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Background Statement for SEMI Draft Document 6088Line Item Revision to:‘SEMI PV35-0215 Specification for Horizontal Communication between Equipment for Photovoltaic Fabrication System’ with designation and title changes to ‘SEMI Axxx-mmyy Specification for Horizontal Communication between Equipment for Factory Automation System (HC)’, and ‘SEMI PV35.1-0215 Media Interface Specifications for a Horizontal Communication between Equipment’ with designation and nonconforming title changes to ‘SEMI Axxx.1-mmyy Specification for Media Interface for a Horizontal Communication between Equipment’.

Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.

Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background

SEMI PV35 and SEMI PV35.1 were initiated by Global PV (Photo Voltaic) Technical Committee and were published by Global PV Automation Technical Committee. As the automation technology is very generic and applicable to other area, Global PV Automation Technical Committee was transformed to Global Automation Technology Technical Committee in 2014 in order to eliminate preconceptions that the activity is only for PV. According to this change, the designation letter and the title of SEMI PV35 and SEMI PV35.1 should also be changed.Also, the title of PV35.1 is not conforming with current naming rule of SEMI Standards and should be corrected.In addition, there are some technical issues which should be improved.

Line Item #1: Change designation of SEMI PV35 from “PV” to “A”. Motivation

Eliminate users’ preconceptions that this Standard is only for PV. Action

Change designation letter from “PV” to “A” and assign new document number. This action is permitted in accordance with Appendix A5-1.1 of the SEMI Procedure Manual. Change document title to conform with the designation change. Replace applicable system in Purpose from ‘photovoltaic fabrication system’ to ‘Factory Automation

system’. Impact

No technical impact

Line Item #2: Correct non-conforming title of SEMI PV35.1.

and amend its quotation in the parent document Motivation

The title of PV35.1 is non-conforming with SEMI Standard naming rule and need to be amended. Action

Correct the title of SEMI PV35.1 according to the SEMI Procedure manual February 12 2016 Appendix A4-1

This action is permitted in accordance with Appendix A4-1 of the SEMI Procedure Manual. Correct the quotation of the title of SEMI PV35.1 in PV35

Impact No technical change

Line Item #3: Revise the length of data block Motivation

Communication Data Block length of current PV35/PV35.1 is limited by 1kbyte per Ethernet packet size and is too small. This limitation should be removed so that user can handle bigger data easily over TCP/IP specification.

The maximum size of total length of Data Block is DB_LENGTH = 232 = 4,294,967,296 Action

Revise the maximum size of data block in SEMI PV35.1. Revise the size of GD/MD_LENGTH field in SEMI PV35.1 and SEMI PV35. Revise the address range of GD/MD_BODY in SEMI PV35.1 according to the field size above. Revise the description of GD/MD_LENGTH in SEMI PV35.1 to make the target clearer. Revise the name of DB/GD/MD_LENGTH in SEMI PV35.1 and SEMI PV35 to make the target clearer. Eliminate Ethernet packet limited expressions in SEMI PV35.1

Impact Modification to comply with longer data block is required

Line Item #4: Correct the abbreviation of data block in PV35 Motivation

Wrong abbreviation of data block “db” is found in SEMI PV35. Action

Correct the abbreviation of data block from “db” to “DB”. Impact

No technical change

Line Item #5: Release assigned STD_IDs which are not used in PV35 Motivation

STD_IDs in GD/MD Format, which are assigned for the use in Subordinate Standards for cSi and large sized substrate oriented, should be released as these Subordinate Standards once planned for PV were cancelled and STD_IDs assigned for them are not needed any more.

Action Release those STD_IDs and make them reserved for other Subordinate Standards.

Impact None

Line Item #6: Improve expressions which indicate the length of ‘Line Information’ or ‘Track Information’ in Data Block of PV35.1 Motivation

‘Data Block Length’ field in the Table 1 and 2 in PV35.1 indicate the length of ‘Line Information’ and ‘Track Information’ accordingly, and do not indicate the length of overall ‘Data Block’ as the names imply. So, these names and corresponding mnemonics etc. are need to be amended.

Also, ‘Information ID’ should be included in ‘Line Information’ and ‘Track Information’, so, structure of the tables need to be amended.

