technical committee on semiconductor and …...wednesday, october 5, 2016 telephone/web conference...

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Technical Committee on Semiconductor and Related Facilities (SCR-AAA) M E M O R A N D U M DATE: September 20, 2016 TO: Principal and Alternate Members of the Technical Committee on Semiconductor and Related Facilities (SCR-AAA) FROM: Jon Hart, Staff Liaison SUBJECT: AGENDA PACKAGENFPA 318 Second Draft Meeting (A2017) ________________________________________________________________________ Enclosed is the agenda for the NFPA 318 Second Draft meeting of the Technical Committee on Semiconductor and Related Facilities, which will be held on Wednesday, October 5, 2016 via Telephone/Web Conference. Please review the attached Public Comments in advance, and if you have alternate suggestions, please come prepared with proposed language and respective substantiation. If you have any questions prior to the meeting, please do not hesitate to contact me at: Office: (617) 984-7470 Email: [email protected] For administrative questions, please contact Sarah Caldwell at (617) 984-7950 or via email at [email protected]. I look forward to working with everyone. Page 1 of 32

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Page 1: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Technical Committee on Semiconductor and Related Facilities

(SCR-AAA)

M E M O R A N D U M

DATE: September 20, 2016

TO: Principal and Alternate Members of the Technical Committee on Semiconductor and Related Facilities (SCR-AAA)

FROM: Jon Hart, Staff Liaison

SUBJECT: AGENDA PACKAGE– NFPA 318 Second Draft Meeting (A2017)

________________________________________________________________________

Enclosed is the agenda for the NFPA 318 Second Draft meeting of the Technical Committee on

Semiconductor and Related Facilities, which will be held on Wednesday, October 5, 2016 via

Telephone/Web Conference. Please review the attached Public Comments in advance, and if you

have alternate suggestions, please come prepared with proposed language and respective

substantiation.

If you have any questions prior to the meeting, please do not hesitate to contact me at:

Office: (617) 984-7470 Email: [email protected]

For administrative questions, please contact Sarah Caldwell at (617) 984-7950 or via email at

[email protected].

I look forward to working with everyone.

Page 1 of 32

Page 2: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Technical Committee on Semiconductor and Related

(SCR-AAA) NFPA 318 Second Draft Meeting (Annual 2017)

Wednesday, October 5, 2016 Telephone/Web Conference

AGENDA

Wednesday, October 5, 2016

1. Call to Order – 10:00 am (EDT)

2. Introductions and Attendance

3. Chairman Comments

4. Approval of Previous Meeting Minutes (Attached)

5. Staff Liaison Presentation on NFPA Revision Process and A2017 Cycle

6. Preparation of the Second Draft Review Public Comments

Create Second Revisions

7. New Business

8. Adjournment

Please submit requests for additional agenda items to the chair and staff liaison at least

seven days prior to the meeting.

Page 2 of 32

Page 3: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Technical Committee on Semiconductor and Related

(SCR-AAA) NFPA 318 Second Draft Meeting (Annual 2017)

Wednesday, October 5, 2016 Telephone/Web Conference

Key Dates for the Annual 2017 Revision Cycle

Public Input Closing Date July 6, 2015

Final Date for First Draft Meeting December 14, 2015

Final First Draft Posted March 7, 2016 Public Comment Closing Date May 16, 2016 Final Date for Second Draft Meeting October 31, 2016

Posting of Ballot by December 12, 2016

Ballots due by January 2, 2017 Final Second Draft Posted January 16, 2017

Closing Date for Notice of Intent to Make a Motion

(NITMAM)

February 20,

2017

Issuance of Consent Document (No NITMAMs) May 12, 2017

NFPA Annual Meeting (Boston) June 4-7, 2017

Issuance of Document with NITMAM August 10, 2017

Technical Committee deadlines are in bold.

Page 3 of 32

Page 4: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Technical Committee Roster

Page 4 of 32

Page 5: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Address List No PhoneSemiconductor and Related Facilities SCR-AAA

Richard P. Bielen09/19/2016

SCR-AAA

Rick Guevara

ChairTechnology Risk Consulting Services, LLC58 Mustang CourtDanville, CA 94526-5109

SE 7/12/2001SCR-AAA

John G. Ronan

SecretaryMicron Technology, Inc.8000 South Federal Way, MS 555PO Box 6Boise, ID 83707-0006Alternate: Bobbie L. Smith

U 7/24/1997

SCR-AAA

Bernard Argo

PrincipalSandia National Laboratories/USDOE05 El CieloLos Lunas, NM 87031

E 03/07/2013SCR-AAA

Robert J. Ballard

PrincipalVictaulic Company of AmericaPO Box 31Easton, PA 18044-0031Fire Suppression Systems Association

M 03/03/2014

SCR-AAA

Alastair R. Brown

PrincipalRushbrook Consultants, Ltd.West Drumloch, ChapeltonStrathaven, ML10 6SH Scotland

SE 7/12/2001SCR-AAA

Allan Cose

PrincipalIntertek Testing Services1365 Wilson CourtMenlo Park, CA 94025

RT 10/28/2014

SCR-AAA

Jonathan M. Eisenberg

PrincipalArup955 Massachusetts AvenueCambridge, MA 02139-3180Alternate: Jeffrey S. Tubbs

SE 12/08/2015SCR-AAA

Richard Ffrench

PrincipalFM Global270 Central AvenueJohnston, RI 02919-4923

I 10/28/2014

SCR-AAA

Amanda Gonzalez

PrincipalGlobal Foundries, Inc.400 Stonebreak Road ExtensionAdmin 2, Mailstop 5Malta, NY 12020Alternate: Stephen L. Fox

U 08/17/2015SCR-AAA

Younghoon Joo

PrincipalSamsung F&M Insurance50, Eulji-Ro, Jung-Gu,6th Floor, Samsung BuildingSeoul, 100-842 South KoreaAlternate: Vincent DeGiorgio

