zinetula zeke insepov, d.sc., ph.d.li.mit.edu/stuff/zekeinsepov/cv_insepov.pdf1 zinetula zeke...

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1 Zinetula Zeke Insepov, D.Sc., Ph.D. 8517 Thistlewood Court, Darien, IL USA E-mail: [email protected] Education Doctor of Sciences (habilitation), Semyonov Chemical Physics Institute, Moscow Russia In Chemical Physics of Combustion, Explosion, and Shock waves, 1994 Doctor of Philosophy (equivalent), Lebedev Physics Institute, Moscow Russia In Semiconductor Physics, 1977 MS (Summa Cum Laude), Moscow Power Engineering Institute, Moscow Russia In Semiconductor Technology, 1972 Industrial Research Experience Epion Japan Corporation 1 Manager for Research and Development Tokyo, JAPAN 3/2000 3/2003 o Pioneered surface treatment in electronic materials for microelectronics. o Introduced concept of lateral sputtering. o Developed and implemented rf mitigation method for high-gradient accelerators. o Redesigned and developed mass-spectrometer for cluster ions. Current and Past Positions Founding Faculty Fellow and Professor, Skolkovo Institute of Science and Technology, Nuclear Science section (Russian Federation) 2012-now Chief Scientist and Head of the Nano Synergy Laboratory, Center for Energy Research, Nazarbayev University (Kazakhstan) 2013-now Adjunct Professor, Moscow Institute of Physics and Technology, Nuclear materials and fuels (Russian Federation) 2013-now Adjunct-Professor, School of Nuclear Engineering, Purdue University, West-Lafayette, IN (USA) 2010-now Computational Materials Scientist, Energy Technology and Mathematics and Computer Science Divisions of Argonne National Laboratory, Chicago (USA) 2003-2013 Manager for Research and Development at Epion Japan Corp, Tokyo (Japan) 2000-2003 Head of Chair and professor of new materials research at the Ion Beam Engineering Experimental Laboratory of Kyoto University, Kyoto (Japan) 19922000 Visiting Professor of Albert Ludwigs University of Freiburg, (Germany) 4-6/1991 Assistant, Associate Professor, promoted to Full Professor of Physics Department, National Technical University, Almaty, (Kazakhstan) 1977-1995 1 Japanese subsidiary of TEL Epion Corporation, Billerica, MA USA

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Zinetula Zeke Insepov, D.Sc., Ph.D. 8517 Thistlewood Court, Darien, IL USA

E-mail: [email protected]

Education

Doctor of Sciences (habilitation), Semyonov Chemical Physics Institute, Moscow Russia

In Chemical Physics of Combustion, Explosion, and Shock waves, 1994

Doctor of Philosophy (equivalent), Lebedev Physics Institute, Moscow Russia

In Semiconductor Physics, 1977

MS (Summa Cum Laude), Moscow Power Engineering Institute, Moscow Russia

In Semiconductor Technology, 1972

Industrial Research Experience

Epion Japan Corporation 1 Manager for Research and Development

Tokyo, JAPAN 3/2000 – 3/2003

o Pioneered surface treatment in electronic materials for microelectronics. o Introduced concept of lateral sputtering. o Developed and implemented rf mitigation method for high-gradient accelerators. o Redesigned and developed mass-spectrometer for cluster ions.

Current and Past Positions Founding Faculty Fellow and Professor, Skolkovo Institute of Science and Technology, Nuclear Science section (Russian Federation)

2012-now

Chief Scientist and Head of the Nano Synergy Laboratory, Center for Energy Research, Nazarbayev University (Kazakhstan)

2013-now

Adjunct Professor, Moscow Institute of Physics and Technology, Nuclear materials and fuels (Russian Federation)

2013-now

Adjunct-Professor, School of Nuclear Engineering, Purdue University, West-Lafayette, IN (USA)

2010-now

Computational Materials Scientist, Energy Technology and Mathematics and Computer Science Divisions of Argonne National Laboratory, Chicago (USA)

2003-2013

Manager for Research and Development at Epion Japan Corp, Tokyo (Japan) 2000-2003

Head of Chair and professor of new materials research at the Ion Beam Engineering Experimental Laboratory of Kyoto University, Kyoto (Japan)

1992–2000

Visiting Professor of Albert Ludwigs University of Freiburg, (Germany) 4-6/1991

Assistant, Associate Professor, promoted to Full Professor of Physics Department, National Technical University, Almaty, (Kazakhstan)

1977-1995

1 Japanese subsidiary of TEL Epion Corporation, Billerica, MA USA

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Research Accomplishments Predicted a new nanopumping and nano-separation effects with carbon nanotubes that have

innovative potential for agriculture (nano-irrigation), nano-medicine, nano-separation of gases. Predicted a new surface smoothening effect by cluster ion beam that had significant industrial impact. Predicted a new cluster field evaporation effect in high gradient linear accelerators. Predicted erosion of Tokamak wall for fusion materials.

