mems growing mainstreamgrowing mainstream
TRANSCRIPT
MEMS Growing MainstreamMEMS Growing Mainstreammirasol Display Technology Inspired by Nature
Evgeni Gusev
October 18, 2011 Page 1www.mirasoldisplays.com
Sr. Director, Technology DevelopmentQualcomm MEMS Technologies, [email protected]
S f H b / I t t N tiSafe Harbor / Important Notices• Nothing in these materials is an offer to sell any of the non-display components or devices referenced herein. Certain non-display components for use in the U.S. are available onlyreferenced herein. Certain non display components for use in the U.S. are available only through licensed suppliers. Some non-display components are not available for use in the U.S.• Before we proceed with our presentation, we would like to point out that the following discussion will contain forward-looking statements from industry consultants, QUALCOMM,
d th di i d t t d ti i t d f t lt t ti l k t iand others regarding industry trends, anticipated future results, potential market size, market shares, and other factors which inherently involve risks and uncertainties, including the rate of development, deployment and commercial acceptance of CDMA-based networks and technology and fluctuations in the demand for CDMA-based products, services or applications.pp• These and other risks and uncertainties relating to QUALCOMM’s business are outlined in detail in our most recent 10-Q and 10-K forms filed with the Securities and Exchange Commission. • Please consult those documents for a more complete understanding of these risks and
t i tiuncertainties.• This presentation may includes a discussion of "non-GAAP financial measures" as that term is defined in Regulation G. The most directly comparable GAAP financial measures and information reconciling these non-GAAP financial measures to the company's financial results prepared in accordance with GAAP have been included at the end of this
October 18, 2011 Page 2www.mirasoldisplays.com
results prepared in accordance with GAAP have been included at the end of this presentation.
Agenda• mirasol® display value & differentiation: Why
another display technology ?– Low power– Consistent viewing quality (incl outdoors)Consistent viewing quality (incl. outdoors)– Video capable (due to fast MEMS elements)
• Technology fundamentals– Surface micromachining (MEMS on glass)– Interferometric thin film opticsp
• Display technology development & f t i d k t f
October 18, 2011 Page 3www.mirasoldisplays.com
manufacturing, and market focus– It is REAL !
(Selected) MEMS devices and products(Selected) MEMS devices and productsInjet Heads
DLP Projectors IMUs GyroscopesGyroscopes
Wide acceptance and deeper penetration
Microphones
MEMS Display
and deeper penetrationinto consumer markets
MEMS Display
October 18, 2011 Page 4www.mirasoldisplays.comMicrofluidic (Bio) AirBag Sensor Wii Motion Sensor Pressure Sensor
AgendaAgenda• mirasol® display value & differentiation: Why
another display technology ?– Low power– Consistent viewing quality (incl. outdoors)– Video capable (due to fast MEMS elements)p ( )
• Technology fundamentals– Surface micromachining (MEMS on glass)
I t f t i thi fil ti– Interferometric thin film optics• Display technology development &
manufacturing, and market focusg,– It is REAL !
October 18, 2011 Page 5www.mirasoldisplays.com
fmirasol displays in the tree of electronic displays
Mobile Device Display Technologies
Emissive Non-EmissiveEmissive Non Emissive
OLEDO i Li ht
SRDS i R ti l
EPD LCD IMODmirasol Displa sOrganic Light
Emitting DiodeScanning Retinal
Displays
PLED, LEP Inc.Flexible version
SMOLED Inc.Flexible version
Electrophoretic Liquid Crystal mirasol DisplaysInterferometric Modulation
Active PassiveFlexible version(Polymer based
OLED)
Flexible version (Small Molecular
OLED)
Active Matrix
Passive Matrix
LCOS Poly-Si TFT/LTPS TFT A-Si TFT/LCD STN Dual Scan
October 18, 2011 Page 6www.mirasoldisplays.com
LCOSLiquid Crystal on
Silicon
Poly Si TFT/LTPS TFT (Low Temperature Polysilicon
Thin Film Transistor)
Amorphous-Silicon Thin Film
Transistor
STN Dual Scan(Super Twisted
Nematic)
TN(Twisted Nematic)
ChLCDCholesteric LCD
21st Century Hi Tech: It’s all about POWER !21st Century Hi-Tech: It s all about POWER ! Example: Power Consumption for an LCD Display (Motorola Razr)
October 18, 2011 Page 7www.mirasoldisplays.com
Courtesy:
C G i P GConvergence = Growing Power Gap
October 18, 2011 Page 8www.mirasoldisplays.com
Source: Battery Technology & Power Management Conference, Vancouver, 18 August, 2005. Stuart Robinson, Strategy Analytics, Ltd.
