micro electronic mechanical system

8/2/2019 Micro Electronic Mechanical System

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PREPARED BY -DALJEET KAUR,

DIKSHA AGGARWAL


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Microelectromechanical systems (MEMS) (also written asmicro-electro-mechanical, MicroElectroMechanical ormicroelectronic and microelectromechanical systems) isthe technology of very small mechanical devices driven byelectricity; it merges at the nano-scale intonanoelectromechanical systems (NEMS) and

nanotechnology. MEMS are also referred to asmicromachines (in Japan), or micro systems technologyMST(in Europe).

MEMS are separate and distinct from the hypotheticalvision ofmolecular nanotechnology or molecularelectronics. MEMS are made up of components between 1

to 100 micrometres in size (i.e. 0.001 to 0.1 mm), andMEMS devices generally range in size from 20 micrometres(20 millionths of a metre) to a millimetre (i.e. 0.02 to1.0 mm). They usually consist of a central unit thatprocesses data (the microprocessor) and severalcomponents that interact with the outside such asmicrosensors.dominate volume effects such as inertia orthermal mass.
http://en.wikipedia.org/wiki/Nanotechnologyhttp://en.wikipedia.org/wiki/Nanoelectromechanical_systemshttp://en.wikipedia.org/wiki/Micromachineryhttp://en.wikipedia.org/wiki/Nanotechnologyhttp://en.wikipedia.org/wiki/Micromachineryhttp://en.wikipedia.org/wiki/Molecular_electronicshttp://en.wikipedia.org/wiki/Molecular_electronicshttp://en.wikipedia.org/wiki/Molecular_nanotechnologyhttp://en.wikipedia.org/wiki/Molecular_electronicshttp://en.wikipedia.org/wiki/Molecular_electronicshttp://en.wikipedia.org/wiki/Inertiahttp://en.wikipedia.org/wiki/Inertiahttp://en.wikipedia.org/wiki/Inertiahttp://en.wikipedia.org/wiki/Molecular_electronicshttp://en.wikipedia.org/wiki/Molecular_electronicshttp://en.wikipedia.org/wiki/Molecular_nanotechnologyhttp://en.wikipedia.org/wiki/Micromachineryhttp://en.wikipedia.org/wiki/Nanotechnologyhttp://en.wikipedia.org/wiki/Nanoelectromechanical_systems


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MEMS have developed in the past decades, especially in the lastfifteen years. In the beginning of 1990s, MEMS emerged with theaid of the development of integrated circuit (IC) fabricationprocesses, in which sensors, actuators, and control functions arecofabricated in silicon. Since then, remarkable research progresses

have been achieved in MEMS under the strong capital promotionsfrom both government and industries. In addition to thecommercialization of some less integrated MEMS devices, such asmicroaccelerometers, inkjet printer head, micromirrors forprojection, etc., the concepts and feasibility of more complexMEMS devices have been proposed and demonstrated for the

applications in such varied fields as microfluidics, aerospace,biomedical, chemical analysis, wireless communications, datastorage, display, optics, etc. Some branches of MEMS, appearing asmicrooptoelectromechanical systems (MOEMS), micrototal analysissystems (TAS), etc., have attracted a great deal of researchinterests since their potential applications market.
http://www.inems.com/mems_course_area/01_introduction/01_Introduction.htmhttp://www.inems.com/mems_course_area/01_introduction/01_Introduction.htm


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Deposition processes Physical deposition

There are two types of physical deposition processes.Theyare as follows.

Physical vapor deposition (PVD)

Physical vapor deposition consists of a process in which amaterial is removed from a target, and deposited on asurface.

Chemical deposition

Chemical deposition techniques include chemical vapor

deposition ("CVD"), in which a stream of source gas reacts onthe substrate to grow the material desired.

Basic Process

Deposition Patterning ETCHING


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Lithography Lithography in MEMS context is typically the transfer

of a pattern into a photosensitive material byselective exposure to a radiation source such as light.A photosensitive material is a material thatexperiences a change in its physical properties whenexposed to a radiation source. If a photosensitivematerial is selectively exposed to radiation (e.g. bymasking some of the radiation) the pattern of theradiation on the material is transferred to thematerial exposed, as the properties of the exposedand unexposed regions differs.