I 10/23/2013

SCR-AAA

Steven W. Joseph

PrincipalHoneywell/Xtralis, Inc.11467 SW Foothill DrivePortland, OR 97225-5313

M 08/17/2015SCR-AAA

Scott R. Lang

PrincipalHoneywell International3825 Ohio AvenueSt. Charles, IL 60174-5467National Electrical Manufacturers AssociationAlternate: Phil Mazzurco

M 08/11/2014

SCR-AAA

Richard M. Lattanzio

PrincipalSpansion, Inc.5204 East Ben White Blvd., M/S 582Austin, TX 78741Alternate: Brett Jay Davis

U 1/18/2001SCR-AAA

Randy Luckman

PrincipalGlobal Asset Protection Services340 Cortez CourtEl Dorado Hills, CA 95762-3509Alternate: Bryan K. Powell

I 7/12/2001

1Page 5 of 32

Page 6: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Address List No PhoneSemiconductor and Related Facilities SCR-AAA

Richard P. Bielen09/19/2016

SCR-AAA

Thomas L. Multer

PrincipalReliable Automatic Sprinkler Company, Inc.1470 Smith Grove RoadLiberty, SC 29657-4305National Fire Sprinkler AssociationAlternate: Ricky R. Jackson

M 1/18/2001SCR-AAA

Eugene Y. Ngai

PrincipalChemically Speaking LLC26 Casper Berger RoadWhitehouse Station, NJ 08889

SE 08/09/2012

SCR-AAA

David A. Quadrini

PrincipalConsultant7723 FallmeadowDallas, TX 75248

SE 7/1/1997SCR-AAA

Rodney D. Randall

PrincipalZurich Services Corporation525 Market Street, Suite 2900San Francisco, CA 94105-2737Alternate: Joseph V. Porada

I 10/1/1996

SCR-AAA

Charles F. Rowe

PrincipalTUV SUD America Inc./Global Risk Consultants Corporation1152 Longford RoadBartlett, IL 60103-1940

SE 3/21/2006SCR-AAA

Scott E. Swanson

PrincipalIntel Corporation2501 NW 229th AvenueHillsboro, OR 97124Alternate: Mark W. Slight

U 3/21/2006

SCR-AAA

Randell T. Thompson

PrincipalAmerican International Group, Inc. (AIG)Commercial Property North America600 North Pearl Street, Suite 700Dallas, TX 75201Alternate: Bruce H. Clarke

I 3/4/2008SCR-AAA

Steven R. Trammell

PrincipalEnvironmental and Occupational Risk Management, Inc.(EORM)111 East Morningside, Suite 206South Padre Island, TX 78597

SE 4/28/2000

SCR-AAA

Joshua C. Vogel

PrincipalUS Department of Defense1220 Jo Apter PlaceNew Windsor, MD 21776

U 4/3/2003SCR-AAA

Derek A. White

PrincipalJENSEN HUGHES3610 Commerce Drive, Suite 817Baltimore, MD 21227-1652Alternate: Jeffrey S. Grove

SE 1/17/1997

SCR-AAA

Matthew T. Wyman

PrincipalKoetter Fire Protection International Inc.10351 Olympic DriveDallas, TX 75220

M 7/23/2008SCR-AAA

Dwayne E. Sloan

Voting AlternateUL LLC12 Laboratory DrivePO Box 13995Research Triangle Park, NC 27709-3995

RT 3/4/2009

SCR-AAA

Bruce H. Clarke

AlternateAmerican International Group, Inc. (AIG)8606 Driscoll CourtCharlotte, NC 28269-6105Principal: Randell T. Thompson

I 10/28/2014SCR-AAA

Brett Jay Davis

AlternateCypress Semiconductor/ Spansion, Inc.5204 E. Ben White BoluevardAustin, TX 78741Principal: Richard M. Lattanzio

U 08/03/2016

2Page 6 of 32

Page 7: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Address List No PhoneSemiconductor and Related Facilities SCR-AAA

Richard P. Bielen09/19/2016

SCR-AAA

Vincent DeGiorgio

AlternateSamsung F&M InsuranceSamsung Building29, Eulji-Ro, Jung-Gu11th Floor, Samsung BuildingSeoul, 100-842 South KoreaPrincipal: Younghoon Joo

I 04/05/2016SCR-AAA

Stephen L. Fox

AlternateGlobal Foundries Inc.7 Hermes RoadMalta, NY 12020Principal: Amanda Gonzalez

U 1/12/2000

SCR-AAA

Jeffrey S. Grove

AlternateJENSEN HUGHES376 East Warm Springs Road, Suite 210Las Vegas, NV 89119Principal: Derek A. White

SE 3/4/2008SCR-AAA

Ricky R. Jackson

AlternateNorthstar Fire Protection of Texas, Inc.510 East Corporate DriveSuite 700Lewisville, TX 75057-6456National Fire Sprinkler AssociationPrincipal: Thomas L. Multer

M 1/10/2008

SCR-AAA

Phil Mazzurco

AlternateSiemens Industry, Inc.Building Technology DivisionInfrastructure & Cities216 Windmill CourtBridgewater, NJ 08807-1119National Electrical Manufacturers AssociationPrincipal: Scott R. Lang

M 08/17/2015SCR-AAA

Joseph V. Porada

AlternateZurich Services Corporation7435 West Wigwam AvenueLas Vegas, NV 89113-5415Principal: Rodney D. Randall

I 12/08/2015

SCR-AAA

Bryan K. Powell

AlternateGlobal Asset Protection Services10112 Lindsay Meadow DriveMechanicsville, VA 23116Principal: Randy Luckman

I 10/23/2013SCR-AAA

Mark W. Slight

AlternateIntel Corporation2200 Mission College BoulevardMailstop: RN6-68Santa Clara, CA 95052Principal: Scott E. Swanson