mirasol Displays are the Low Powermirasol Displays are the Low Power OptionHandset model
mirasol Color Display AM‐OLED TFT ‐ LCDColor Display
Panel Power‐ Text/Static Imagery 1 mW 100‐700 mW 20 mW
SupplementalLight Power 55 mW N/A 220 mW
Typical ModulePo er1 1 mW 280 mW* 240 mW
October 18, 2011 Page 9www.mirasoldisplays.comSource: QUALCOMM Labs (2010)
Power1
All displays comparisons are for 2.2” QVGA *Content Dependent (40% of pixels on)
Display Power Consumption by Application
mirasol Displays Consume Far Less Power than Competing Display T h l i Lik LCD
Display Power Consumption by Application
Technologies Like LCD
Video PlaybackSMS Web Browsing GPS
Phone with mirasol display
Display & Frontlight
4%10% 6% 4%
Other
Phone with LCD 73% 48% 41%
625 mW
101 mW
276 mW365 mW
29%Phone with LCD
Display & Backlight
Other
% % %
330 mW
%
October 18, 2011 Page 10www.mirasoldisplays.comSource: Qualcomm Labs
839 mW
330 mW500 mW
590 mW
Scalability as Usage Evolves
Ereader Energy Consumption by Application Hours of Application Usage by Technology
Books
Textbo
ok
Magazines/
New
spaper
Web
brow
sing
Vide
o
Application
Ereader Energy Consumption by Application Hours of Application Usage by Technology
M N
mirasol 626 328 52.5 21 10
E Ink 222 95 7 2 0.3
ogy
Chol ‐LCD 20 8 0.5 0.1 0
Transf ‐LCD 2 2 2 2 2D
isplay Techn
olo
LCD
Pixel Qi 7.2 7.2 7.2 7.2 7.2
October 18, 2011 Page 11www.mirasoldisplays.com
Source: Qualcomm Labs (2010)
Importance of Consistent Viewing QualityImportance of Consistent Viewing QualityImage quality of mirasol displays vs. Transflective TFT as a function of ambient illumination
l l i l Di l TFTmirasol Display mirasol DisplayTFT TFT
( l )
262k JNDs10:1 CR; 30% NTSC
262k JNDs10:1 CR; 23%
262k JNDs10:1 CR; 30% NTSC
2k JNDs2.2:1 CR; 2% NTSC
Dim Room (250 lux) Overcast Outdoor (6,000 lux)
262k JNDs 262k JNDs131k JNDs 32 JNDs
October 18, 2011 Page 12www.mirasoldisplays.com
Indoor (500 lux) Sunny Day (40,000 lux)
10:1 CR; 30% NTSC 10:1 CR; 30% NTSC7:1 CR; 16% NTSC 1.9:1 CR, 1% NTSC
262k colors?
mirasol Displays Offer Consistent Viewing Quality in All Environments
mirasol Bichrome RGB mirasol
RGB mirasol™
Current Industry Benchmarking(Example; CR = 1000:1)
October 18, 2011 Page 13www.mirasoldisplays.com
S f E di D iSpectrum of E-reading DevicesColor
Expansive Content p(books, magazines, etc.)
Web Experience
Multimedia
R di6700 mAh
Reading Devices$ $$
No color
Reading
Low Power
Visible Outdoors
Intuitive UI
Battery
Web ExperienceVideo/PhotosGaming / Music
$$ ‐ $$$$Power & Visibility $ ‐ $$
Low Power (for Reading)
Visible OutdoorsSmall and Thin
No webNo videoNo gamingNo photos
Intuitive UI
Small Battery
Lightweight & Thin
Gaming / MusicReading
ComputingIntuitive/Familiar UIExpansive Content
yIssues
2X the weight40% thicker
October 18, 2011 Page 14www.mirasoldisplays.com
Demographic: Serious Book Readers
Demographic: Multimedia Gurus
Expectation of PrintAND
Multimedia Criteria
Market Size Comparison
Phone: $23B
October 18, 2011 Page 15www.mirasoldisplays.comSource: Display Search Quarterly World Wide Flat Panel Display Forecast Report, Q1 2011
AgendaAgenda• mirasol display value & differentiation: Why
another display technology ?another display technology ?– Low power– Consistent viewing quality (incl. outdoors)
Video capable (d e to fast MEMS elements)– Video capable (due to fast MEMS elements)• Technology fundamentals
– Interferometric thin film opticsp– Surface micromachining (MEMS on glass)
• Display technology development & manufacturing and market focusmanufacturing, and market focus– It is REAL !
