new solutions for intermetal dielectrics using trimethylsilane-based pecvd processes

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Page 1: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Page 2: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Page 3: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Page 4: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Page 5: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Page 6: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes
Page 7: New solutions for intermetal dielectrics using trimethylsilane-based PECVD processes