3d integrated circuits and their economic feasibility

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1 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights reserved. Liu Shaotao A0082081 Fan Yang A0098546 Emile Choo A0094185 Wang Qian Qian A0082192 Qu Xian A0104376 Lim Teck Yeow A0098556 MT5009 Opportunity for 3D IC For information on other new technologies that are becoming economically feasible, see http://www.slideshare.net/Funk98/presentations

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These slides use concepts from my (Jeff Funk) course entitled analyzing hi-tech opportunities to analyze how the economic feasibility of 3D integrated circuits (ICs) is becoming better and this will enable the continuation of Moore’s Law. 3D ICs involve the stacking of transistors and memory cells on top of each other in order to increase the number of transistors per chip area and thus continue Moore’s Law. As opposed to attempting to further reduce the feature sizes, engineers build up. They increase the number of layers of transistors and memory cells just as they have increased the number of layers of metal interconnect. To do this, they connect the different layers of transistors and memory cells with so-called Vias that are fabricated from copper. IC suppliers began shipping 3D ICs in 2006 and these shipments have gradually grown and expanded from simple structured ICs such as image sensors to power ICs, and more recently memories, microprocessors, and ASICs. It is easier to increase the number of layers on simple than complex structured ICs. The global 3D IC market is expected to grow from $2.21 billion in 2009 to $6.55 billion in 2016 at a compound annual rate of 16.9% from 2011 to 2016. Although it is hard to compare actual 2D and 3D ICs, simulations allow us to easily do such comparisons. For example, simulations found that chip area is almost 50% less and the metal length is about 28% less for 3D than 2D chips. The shorter metal length means that speeds will be faster since the electrons have less distance to travel. Simulations show that timing delay is 37%, 57% and 65% shorter for 2, 3, and 4-layer 3D ICs, data transfer rates are faster, and operating frequency is about 30% fasters for 3D than 2D ICs. Simulations also show that power consumption is lower for 3D ICs, achieving a 40% reduction with 4-layer 3D ICs as compared to 2D ICs. Perhaps more importantly, these simulations show that 3D ICs are theoretically cheaper to develop and manufacture. The reason is that 3D ICs can use larger feature sizes than can 2D ICs in order to achieve the same densities of transistors per chip. These larger feature sizes reduce the cost of equipment such as photolithographic equipment, whose costs are rising rapidly. Simulations show that capital costs for 3D ICs are 5% and R&D costs are those of 2D ICs. For manufacturing costs, simulations of flash memory that the advantage of 3D ICs increases as the size of flash memory increases reaching 50% with 256Gb. All of this suggests that Moore’s Law will continue for many years. Combined with the reductions in feature size that were mentioned earlier from International Technology Roadmap for Semiconductors, there is probably another 10-20 years left in Moore’s Law just from 3D ICs and smaller feature sizes. Nevertheless, challenges remain for 3D ICs. The simulations assume similar yields when in reality it will be harder to achieve similar yields on 3D as 2D ICs given the increa

TRANSCRIPT

Page 1: 3D Integrated Circuits and their economic feasibility

1 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Liu Shaotao A0082081

Fan Yang A0098546

Emile Choo A0094185

Wang Qian Qian A0082192

Qu Xian A0104376

Lim Teck Yeow A0098556

MT5009

Opportunity for 3D IC

For information on other new technologies that are becoming economically feasible,

see http://www.slideshare.net/Funk98/presentations

Page 2: 3D Integrated Circuits and their economic feasibility

2 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

1.Introduction to 3D IC

2.Advantages of 3D IC

3.Development and Challenges

4.Business opportunities for 3D IC

5.Q&A

AGENDA

Page 3: 3D Integrated Circuits and their economic feasibility

3 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

PART1:

INTRODUCTION TO 3D IC

Liu Shaotao

Page 4: 3D Integrated Circuits and their economic feasibility

4 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

SLOWING DOWN OF MOORE’S LAW

Page 5: 3D Integrated Circuits and their economic feasibility

5 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

CHIP SIZE VS DEVICE SIZE

1953 1983 now

0

50

100

150

200

250

300

350

1971 1972 1974 1978 1982 1985 1992 1994 1995 1998 1999 2000

Chip size

year

sqmm

Device getting smaller

Chip size increases

Page 6: 3D Integrated Circuits and their economic feasibility

6 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

WHAT IS 3D IC

Page 7: 3D Integrated Circuits and their economic feasibility

7 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

PART 2:

ADVANTAGES OF 3D IC

Liu Shaotao

Page 8: 3D Integrated Circuits and their economic feasibility

8 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Timing delay

Length of metal wire connection

Data transfer rate

Chip area

Operating frequency

Power consumption

Development cost

Manufacturing cost

KEY PARAMETERS

Page 9: 3D Integrated Circuits and their economic feasibility

9 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

TIMING DELAY: 3D VS 2D

3D ICs Interconnect Performance Modeling and Analysis , Ph.D. Dissertation Draft

3D has 37% reduction

Timing delay:

- data transfer time from one transistor to another;

- smaller timing delay could help to achieve higher frequencies

Page 10: 3D Integrated Circuits and their economic feasibility

10 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

TIMING DELAY: 3D VS 2D (CONTINUE)

3D ICs Interconnect Performance Modeling and Analysis , Ph.D. Dissertation Draft

2 layers: 37% reduction

3 layers: 57% reduction

4 or 5 layers: 65% reduction

Page 11: 3D Integrated Circuits and their economic feasibility

11 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

LENGTH OF METAL WIRE CONNECTION

3D ICs Interconnect Performance Modeling and Analysis , Ph.D. Dissertation Draft

28% and above reduction

Metal wire connection:

- Length of metal used to connect one transistor to another;