Action Amend the ‘Data Block Length’ field in ‘Table 1 Signal Assignment for Line DB’ so that it can be

understood as the length of ‘Line Information’, and reflect the changes to the Figure 7. Amend the ‘Data Block Length’ field in ‘Table 2 Signal Assignment for Track DB’ so that it can be

understood as the length of ‘Track Information’, and reflect the changes to the Figure 8. Amend the structure of the Table 1 and 2 so that ‘Information ID’ is included in ‘Line Information’ and

‘Track Information’ Impact

No technical impact

Review and Adjudication Information

Task Force Review Committee ReviewGroup: Global EIS TF Japan TC Chapter of Global Automation

Technology CommitteeDate: Wednesday, April 19, 2017 Wednesday, April 19, 2017

Time & Timezone: 10:00-12:00, JST 13:30-17:30, JST

Location: SEMI Japan SEMI Japan

City, State/Country: Ichigaya, Tokyo, Japan Ichigaya, Tokyo, Japan

Leader(s): Katsuyoshi Takahashi (Mitsubishi Electic)Carsten Born (VITRONIC GmbH)

Teruaki Ito (Mitsubishi Electric)Terry Asakawa (Tokyo Electron)

Standards Staff: Junko Collins (SEMI Japan)[email protected] Nguyen (SEMI NA/EU)[email protected]

Junko Collins (SEMI Japan)[email protected]

This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation.

Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.

Check www.semi.org/standards on calendar of event for the latest meeting schedule.

http://www.semi.org/standards

mailto:[email protected]

mailto:[email protected]

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DRAFTDocument Number: 6088

Date: 5/13/23

SEMI Draft Document 6088Line Item Revision to:‘SEMI PV35-0215 Specification for Horizontal Communication between Equipment for Photovoltaic Fabrication System’ with designation and title changes to ‘SEMI Axxx-mmyy Specification for Horizontal Communication between Equipment for Factory Automation System (HC)’, and ‘SEMI PV35.1-0215 Media Interface Specifications for a Horizontal Communication between Equipment’ with designation and nonconforming title changes to ‘SEMI Axxx.1-mmyy Specification for Media Interface for a Horizontal Communication between Equipment’.

Note: See the ‘Quotations of Required Sections from the Documents’ section in the end of this document for the quotation of Purpose, Scope, and Terminology etc. from the Standards to be revised by this ballot.

Line Item Revisions

Note: Additions are indicated in blue with underline and deletions are indicated in red with strikethrough.

Note: Numbers of section, table, and figure, and numbers used for their references in the quoted portion of the proposals are aligned with the existing Standard unless otherwise noted. Those numbers are subjects to change per the result of various line items which may add or remove those elements. Those numbers will be adjusted by SEMI prior to publication.

Note: Additions of ruled line to a table are indicated by blue line and deletions of ruled line from a table are indicated by red dotted line.

Note: The temporary number of Standard that will be replaced with actual number after approval is expressed as xxx.

1 Line Item #1: Change designation of SEMI PV35 from “PV” to “A”. Make following changes to PV35, and PV35.1 This action is permitted in accordance with Appendix A5-1.1 of the SEMI Procedure Manual.

1.1 Line Item #1-1: Change designation of PV35 and PV35.1 from “PV” to “A” and assign new number

SEMI PV35 AxxxSEMI PV35.1 Axxx.1

1.2 Line Item #1-2: Change document title of PV35 as shown below to conform with the designation change

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Page 1 Doc. 6088 SEMI

SEMI673 S. Milpitas Blvd.Milpitas, CA 95035-5446Phone: 408.943.6900

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SPECIFICATION FOR HORIZONTAL COMMUNICATION BETWEEN EQUIPMENT FOR PHOTOVOLTAIC FABRICATION FACTORY AUTOMATION SYSTEM (HC)

1.3 Line Item #1-3: Replace quotations and inheritances of PV35 and old title with new designation and number (Axxx) and new title all over PV35 and PV35.1

1.4 Line Item #1-4: Amend section 1.1 of PV35.1 as shown below

1.1 The purpose of this Subordinate Standard is to provide Ethernet based media interface specifications for SEMI PV35 Axxx, Specification for Horizontal Communication between Equipment for Photovoltaic Fabrication Factory Automation System, (hereinafter referred to as PV35 Axxx HC) that are commonly usable between control entities such as programmable logic controllers (PLCs) or personal computers (PCs) from different suppliers regardless of their different fieldbus supports. A factory in which PV35 Axxx HC would be applied generally uses PLCs and PCs for equipment control.

