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Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. Optical characterization of hydrogenated amorphous silicon thin films deposit... S H Lin; Y C Chan; D P Webb; Y W Lam Journal of Electronic Materials; Dec 1999; 28, 12; ProQuest Science Journals pg. 1452

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Page 1: Optical characterization of hydrogenated amorphous silicon ...ycchan/publications-ycchan/PeerReviewedJournals/... · For characterization of the properties of our high rate deposited

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Optical characterization of hydrogenated amorphous silicon thin films deposit...S H Lin; Y C Chan; D P Webb; Y W LamJournal of Electronic Materials; Dec 1999; 28, 12; ProQuest Science Journalspg. 1452

Page 2: Optical characterization of hydrogenated amorphous silicon ...ycchan/publications-ycchan/PeerReviewedJournals/... · For characterization of the properties of our high rate deposited

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 3: Optical characterization of hydrogenated amorphous silicon ...ycchan/publications-ycchan/PeerReviewedJournals/... · For characterization of the properties of our high rate deposited

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 4: Optical characterization of hydrogenated amorphous silicon ...ycchan/publications-ycchan/PeerReviewedJournals/... · For characterization of the properties of our high rate deposited

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 5: Optical characterization of hydrogenated amorphous silicon ...ycchan/publications-ycchan/PeerReviewedJournals/... · For characterization of the properties of our high rate deposited

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.