October 18, 2011 Page 16www.mirasoldisplays.com
Bi i i S i I it ti N tBiomimicry: Science Imitating NatureThose who are inspired by a model other than Nature, a mistress above all
masters, are laboring in vain. ‐ Leonardo Da Vinci
• The mirasol display works by reflecting light so light interferes to create color
Th h th t k• The phenomenon that makes a butterfly’s wings shimmer is the same principle mimicked in mirasol displays
Other examples of biomimicry: Low friction ship hulls from shark skin
October 18, 2011 Page 17www.mirasoldisplays.com
Velcro® from seeds clingy spurs
Morphing aircraft wings from bird’s wings
Neuromorphic chips from neural networks
The Adj stable Etalon A Core mirasol Displa Concept
Incident light Reflected light
The Adjustable Etalon: A Core mirasol Display Concept
Partial reflector
Vi ibl
Full reflector
Visible
tanc
e • Reflectance peak within visible range.
• Display appears bright
• Reflectance peak outside visible range.
• Display appears dark.
Ref
lect
October 18, 2011 Page 18www.mirasoldisplays.com
Wavelength
mirasol® Displays - A MEMS based Reflective p yDisplay
As a mechanical device, the mirror actuates due to an applied voltage, with a response time of 10 - 15 usec(microseconds) – easily supporting video
li tiapplications
Simple Pixel Design using MEMS‐ Light Modulation from applied voltage‐ Color Selection from constructive interference‐ Memory from electro‐mechanical behavior
<1 uM
October 18, 2011 Page 19www.mirasoldisplays.com• No color filters • No polarizer • No transistors • No organic material • No backlight
RGB O ti l P fRGB Optical Performance
• Bright State ~ 90%, Dark State ~ 1%
Red IMODGreen IMODl OBlue IMOD
Black State
October 18, 2011 Page 20www.mirasoldisplays.com
mirasol Displays Have Inherent Memorymirasol Displays Have Inherent Memory
Hysteresis loop gives IMOD element its memory• Allows an array to be addressed in a line‐at‐a‐time fashion• Image is maintained once the array is addressed • Response time suitable for video
“light” state clear
eflectan
ce
“light” state hold
Re
V
October 18, 2011 Page 21www.mirasoldisplays.com
0 8Applied voltage
VHOLD
“dark” state hold “dark” state write
MEMS Electromechanical Bistability: CVMEMS Electromechanical Bistability: CV Measurements
1x10-7 Entire P1 Panel
8x10-8
6x10-8
tanc
e (F
)
8
4x10-8
Cap
acit
10 8 6 4 2 0 2 4 6 8 100
2x10-8
October 18, 2011 Page 22www.mirasoldisplays.com
-10 -8 -6 -4 -2 0 2 4 6 8 10Applied Bias (V)
Simple electromechanical modelCompetition between electrostatic force and elastic restoring
fforceThe mechanical spring restoring force
must be balanced by the electrostatic forcek (H y) E Q k Q2k (H – y) = E Q = ke Q2
The capacitance varies as the element movesC = kc / y = Q / V
With the result that:
F = k (H – y)+Q
With the result that:Q = V kc / y
Substitution yieldsk H – k y = k V2 k 2 / y2
HV Ey
k H k y ke V kc / yk H y2 – k y3 = k4 V2
(2 k H y – 3 k y2) dy = 2 k4 V dVdy / dV = 2 k4 V / (2 k H y – 3 k y2)
‐Q
October 18, 2011 Page 23www.mirasoldisplays.com
dy / dV 2 k4 V / (2 k H y 3 k y )There’s a singularity at y = (2/3) H
Hysterisis: linear elastic force vs. non-linear l t t tielectrostatic
electrostatic
elastic
October 18, 2011 Page 24www.mirasoldisplays.com
Capacitive MEMS StructureBack‐End related effects Top Electrode
Surface Effects
Bulk and interface effects
October 18, 2011 Page 25www.mirasoldisplays.com
Substrate: Si or Me
MEMS: Bulk and Surface MicromachiningMEMS: Bulk and Surface Micromachining
• silicon is a dominant substrate/mech structure
• can be fabricated on any planar substratestructure
• based mainly on (deep) dry or wet etching
• “sculptor’s” approach structure is
• based mainly on thin film depositions
• fabrication approach similar to solid state
devices (except for sac layer removal)
October 18, 2011 Page 26www.mirasoldisplays.com
• sculptor s approach – structure is trimmed from a bulk (silicon) piece
Color ArchitectureColor Architecture
Flex
Bichrome Architecture
Flex Layer
MirrorColor Architecture Sacrificial Layers
Etched Away