Awards, Memberships, and Professional Service: Awarded the highest level undergraduate and graduate scholarships. Ion Beam Engineering Awards, to hold a New Materials Research Chair at Kyoto University, Japan

(1992/93, 1994/95, 1995/96, 1997/98, 1998/99, 1999/2000). Member of evaluation committee at Kyoto University, Japan Member of the Moscow Physical Society. Foreign member of the Board of the Moscow Physical Society. Member of the Joint Physical Society of the Russian Federation. Session Chairman of the IU-MRS International Conference in Asia, Japan. Symposium “Materials

synthesis and modification by ion and/or laser beams”, 1997. Session Chairman of the International Conference on Computer Simulation of Radiation Effects in

Solids (COSIRES'98) Okayama, Japan, 1998.

Grants and Proposals Argonne National Laboratory funded research grants: Large Area picosecond Photo detectors $400,000 (2010-2012) RERTR (Reduced Enrichment for Research and Test Reactors $400,000 (2010-2013) Nanopumping and nano-engine made of carbon nanotubes $195,000 (2004-2006) RF vacuum breakdown mitigation by Gas cluster technology $225,000 (2005-2007) Meso-scale simulation of blood flow using kinetic theory $250,000(2006-2009) Fast Nuclear Reactor Development $2,000,000 (2005-06) Fundamental properties of dense plasma interaction with surfaces $10,000 (2005)

DOE funded research grants: Physics and Material Models for Advanced Nuclear Fuel $310,000 (2010-11) Development of large-area picosecond photo-detectors $250,000 (2010-11) Low enrichment nuclear fuel development $210,000 (2010-11) Atomic layer deposition for superconducting linacs $200,000 (2010-11) Development of muon collider $100,000 (2011-12) SBIR DOE Grant Improving the Performance of High $600,000 (2005-2008) Gradient RF Structures by Surface Treatment

External funding Dongshin University, Korea, Principal Investigator (PI) $30,000 (2005-2006) Biology Research Center of Industrial Accelerators, KEK, Japan (High Energy Accelerator Research $100,000 (2007-2009)

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Organization, Tsukuba, Japan) PI Nazarbayev University, Kazakhstan $130,000 (2011) Contract for the Development of Research Centers, PI Ministry of Education and Science of Russian Federation $178,000 (2012-2013) Grant for the Federal Program Research and Pedagogical Cadre for Innovative Russia, PI Ministry of Education and Science of Kazakhstan Grant for energy efficient nanomembranes, PI $3,000,000 (2013-2016) Grant for mitigation of vacuum breakdown, PI $200,000 (2013-2014) Post-doctoral Internship $64,000 (2013-2014)

Supervision in M.S. and Ph.D. theses: S. Zheludkov "The kinetics of cluster formation in dense systems", Kazakh National University; E. Karataev "The kinetics of cluster formation in rare gases", Kazakh National University; A. Zhankadamova "Molecular Dynamics calculation of sticking coefficient of gases to a solid surface", Kazakh National University; M. Ishii, "Generation of Intensive Cluster Ion Beams and their applications", Kyoto University, Japan G. Sugahara, "Modification of Solid Surfaces with Cluster Ion Beams", Kyoto University. T. Aoki, “Molecular Dynamic Simulation of Cluster Ion Impact on Solid Surface” (Kyoto University, Japan) MS and Ph.D. theses. A. Issayev “Environmentally friendly shale gas production”, Kazakh-British National University, PhD Evaluated Ph.D. theses at Kyoto University, Japan: Daisuke Takeuchi – 1997, Makoto Akizuki – 1998, Noriaki Toyoda – 1999, Takaaki Aoki – 2000, Toshio Seki -- 2000.

Courses Taught Graduate courses at Kyoto and Purdue Universities: o Radiation defects in solid materials; o Thin film deposition; o Computational physics o Cluster ion beam engineering. Undergraduate courses: o General, Theoretical, Applied and Computational Physics o Programming in Science and Engineering Spoken Languages: English – fluent, German – good, Kazakh and Russian – native, Japanese –can understand. Family: Married to Shara Insepova, with two sons, one is graduated from the University of Illinois at Urbana/Champaign; the second son is a graduate from the Univ. of Oregon and now works at SONY Corp., Los Angeles, CA. Hobbies: History, cycling, Japanese culture.