U 3/2/2010

SCR-AAA

Bobbie L. Smith

AlternateMicron Technology, Inc.8000 South Federal WayBoise, ID 83707Principal: John G. Ronan

U 3/2/2010SCR-AAA

Jeffrey S. Tubbs

AlternateArup955 Massachusetts AvenueSuite 402Cambridge, MA 02139-3180Principal: Jonathan M. Eisenberg

SE 03/07/2013

SCR-AAA

Dennis H. Collins

Member EmeritusPO Box 2428Florence, OR 97439

SE 1/1/1988

3Page 7 of 32

Page 8: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Address List No PhoneSemiconductor and Related Facilities SCR-AAA

Richard P. Bielen09/19/2016

SCR-AAA

Dennis Kirson

Member EmeritusNAVFAC MIDLANTLittle Creek SiteBuilding 3165, Code 4601450 Gator Boulevard, Suite 100Norfolk, VA 23521-2616

SE 1/1/1987SCR-AAA

Richard P. Bielen

Staff LiaisonNational Fire Protection Association1 Batterymarch ParkQuincy, MA 02169-7471

4Page 8 of 32

Page 9: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Committee Distribution

By Percentage

Page 9 of 32

Page 10: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

09/19/2016

Semiconductor and Related FacilitiesSCR-AAAName Representation Class Office

Distribution by %

Company

Bernard Argo Sandia National Laboratories/USDOE E Principal

1Voting Number Percent 4%

Richard Ffrench FM Global FM I Principal

Younghoon Joo Samsung F&M Insurance I Principal

Randy Luckman Global Asset Protection Services XLGAPS I Principal

Rodney D. Randall Zurich Services Corporation I Principal

Randell T. Thompson American International Group, Inc.(AIG)

I Principal

5Voting Number Percent 19%

Robert J. Ballard Victaulic Company of America FSSA M Principal

Steven W. Joseph Honeywell/Xtralis, Inc. M Principal

Scott R. Lang Honeywell International NEMA M Principal

Thomas L. Multer Reliable Automatic SprinklerCompany, Inc.

NFSA M Principal

Matthew T. Wyman Koetter Fire Protection InternationalInc.

M Principal

5Voting Number Percent 19%

Allan Cose Intertek Testing Services itk RT Principal

Dwayne E. Sloan UL LLC UL RT Voting Alternate

2Voting Number Percent 8%

Rick Guevara Technology Risk Consulting Services,LLC

SE Chair

Alastair R. Brown Rushbrook Consultants, Ltd. SE Principal

Jonathan M. Eisenberg Arup SE Principal

Eugene Y. Ngai Chemically Speaking LLC SE Principal

David A. Quadrini Consultant SE Principal

Charles F. Rowe TUV SUD America Inc./Global RiskConsultants Corporation

SE Principal

Steven R. Trammell Environmental and Occupational RiskManagement, Inc. (EORM)

SE Principal

Page 10 of 32

Page 11: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Monday 9 19, Monday

Semiconductor and Related FacilitiesSCR-AAAName Representation Class Office

Distribution by %

Company

Derek A. White JENSEN HUGHES JH SE Principal

8Voting Number Percent 31%

John G. Ronan Micron Technology, Inc. U Secretary

Amanda Gonzalez Global Foundries, Inc. U Principal

Richard M. Lattanzio Spansion, Inc. U Principal

Scott E. Swanson Intel Corporation U Principal

Joshua C. Vogel US Department of Defense U Principal

5Voting Number Percent 19%

26Total Voting Number

Page 11 of 32

Page 12: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Previous Meeting Minutes

Page 12 of 32

Page 13: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

NFPA 318 Technical Committee on Semiconductor and Related Facilities First Draft Meeting (2018)

Adobe Connect Web Meeting and Teleconference October 20, 2015 1PM-5PM EDT

Attendees

Principals Alternates Guests Rick Guevara, Chair Jeffrey Grove Vinnie DeGiorgio Audrey Goldstein, Staff Liaison Ricky Jackson Denise Beach John Ronan Phil Mazzurco (new) Jon Eisenberg (future TC member) Robert Ballard (new) Bryan Powell (new) Karl Olander Alastair Brown Brett Davis Amanda Gonzalez (new) Steven Joseph (new) Scott Lang Richard Lattanzio Thomas Multer Eugene Ngai Rodney Randall Charles Rowe Randell Thompson Derek White New = new member or alternate October 20, 2015

1. NFPA Chair, Rick Guevara, called the meeting to order at 1:10 PM EDT. 2. Due to time constraints, NFPA Chair, Rick Guevara, recognized Eugene Ngai to present a PowerPoint

presentation containing a summary level view of Compressed Gas Associated (CGA) document G-13. A copy of this presentation is available upon request.

3. NFPA Staff Liaison, Audrey Goldstein, presented meeting protocols and key dates in the current

revision cycle. .

4. NFPA Chair, Rick Guevara, presented comments: welcomed new members and alternates and thanked 2015 for their efforts completing major document rewrite.

5. The September 11, 2013, Second Draft Meeting minutes were approved as presented.

6. The committee reviewed and commented on 14 Public Inputs (PIs).

7. The TIA regarding the definition of Compressed Gas submitted to NFPA 55 will need to be tracked as the 318 committee resolved the PI regarding the same issue. The outcome of the TIA will be reported by the 318 Staff Liaison in the future. Online NFPA 55 access can be obtained for NFPA 318 TC members at www.nfpa.org/318tc.

8. A Task Group was formed to review and develop appropriate language for the committee inputs submitted by Al Brown. Al Brown will be the Task Group Leader. Task Group participants include Chuck Rowe, Scott Lang, Phil Mazzurco, and John Ronan. The recommendations of the task group will be presented to the committee prior to the Second Draft meeting.