October 18, 2011 Page 27www.mirasoldisplays.com
(Simplified) Schematic of IMOD Process Flow(Simplified) Schematic of IMOD Process Flow
SacrificialMaterial
AbsorberConductor
Insulator
Deposit thin film stackAb b
Pattern Stack Form Posts
Substrate
Mechanical Film
• Absorber • Insulator • Sacrificial Material
Support Post
Airgap
Remove sacrificial material Deposit Mechanical LayerPattern Mechanical Layer
October 18, 2011 Page 28www.mirasoldisplays.com
Schematic cross section of IMOD elementSchematic cross-section of IMOD element
Change in spectral response between up/down statesChange in spectral response between up/down states appears to viewer as bright or dark states
Thin films:Thin-films:optical stack and metal interconnect
The IMOD structure is an optical switch, but the operating principle is similar for all capacitive MEMS
October 18, 2011 Page 29www.mirasoldisplays.com
principle is similar for all capacitive MEMS
materials and interfaces dominate behavior
Backend Encapsulation Scheme• Encapsulation
Leveraging existing encapsulation technology
Backend Encapsulation Scheme
– Leveraging existing encapsulation technology– optimized assembly techniques on large area glass substrates
IMOD array
• Key Differences with LCD • No LC process steps
October 18, 2011 Page 30www.mirasoldisplays.com
No LC process steps • No color filter process steps • No cell gap requirements
AgendaAgenda• Introduction to MEMS
– Micro-Electro-Mechanical Systems (aka Micro Systems T h l i )Technologies)
• mirasol display value & differentiation: Why another display technology ?p y gy– Low power– Consistent viewing quality (incl. outdoors)
Video capable (due to fast MEMS elements)– Video capable (due to fast MEMS elements)• Technology fundamentals
– Surface micromachining (MEMS on glass)– Interferometric thin film optics
• Display technology development & manufacturing and market focus
October 18, 2011 Page 32www.mirasoldisplays.com
manufacturing, and market focus– It is REAL !
Qualcomm MEMS Technologies IncQualcomm MEMS Technologies, Inc. Locations
QMT North San Jose, CA, USA
MEMS Research & Innovation Center‐ Process Development
QMT Taiwan Operations‐Hsinchu, ROC
QMT Taiwan FAB B‐Taoyoun, ROC
Process Development
QMT SouthQMT SouthSan Diego, CA USA
Division Headquarters ‐ Business Functions ‐ Product Engineering
October 18, 2011 Page 33www.mirasoldisplays.com
5.7” XGA mirasol Color Display
October 18, 2011 Page 34www.mirasoldisplays.com
To view the demo online, visit www.mirasoldisplays.com/mwc
Qualcomm Dedicated mirasol Display Fabrication Facility
Displays Manufactured at Generation 4 5 FabDisplays Manufactured at Generation 4.5 Fab
Opening Ceremony – June 2009
Longtan Science Park, T T i
October 18, 2011 Page 35www.mirasoldisplays.com
Taoyuan, Taiwan
Economics of Large Area GlassEconomics of Large Area Glass
300mm Source: Corning
October 18, 2011 Page 36www.mirasoldisplays.com
Early QMT Market Focus & y QCommercialization
• Mobile DevicesMobile Devices– Best match with mirasol® advantages of ultra-
low power, and greatest viewability under all lighting conditionsFl ibilit i t il i “l k & f l” f h– Flexibility in tailoring “look & feel” for each product (Bi-chrome color, metallic to diffuse)
• Applications– Cell phone displays– Portable Bluetooth accessories– Handheld/wrist-worn GPS devices
E d /T bl t– E-readers/Tablets– Industrial applications
• Initial application in low to mid-volume
October 18, 2011 Page 37www.mirasoldisplays.com
• Initial application in low to mid-volume designs
Summary• Display challenge is to provide an enhanced user experience for p y g p p
multimedia at low power and under various ambient illumination. mirasol reflective MEMS display offers all of it.
• Convergence is happening toe‐readers – just like mobile phones
• Qualcomm has developed R&D and manufacturing infrastructure to drive technology development anddrive technology development and display module production based on MEMS surface micromachining on large area glass
October 18, 2011 Page 38www.mirasoldisplays.com
large‐area glass