This exposed region can then be removed or treatedproviding a mask for the underlying substrate.Photolithography is typically used with metal or otherthin film deposition, wet and dry etching.
http://en.wikipedia.org/wiki/Photolithographyhttp://en.wikipedia.org/wiki/Photolithography


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In one viewpoint MEMS application is categorized by type ofuse.

Sensor

Actuator

Structure

In another view point MEMS applications are categorized bythe field of application (commercial applications include):

Inkjet printers, which use piezoelectrics or thermal bubbleejection to deposit ink on paper.

Accelerometers in modern cars for a large number ofpurposes including airbag deployment in collisions.

Accelerometers in consumer electronics devices such as gamecontrollers (NintendoWii), personal media players / cellphones (Apple iPhone, various Nokia mobile phone models,various HTC PDA models)[15] and a number of Digital Cameras(various Canon Digital IXUS models). Also used in PCs to parkthe hard disk head when free-fall is detected, to preventdamage and data loss.
http://en.wikipedia.org/wiki/Sensorhttp://en.wikipedia.org/wiki/Actuatorhttp://en.wikipedia.org/wiki/Inkjet_printerhttp://en.wikipedia.org/wiki/Piezoelectrichttp://en.wikipedia.org/wiki/Accelerometerhttp://en.wikipedia.org/wiki/Airbaghttp://en.wikipedia.org/wiki/Airbaghttp://en.wikipedia.org/wiki/IPhonehttp://en.wikipedia.org/wiki/Wiihttp://en.wikipedia.org/wiki/IPhonehttp://en.wikipedia.org/wiki/Canon_Digital_IXUShttp://en.wikipedia.org/wiki/Canon_Digital_IXUShttp://en.wikipedia.org/wiki/IPhonehttp://en.wikipedia.org/wiki/Wiihttp://en.wikipedia.org/wiki/Airbaghttp://en.wikipedia.org/wiki/Accelerometerhttp://en.wikipedia.org/wiki/Piezoelectrichttp://en.wikipedia.org/wiki/Inkjet_printerhttp://en.wikipedia.org/wiki/Actuatorhttp://en.wikipedia.org/wiki/Sensor


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MEMS gyroscopes used in modern cars and other

applications to detect yaw; e.g., to deploy a roll over bar

or trigger dynamic stability control[16]

MEMS microphones in portable devices, e.g., mobile

phones, head sets and laptops. Silicon pressure sensors e.g., car tire pressure sensors, and

disposable blood pressuresensors

Displays e.g., the DMD chip in a projector based on DLP

technology, which has a surface with several hundred

thousand micromirrors or single micro-scanning-mirrorsalso called microscanners

Optical switching technology, which is used for switching

technology and alignment for data communications

Bio-MEMS applications in medical and health related

technologies from Lab-On-Chip to MicroTotalAnalysisbiosensor chemosensor
http://en.wikipedia.org/wiki/MEMS_gyroscopehttp://en.wikipedia.org/wiki/Yaw,_pitch,_and_rollhttp://en.wikipedia.org/wiki/Dynamic_stability_controlhttp://en.wikipedia.org/wiki/Pressure_sensorhttp://en.wikipedia.org/wiki/Tirehttp://en.wikipedia.org/wiki/Sensorhttp://en.wikipedia.org/wiki/Blood_pressurehttp://en.wikipedia.org/wiki/Sensorhttp://en.wikipedia.org/wiki/Display_devicehttp://en.wikipedia.org/wiki/Digital_micromirror_devicehttp://en.wikipedia.org/wiki/Digital_Light_Processinghttp://en.wikipedia.org/wiki/Microscannerhttp://en.wikipedia.org/wiki/Optical_switchhttp://en.wikipedia.org/wiki/Data_communicationshttp://en.wikipedia.org/wiki/Bio-MEMShttp://en.wikipedia.org/wiki/Biosensorhttp://en.wikipedia.org/wiki/Chemosensorhttp://en.wikipedia.org/wiki/Chemosensorhttp://en.wikipedia.org/wiki/Biosensorhttp://en.wikipedia.org/wiki/Bio-MEMShttp://en.wikipedia.org/wiki/Bio-MEMShttp://en.wikipedia.org/wiki/Bio-MEMShttp://en.wikipedia.org/wiki/Data_communicationshttp://en.wikipedia.org/wiki/Optical_switchhttp://en.wikipedia.org/wiki/Microscannerhttp://en.wikipedia.org/wiki/Digital_Light_Processinghttp://en.wikipedia.org/wiki/Digital_micromirror_devicehttp://en.wikipedia.org/wiki/Display_devicehttp://en.wikipedia.org/wiki/Sensorhttp://en.wikipedia.org/wiki/Blood_pressurehttp://en.wikipedia.org/wiki/Sensorhttp://en.wikipedia.org/wiki/Tirehttp://en.wikipedia.org/wiki/Pressure_sensorhttp://en.wikipedia.org/wiki/Dynamic_stability_controlhttp://en.wikipedia.org/wiki/Yaw,_pitch,_and_rollhttp://en.wikipedia.org/wiki/MEMS_gyroscope