9. Next meeting is to be scheduled for September 2016.

10. Meeting adjourned at 5:00 PM EST, October 20, 2015.

Minutes Respectfully Submitted by John Ronan

Page 13 of 32

Page 14: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Public Comment Report

(A2017)

Page 14 of 32

Page 15: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Public Comment No. 1-NFPA 318-2016 [ Chapter 2 ]

Chapter 2 Referenced Publications

2.1 General.

The documents or portions thereof listed in this chapter are referenced within this standard and shall beconsidered part of the requirements of this document.

2.2 NFPA Publications.

National Fire Protection Association, 1 Batterymarch Park, Quincy, MA 02169-7471.

NFPA 1, Fire Code , 2018 edition.

NFPA 12, Standard on Carbon Dioxide Extinguishing Systems, 2015 edition.

NFPA 13, Standard for the Installation of Sprinkler Systems, 2016 edition.

NFPA 30, Flammable and Combustible Liquids Code, 2018 edition.

NFPA 37, Standard for the Installation and Use of Stationary Combustion Engines and Gas Turbines, 2018edition.

NFPA 55, Compressed Gases and Cryogenic Fluids Code, 2016 edition.

NFPA 70® , National Electrical Code®, 2017 edition.

NFPA 72® , National Fire Alarm and Signaling Code, 2016 edition.

NFPA 79, Electrical Standard for Industrial Machinery, 2015 edition.

NFPA 90A, Standard for the Installation of Air-Conditioning and Ventilating Systems, 2018 edition.

NFPA 92, Standard for Smoke Control Systems, 2015 edition.

NFPA 101 ®, Life Safety Code®, 2018 edition.

NFPA 385, Standard for Tank Vehicles for Flammable and Combustible Liquids, 2017 edition.

NFPA 400, Hazardous Materials Code, 2016 edition.

NFPA 497, Recommended Practice for the Classification of Flammable Liquids, Gases, or Vapors and ofHazardous (Classified) Locations for Electrical Installations in Chemical Process Areas, 2017 edition.

NFPA 704, Standard System for the Identification of the Hazards of Materials for Emergency Response,2017 edition.

NFPA 750, Standard on Water Mist Fire Protection Systems,2015 edition.

NFPA 2001, Standard on Clean Agent Fire Extinguishing Systems, 2015 edition.

NFPA 5000® , Building Construction and Safety Code®, 2018 edition.

2.3 Other Publications.

2.3.1 ANSI/ CGA Publications.

Compressed Gas Association, 14501 George Carter Way, Suite 103, Chantilly, VA 20151-2923.

ANSI/ CGA G-13, Storage and Handling of Silane and Silane Mixtures, 2006 2015 .

2.3.2 ANSI/ FM Publications.

FM Global, 270 Central Avenue, Johnston, RI 02919.

ANSI/ FM 4910, Standard for Cleanroom Materials Flammability Test Protocol, 2013.

National Fire Protection Association Report http://submittals.nfpa.org/TerraViewWeb/ContentFetcher?commentPara...

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Page 16: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

2.3.3 ANSI/ UL Publications.

Underwriters Laboratories Inc., 333 Pfingsten Road, Northbrook, IL 60062-2096.

ANSI/ UL 723, Standard for Test for Surface Burning Characteristics of Building Materials, 2008, revised2013.

ANSI/ UL 900, Standard for Air Filter Units, 2004, revised 2012 2015 .

ANSI/ UL 2360, Standard Test Method for Determining the Combustibility Characteristics of Plastics Usedin Semiconductor Tool Construction, 2013.

2.3.4 ASME Publications.

American Society of Mechanical Engineers, Three ASME International , Two Park Avenue, New York,NY 10016-5990.

ASME A.13.1, Scheme for the Identifications of Piping Systems, 2007 2015 .

ASME B31.3, Process Piping, 2012 2014 .

ASME Boiler and Pressure Vessel Code , 2017.

2.3.5 ASTM Publications.

ASTM International, 100 Barr Harbor Drive, P.O. Box C700, West Conshohocken, PA 19428-2959.

ASTM D5/D5M , Standard Test Method for Penetration of Bituminous Materials, 2006e1 2013 .

ASTM E84, Standard Test Method for Surface Burning Characteristics of Building Materials, 2015a 2015 b .

ASTM E119, Standard Test Methods for Fire Tests of Building Construction and Materials, 2014.

ASTM E136, Standard Test Method for Behavior of Materials in a Vertical Tube Furnace at 750°C, 20122016 .

2.3.6 ISO Publications.

International Organization for Standardization, 1, ch. de la Voie-Creuse, Case postale 56, CH-1211Geneva 20, ISO Central Secretariat, BIBC II, Chemin de Blandonnet 8, CP 401, 1214 Vernier, GenevaSwitzerland .

ISO 14644-1, Cleanrooms and Associated Controlled Environments — Part 1: Classification of AirCleanliness, 1999 by Particle Concentration , 2nd edition, 2015 .

2.3.7 SEMI Publications.

Semiconductor Equipment and Materials International, 3081 Zanker Road, San Jose, CA 95134.

SEMI F1, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components, 1996.

SEMI S3-0306 , Safety Guidelines Guideline for Process Liquid Heating Systems, 2006 2011 .

2.3.8 U.S. Government Publications.

U.S. Government Publishing Office, 725 North Capitol St., NW, Washington, DC 20402 20401-0001 .

Title 29, Code of Federal Regulations, Part 1910.1000, “Air Contaminants.”

2.3.9 Other Publications.

Merriam-Webster's Collegiate Dictionary, 11th edition, Merriam-Webster, Inc., Springfield, MA, 2003.

2.4 References for Extracts in Mandatory Sections.

NFPA 1, Fire Code, 2015 edition.

NFPA 30, Flammable and Combustible Liquids Code, 2015 edition.

NFPA 55, Compressed Gases and Cryogenic Fluids Code, 2016 edition.

NFPA 69, Standard on Explosion Prevention Systems, 2014 edition.