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Summary of research results:

Scientific Reviewer of Journals o The Physical Review (B, STAB) o Philosophical Magazine Letters o Thin Solid Films o Applied Physics Letters o Journal of Applied Physics o Nuclear Instruments and Methods in Physical Research. (Section B) o Vacuum o Metals o Journal of Nuclear Materials o Science Expert of the Russian Ministry of Education and Science o Science Expert of the Kazakh Ministry of Education and Science o Science Expert of the Romanian Ministry of Education and Science

Patents and invention applications:

1) “Environmentally friendly method of shale gas production by nanopumping”, Z. Insepov, Submitted to ANL on 2/23/2013. 2) “Mitigation of corona losses for high-tension power grids”, J. Norem, Z. Insepov, J. Elam, submitted to ANL on 9/13/2012. 3) “Method and system for small-scale pumping”, Z. Insepov, A. Hassanein; US patent #7,651,673, awarded on January 26, 2010. 4) “Method for nanopumping using carbon nanotubes”, Z. Insepov, A. Hassanein; US patent # 7,632,482, awarded on December 15, 2009. 5) “Mitigation of high-voltage breakdown in linacs by atomic-scale smoothing of accelerator structure and microwave source surfaces by gas cluster ion beam technique”, ANL-IN-03-132, DOE-S-104,655 (2003) pending, Z. Insepov, A. Hassanein. 6) “Rock peeling with high-current pulsed electron beam in air”, USSR patent, 1989. Z. Insepov et al.

List of recent papers:

1. D. Yun, M.A. Kirk, P.M. Baldo, J. Rest, A.M. Yacout, Z.Insepov, In situ TEM investigation of Xe ion irradiation induced defects and bubbles in pure molybdenum single crystal, J. Nucl. Mater. 437, Issue 1-3, pp. 240-249 (June 2013).

2. D.E. Smirnova, A.Yu. Kuksin, S.V. Starikov, V.V. Stegailov, Z. Insepov, J. Rest, A.M. Yacout, A ternary EAM interatomic potential for U–Mo alloys with xenon, Modelling Simul. Mater. Sci. Eng. 21 (2013). (Available online)

3. Z. Insepov, J. Norem, Can surface cracks and unipolar arcs explain breakdown and gradient limits? J. Vac. Sci. Technol. A 31, 011302 (2013).

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4. J Norem, Z Insepov, Can surface cracks and unipolar arcs explain breakdown and gradient limits? arXiv preprint arXiv:1208.0847 (2012)

5. IV Morozov, GE Norman, Z Insepov, J Norem, Sheath parameters for non-Debye plasmas: Simulations and arc damage, Physical Review Special Topics-Accelerators and Beams 15 (5), 053501 (2012)

6. A Yanilkin, Z Insepov, G Norman, J Rest, V Stegailov, Atomistic simulation of clustering and annihilation of point defects in Molybdenum, Defect and Diffusion Forum 323, 95-100 (2012)

7. Z Insepov, A Kuksin, J Rest, S Starikov, A Yanilkin, AM Yacout, B Ye, D Yun, Simulation of Ion Irradiation of Nuclear Materials and Comparison with Experiment, arXiv preprint arXiv:1203.0327 (2012)

8. Z Insepov, J Rest, AM Yacout, B Ye, D Yun, AY Kuksin, GE Norman, VV ..., Atomistic and Kinetic Simulations of Radiation Damage in Molybdenum, MRS Proceedings 1444 (1) (2012)

9. B Ye, D Yun, Z Insepov, J Rest, Multi-Scale Modeling of Interstitial Dislocation Loop Growth in Irradiated Materials, MRS Online Proceedings Library 1444 (1) (2012)

10. SV Starikov, Z Insepov, J Rest, AY Kuksin, GE Norman, VV Stegailov, AV Yanilkin, Radiation-induced damage and evolution of defects in Mo, Physical Review B 84 (10), 104109 (2011)

11. Z Insepov, J Rest, AM Yacout, AY Kuksin, GE Norman, VV Stegailov, SV ..., Derivation of kinetic coefficients by atomistic methods for studying defect behavior in Mo, Journal of Nuclear Materials (2011)

12. I Morozov, G Norman, Z Insepov, J Norem, Sheath parameters for non-Debye plasmas: simulations and experimental estimates, arXiv preprint arXiv:1108.0594 (2011)

13. Z Insepov, J Norem, S Veitzer, S Mahalingam, Modeling arcs, arXiv preprint arXiv:1108.0861 (2011)

14. Z Insepov, J Norem, S Veitzer, FD McDaniel, BL Doyle, Ion solid interaction and surface modification at RF breakdown in high-gradient linacs, AIP Conference Proceedings-American Institute of Physics 1336 (1), 345 (2011)

15. Z Insepov, D Yun, B Ye, J Rest, S Starikov, AM Yacout, FD McDaniel, BL Doyle, Simulation of ion implantation into nuclear materials and comparison with experiment, AIP Conference Proceedings-American Institute of Physics 1336 (1), 672 (2011)

16. V Ivanov, Z Insepov, S Antipov, Simulation of gain and timing resolution in saturated pores, Nuclear Instruments and Methods in Physics Research Section A: Accelerators (2011)

17. Z Insepov, V Ivanov, SJ Jokela, I Veryovkin, A Zinovev, H Frisch, Comparison of secondary electron emission simulation to experiment, Nuclear Instruments and Methods in Physics Research Section A: Accelerators ..(2011)

18. V. Ivanov, Z. Insepov, S. Antipov, Simulation of gain and timing resolution in saturated pores, Nucl. Instr. Meth. in Phys. Res. A 639 (2011) 158-161.