1.5 Line Item #1-5: Amend Figure 1 of PV35.1 with new designation and title of PV35

Note: In case new Standard number request conflict occurs among the ballots submitted to this ballot cycle, the Standard number may be reassigned by SEMI Staff.

Delete




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AddFigure 1

Position of This Subordinate Standard on HC Tiers

1.6 Line Item #1-6: Amend section 3.1 of PV35.1 as shown below

3.1 SEMI Standards and Safety Guidelines

SEMI PV35 Axxx — Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication Factory Automation System

1.7 Line Item #1-7: Amend section 1.1 of PV35 as show below

1.1 The purpose of this Standard is to provide a specification for communication between adjacent equipment in material flow (hereinafter referred to as horizontal communication [HC]) to be used for photovoltaic fabrication system or similar ones Factory Automation system (equipment here includes process equipment, metrology equipment, transport equipment and clustered one of those, etc.).

2 Line Item #2: Correct non-conforming title of SEMI PV35.1. Make following change to PV35, and PV35.1 This action is permitted in accordance with Appendix A4-1 of the SEMI Procedure Manual.

2.1 Line Item #2-1: Correct document title of PV35.1 as below according to the SEMI Procedure manual February 12 2016 Appendix A4-1, because it is a non-conforming title.




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SPECIFICATION FOR MEDIA INTERFACE SPECIFICATIONS FOR A HORIZONTAL COMMUNICATION BETWEEN EQUIPMENT

2.2 Line Item #2-2: Amend quoted document title of PV35.1 in PV35

8.1 Subordinate Standards

SEMI PV35.1 — Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System Media Interface for a Horizontal Communication between Equipment

3 Line Item #3: Revise the length of data block Revise the maximum size of data block Revise the size of GD/MD_LENGTH field Revise the address range of GD/MD_BODY Revise the description of GD/MD_LENGTH Revise the name of GD/MD_LENGTH Eliminate Ethernet packet limited expressions in SEMI PV35.1 Make following change to PV35, and PV35.1

3.1 Line Item #3-1: Revise Maximum Size of Data Block in 5.1.6 of PV35.1

5.1.6 Maximum Size of Data Block — The maximum size of data block is 1024 4,294,967,296 bytes.

3.2 Line Item #3-2: Amend Table 1 of PV35.1 as shown below




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Table 1 Signal Assignment for Line DB

Layer Address Type#2 Name Description

General Data(DSDR)

Send GD to data receiver of the other equipment.GD is valid only in the SEMI PV35 state transition which uses GD. In case GD is invalid, the signals other than GD_BODY shall be filled with 0x00 and GD_BODY shall be ignored.

14 INT16 CS_No.#1 Command Sequence No. of General Data (MSB)15 (LSB)16 INT8 STD_ID#1 Standard ID of General Data17 INT8 RSV_SBSTD#1 Reserved18 INT8 GD_ID (CC) #1 Category Code of General Data19 INT8 GD_ID (GC) #1 Command Code of General Data20 INT16

INT32GD_BODY_LENGTH#

1

Length of General Data GD_BODY (MSB)21 (LSB)2223 (LSB)22-102324-4,294,967,295 #3

STRUCT GD_BODY#1 Body of General DataGD_BODY is variable length. This Standard only defines the maximum length. The actual length is defined by user.

3.3 Line Item #3-3: Amend Table 2 of PV35.1 as shown below

Table 2 Signal Assignment for Track DB


Material Data Send MD to Track DB of the other Port.MD is valid only in the SEMI PV35 state transition which uses MD. In case MD is invalid, the signals other than MD_BODY shall be filled with 0x00 and MD_BODY shall be ignored.

14 INT8 STD_ID#1 Standard ID of MD15 INT8 RSV_SBSTD#1 Reserved16 INT8 - Reserved17 INT8 MD_TYPE#1 Type of MD18 INT16

INT32MD_BODY_LENGTH#

1

Length of MD MD_BODY (MSB)19 (LSB)2021 (LSB)20-102322-4,294,967,295#5

STRUCT MD_BODY#1 Body of MDMD_BODY is variable length. This Standard only defines the maximum length. The actual length is defined by user.