NFPA 400, Hazardous Materials Code, 2016 edition.

NFPA 1670, Standard on Operations and Training for Technical Search and Rescue Incidents, 2014edition.

NFPA 5000® , Building Construction and Safety Code®, 2015 edition.

National Fire Protection Association Report http://submittals.nfpa.org/TerraViewWeb/ContentFetcher?commentPara...

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Page 16 of 32

Page 17: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Statement of Problem and Substantiation for Public Comment

Major revisions from FR3 and FR4.

Related Item

First Revision No. 3-NFPA 318-2015 [Section No. 2.3.3]

First Revision No. 4-NFPA 318-2015 [Section No. 2.3.5]

Submitter Information Verification

Submitter Full Name: Aaron Adamczyk

Organization: [ Not Specified ]

Street Address:

City:

State:

Zip:

Submittal Date: Mon May 02 17:38:10 EDT 2016

National Fire Protection Association Report http://submittals.nfpa.org/TerraViewWeb/ContentFetcher?commentPara...

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Page 17 of 32

Page 18: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Public Comment No. 2-NFPA 318-2016 [ Section No. 3.3.8 ]

3.3.8 Exempt Amount per Control Area.

The amount of hazardous material allowed to be stored, used, or handled in a control area as set forth inNFPA 1, and NFPA 5000 . The exempt amount per control area is based on the material state (solid, liquid,or gas) and the material storage or use conditions.

Statement of Problem and Substantiation for Public Comment

The definition is in conflict with the NFPA Manual of Style that does not allow definitions to contain references to codes and standards. Furthermore the definition is unnecessary. The exempt amount per control area is discussed in section 5.5.2 and there is no real need for an additional definition. The requirements in the definition are not enforceable anyway.

Related Public Comments for This Document

Related Comment Relationship

Public Comment No. 3-NFPA 318-2016 [Section No. 5.5.2]

Related Item

Public Input No. 8-NFPA 318-2015 [Section No. 3.3.8]

Submitter Information Verification

Submitter Full Name: Marcelo Hirschler

Organization: GBH International

Street Address:

City:

State:

Zip:

Submittal Date: Wed May 04 18:10:21 EDT 2016

National Fire Protection Association Report http://submittals.nfpa.org/TerraViewWeb/ContentFetcher?commentPara...

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Page 19: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Public Comment No. 4-NFPA 318-2016 [ Section No. 3.3.17 ]

3.3.17 Hazardous Production Material.

In semiconductor fabrication facilities, any solid, liquid, or gas that has a degree-of-hazard rating in health,flammability, or reactivity of Class 3 or 4 as ranked by NFPA 704 .

Statement of Problem and Substantiation for Public Comment

The reference to NFPA 704 in a definition is in contravention of the NFPA Manual of Style and is unnecessary. This concept is used in Section 5.6.2.1 and fully explained there. Moreover requirements in definitions are not enforceable.

Related Item

Public Input No. 10-NFPA 318-2015 [Section No. 3.3.17]

Submitter Information Verification

Submitter Full Name: Marcelo Hirschler

Organization: GBH International

Street Address:

City:

State:

Zip:

Submittal Date: Wed May 04 18:20:57 EDT 2016

National Fire Protection Association Report http://submittals.nfpa.org/TerraViewWeb/ContentFetcher?commentPara...

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Page 20: Technical Committee on Semiconductor and …...Wednesday, October 5, 2016 Telephone/Web Conference AGENDA Wednesday, October 5, 2016 1. Call to Order – 10:00 am (EDT) 2. Introductions

Public Comment No. 5-NFPA 318-2016 [ Section No. 3.3.24 ]

3.3.24 Noncombustible.

In semiconductor fabrication facilities, a material that, in the form in which it is used and under theconditions anticipated, will not ignite, burn, support combustion, or release flammable vapors whensubjected to fire or heat. Materials that are reported as passing ASTM E136, Standard Test Method forBehavior of Materials in a Vertical Tube Furnace at 750°C , shall be considered noncombustible materials.

(see 4.3.1)

Statement of Problem and Substantiation for Public Comment

This is being proposed for consistency with many other documents (including NFPA 1, 101, 5000, 90A, 220, etc) and for compliance with the Manual of Style, which prohibits requirements and references to codes and standards in definitions. The requirements are proposed to be moved to a new section 4.3.1 and extracted from NFPA 101.

Related Public Comments for This Document

Related Comment Relationship

Public Comment No. 6-NFPA 318-2016 [Section No. 4.3]

Related Item

Public Input No. 7-NFPA 318-2015 [Section No. 3.3.24]

Public Input No. 6-NFPA 318-2015 [New Section after 4.2]

Submitter Information Verification

Submitter Full Name: Marcelo Hirschler

Organization: GBH International

Street Address:

City:

State:

Zip:

Submittal Date: Wed May 04 18:23:42 EDT 2016

National Fire Protection Association Report http://submittals.nfpa.org/TerraViewWeb/ContentFetcher?commentPara...

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Public Comment No. 13-NFPA 318-2016 [ Sections 3.3.36.1, 3.3.36.2 ]

Sections 3.3.36.1, 3.3.36.2

3.3.36.1 Subatmospheric Gas Storage and Delivery Source (Type 1 SAGS).

A gas source package that stores and delivers gas at subatmospheric pressure and includes asource container (e.g., gas cylinder and outlet valve) that stores and delivers that stores gas at

subatmospheric pressure at NTP and less than 58 psia at 122 o F (300 kPa at 50 o C) and that deliversgas at a pressure of less than absolute pressure of 14.7 psi at NTP and may be greater than absolutepressure at temperatures greater than NTP.

3.3.36.2 Subatmospheric Gas Delivery Source (Type 2 SAGS).

A gas source package that stores compressed gas and delivers gas at subatmospheric pressure andincludes a source container (e.g., gas cylinder and outlet valve) that stores gas compressed gas at apressure greater than absolute pressure of 14.7 psi at NTP and and that delivers gas at a pressure ofless than absolute pressure of 14.7 psi at NTP any temperature .