-shorter metal wire length help to reduce timing delay and power consumption

Page 12: 3D Integrated Circuits and their economic feasibility

12 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

DATA TRANSFER RATE

3D TECHNOLOGIES: SOME PERSPECTIVES FOR MEMORY INTERCONNECT AND CONTROLLER,

Denis Dutoit, Fabien Clermidy, Pascal Vivet

3D IC

Cost per 100GB:

DDR@16W

3D [email protected] W, 80% reduction

2D IC

Date transfer rate:

- ability to transfer date per second

GB/s

Page 13: 3D Integrated Circuits and their economic feasibility

13 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

CHIP AREA

3D ICs Interconnect Performance Modeling and Analysis , Ph.D. Dissertation Draft

Chip area:

- size of silicon chip

3D IC has 50% reduction

Page 14: 3D Integrated Circuits and their economic feasibility

14 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

OPERATING FREQUENCY

3D ICs Interconnect Performance Modeling and Analysis , Ph.D. Dissertation Draft

Operating frequency:

- measures the speed of clock; the higher the better

Page 15: 3D Integrated Circuits and their economic feasibility

15 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

ENERGY CONSUMPTION

3D IC technology, Pouya Dormiani and Christopher Lucas

2 layers: 30% reduction

3 layers: 35% reduction

4 or 5 layers: 40% reduction

Page 16: 3D Integrated Circuits and their economic feasibility

16 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

DEVELOPMENT COST

http://www.monolithic3d.com/why-monolithic-3d.html

Page 17: 3D Integrated Circuits and their economic feasibility

17 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

MANUFACTURING COST REDUCTION

Market trends & Cost analysis for 3D ICs, JC Eloy

128Gb: 30% reduction

256Gb: 50% reduction

Page 18: 3D Integrated Circuits and their economic feasibility

18 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

From: http://www.monolithic3d.com/why-monolithic-3d.html

3D PROTOTYPE

Page 19: 3D Integrated Circuits and their economic feasibility

19 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

PART 3:

TECHNOLOGY DEVELOPMENT AND CHALLENGES

Fan Yang

Page 20: 3D Integrated Circuits and their economic feasibility

20 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Simple stacked

(Same function)

4. DEVELOPMENT AND CHALLENGES

Page 21: 3D Integrated Circuits and their economic feasibility

21 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Simple stacked

(Same function)

Medium

integration

(Logic+Memory)

Page 22: 3D Integrated Circuits and their economic feasibility

22 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Simple stacked

(Same function)

Medium

integration

(Logic+Memory)

Multi-function

integration

(Heterogeneous)

4. DEVELOPMENT AND CHALLENGES

Page 23: 3D Integrated Circuits and their economic feasibility

23 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

3D IC EDA design Design

Process

Packaging

Testing

Standard

TSV process yield

Layers bounding and stacking

Chip testing

Technology standard

4. DEVELOPMENT AND CHALLENGES

Page 24: 3D Integrated Circuits and their economic feasibility

24 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Design

2D Design 3D Design

Challenges

Most EDA IC design tools is not capable for interlayer layout design and simulation.

Overall performance, I/O bandwidth, thermal performance is critical

4. DEVELOPMENT AND CHALLENGES

Overcome Approches

Main stream EDA tools companies like Cadence and Synopsis are dedicated to

develop better tools for 3D IC.

Page 25: 3D Integrated Circuits and their economic feasibility

25 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Process

Challenges

Through Silicon Via (TSV) yield is the most critical part in process

High depth/wide ratio may induce void in TSV

Overcome Approaches

Leading foundries like TSMC, Samsung, Global foundries, UMC are dedicated in optimize TSV

process

TSV

Void

4. DEVELOPMENT AND CHALLENGES

Page 26: 3D Integrated Circuits and their economic feasibility

26 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Packaging

Micro bump

4. DEVELOPMENT AND CHALLENGES

Challenges

Interlayer TSV contact quality

Interlayer stacking and bonding

Overcome Approaches

Leading packaging companies like ASE, Amkor, STATS Chip PAC are dedicated in optimize 3D IC

packaging technology and process

Page 27: 3D Integrated Circuits and their economic feasibility

27 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Testing

Challenges

High integration density, hard to test by normal contact test key.

Test individual layer and whole system is reliable, but slow and expensive.

Test whole system is economical, but hard to determine failure.

Overcome Approaches

Design self test and diagnose function in 3D IC design

Develop new testing tool and platform to work with 3D IC design

Test each layer

Test whole system

OR

Page 28: 3D Integrated Circuits and their economic feasibility

28 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Standard

Challenge

Standard is essential for 3D IC to enter volume production

Overcome Approaches

Setup technology standard to guide and regulate 3D IC industry

4. DEVELOPMENT AND CHALLENGES

Page 29: 3D Integrated Circuits and their economic feasibility

29 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

PART 4:

BUSINESS OPPORTUNITIES FOR 3D IC

Emile Choo

Page 30: 3D Integrated Circuits and their economic feasibility

30 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Page 31: 3D Integrated Circuits and their economic feasibility

31 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Page 32: 3D Integrated Circuits and their economic feasibility

32 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Page 33: 3D Integrated Circuits and their economic feasibility

33 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Auto-pilot cars

FUTURE APPLICATIONS

Wearable computers and sensors

Future robots

Page 34: 3D Integrated Circuits and their economic feasibility

34 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

FUTURE APPLICATIONS

Clothes dryer

Self-sterilizing door handle

Bath or shower

Page 35: 3D Integrated Circuits and their economic feasibility

35 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

Page 36: 3D Integrated Circuits and their economic feasibility

36 Broadcom Proprietary and Confidential. © 2012 Broadcom Corporation. All rights

reserved.

36

Thank You

Q&A