microelectronics processing course j. salzman fall 2006 1 microelectronics processing course...
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Microelectronics Processing Course J. Salzman Fall 2006 1
Microelectronics Processing CourseIntroduction
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Conductivity in solids
Resistivity [ cm]
Conductivity [ cm] -1
10-81018
10-18 10810310-8
108 10-3
Ag
Cu
Al
GlassPure
Diamond
Quartz
Si
Semiconductors ConductorsInsulators
GaAs
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History
1904 Vaacum Tube1925 Concept of Field Effect Transistor1947 Bipolar Transistor1958 Bipolar IC1959 MOS Transistor1961 IC-MOS Technology1972 MOS Microprocessor
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Moore Law(Gordon Moore 1965)
The number of transistors in a chip will be doubled every 18
months
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MOS Transistor
Source Drain
Gate
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MOS Transistor
Source Drain
Gate
Electrons in inversion layer
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Drain
Gate
Source
W
L
tox
Substrate
Metal contact
Schottky contact
Si2O
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Optical Measurements
• Photometric
• Interferometric
• Polarization
• Spectroscopic
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Basic Optical Instruments
•Microscope
•Reflectometer (Nanospec)
• Ellipsometer
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