Statement of Problem and Substantiation for Public Comment

In 3.3.28.5.1 the definition of SAGS Type 1 is incomplete because it does not consider variable ambient conditions that may be experienced under typical storage and use. Variable ambient conditions will change the storage and delivery conditions for a SAGS Type 1. For example, a Type 1 SAGS stored at ambient temperature about 77oF or higher will have a pressure that is ABOVE 14.7 psia (i.e. NOT subatmospheric). By adding a phrase “and less than 58 psia at 122 oF (300 kPa at 50 oC)” to the current text clarifies that Type 1 SAGS may be under a positive storage pressure at higher ambient temperatures. The temperature and pressure values proposed align with the definition for term “adsorbed gas” in UN Model Regulations and DOT Hazardous Materials Regulations. To further and correctly clarify delivery properties of SAGS Type 1, the phrase “and may be greater than absolute pressure at temperatures greater than NTP” is proposed to be added. This serves to clearly explain that SAGS Type 1 may deliver gas that is not sub-atmospheric from the container above NTP. Also, the definition of SAGS Type 2 in paragraph 3.3.28.5.2 is incomplete. Type 2 SAGS requires a vacuum on the valve outlet to withdraw gas from the cylinder. This vacuum condition must be satisfied regardless of ambient temperature conditions in order to allow gas to leave the cylinder. By adding the phrase “at any temperature” clarifies that Type 2 SAGS delivers gas under vacuum (subatmospheric) under all temperature conditions. Additional changes are proposed to the definition for Type 2 SAGS that discusses storage of gas in the first part and delivery of gas in the second part to better describe how a SAGS Type 2 functions. This is the same structure as in the proposed definition for Type 1 SAGS.

Praxair feels strongly that the current definition for SAGS needs to be clarified to communicate that, while SAGS Type 1 delivers gas sub-atmospherically when connected for use below NTP, the gas source container may contain contents at pressures above 14.7 psia when the ambient temperature exceeds NTP. This is critical to know, especially during storage, handling and emergency response. As currently written, the definition of SAGS implies that Type 1 SAGS is always “subatmospheric”. It is a fact that varying ambient conditions can lead to positive pressure within the gas source package. Under typical storage, handling and use conditions (i.e. above NTP) SAGS Type 1 gas source package may be under positive pressure and could release toxic gases if the gas source container hand wheel is accidently opened, a valve leak develops, or the container is breached. Fire officials and users need to be aware of this condition that can lead to unintended exposure. NFPA standards should be accurate and include complete information when published. It is a safety issue and the importance of a full and clear definition will help to avoid someone getting hurt.

Related Item

Public Input No. 14-NFPA 318-2015 [Section No. 3.3.4]

Submitter Information Verification

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Submitter Full Name: Ronald Fuhrhop

Organization: Praxair

Street Address:

City:

State:

Zip:

Submittal Date: Mon May 16 14:12:28 EDT 2016

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Public Comment No. 6-NFPA 318-2016 [ Section No. 4.3 ]

4.3* Noncombustible Construction Components.

Cleanrooms rated ISO Class 5 or cleaner in accordance with ISO 14644-1, Cleanrooms and AssociatedControlled Environments — Part 1: Classification of Air Cleanliness, or cleanrooms having clean zonesrated ISO Class 5 or cleaner shall have approved, noncombustible components for walls, floors, ceilings,and partitions.

4.3.1* Noncombustible material

A material that complies with any of the following shall be considered a noncombustible material:

(1) A material that, in the form in which it is used and under the conditions anticipated, will not ignite,burn, support combustion, or release flammable vapors when subjected to fire or heat

(2) A material that is reported as passing ASTM E 136, Standard Test Method for Behavior ofMaterials in a Vertical Tube Furnace at 750 Degrees C

(3) A material that is reported as complying with the pass/fail criteria of ASTM E 136 when tested inaccordance with the test method and procedure in ASTM E 2652, Standard Test Method for Behavior ofMaterials in a Tube Furnace with a Cone-shaped Airflow Stabilizer, at 750 Degrees C

A.4.3.1 The provisions of 4.3.1 do not require inherently noncombustible materials, such as steel,concrete or masonry, to be tested in order to be classified as noncombustible materials.

(Also, add ASTM E2652 (2016), Standard Test Method for Behavior of Materials in a Tube Furnacewith a Cone-shaped Airflow Stabilizer, at 750 Degrees C, into Section 2 on referenced ASTMstandards. )

Statement of Problem and Substantiation for Public Comment

This public input incorporates into NFPA 318 the same format as is used in NFPA 1, 101, 5000, 220, 90A and others and complies with the manual of style which prohibits definitions from containing requirements or references to specific codes or standards. This is associated also with the proposed reference, in the definitions section, simply to this section.

The new proposed section contains more complete requirements for noncombustible materials than the earlier definition, and includes requirements that are enforceable (while those in definitions are not enforceable) and complies with the NFPA Manual of Style.

The new annex section clarifies that no one will require testing of materials such as concrete or steel for noncombustibility.

ASTM E2652 was specifically developed as an alternate method to assess noncombustibility in a manner consistent with ASTM E136.

Related Public Comments for This Document

Related Comment Relationship

Public Comment No. 5-NFPA 318-2016 [Section No. 3.3.24]

Related Item

Public Input No. 6-NFPA 318-2015 [New Section after 4.2]

Public Input No. 7-NFPA 318-2015 [Section No. 3.3.24]

Submitter Information Verification

Submitter Full Name: Marcelo Hirschler

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Organization: GBH International

Street Address:

City:

State:

Zip:

Submittal Date: Wed May 04 18:29:20 EDT 2016

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Public Comment No. 12-NFPA 318-2016 [ Section No. 4.4.1 ]

4.4.1

Fire resistance ratings shall be determined in accordance with ASTM E119, Standard Test Methods for FireTests of Building Construction and Materials or ANSI/UL 263, Syandard for Fire Tests of BUildingConstruction and Materials .