19. Z. Insepov, V. Ivanov, S.J. Jokela, I. Veryovkin, A. Zinovev, H. Frisch, Comparison of secondary electron emission simulation to experiment, Nucl. Instr. Meth. in Phys. Res. A, 639 (2011) 155-157.

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20. Z. Insepov, V. Ivanov, H. Frisch, Comparison of back-scattering properties of electron emission materials, Nucl. Inst. Meth. B 268 (2010) pp. 3315-3320.

21. Z. Insepov, J. Rest, G.L. Hofman, A. Yacout , A New Multiscale Approach to Nuclear Fuel Simulations: Atomistic Validation of Kinetic method; Transactions of the American Nuclear Society, Pages: 264-265 (2010).

22. Z. Insepov, J. Rest, G.L. Hofman, Lattice Expansion in Nuclear Fuels at High Burnups; Transactions of the American Nuclear Society, pp. 149-150 (2010).

23. Z. Insepov, J. Norem, S. Veitzer, “Atomistic mechanisms of rf breakdown in high-gradient linacs”, Nucl. Instr. Math. in Phys. Res. B 268 (2010) pp. 642-650.

24. J. Norem, Z. Insepov, D. Huang, S. Mahalingam, S. Veitzer, “The problem of rf gradient limits”, AIP Conf. Proc., Volume 1222, pp. 348-352. (Issue date: 30 March, 2010)

25. Z. Insepov, J. Norem, T. Proslier, D. Huang, S. Mahalingam, S. Veitzer, Modeling rf breakdown arcs I: Arc evolution, arXiv:1003.1736v3 [physics.acc-ph] (Published on 8 Mar 2010 (v1), 12 Oct 2010

26. Z. Insepov, J. Norem, T. Proslier, D. Huang, S. Mahalingam, S. Veitzer, Modeling rf breakdown arcs II: plasma / materials interactions, arXiv:1006.2370v1 [physics.acc-ph] (Published on 8 Mar 2010 (v1), Fri, 11 Jun 2010

27. Z. Insepov, J. Norem, T. Proslier, D. Huang, S. Mahalingam and S. Veitzer, “Modeling Vacuum Arcs,” arXiv:1006.3770v1, (Published 2010).

28. Z. Insepov, V. Ivanov, H. Frisch, Comparison of Candidate Secondary Electron Emission Materials, Published in NIM B, 268 (2010) 3315-3320.

29. Z. Insepov, V. Ivanov, S. J. Jokela, I. Veryovkin, A. Zinoviev, H. Frisch, Comparison of Secondary Electron Emission Simulation to Experiment, Published in NIM A, 2010.

30. Z. Insepov, J. Rest, G.L. Hofman, A. Yacout, A New Multiscale Approach to Nuclear Fuel Simulations: Atomistic Validation of Kinetic method; Published in Transactions of 2010 ANS Annual Meeting, 13-17 June, 2010.

31. Z. Insepov, J. Rest, G.L. Hofman, Lattice Expansion in Nuclear Fuels at High Burnups, Published in Transactions of 2010 ANS Annual Meeting, 13-17 June, 2010;

32. B. Adams, J.T. Anderson, K. Attenkofer, et al. “A Design for Large-Area Fast Photo-detectors with Transmission-Line Readout and Waveform Sampling”, IEEE 2009 16th IEEE-NPSS Real Time Conference, pp. 49-61 (2009).

33. T. Wu, D. R. Swenson, Z. Insepov, “Modification on surface oxide layer structure and surface morphology of niobium by gas cluster ion beam treatments”, Phys. Rev. STAB 13, 093504 (2010).

34. Z. Insepov, M. Terasawa, K. Takayama, Surface erosion and modification by highly charged ions, Phys. Rev. A 77 (2008) 062901.

35. Z. Insepov, J. Norem, D. Swenson, A. Hassanein, Surface erosion and modification by energetic ions, Vacuum 82 (2008) 872–879.

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36. Z. Insepov, J. Norem, D. Swenson, A. Hassanein, Surface erosion and modification by energetic ions, to be published in Vacuum (Available online Dec. 2007)

37. Z. Insepov, M. Terasawa, K. Takayama, Surface erosion and modification by highly charged ions, Submitted to Physical Review A, 2007.

38. Insepov, Z., A. Hassanein, T. Bazhirov, G. Norman, V. Stegailov, “Molecular dynamics simulation of bubble formation and cavitation in liquid metals”, Fusion Science & Technology, 52 (2007) 885-889

39. Z. Insepov, Surface erosion and modification by energetic ions, Book of reports of 18th Intern. Conf. on Ion-Surface Interactions ISI-2007, p.55-59, Zvenigorod, Russia.

40. Z. Insepov, T. Bazhirov, G. Norman, V. Stegailov, Computer simulation of bubble formation, Joint Intern. Top. Meet. on Math. and Comput. and Supercomp. in Nucl. Appl. (Math. and Comp. + SNA 2007); Monterey, CA (2007), Am. Nucl. Soc., LaGrange Park, IL (2007).

