amat centura pvd system with 2 al pvd chambers

88 Equipment Engineering and Process Consulting, Inc. Mailing Address: 5610 Scotts Valley Dr., Suite B#174 Scotts Valley, CA 95066

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AMAT Centura PVD System Config

AMAT Centura PVD System with 2 Al PVD Chambers Vintage: mid 1990’s Originally built by AMAT USA Refurbished in 2011 Set up for 200mm substrates De-installed and crated in USA Complete working system Re-install services available Tool Configuration Information

• OEM = Applied Materials (AMAT) • Platform = Centura 5200 • Qty 2 narrow body load-locks • Chamber A and C are PVD chambers

o Standard body o Aluminum deposition o 4 finger heater o With back side gas

• Chamber D is an mark II etch (set up as pre-clean) • Chamber F is an orienter/degas chamber • Support Equipment Included

o Neslab HX-750 chiller o Ebara cold traps (3) o Ebara cryo compressor o Ebara dry vacuum pumps o Ebara turbo pumps and controllers (6) o Integrated smaller foot print AC controller and gen rack (single unit) o All required umbilical’s

• Notes • The system was originally built by AMAT so it is a common mainframe and standard chambers. It does

have a few modifications: o It has an older mark II etch chamber acting at the Pre-clean chamber (more custom as amat

uses the PC or PCII chamber). This can be easily removed and a PC chamber added if need be. o This system has a standard orienter degas chamber (currently the customer didn’t use so not

configured in the software, but physically it is there, just need to turn on in the software). o The customer ran a special substrate so the robot blade was modified – note, on the blade, so

very easy to get this back to standard AMAT configuration – can replace the blade if need be.


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o Chambers have a cold trap (aka water pump) and turbo pumps. This was a standard configuration option from AMAT – allows more process gas to be used and longer times between regens, actually the water pump regens very quickly.

• AMAT serial is 2506 • estimated vintage is mid 90’s • platform type is centura I with rev II facilities (so typical centura I mainframe for PVD 5200 and facilities

points of connections are along the rear)

NOTE: This tool was originally running in a Toshiba Japan fab and the tool vacuum system was designed to reduce maintenance/pump re-generation time and also to provide faster pump downs and elimination of moisture (water) from the entire system. The critical chambers use a combination of Ebara cold traps (similar to cryo-pump but much reduced down time) and turbo pumps. Cold traps are similar to cryo-pumps: they use a cryo-compressor to chill and trap moisture (water vapor) on the walls of the trap. They do not use a charcoal element so they do not accumulate vapors that then require re-generation. In fact these cold traps almost never require re-generation effort, hence reduce down time and increase production time. These traps operate at a slightly higher temperature than cryo-pumps. They can handle much larger gas volumes compared to cryo-pumps. They also are a must if the customer wants to run O2 gas in the process. This tool also has a combination of cold trap-turbo pump on the transfer module. The load locks have turbo pumps (one for each). Vacuum design details here: This system has 6 turbo pumps and 3 cold traps total: -loadlock A; turbo pump only -loadlock B; turbo pump only -transfer chamber; turbo pump and cold trap -PVD chamber A; turbo pump and cold trap -PVD chamber C; turbo pump and cold trap -Etch chamber D; turbo pump only


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Photos

Note Ebara cold trap-turbo pump locations


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Note turbo pump mounted on load-lock, one per load-lock


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The following photos are when the refurbishment was taking place in 2011; Note: this was before the addition of the etch chamber in position D.


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amat centura pvd system with 2 al pvd chambers

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