ald for industry - standort sachsen · pdf fileald for industry tutorial, workshop ... atomic...
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www.efds.org
ALD for IndustryTutorial, Workshop & Industrial Exhibition
Sponsors:
January 17, 2017Tutorial, TU Dresden, Werner-Hartmann-BauTour of ALD Labs at IHM, NaMLab & Fraunhofer IKTS Dresden
January 18, 2017Workshop & Industrial Exhibition, Swissôtel Dresden, Am Schloss
January 17 – 18, 2017
in DresdenGermany
This event provides the opportunity to learn more about fundamentals of ALD technology, to get informed about recent progress in the field and to get in contact with industrial and academic partners. Increase your visibility and present your company in our accompanying exhibition.
PREFACE
Atomic Layer Deposition (ALD) is used to deposit ultrathin and highly conformal thin films. ALD is unique in the sense that it employs sequential self-limiting surface reactions for growth in the monolayer thickness regime. According to market esti-mates the equipment market alone is currently at an annual revenue of US$ 750 million (2016) and it is expected to reach US$1.2 billion in the next 2-3 years. Today the markets for ALD, besides the leading edge semiconductor industry, are mainly:
• MEMS & Sensors • Display• Lightning• Barriers• Photovoltaics
„ALD for Industry“a topical workshop with focus on industrialization and commercialization of ALD for current and emerging markets
• Basics of ALD• Commercial Trends & Emerging Applications• ALD Equipment Technologies• Fast ALD by Roll 2 Roll and Spatial ALD Technologies• ALD in-situ Analytics
Tutorial
In an European context ALD was invented independently twice in Europe (Russia & Finland) and since the last 15 years Germany has grown to become one of the strongest European markets for ALD in R&D, chemicals, equipment and end users. Here, Dresden and Saxony is a unique ALD hotspot due to a strong semiconductor and equipment industry.
The event will start with a tutorial for attendees with special interests or less previous experience in ALD giving insight into the following topics:
After the tutorials there will be an opportunity to visit ALD labs and cleanrooms at the Technical University Dresden and Fraunhofer Institute for Ceramic Technologies and Systems IKTS. Here there will be an opportunity for detailed discus-sions that can continue during the Workshop Dinner in Dres-den’s historical city centre.
The 2nd day will be the main workshop day with invited talks from leading researchers and industry experts on the broad range of topics. The workshop will focus on non-Semiconduc-tor industrial applications of today and the emerging markets with an expected industrialization in the next 5 years. Presen-tations will focus on the latest topics and the state of the art in the field of Atomic Layer Deposition.
In parallel there will be an exhibition, giving great opportu-nities for face to face meetings and to share product infor-mation. The workshop will provide an excellent platform for discussions and networking during the program as well as during the social events.
ALD has a high potential for emerging ALD markets that may grow in the next 5 years:
• Power electronics• Optics• Medical• Particle coating• Packaging• Protective coatings• Energy storage• Textile• Fibers• Decorative coatings
Contact: Dr. Katrin FerseEuropean Society of Thin Films (EFDS)Gostritzer Straße 63, 01217 Dresden, GermanyPhone: +49 351 8718370 Fax: +49 351 8718431 Email: [email protected]
„ALD for Industry“a topical workshop with focus on industrialization and commercialization of ALD for current and emerging markets
ALD - TECHNOLOGy & APPLICATIONS
“ALD is now firmly established as a key enabling technology. Today, ALD has become a critical technology for the manufacture of virtually all leading-edge semiconductor devices. The leading customers in our industry have already ramped several device generations based on our ALD equipment – for high-k metal gate applications in logic and foundry and for multiple patterning applications in the memory sector.”Chuck del Prado, CEO of ASMi
Picosun from Finland has developed an ALD Batch Tool with an amazing batch flipping loading mechanism. Meaning a highly productive production platform that the market always want-ed for productive ALD capable of Lot processing (25 wafers) so you can run lot to lot processing in a vacuum cluster.
Flash-enhanced ALD (FEALD) has been developed by research-ers at IHM, TU Dresden using a process tool custom-made by FHR Anlagenbau GmbH (Ottendorf-Okrilla, Germany) shown above.
Modularflow is a design office for ALD solutions (Atomic Layer Deposition), copper & silver precursors, evaporator and coat-ing systems for research purposes. The Modularflow ALD Re-actor is a self designed tool for academic research and devel-opment and very flexible for its use in ALD application. The system can be used for thermal ALD and a PEALD reactor is also available for larger substrates.
Beneq has laid the foundation for is Roll-to-Roll ALD. The Beneq WCS 600 has been designed as a development plat-form, which means it can address the different R&D needs of different customers. As an example, the WCS 600 can handle many types of substrate materials and thicknesses. With a coating capacity of 400,000 m2/year, the WCS 600 expands easily from R&D to pilot production for many industrial appli-cations, including moisture barriers for flexible organic elec-tronics and buffer layers for CIGS solar cells.