Statement of Problem and Substantiation for Public Comment

Fire resistance ratings are also able to be determined in accordance with ANSI/UL 263, which is considered to be equivalent to ASTM E119. Referencing both standards would be consistent when fire resistance ratings are required in other NFPA codes and standards, such as NFPA 101 and NFPA 5000. There are numerous fire resistance ratings that have already been established using ANSI/UL 263.

Related Item

First Revision No. 6-NFPA 318-2015 [Section No. 4.4]

Submitter Information Verification

Submitter Full Name: Kelly Nicolello

Organization: UL LLC

Affilliation: UL LLC

Street Address:

City:

State:

Zip:

Submittal Date: Sun May 15 11:15:55 EDT 2016

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Public Comment No. 3-NFPA 318-2016 [ Section No. 5.5.2 ]

5.5.2

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Hazardous chemicals in the fabrication area shall be limited to those needed for operations andmaintenance and as required by 5.5.2.1 and 5.5.2.2, with quantities not exceeding the limitations specifiedin Table 5.5.2. The limits of Table 5.5.2 shall be permitted to be exceeded, provided a submittal usingalternative methods and materials is approved by the authority having jurisdiction (AHJ).

5.5.2.1

The amount of hazardous material allowed to be stored, used, or handled in a control area shall be theexempt amount set forth in NFPA 1 and NFPA 5000 and it shall be based on the material state (solid,liquid, or gas) and the material storage or use conditions.

Table 5.5.2 Quantity Limits for Hazardous Materials in a Single Fabrication Area

Hazard Category

Solids Liquids Gas

kg/m2 lb/ft2 L/m2 gal/ft2m3 @

NTP/m2ft3 @

NTP/ft2

Physical Hazard Materials

 Combustible liquid

 Class II 0.8 0.02

 Class III-A 1.6 0.04

 Class III-BNot

limitedNot

limited

 Combination Class I, II, andIII-A

3.26 0.08

Cryogenic

 Flammable Note b Note b

 Oxidizing 0.76 2.5

Flammable gas

 Gaseous Note b Note b

 Liquefied Note b Note b

Flammable liquid

 Class I-A 2.04 0.05

 Class I-B 2.04 0.05

 Class I-C 2.04 0.05

 Combination Class I-A, I-B, andI-C

2.04 0.05

 Combination Class I, II, andIII-A

3.26 0.08

Flammable solid 0.032 0.002

Organic peroxide

 Unclassified detonable Note a Note a Note a Note a

 Class I Note a Note a Note a Note a

 Class II 0.8 0.05 0.1 0.0025

 Class III 3.2 0.2 0.8 0.02

 Class IVNot

limitedNot

limitedNot

limitedNot

limited

 Class VNot

limitedNot

limitedNot

limitedNot

limited

Oxidizing gas

 Gaseous 0.76 2.5

 Liquefied 0.76 2.5

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Combination of gaseous andliquefied

0.76 2.5

Oxidizer

 Class 4 Note a Note a Note a Note a

 Class 3 0.096 0.006 2.44 0.06

 Class 2 0.096 0.006 2.44 0.06

 Class 1 0.096 0.006 2.44 0.06

Combination oxidizer

Class 1, 2, 30.096 0.006 2.44 0.06

Pyrophoric Note a Note a 0.1 0.0025 Notes b and c Notes b and c

Unstable reactive

 Class 4 Note a Note a Note a Note a Note a Note a

 Class 3 0.8 0.05 0.2 0.005 Note a Note a

 Class 2 3.2 0.2 0.8 0.02 Note a Note a

 Class 1Not

limitedNot

limitedNot

limitedNot

limitedNot limited Not limited

Water reactive

 Class 3 Note b Note b 0.1 0.0025

 Class 2 8.0 0.5 2.04 0.05

 Class 1Not

limitedNot

limitedNot

limitedNot

limited

Health Hazard Materials

CarcinogensNot

limitedNot

limitedNot

limitedNot

limitedNot limited Not limited

CorrosivesNot

limitedNot

limitedNot

limitedNot

limitedNot limited Not limited

Highly toxicsNot

limitedNot

limitedNot

limitedNot

limited Note b Note b

IrritantsNot

limitedNot

limitedNot

limitedNot

limitedNot limited Not limited

SensitizersNot

limitedNot

limitedNot

limitedNot

limitedNot limited Not limited

Other health hazardsNot

limitedNot

limitedNot

limitedNot

limitedNot limited Not limited

ToxicsNot

limitedNot

limitedNot

limitedNot

limited Note b Note b

Hazard Category

Solids Liquids Gas

kg/m2 lb/ft2 L/m2 gal/ft2m3 @

NTP/m2ft3 @

NTP/ft2

Note: Hazardous materials within piping not to be included in the calculated quantities.

aQuantity of hazardous materials in a single fabrication not to exceed exempt amounts in NFPA 1, FireCode.

bThe aggregate quantity of flammable, pyrophoric, toxic, and highly toxic gases not to exceed a density

limit of 0.2 ft3 per ft2at NTP.

cThe aggregate quantity of pyrophoric gases in the building limited to the amounts for which detachedstorage is not required as set forth in NFPA 1, Fire Code.

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5.5.2.1 2

Quantities of hazardous chemicals shall be limited to those in use within the tool or the daily (24-hour)supply of chemicals needed, with quantities not exceeding the limitations specified in Table 5.5.2.1 unlessa risk assessment determines that a significant fire is unlikely to take place.