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Bio-MEMS is an abbreviationofbiological microelectromechanicalsystems and refers to a special class

of microelectromechanical systems(MEMS) where biological matter is

manipulated to analyze and measure

its activity under any class of scientific

study. This class of devices belongs to

one of the areas of development

based on microtechnology. Among theapplications based in Bio-MEMS are:

biological and biomedical analysis and

measurements and micro total analysis

systems (TAS). One of the more

popular approaches to Bio-MEMS as of

late has been through
http://en.wikipedia.org/wiki/Microelectromechanical_systemshttp://en.wikipedia.org/wiki/Microelectromechanical_systems


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A biosensor is an analytical device for the detection ofan analyte that combines a biological component with aphysicochemical detector component.

It consists of 3 parts now:

the sensitive biological element (biological material (e.g. tissue,microorganisms, organelles, cell

receptors, enzymes, antibodies, nucleic acids, etc.), abiologically derived material or biomimic component thatinteracts (binds or recognises) the analyte under study. Thebiologically sensitive elements can also be created by biologicalengineering.

biosensor reader device with the associated electronics or signalprocessors that are primarily responsible for the display of the

results in a user-friendly way.[1] This sometimes accounts for themost expensive part of the sensor device, however it is possibleto generate a user friendly display that includes transducer andsensitive element(see Holographic Sensor). The readers areusually custom-designed and manufactured to suit the differentworking principles of biosensors. Known manufacturers ofbiosensor electronic readers include PalmSens, Gwent

Biotechnology Systems and Rapid Labs.
http://en.wikipedia.org/wiki/Analytehttp://en.wikipedia.org/wiki/Analytehttp://en.wikipedia.org/wiki/Enzymehttp://en.wikipedia.org/wiki/Antibodyhttp://en.wikipedia.org/wiki/Nucleic_acidhttp://en.wikipedia.org/wiki/Biological_engineeringhttp://en.wikipedia.org/wiki/Biological_engineeringhttp://en.wikipedia.org/wiki/Biological_engineeringhttp://en.wikipedia.org/wiki/Biosensorhttp://en.wikipedia.org/wiki/Holographic_Sensorhttp://en.wikipedia.org/wiki/Holographic_Sensorhttp://en.wikipedia.org/wiki/Biosensorhttp://en.wikipedia.org/wiki/Biological_engineeringhttp://en.wikipedia.org/wiki/Biological_engineeringhttp://en.wikipedia.org/wiki/Nucleic_acidhttp://en.wikipedia.org/wiki/Antibodyhttp://en.wikipedia.org/wiki/Enzymehttp://en.wikipedia.org/wiki/Analyte


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A chemoreceptor, also

known as chemosensor,

is a sensory receptor that

transduces a chemical signal

into an action potential.

In more general terms,

a chemosensor detectscertain chemical stimuli in

the environment.
http://en.wikipedia.org/wiki/Sensory_receptorhttp://en.wikipedia.org/wiki/Transduction_(physiology)http://en.wikipedia.org/wiki/Action_potentialhttp://en.wikipedia.org/wiki/Action_potentialhttp://en.wikipedia.org/wiki/Transduction_(physiology)http://en.wikipedia.org/wiki/Sensory_receptor


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micro electronic mechanical system

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