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3.4 Line Item #3-4: Revise GD_LENGTH in Table 2 of PV35

Table 2 General Data Format

Mnemonic Name Size (Byte) Definition

GD_BODY_LENGT

H

General Data Body Length

2 4 Length of GD_BODY (0x0000-0xFFFF 0x00000000-0xFFFFFFFF #1)

3.5 Line Item #3-5: Revise MD_LENGTH in Table 4 of PV35

Table 4 Material Data Format


MD_BODY_LENGT

H

Material Data Body Length

2 4 Length of MD_BODY (0x0000-0xFFFF 0x00000000-0xFFFFFFFF #1)

3.6 Line Item #3-6: Eliminate Ethernet packet limited expressions in SEMI PV35.1

4.2.2 Data Block — a group of data which represents PV 35 HC communication signals which shall be transferred at a same time as one message Ethernet packet for synchronization purpose. There are two types of Data Blocks; one is “Line DB” for “Line Information” another is “Track DB” for “Track Information”.

5.1.4 Assurance of Data Change Order in a Data Block — In order to ensure the order of change among interrelated bits and bytes in a Data Block, a Data Block shall be sent at the same time as one message Ethernet packet.




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Equipment A

CommunicationBlock

Line CB

Equipment B

LineWB

TrackWB

Ethernet

Track CB 1

LineDB

TrackDB

TrackWB

Track CB nTrackDB

CommunicationBlock

Line CBLineRB

TrackRB

Track CB 1

TrackRB

Track CB n

LineDB

TrackDB

TrackDB

Figure 5One Message Ethernet Packet per One Data Block

4 Line Item #4: Correct the abbreviation of data block in PV35.1 Make following change to PV35.1

4.2.2 data block (db DB) — a group of data which represents PV35 HC communication signals which shall be transferred at a same time as one Ethernet packet for synchronization purpose. There are two types of data blocks; one is ‘Line DB’ for ‘Line Information’ another is ‘Track DB’ for ‘Track Information.’

5 Line Item #5: Release assigned STD_IDs which are not used in PV35 Release assigned STD_IDs for unused standard drafts. Revise the range of ‘Reserved for the other Subordinate Standards’ to include the above IDs. Make following change to PV35

Table 2 General Data Format


STD_ID Standard ID 1 General Data Format is commonly used by this Standard and/or its Subordinate Standards. STD_ID indicates which Standard defined the particular message.0x00#1: This Standard0x01#1: Subordinate Standard (for cSi)0x02#1: Subordinate Standard (for larger sized substrate oriented)0x03 0x01-0x7F#1: Reserved for the other Subordinate Standards0x80-0xFF#1: User defined




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Table 4 Material Data Format


STD_ID Standard ID 1 Material Data Format is commonly used by this Standard and/or its Subordinate Standards. STD_ID indicates which Standard defined the particular message.0x00#1: This Standard0x01#1: Subordinate Standard (for cSi)0x02#1: Subordinate Standard (for larger sized substrate oriented)0x03 0x01-0x7F#1: Reserved for the other Subordinate Standards0x80-0xFF#1: User defined

6 Line Item #6: Improve expressions which indicate the length of ‘Line Information’ or ‘Track Information’ in Data Block of PV35.1 Make following changes to PV35.1 Amend the ‘Data Block Length’ field in ‘Table 1 Signal Assignment for Line DB’ so that it can be understood

as the length of ‘Line Information’, and reflect the changes to the Figure 7. Amend the ‘Data Block Length’ field in ‘Table 2 Signal Assignment for Track DB’ so that it can be understood

as the length of ‘Track Information’, and reflect the changes to the Figure 8. Amend the structure of the Table 1 and 2 so that ‘Information ID’ is included in ‘Line Information’ and ‘Track

Information’

Delete

Add

Figure 7Structure of Line DB

Table 1 Signal Assignment for Line DB





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Message ID 0 BYTE MESSAGE_ID This ID is used for the message extraction from TCP data stream.“H” shall be set (ASCII code)

1 BYTE “C” shall be set (ASCII code)2 BYTE “CR” shall be set (ASCII code)3 BYTE “LF” shall be set (ASCII code)

Information LengthData Block Length

4 INT32 INFORMATION_LENGTHDB_LENGTH

The length from “Information ID Data Block ID” to the end of Line DB. This length is used for the message extraction from TCP data stream. (MSB)

567 (LSB)

Information IDData Block ID

8 BYTE LINE_ID “L” shall be set for Line DB. (ASCII code)9 BYTE “I” shall be set for Line DB. (ASCII code)

Data Handshake Signals(DRDS)

Send logical signals of my Data Receiver to Data Sender of the other equipment.