Table 5.5.2.1 Maximum Quantities of Hazardous Chemicals at a Workstation

Hazardous Chemical State Maximum Amount

Flammables, highly toxics, and

pyrophorics and toxics combineda Gas

Combined aggregate volume of all cylinders at a work stationshall not exceed an internal cylinder volume of 150 L (39.6 gal,

or 5.29 ft3).

Hazardous chemical flammablesLiquid 56.8 L (15 gal)a, b

Solid 2.3 kg (5 lb)a, b

Corrosivesa

Gas

Combined aggregate volume of all cylinders at a work stationshall not exceed an internal cylinder volume of 150 L (39.6 gal,

or 5.29 ft3).

Liquid 378.5 L (100 gal)a, b

Solid 9.1 kg (20 lb)

Highly toxicsLiquid 56.8 L (15 gal)a

Solid 2.3 kg (5 lb)a

Oxidizersa

Gas

Combined aggregate volume of all cylinders at a work stationshall not exceed an internal cylinder volume of 150 L (39.6 gal,

or 5.29 ft3).

Liquid 45.4 L (12 gal)a, b

Solid 9.1 kg (20 lb)a, b

Pyrophorics Liquid 20 L (5.3 gal)c, d

ToxicsLiquid 56.8 L (15 gal)a, b

Solid 2.3 kg (5 lb)a, b

Unstable reactives

Class 3

Liquid 20 L (5.3 gal)a, b, d

Solid 2.3 kg (5 lb)a, b

Water reactives

Class 3Liquid 1.9 L ( 0.5 gal)c

aAllowable quantities increased 100 percent for use-closed systems operations. When note b also applies,the increase for both requirements is allowed.

bAllowable quantities are allowed to be increased 100 percent when tools are constructed of materials thatare listed or approved for use without internal fire extinguishing or suppression or internally protected withan approved automatic fire-extinguishing or suppression system. When note a also applies, the increasefor both notes is allowed.

cOnly in tools that are internally protected with an approved automatic fire-extinguishing or fire protectionsystem compatible with the reactivity of materials in use at the workstation.

d20 L is acceptable, it is more reflective of current practices for volumes of materials used at individualtools.

5.5.2.1 2 .1*

The amounts in Table 5.5.2.1 shall be permitted to be exceeded if a risk assessment is performed andapproved by the AHJ.

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5.5.2.2 3

Storage of hazardous chemicals in the fabrication area shall be within approved or listed storage cabinets,gas cabinets, or exhausted enclosures, or within a tool.

Statement of Problem and Substantiation for Public Comment

This places the information from the deleted definition of exempt amount per control are in a mandatory section of the standard.

Related Public Comments for This Document

Related Comment Relationship

Public Comment No. 2-NFPA 318-2016 [Section No. 3.3.8]

Related Item

Public Input No. 8-NFPA 318-2015 [Section No. 3.3.8]

Submitter Information Verification

Submitter Full Name: Marcelo Hirschler

Organization: GBH International

Street Address:

City:

State:

Zip:

Submittal Date: Wed May 04 18:14:19 EDT 2016

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Public Comment No. 14-NFPA 318-2016 [ Section No. A.7.14.2.2 ]

A.7.14.2.2

Subsections 9 Subsections 63 . 1 2 . 4 17.2 and 9 63 . 2.18. 1 .5 provide reference requirements in NFPA1, for minimum external face minimum face velocities of 200 fpm (1 m/s) at openings in gas cabinets orexhausted enclosures . Maintaining conditions below IDLH within the gas box represents a higher standardof control. Also, per NFPA 1, treatment systems for corrosive, toxic, or highly toxic gases can includenontreated ventilation systems that dilute the accidental release to less than 1⁄2 IDHL. Ventilation systemdesign for SAGS meets these dilution thresholds and therefore meets the requirement for treatmentsystems.

Statement of Problem and Substantiation for Public Comment

In A.7.14.2.2, Annex A, the reference to subsections 9.1.4 and 9.1.5 of NFPA 1 needs to be updated because these subsections have now been reserved. In NFPA 1: 2015, ventilation requirements for compressed gases and cryogenic fluids are found at subsections 63.2.17.2 and 63.2.18.1. These requirements (in NFPA 1:2015) have been extracted from Chapter 6 of NFPA 55 where the reference for “face velocity of 200 ft./m (1 m/s) at openings” for gas cabinets and exhausted enclosures is currently located. Since NFPA 1 talks about the face velocity only when installed “in gas cabinets or exhausted enclosures”, a reference to gas cabinets and exhausted enclosures was added to Annex A of NFPA 318. The word “external” was deleted because face velocity is measured at the opening which divides internal from external.

Related Item

Public Input No. 15-NFPA 318-2015 [Section No. A.7.14.2]

Submitter Information Verification

Submitter Full Name: Ronald Fuhrhop

Organization: Praxair

Street Address:

City:

State:

Zip:

Submittal Date: Mon May 16 14:51:29 EDT 2016

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Public Comment No. 15-NFPA 318-2016 [ Section No. A.7.14.2.6 ]

A.7.14.2.6

A Type 1 SAGS has an inherent flow restriction because the cylinder’s low internal gas pressure is

subatmospheric at NTP and less than 58 psia at 122 o F (300 kPa at 50 o C) .

Statement of Problem and Substantiation for Public Comment

In A.7.14.2.6, Annex A, adding the phrase “at NTP and less than 58 psia at 122 oF (300 kPa at 50 oC)” is proposed to add clarity. It is important to communicate that, even though Type 1 SAGS gas source may have positive pressure at temperatures above NTP, the container still has an inherent flow restriction because the pressure is low and the flow is low. The word “low” was also added to emphasize low pressure.

Related Item

Public Input No. 16-NFPA 318-2015 [Section No. A.7.14.2.6]

Submitter Information Verification

Submitter Full Name: Ronald Fuhrhop

Organization: Praxair

Street Address:

City:

State:

Zip:

Submittal Date: Mon May 16 14:57:32 EDT 2016

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