korea(Anseong))

K社 RetrofitedandinstallatedAITXPfor12"&8"wafers

Refurb,Retrofit&Installation Korea(Yongin)

S社 RetrofitedAIT1for1.5TwaferandinstallationRetrofitedAIT1for4",6"&8"wafersandinstallation

Servicehistory

Korea(Sangwoo)

D社 SP1TbilaserreplacementAITXPLaser&robotreplacement

Korea(Bucheon)

D社 MP200Laserreplacement

Korea(Yongin)

S社 MP200Laserreplacement

Korea(Yongin)

S社 HRP340,HRP240,RS75,RS55,P-22,P-2,AITXP,AIT1,F5X,HITACHISeries

Performance of 2013 ~ Currently

Sale & Retrofit, Installation :Area : Buchon , Korea. Customer : Fairchild KoreaItems : Sale and and installation for 200mm FAB.Equipment Model :

1. UV1280SE, 1EA2. Vx330, 1EA

OEM : KLA-Tencor. VEECOArea : Ansung, Korea. Customer : KCTItems : Sale and Installation for 200mm FAB.Equipment Model :

1. P-11, 1EAOEM : KLA-TencorArea : Yongin, Korea. Customer : SAMSUNGItems : Sale and retrofit ,installation for 200mm FAB.Equipment Model : AITUV, 1EA

SEMICONDUCTOR LEADING SERVICES

Performance of 2013 ~ Currently

Sale & Retrofit, Installation :Area : Buchon , Korea. Customer : Fairchild KoreaItems : Sale and and installation for 200mm FAB.Equipment Model :

1. UV1280SE, 1EA2. Vx330, 1EA

OEM : KLA-Tencor. VEECOArea : Ansung, Korea. Customer : KCTItems : Sale and Installation for 200mm FAB.Equipment Model :

1. P-11, 1EAOEM : KLA-TencorArea : Yongin, Korea. Customer : SAMSUNGItems : Sale and retrofit ,installation for 200mm FAB.Equipment Model : AITUV, 1EA

Thankyou

PYJ Co.,Ltd.

SEMICONDUCTOR LEADING SERVICES

Thankyou

PYJ Co.,Ltd.