10 INT8 - Reserved11.0 BOOL GD_RCV#1 Timing Signal of Data Receiver11.1 BOOL - Reserved11.2 BOOL - Reserved11.3 BOOL - Reserved11.4 BOOL - Reserved11.5 BOOL DH_RST#1 Status Signal of Data Receiver11.6 BOOL DH_ERR#1 Status Signal of Data Receiver11.7 BOOL DH_RDY#1 Status Signal of Data Receiver

Data Handshake Signals(DSDR)

Send logical signals of my Data Sender to Data Receiver of the other equipment.

12 INT8 - Reserved13.0 BOOL - Reserved13.1 BOOL GD_RDY#1 Timing signal of Data Sender13.2 BOOL - Reserved13.3 BOOL - Reserved13.4 BOOL - Reserved13.5 BOOL DH_RST#1 Status signal of Data Sender13.6 BOOL DH_ERR#1 Status Signal of Data Sender13.7 BOOL DH_RDY#1 Status Signal of Data Sender

General Data(DSDR)

Send GD to Data Receiver of the other equipment.General Data is valid only in the PV35 state transition which uses GD. In case General Data is invalid, the signals other than GD_BODY shall be filled with 0x00 and GD_BODY shall be ignored.

14 INT16 CS_No. #1 Command Sequence No. of General Data (MSB)

15 (LSB)16 INT8 STD_ID#1 Standard ID of General Data17 INT8 RSV_SBSTD#1 Reserved18 INT8 GD_ID (CC) #1 Category Code of General Data19 INT8 GD_ID (GC) #1 Command Code of General Data




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20 INT16 GD_LENGTH#1 Length of General Data (MSB)21 (LSB)22-1023#3

STRUCT GD_BODY#1 Body of General DataGD_BODY is variable length. This standard only defines the maximum length. The actual length is defined by user.

Delete

AddFigure 8

Structure of Track DB

Table 2 Signal Assignment for Track DB

Layer Address Type#2 Name DescriptionMessage ID 0 BYTE MESSAGE_ID This ID is used for the message extraction from

TCP data stream.“H” shall be set (ASCII code)

1 BYTE “C” shall be set (ASCII code)2 BYTE “CR” shall be set (ASCII code)3 BYTE “LF” shall be set (ASCII code)

Information LengthData Block Length

4 INT32 INFORMATION_LENGTHDB_LENGTH

The length from “Information ID Data Block ID” to the end of Track DB. This length is used for the message extraction from TCP data stream. (MSB)

567 (LSB)

Information ID

8 BYTE TRACK_ID “T” shall be set for Track DB n#3 (ASCII code)9 BYTE “n#3” shall be set for Track DB n#3 (binary code )




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Data Block ID

: 0x01-0xFF#4.

Track Information (PV

35 HC

Signals)

Material Handoff Handshake Signals

Send logical signals of Material Handoff Handshake to Track DB of the other Port.

10 INT8 - Reserved11.0 BOOL STEP0#1 Handoff step signal11.1 BOOL STEP1#1 Handoff step signal11.2 BOOL STEP2#1 Handoff step signal11.3 BOOL STEPc#1 Handoff step signal11.4 BOOL - Reserved11.5 BOOL PAUSE_ACK#1 Handoff Control Signal11.6 BOOL PAUSE#1 Handoff Control Signal11.7 BOOL BUSY#1 Handoff Control Signal

Mode Resolution Signals

Send logical signals of Mode Resolution to Track DB of the other Port.

12 INT8 - Reserved13.0 BOOL X-MODE#1 eXchange Mode Signal13.1 BOOL R-MODE#1 Receive Mode Signal13.2 BOOL S-MODE#1 Send Mode Signal13.3 BOOL - Reserved13.4 BOOL - Reserved13.5 BOOL MH_RST#1 Status Signal13.6 BOOL MH_ERR#1 Status Signal13.7 BOOL MH_RDY#1 Status Signal

Material Data

Send MD to Track DB of the other Port.Material Data is valid only in the PV35 state transition which uses MD. In case Material Data is invalid, the signals other than MD_BODY shall be filled with 0x00 and MD_BODY shall be ignored.

