Silicon Efficiency

Tod HiginbothamGeorge Yang

2 2

Outline

Silicon Market Opportunity • Silicon Flow Map• Reclaim Market• Opportunity Analysis

RegenSi Solution • RegenSi Technology vs. Traditional Reclaim• Proven Value• Applications• The RegenSi Advantage

Case Study

Business Outlook

3 3

Silicon Flow MapSilicon Market ($ Bil)

$11.03

$1.25

Prime Test

Prime Wafers > Volume Production > 99.9% Product YieldPrime Wafers > Volume Production > 99.9% Product YieldPrime Wafers > Volume Production > 99.9% Product YieldPrime Wafers > Volume Production > 99.9% Product YieldCustomer

Test/Monitor Wafers > Process Control > Reclaim Test/Monitor Wafers > Process Control > Reclaim Test/Monitor Wafers > Process Control > Reclaim Test/Monitor Wafers > Process Control > Reclaim

Test Silicon Purchased

$1.25 B

Process Monitoring,Process Monitoring,

Qualification, and Qualification, and

OptimizationOptimization

Process Monitoring,Process Monitoring,

Qualification, and Qualification, and

OptimizationOptimization

= Total Test Silicon

Annual Market

$2.00 - $2.25 BWASTE WASTE Wafers Disposed Due to Thinness/DamageWafers Disposed Due to Thinness/Damage

WASTE WASTE Wafers Disposed Due to Thinness/DamageWafers Disposed Due to Thinness/Damage

Reclaim Loop

+ Services Purchased

$0.75-$1.00 B

2-8X Wafer Cycle2-8X Wafer Cycle

4 4

Silicon Reclaim Market

727

939

874

Market Drivers

• The risk factors for 300mm processing have caused an increase in monitor wafer usage

• The shortage of silicon has kept test wafer prices high

• The price differential between a new test wafer and a reclaimed test wafer establishes the opportunity cost

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Traditional Wafer Reclaim

Issues associated with current wafer reclaim processes:

• Limited wafer reclaim lifetime: < 8 times • Relatively low yield: typically <75%• High per pass wafer cost: >$60 300mm wafer pass• Many new films (i.e. BDII) are hard to remove

2.

Wafer Preparation

&

Film Striping

3.

Lapping

or

Grinding

4.

Polishing

5.

Cleaning

6.

Inspection

&

Sorting

1.

Incoming Inspection

&

Wafer Sorting

Wafer Reclaim

Process Flow

6 6

RegenSi Technology

The RegenSi process quickly removes films without removing silicon, and leaves the Si surface very smooth and passivated, enabling customers to increase the wafer use cycles while reducing cost.

Si wafer

Dielectric

Si wafer

Si wafer

Dielectric

Barrier MetalMetal

Si wafer

RegenSi 31

RegenSi 34

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RegenSi Proven Value

• Chemically removing films without grinding / polishing

• Minimal Si damage with no pitting

• Increased lifetime of Si test wafers

• Higher wafer yield

• Reduction in Si test wafer spending

RMS=1.01nm

DHF 15:1 RegenSi 31

RMS=0.353nm

New Wafer Costs

Reclaim Costs

20-30% reduction with RegenSi implementation

40-50% reduction with RegenSi + Insourcing

Overall Si spend

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RegenSi Applications

Product Applications

Wafer Reclaim•TEOS•OSG: Coral TM , Black Diamond TM ,

Aurora TM

•FSG•SiN, TiN, TaN•Metals: Cu, Al, Ta, Ti

Backside and Bevel Edge Clean

Product Wafer Rework

High Selectivity Etch Rate to Minimize Si Roughening High Selectivity Etch Rate to Minimize Si Roughening

Metal Etch Rate of RegenSi 34

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Silicon Efficiency SolutionCase Study – Taiwan Foundry, 200mm BDII

Before Adopting RegenSi 31

• Reclaim yield: ~60%

• For returned wafers, < 50% Grade A

• Silicon lost is 15~20 um each reclaim *Wafer life time : 8~10 times of reclaim

• Purchase of new test wafers too high

• Lead time: 2 weeks from Japan to Taiwan with in costly air freight.

After Adopting RegenSi 31

• Yield of return: >90%

• For return wafers, >70% Grade A

• Silicon loss is 3um each reclaim *Wafer life time: 40~50 times of reclaim

• Purchases reduced >30%

• Lead time: <1 week. *Enabled by simple localization with RegenSi Technology

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Summary Results

1. Customer has begun migration to other fabs and processes

2. ATMI has established a Reclaim upcharge to capture value of silicon savings

3. After the success of BD wafers, collaboration expanded to include W and Cu 8” wafers

4. New results for SiN, SiON, BD films for 12” test wafer evaluated successfully.

Silicon Efficiency SolutionCase Study (cont.)

Cost Model

Before vs. After Adopting ATMI RegenSi

2937

71

41

0

20

40

60

80

100

Current With RCR

% o

f Tes

t Waf

er C

osts

With RegenSi

Cost for Reclaim/yr

Cost for New Wafer Replacements/ yr

Customer is currently spending over

$50M for wafer reclaim each year.

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Business Outlook

0.00

500.00

1,000.00

1,500.00

2,000.00

2,500.00

3,000.00

Mil $

2007 2008 2009 2010 2011

RegenSi TAM

Test Silicon Reclaim Services

0

100

200

300

400

500

600

700

800Mil $

2007 2008 2009 2010 2011

RegenSi SAM

*25% Si Process Efficiency Gain vs TAM Market Share Potential

$740 Mil SAM Opportunity in 2011

Chemistry, $111.00

Reclaim, $258.00

Turnkey Fab, $369.00

* 20% market penetration in 2011 would

equate to

$150 million in Revenue.

Q&A

ATMI, the ATMI logo, AccuDose, AutoClean, Better Process. Delivered., Cerulean, EPM, ErgoNOW, GasGauge, IDEAL Clean, LOK cap, NOWPak, NOWTrak, PDMPak, ProAct, the ProAct logo, ProE-Vap, RegenSi, SAGE, The Source of Process Efficiency, TiTaN Kleen, UniChem and VAC are trademarks or registered trademarks of Advanced Technology Materials, Inc. in the United States, other countries or both.

SDS is a trademark or registered trademark of Advanced Technology Materials, Inc. and Matheson Gas Products, Inc. in the United States, other countries or both.

Other company, product, or service names may be trademarks or service marks of others.