41. Z. Insepov, J. Norem, D.R. Swenson, A. Hassanein and M. Terasawa, Surface erosion and modification by ions studied by computer simulation, Nucl. Inst. Meth. in Phys. Res. B 258 ( 2007) 172-177.

42. Z. Insepov, A. Hassanein, J. Norem and D.R. Swenson, Advanced surface polishing using gas cluster ion beams, Nucl. Inst. Meth. in Phys. Res. B 261 (2007) 664-668.

43. D.R. Swenson, A.T. Wu, E. Degenkolb and Z. Insepov, Gas cluster ion beam surface treatments for reducing field emission and breakdown of electrodes and SRF cavities, Nucl. Inst. Meth. in Phys. Res. B 261 (2007) 630-633.

44. Z. Insepov, D. Wolf, A. Hassanein, Nanopumping using carbon nanotubes, Nano Letters 6 (9) (2006) 1893-1895.

45. Hassanein, Z. Insepov, and J. Norem et al., Effects of surface damage on rf cavity operation, Phys. Rev. ST AB 9, 062001 (2006).

46. Z. Insepov, M. Terasawa, A. Hassanein, J.S. Choi, Coulomb explosion following electronic excitation in ion-solid interaction, Surface (Russian magazine), No.7 (2006) 93-95.

47. Z. Insepov, A. Hassanein and D. Swenson, Computer simulation of surface modification with ion beams, Physica C: Superconductivity, Vol. 441 (2006) 114-117.

48. D.R. Swenson, E. Degenkolb and Z. Insepov, Study of gas cluster ion beam surface treatments for mitigating RF breakdown, Physica C: Superconductivity, Vol. 441 (2006) 75-78.

49. Z. Insepov, J.P. Allain, A. Hassanein, M. Terasawa, Surface erosion by highly-charged ions, Nucl. Inst. Meth. in Phys. Res. B 242 (2006) 498-502.

50. J. Norem, A. Hassanein, Z. Insepov, Breakdown in RF cavities, Proc. IEEE Particle Accelerator Conference (PAC), Vols. 1-4 (2005) 3548-3550.

51. Hassanein, J.P. Allain, Z. Insepov, I. Konkashbaev, Plasma/Liquid-Metal Interactions during Tokamak Operation, Fusion Sci. and Techn. 47 (2005) 686-697.

52. Z. Insepov, A. Hassanein, Molecular dynamics simulation of Li surface erosion and bubble formation, Journal of Nucl. Mat., Vol. 337-339 (2005) 912-916.

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53. Z. Insepov, A. Hassanein, Field Evaporation Model of Rf-Vacuum Breakdown, ANL Preprint, ANL-ET-04/23, 2005.

54. D. Swenson, E. Degenkolb, Z. Insepov, L. Laurent, G. Scheitrum, Smoothing RF cavities with gas cluster ions to mitigate high voltage breakdown, Nucl. Inst. Meth. in Phys. Res. B241 (2005) 641-644.

55. Z. Insepov, A. Hassanein, D. Swenson, M. Terasawa, Computer simulation of surface modification with ion beams, Nucl. Inst. Meth. in Phys. Res. B241 (2005) 496-500.

56. J. Norem, Z. Insepov, I. Konkashbaev, Triggers for RF breakdown, Nucl. Inst. Meth. in Phys. Res. A 537 (2005) 510-520.

57. Z. Insepov, J. Norem, and A. Hassanein, Field Evaporation Model of Rf-Vacuum Breakdown, Phys. Rev. STAB, 7 (2004) 122001.

58. J. Norem, Z. Insepov, Triggers for RF Breakdown, Proc. of EPAC-2004, Lucerne, Switzerland, pp.1063-1065.

59. Z. Insepov, J. Norem, A. Hassanein, New mechanism of cluster field evaporation in rf breakdown, Techn. Digest 17th Intern. Vac. Nanoelectr. Conf. 180-181 (2004).

60. J.P. Allain, A. Hassanein, T. Burtseva, A. Yacout, Z. Insepov, S. Taj, B. Rice Radiation-induced synergistic effects of athermal and thermal mechanisms on erosion and surface evolution of advanced electrode and condenser optics materials, Emerging Lithographic Technologies VIII, ed. By R.S. Mackay, Proc. of SPIE Vol. 5374 (SPIE, Bellingham, WA, 2004), pp. 112-121.

61. M. Terasawa, Z. Insepov, T. Sekioka, A. Valuev, T. Mitamura, Sputtering due to Coulomb explosion in highly charged ion bombardment, Nucl. Instr. Meth. in Phys. Res. B212 (2003), pp. 436-441.

62. Valuev, M. Terasawa, T. Sekioka, Z. Insepov, I. Yamada, Nanocrater formation via Coulomb explosion initiated by impingement of highly charged xenon ions with silicon surface, Comput. Nanosci. and Nanotechn. 2002, pp. 455-457.