14 INT8 STD_ID#1 Standard ID of Material Data15 INT8 RSV_SBSTD#1 Reserved16 INT8 - Reserved17 INT8 MD_TYPE#1 Type of Material Data18 INT16 MD_LENGTH#1 Length of Material Data (MSB)19 (LSB)20-1023#5

STRUCT MD_BODY#1 Body of Material DataMD_BODY is variable length. This standard only defines the maximum length. The actual length is defined by user.




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Quotations of Required Sections from the Documents

Note: Per ¶ 3.4.3.3.1 of the SEMI Standards Procedure Manual, the introductory sections of SEMI PV35-0215 are providedbelow. Revisions are not applied to this quotation.

SEMI PV35-0215SPECIFICATION FOR HORIZONTAL COMMUNICATION BETWEEN EQUIPMENT FOR PHOTOVOLTAIC FABRICATION SYSTEM

This Standard was technically approved by the Automation Technology Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 11, 2014. Available at www.semiviews.org and www.semi.org in February 2015; originally published October 2012; previously published December 2014.

PurposeThe purpose of this Standard is to provide a specification for communication between adjacent equipment in material flow (hereinafter referred to as horizontal communication [HC]) to be used for photovoltaic fabrication system or similar ones (equipment here includes process equipment, metrology equipment, transport equipment and clustered one of those, etc.).

The purpose of this Standard is also to provide HC to perform both ‘Material and associated data transfer’ and ‘General purpose data exchange’ without factory host assistance.

The purpose of this Standard is also to provide HC specification to cover the following cases based on a common concept.

6.1.1 Various material transfer types (such as Single Substrate and Multiple Substrate with/without Carrier).

6.1.2 Various material flow type combinations (such as Uni-Direction, Alternate-Direction, Bi-Direction and multiple set and/or combination of them).

The purpose of this Standard is also to provide HC specification that is compatible with various line connection topologies (such as Branch and Merge).

The purpose of this Standard is also to provide scalable specification to support sufficient HC functionality for lower implementation cost.

ScopeTargeted Area of Application — This Standard defines HC specifications for both crystalline and thin film fabrication system cases, and may be applied to other similar systems.

Targeted System Configuration Coverage — This Standard defines HC specifications to cover below.

6.1.3 Transfer operations for Material such as ‘Single Substrate’, ‘Multiple Substrates (as a set) Without Carrier’ and ‘Multiple Substrates in Carrier’ by single cycle with assoc

6.1.4

6.1.5 iated Material data.




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Multiple SubstratesWith Carrier

Multiple SubstratesWithout Carrier

Single Substrate

Material

Figure 1Types of Material

6.1.6 Track management of three track types, which are Uni-Direction, Alternate-Direction and Bi-Direction, and of multiple set and/or combination of them by single HC connection.

6.1.6.1 Uni-Direction — A track in which a material flows in one direction from a Send Port of equipment A to a Receive Port of equipment B, as shown in Figure 2.

6.1.6.2 Alternate-Direction — A track which has a transfer direction change capability, and in which a material flows in both directions between Alternate Port (Send/Receive Port) of equipment A, which dynamically changes as Send Port or Receive Port, and Alternate Port of equipment B, which dynamically changes as Receive Port or Send Port accordingly, as shown in Figure 2. This track type needs arbitration capability (sequence) of transfer requests from equipment A and B.

6.1.6.3 Bi-Direction — A track which has a bi-directional transfer capability in one transfer cycle, and in which two materials (at maximum) flow in both directions with quasi-simultaneous manner between eXchange Port (Send+Receive Port) of equipment A, which works as one or both of Send Port and Receive Port in one transfer cycle, to eXchange Port of equipment B, which works as one or both of Receive Port and Send Port accordingly in one transfer cycle, as shown in Figure 2.

Figure 2Track Types and Combinations

Functional Coverage — Single HC line in this Standard covers concurrent operation of one full duplex General Data transfer channel and Material and Material Data transfer channel(s).

6.1.7 General Data Between Adjacent Equipment — HC in this Standard covers General Data transfer.




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6.1.8 Material and Associated Data — HC in this Standard covers Material and Material Data transfer. Adjacent equipment may have multiple tracks for material transfer, and HC specification covers concurrent operation of those.

Communication Tiers in Scope — This Standard covers communication tiers for HC as below.