PROGRAM COMMITTEE
Dr. Jonas Sundquist
Fraunhofer IKTS
Dresden
Dr. Christoph Hossbach
IHM
TU Dresden
Dr. Uwe Schröder
NaMLab gGmbH
Dresden
Dr. Jörg Neidhardt
VON ARDENNE GmbH
Dresden
Dr. Sabine Kolodinski
GLOBALFOUNDRIES Management Services Limited Liability Company & Co. KG
Dresden
Dr. Katrin Ferse
EFDS
Dresden
PROGRAM
• Basics of ALD• Commercial Trends & Emerging Applications• ALD Equipment Technologies• Fast ALD by Roll 2 Roll and Spatial ALD Technologies• ALD in-situ Analytics
Topics
Tuesday, January 17, 2017
13:00 - 16:00 Tutorial
TU Dresden, Werner-Hartmann-Bau
Wednesday, January 18, 2017
10:00 - 16:00 Workshop & Industrial Exhibition
Swissôtel Dresden
• The state of the art in the field of Atomic Layer Deposition
• Current industrial applications of ALD and the emerging markets
Topics
16:15 - 19:00 Tour of ALD Labs at
IHM, NaMLab and Fraunhofer IKTS
19:30 Get-Together in the restaurant „Freiberger Schankhaus“
www.freiberger-schankaus.de
GENERAL INFORMATION
Recommendation for hotel:Swissôtel Dresden Am Schloss Schlossstraße 16 01067 DresdenCode: ALD Deadline: December 6, 2016Room Rate: 109,00 EUR per night/Single Room (City Tax is not included)Phone: +49 351 501200 Fax: +49 351 [email protected] www.swissotel.com
Fee Covers:The registration fee includes the participation of the chosen event, conference proceedings, coffee and lunch breaks and the Social Evening. Please note, that the number of participants is limited, so please register early. Please use the registration form and return the completed form until January 4, 2017 to: Fax: +49 351 8718431, Email: [email protected]
Upon receipt of your registration, you will receive the invoice/ confirmation. Please remit the amount after receiving our invoice.
Organization: Contact:European Society of Thin Films Grit Kotschenreuther Gostritzer Straße 63 Phone: +49 351 8718372 01217 Dresden Fax: +49 351 8718431 Germany Email: [email protected]
Terms:The general terms and conditions of sale of the EFDS apply (www.efds.org/agb). Cancellations must be made in written form.
In case of the cancellation of your registration before January 4, 2017, a cancellation fee of 50,00 EUR will be charged. After this date, a refund is not possible.
ALD for Industry Workshop only Tutorial onlyStandard 790,00 EUR 590,00 EUR 390,00 EUREFDS members 690,00 EUR 490,00 EUR 290,00 EURStudents 395,00 EUR 250,00 EUR 180,00 EUR
Workshop fees are free of VAT according to §4 (22a) UStG (German value-added tax law).
ALD for IndustryJanuary 17 - 18, 2017, Dresden, Germany
Contact details
____________________________________________________________________________Title Last name First name
____________________________________________________________________________Company / Organisation / Institute Sector
____________________________________________________________________________Phone Fax Email
____________________________________________________________________________Street P.O. Box State Country Postcode / City
Workshop☐ I would like to participate at the Tutorial & Workshop on January 17 – 18, 2017.
☐ I would like to participate at the Tutorial on January 17, 2017.
☐ I would like to participate at the Workshop on January 18, 2017.
☐ I am an EFDS member.
Social Evening☐ I would like to participate at the Get-Together in the restaurant “Freiberger Schankhaus”, January 17, 2017.
____________________________________________________________________________Date, Stamp, Signature
Fees: Standard: 790,00 EUR; 690,00 EUR for EFDS members; 395,00 EUR for students (verification required);Workshop only: 590,00 EUR; 490,00 EUR for EFDS members; 250,00 EUR for students (verification required);Tutorial only: 390,00 EUR; 290,00 EUR for EFDS members; 180,00 EUR for students (verification required);Please remit the registration fee after receipt of invoice.
REGISTRATION FORM
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REGISTRATION FORM for accompanying Exhibition - ALD for Industry
Organization: Contact:European Society of Thin Films Grit Kotschenreuther Gostritzer Straße 63 Phone: +49 351 8718372 01217 Dresden Fax: +49 351 8718431 Germany Email: [email protected]
Please return by fax to: +49 351 871-8431____________________________________________________________________________Company Name____________________________________________________________________________Address____________________________________________________________________________Country____________________________________________________________________________Email Phone Fax Internet
Billing address (if it is different from address above):____________________________________________________________________________Company Name____________________________________________________________________________Address
Employee in charge of the stand (free of charge):____________________________________________________________________________Name____________________________________________________________________________Department Phone Email
Sponsoring OpportunityGold Sponsor (1.500 EUR plus VAT):• Logo and web link on Workshop page• Logo listed in program• half page advertisement within program booklet• 1 table in Exhibition• 1 person free of charge in the workshop & tutorial
____________________________________________________________________________Place / Date Company stamp / Signature (please also print name)
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