63. Z. Insepov, N. Toyoda, and I. Yamada, L.P. Allen, C.L. Santeufemio, K.S. Jones, Computer Modeling and Electron Microscopy of Silicon Surfaces Irradiated by Cluster Ion Impacts, Proc. of the 14th Int. Conf. on Ion Implant. Techn. (IIT 2002), IEEE, Piscataway, USA, pp. 571 - 574, 2003.

64. Z. Insepov, L.P. Allen, C. Santeufemio, K.S. Jones, and I. Yamada, Crater formation and sputtering by cluster impacts, Nucl. Instr. Meth. In Phys. Res. B 206, 2003, pp.846-850.

65. Z. Insepov and I. Yamada, Direct Simulation Monte Carlo method for GCIB technology, Nucl. Instr. Meth. in Phys. Res. B 202, 2003, pp.283-288.

66. Z. Insepov, L.P. Allen, C. Santeufemio, K.S. Jones, and I. Yamada, Computer Modeling and Electron Microscopy of Silicon Surfaces Irradiated by Cluster Ion Impacts, Nucl. Instr. Meth. in Phys. Res. B 202 (2003) pp.261-268. (April, 2003).

67. Z. Insepov, M. Sosnowski, and I. Yamada, Modeling of Boron implantation into Si with Decaborane cluster ions, Symp. J: Si Front-End Processing --Physics and Technology of Dopant-Defect Interactions III, Mat. Res. Soc. Proc., Vol. 669, J4.19 (2002).

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68. Z. Insepov and I. Yamada, Computer simulation of Decaborane implantation into silicon, annealing and re-crystallization of silicon, Mat. Res. Soc. Proc., Vol. 669, J4.7 (2002).

69. Valuev, T. Sekioka, M. Terasawa, Z. Insepov, and I. Yamada, Nanocrater formation via Coulomb explosion initiated by impingement of highly charged Xe ions with silicon surface, Proc. of Intern. ACRS2002 (2002), San Juan, Puerto Rico, U.S.A.

70. L. Allen, Z. Insepov, C. Santeufemio, D. Fenner, W. Brooks, K. Jones, and I. Yamada Craters on silicon surfaces created by argon gas cluster ion impacts, Journ. of Appl. Phys. 92 (2002) pp.3671-3678.

71. Z. Insepov, R. Manory, J. Matsuo and I. Yamada, New hardness measurement technique without indenter by gas cluster beam bombardment, Phys. Rev. B, Vol. 61, No.13 (2000) pp. 8744-8752.

72. Yamada, J. Matsuo, Z. Insepov et al., Nano-Processing with gas cluster ion beams, Nucl. Instr. and Meth. in Phys. Res., B 164/165 (2000) pp. 944-959.

73. T. Aoki, T. Seki, J. Matsuo, Z. Insepov, and I. Yamada, Surface processing with ionized cluster beams: computer simulation, Nucl. Instr. and Meth. in Phys. Res., B 153, pp.264-269 (1999).

74. Z. Insepov and I. Yamada, Surface processing with ionized cluster beams: computer simulation, Nucl. Instr. and Meth. in Phys. Res. B 153, pp.199-208 (1999).

75. T. Aoki, J. Matsuo, Z. Insepov and I. Yamada, Molecular Dynamics simulations of low-energy Boron cluster ion implantation, Proc. of XII Intern. Conf. on Ion Implantation Technology, Kyoto, Japan (1999) pp.1254-1261.

76. Z. Insepov, T. Aoki, J. Matsuo, and I. Yamada, Computer simulation of Decaborane implantation and rapid thermal annealing, Proc. of XII Intern. Conf. on Ion Implantation Technology, Kyoto, Japan (1999) pp.807-810.

77. Z. Insepov and I Yamada, Computer simulation of cluster ion irradiation of a solid surface, Proc. of Int. Symp. on Atomic Process of Highly Charged Heavy Ions and Cluster Ions, Himeji Institute of Technology, March 23-24, 1998, Himeji, Japan.

78. Z. Insepov, T. Aoki, J. Matsuo, and I. Yamada, Computer simulation of annealing of implantation by cluster ions, Mat. Res. Soc. Symp. Proc., Vol. 532 (1998), pp. 147-152.

79. Z. Insepov, I. Yamada, Surface modification with ionized cluster beams: Modelling, Nucl. Instr. and Meth. in Phys. Res. B 148, No.1-4 (1999), p.121-125.

80. Z. Insepov, R. Manory, J. Matsuo and I. Yamada, Ionized cluster beam as a hardness measurement tool, Nucl. Instr. Meth. B 148, No.1-4 (1999), p. 47 - 52.

81. T. Aoki, J. Matsuo, Z. Insepov, I. Yamada, Molecular Dynamics Study of Implant and Damage Formation in Low-Energy Boron Cluster Ion Implantation, Proceeding of XII-th International Conference on Ion Implantation Technology, Kyoto, Japan, June., 1998 pp.1254-1257 (1999).