6.1.9 Application — This Standard does not define application tier for HC.

6.1.10 Data Definition — This Standard defines mandatory part of data for each data block in data model, however, leaves user space free for extendibility.

6.1.11 Data Model — This Standard defines data model for HC.

6.1.12 Informational Structure — This Standard defines informational structure for HC.

6.1.13 Handshake State Models — This Standard defines logical handshake state models for HC.

6.1.14 Media Interfaces — This Standard does not specify media interface. Subordinate Standards may be developed for this purpose.

6.1.15 Communication Media — This Standard does not specify media to be used but defines nonmedia specific part of HC specifications that are compatible with several communication media such as Hardwired Signals type, Shared Memory (Fieldbus) type and message oriented type.

6.1.16 Application Notes — This Standard includes some generic application notes to map HC on those media, however, does not cover implementation specifications for those media which should be in separated Standards.

Figure 3Specification Structure




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NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

LimitationsThis Standard may have some definitions for exception states, however, does not cover exceptions related to safety issues such as emergency off (EMO), so, those functionalities should be defined and implemented separately.

Referenced Standards and DocumentsNone.

TerminologyAbbreviations and Acronyms

6.1.17 DR — data receiver

6.1.18 DS — data sender

6.1.19 GD — general data

6.1.20 HC — horizontal communication

6.1.21 MD — material data

6.1.22 PV — photovoltaic

Definitions

6.1.23 Alternate Port — a material transfer port which dynamically changes as Send Port or Receive Port.

6.1.24 carrier — entity which is used to transport one or more substrate being contained in it.

6.1.25 Data Handshake — a handshake to transfer General Data.

6.1.26 eXchange Port — a material transfer Port which works as one or both of Send Port and Receive Port in one transfer cycle.

6.1.27 full duplex — a communication scheme which has two independent transfer channels and has a capability to perform asynchronously simultaneous bi-directional communication.

6.1.28 General Data — data which is exchanged and used among equipment and not synchronized with a Material Handshake.

6.1.29 handoff — physical action to transfer material from one Port to another Port.

6.1.30 Handoff Step — step of operation in which material handoff is performed. Operation here is not always physical but sometimes nonphysical such as observation of sensors.

6.1.31 handshake — a communication between communication entities associated with Line or Track to perform data transfer and/or material handoff.

6.1.32 horizontal communication — interequipment communication along with a physical flow line of a material in process. It contains material related and nonrelated data. Equipment here is equipment which handles a material (substrate or group of substrate) in process, such as process equipment, transfer equipment, metrology equipment, storage equipment, etc.

6.1.33 Line — a connection between equipment. One Line has at least one Track.

6.1.34 Logical Signal — an information which indicates the handshake state of a Port to the other Port.

6.1.35 Material — a unit of work piece which will be transferred at a time as one entity.

6.1.36 Material Data — data which is associated with particular Material and describes its characteristics.

6.1.37 Material Handoff — a series of actions to transfer a Material from a Port to another.




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6.1.38 Material Handoff Handshake — a handshake to perform physical handoff of Material.

6.1.39 Material Handshake — a handshake to transfer Material and associated Material Data.

6.1.40 media — communication means which perform communication between equipment.

6.1.41 Mode Resolution — a process in which an agreement is made in transfer mode and transfer direction between two Ports in an autonomous manner.

6.1.42 Mode Resolution Handshake — a handshake to perform Mode Resolution.

6.1.43 Port — a physical in/out point for material on equipment. A Track has one Port at the each end. Port also represents a logical communication entity assigned to each Port.

6.1.44 Receive Port — a material transfer Port which has a function of receiving a material.

6.1.45 Track — a physical material flow route in Line. One Line may have multiple Tracks.

6.1.46 Send Port — a material transfer Port which has a function of sending out a material.

NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice.

By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.




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Note: Per ¶ 3.4.3.3.1 of the SEMI Standards Procedure Manual, the introductory sections of SEMI PV35.1-0215 are providedbelow. Revisions are not applied to this quotation.

SEMI PV35.1-0215MEDIA INTERFACE SPECIFICATIONS FOR A HORIZONTAL COMMUNICATION BETWEEN EQUIPMENT

This Standard was technically approved by the Automation Technology Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 11, 2014. Available at www.semiviews.org and www.semi.org in February 2015; originally published January 2014; previously published December 2014.

1 Purpose1.1 The purpose of this Subordinate Standard is to provide Ethernet based media interface specifications for SEMI PV35, Specification for Horizontal Communication between Equipment for Photovoltaic Fabrication System, (hereinafter referred to as PV35 HC) that are commonly usable between control entities such as programmable logic controllers (PLCs) or personal computers (PCs) from different suppliers regardless of their different fieldbus supports. A factory in which PV35 HC would be applied generally uses PLCs and PCs for equipment control.

ScopeThis Subordinate Standard covers ‘Media Interfaces’ portion of communication tiers which is shown in Figure 3 in PV35 HC.

1.1.1 This Subordinate Standard covers Ethernet based Media Interface specifications which uses TCP.

Figure 1Position of This Subordinate Standard on HC Tiers




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1.1.2 This Subordinate Standard covers interface specifications that are used between fabrication components such as a unit, equipment or a cluster of equipment, which are used as independent entities to form a fabrication line from material transportation perspective. This Subordinate Standard does not care about interface specification between equipment in a cluster.

Cluster EQ

EQ

Logical Connection of HC

EQ

Cluster

Cluster

EQ EQ

May be used

Figure 2Logical Connection of HC

NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Referenced Standards and DocumentsSEMI Standards and Safety Guidelines

SEMI PV35 — Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System

IEEE Standard1

IEEE 802.3 — Ethernet

IETF Document2

IETF RFC 793 — Transmission Control Protocol

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

TerminologyAbbreviations and Acronyms

1.1.3 CB — communication block

1.1.4 DB — data block

1 Institute of Electrical and Electronics Engineers, 3 Park Avenue, 17th Floor, New York, NY 10016-5997, USA; Telephone: 212.419.7900, Fax: 212.752.4929, http://www.ieee.org2 The IETF documents can be obtained from The Network Information Center, Network Solution, 14700 Park Meadow Drive, Suite 200, Chantilly, VA 22021, USA.




http://www.ieee.org/

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1.1.5 DH — data handshake

1.1.6 DR — data receiver

1.1.7 DS — data sender

1.1.8 EQ — equipment

1.1.9 GD — general data

1.1.10 HC — horizontal communication

1.1.11 MD — material data

1.1.12 MH — material handshake

1.1.13 PC — personal computer

1.1.14 PLC — programmable logic controller

1.1.15 PV — photovoltaic

1.1.16 RB — read block

1.1.17 WB — write block

Definitions

1.1.18 communication block (CB) — an informational block in HC Controller, which is used to communicate data blocks between HC controllers. One PV35 HC ‘Line’ has one communication block. One communication block consists of one Line CB and one or more Track CB(s).

1.1.19 data block (db) — a group of data which represents PV35 HC communication signals which shall be transferred at a same time as one Ethernet packet for synchronization purpose. There are two types of data blocks; one is ‘Line DB’ for ‘Line Information’ another is ‘Track DB’ for ‘Track Information.’

1.1.20 HC controller — a controller which is a node of Ethernet and performs communication per PV35 HC in equipment. In general, PLC or PC is used as HC controller.

1.1.21 Line CB — a part of communication block which contains Line Information including GD. Line CB consists of Line RB and Line WB.

1.1.22 Line DB — a data block which contains Line Information signals including GD.

1.1.23 Line RB — a part of Line CB which receives data in Line DB from other equipment.

1.1.24 Line WB — a part of Line CB which contains the data to be sent as Line DB to other equipment.

1.1.25 Track CB — a part of communication block which contains Track Information including MD for one Track. One Track shall have one Track CB. Each Track CB consists of Track RB and Track WB.

1.1.26 Track DB — a data block which contains Track Information signals including MD for one Track.

1.1.27 Track RB — a part of Track CB which receives data in Track DB from other equipment.

1.1.28 Track WB — a part of Track CB which contains the data to be sent as Track DB to other equipment.

The terminology in SEMI PV35 shall be referred to for the following definitions.

1.1.29 Data Handshake

1.1.30 General Data

1.1.31 Line

1.1.32 Line Information

1.1.33 Logical Signal

1.1.34 Material Data




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1.1.35 Material Handoff Handshake

1.1.36 Material Handshake

1.1.37 Mode Resolution

1.1.38 Port

1.1.39 Track

1.1.40 Track Information

NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice.

By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.