82. T. Aoki, T. Seki, J. Matsuo, Z. Insepov, I. Yamada, Cluster Size Dependence of the Impact Process on a Carbon Substrate, Nucl. Instr. Meth. in Phys. Res. B153 (1999) pp.264-269.

83. T. Aoki, J. Matsuo, Z. Insepov, I. Yamada, Molecular Dynamics Simulation Cluster Ion Impact for Surface Modification Process, Proc. of 9th International Symposium on Small Particles and Inorganic Clusters, Lausanne, Switzerland, Sep. 1-5, 1998.

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84. Z. Insepov, R. Manory, J. Matsuo and I. Yamada, A new hardness measurement technique without indenter by gas cluster beam bombardment, Proc. of the Japanese Applied Physics Conference, Tokyo Japan, 1998.

85. T. Aoki, T. Seki, J. Matsuo, Z. Insepov, and I. Yamada, Molecular Dynamics Simulation of a Carbon Cluster Ion Impacting on a Carbon Surface, Mat. Chem. and Phys., 54, 1998, pp.139-142.

86. Yamada, J. Matsuo, N. Toyoda, T. Aoki, E. Jones, Z. Insepov, Non-linear processes in the gas cluster ion beam modification of solid surfaces, Mat. Sci. and Engin., A253 (1998), p. 249 -257.

87. Z. Insepov, I. Yamada, M. Sosnowski, Sputtering and smoothing of metal surface with energetic gas cluster beams, Mat. Chem. and Phys. 54 (1998), pp. 234 - 237.

88. T. Seki, T. Kaneko, D. Takeuchi, T. Aoki, J. Matsuo, Z. Insepov, and I. Yamada, Molecular Dynamics simulation of fullerene cluster ion impact, Nucl. Instr. and Methods in Phys. Res. B121 (1997), pp. 498 - 502.

89. T. Aoki, T. Seki, J. Matsuo, Z. Insepov, I. Yamada, Molecular Dynamics Simulation of a Carbon Cluster Ion Impacting on a Carbon Surface, Mater. Chem. and Phys., Vol. 54 (1998) pp. 139-142.

90. T. Aoki, T. Seki, M. Tanomura, J. Matsuo, Z. Insepov, I. Yamada, Molecular Dynamics Simulation of Fullerene Cluster Ion Impact, Mat. Res. Soc. Symp. Proc., Vol. 504 (1999) pp.81-86.

91. T. Aoki, J. Matsuo, Z. Insepov, I. Yamada, Molecular Dynamics Simulation of a Carbon Cluster Ion Impacting on a Carbon Surface, Proc. 4th IU-MRS Intern. Conf. in Asia, Chiba, Japan, Sep. 16-18, 1997.

92. T. Aoki, I. Yamada, J. Matsuo, N. Toyoda, E.C. Jones, Z. Insepov, Non-Linear Processes in the Gas Cluster Ion Beam Modification of Solid Surfaces, Engineering Foundation Conference, Italy, May 18-23, 1997.

93. T. Aoki, I. Yamada, J. Matsuo, N. Toyoda, E.C. Jones, Z. Insepov, Gas Cluster Ion Beam Processing, Proc. of 1997 MRS Fall Meeting, Boston, USA, 1997.

94. T. Aoki, J. Matsuo, Z. Insepov, I. Yamada, Molecular Dynamics Simulation of Damage Formation by Cluster Ion Impact Proc. of the Joint Intern. Symp. MRS-J Conference, 1996.

95. T. Aoki, T. Seki, J. Matsuo, Z. Insepov, I. Yamada, Molecular Dynamics Simulation of Surface Modification Process by Cluster Ion Impact, Proc. Conf.1997 MRS Fall Meeting Boston, USA, Dec., 1997.

96. T. Aoki, J. Matsuo, Z. Insepov, and I. Yamada, Molecular dynamics simulation of a carbon cluster ion impacting on a carbon surface, Nucl. Instr. Meth. B 121 (1997), pp. 49-52.

97. Z. Insepov, I. Yamada, Surface smoothing with energetic cluster beams, Nucl. Instr. and Methods in Phys. Res. B121 (1997), pp.44-48.

98. Z. Insepov, M. Sosnowski and I. Yamada, Surface smoothing with energetic cluster beams, J. Vac. Sci. Technol. A 15(3) (1997), pp.981-984.

99. Z. Insepov, M. Sosnowski and I. Yamada, Simulation of impacts of energetic clusters on a solid surface, Nucl. Instr. Meth. B 127/128 (1997), pp. 269 - 272.

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100. Yamada, J. Matsuo, Z. Insepov, D. Takeuchi, M. Akizuki, N. Toyoda, Surface processing by gas cluster ion beams at the atomic (molecular) level, J. of Vac. Sci. and Techn. A14 p.781 (1996).

101. Z. Insepov and I. Yamada, Computer simulation of cluster ion impacts on a solid surface, Proc. of 1995 Fall Meeting of US-MRS, Boston USA 1995, Symposium P: Materials Theory, Simulations, and Parallel Algorithms, E. Kaxiras, J. Joannopoulos, P. Vashishta, R.K. Kalia, eds. (1996) P16.4, p. 591.

102. Z. Insepov and I. Yamada, Computer simulation of crystal surface smoothing by accelerated cluster ion impacts, Mat. Sci. and Engin. A 217/218 (1996), pp.89 - 93.

103. Z. Insepov and I. Yamada, Molecular dynamics study of shock waves generation by cluster impact on solid targets, Nucl. Instr. and Methods in Phys. Res. B 112 (1996), pp.16-22.

104. Yamada, J. Matsuo, Z. Insepov and M. Akizuki, Surface modification by gas cluster ion beams, Nucl. Instr. and Meth. in Phys. Res. B106 (1995) p. 165.

105. Z. Insepov and I. Yamada, Molecular dynamics simulation of cluster ion bombardment of solid surfaces, Nucl. Instr. and Methods in Phys. Res. B 99 (1995), p.248.

106. H. Haberland, Z. Insepov and M. Moseler, Molecular dynamics simulation of thin film growth by energetic cluster impact, Phys. Rev. B 51, (1995) p.11601.

107. C.E. Ascheron, M. Akizuki, J. Matsuo, Z. Insepov, G.H. Takaoka and I. Yamada, Cluster ion bombardment-induced surface damage of Si, Surf. Rev. and Lett., Vol.3, No.1 (1996), pp. 1045-1049.

108. Z. Insepov and I. Yamada, Molecular dynamics simulations of cluster ion beam process, Surf. Rev. and Lett., Vol.3, No.1 (1996), pp.1023-1027.

109. Z. Insepov, M. Sosnowski, G.H. Takaoka and I. Yamada, Molecular dynamics simulation of the effects of energetic cluster ion impact on solid surface, Mat. Res. Soc. Symp. Vol. 316 (1994), pp. 999-1004.

110. Z. Insepov, M. Sosnowski and I. Yamada, Molecular dynamics simulation of metal surface sputtering by energetic rare-gas cluster impact, Trans. Mat. Res. Soc. Jpn 17 (1994) pp.111-118.

111. H. Haberland, Z. Insepov and M. Moseler, Molecular dynamics simulation of cluster deposition, Nucl. Instr. and Meth. in Phys. Res., B 89 (1993) pp.419-425.

112. H. Haberland, Z. Insepov and M. Moseler, Molecular dynamics simulation of thin film formation by energetic cluster impact (ECI), Z. Phys. D 26 (1993) pp.229-231.

113. H. Haberland, Z. Insepov, M. Karrais, M. Mall, M. Moseler and Y. Thurner, Thin film growth by energetic cluster impact (ECI): comparison between experiment and molecular dynamics simulation, Mat. Sci. and Engin., B 19 (1993) pp.31-36.

114. H. Haberland, Z. Insepov, M. Karrais, M. Mall, M. Moseler and Y. Thurner, Thin film energetic cluster impact: experiment and molecular dynamics simulation, Proc. of 8th. Intern. Symp. on Ion Beam Modification of Materials, 1992, pp.115-122.

115. Z. Insepov and B. Kabdiev, Computer simulation of metal cluster impact on crystal surfaces, Phys. and Chem. of Finite Systems, NATO ASI Series, V 1 (1992), pp.429-433.

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116. Z. Insepov, E. Karataev, Molecular dynamics simulation of infrequent events: evaporation from cold metallic clusters, Phys. and Chem. of Finite Systems, NATO ASI Series, V 1 (1992) pp. 423-427.

117. Z. Insepov, E. Karataev and G. Norman, Kinetics of Ar cluster formation in a supersonic jet, Proc. of Intern. Workshop on ‘‘Nucleation-clusters-fractals’’ Serrahn (Germany) (1991), pp.141-153.

118. Z. Insepov and B. Kabdiev, Molecular dynamics simulation of pulsed recrystallization of crystal surface, Proc. of Intern. Workshop on ‘‘Nucleation-clusters-fractals’’ Serrahn (Germany) (1991), pp.111-121.

119. Z. Insepov and S. Zheludkov, Kinetics of clustering on a surface, Proc. of Workshop ‘‘Nucleation-clusters-fractals’’ Serrahn (Germany) (1991), pp.102-110.

120. Z. Insepov and S. Zheludkov, Molecular kinetics of cluster formation in the dense fluids, Z. Phys., D 20 (1991), pp 453-455.

121. Z. Insepov, E. Karataev and G. Norman, The kinetics of condensation behind the shock front, Z. Phys., D 20 (1991), pp.449-451.

122. Z. Insepov, A. Zhankadamova, Molecular dynamics calculation of the sticking coefficient of gases to surfaces, Z. Phys., D 20 (1991), pp.145-146.

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