introduction to photonic integrated circuits

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Microphotonic Devices Group Introduction to Photonic Integrated Circuits Min-Hsiung Shih(施閔雄) Research Center for Applied Sciences (RCAS) & Taiwan International Graduated Program (TIGP) Academia Sinica, Taiwan May 9, 2008

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Microphotonic Devices Group

Introduction to Photonic Integrated Circuits

Min-Hsiung Shih(施閔雄)

Research Center for Applied Sciences (RCAS)&

Taiwan International Graduated Program (TIGP)Academia Sinica, Taiwan

May 9, 2008

Microphotonic Devices Group

Optical communication and photonic integrated circuits

Property of light

Elements for optical communication system1) Lasers and amplifiers2) Waveguides and fibers3) Modulators4) Multiplexer and Demultiplexer elements5) Photodectors

Photonic crystal waveguide and bending structures

Outlines

Microphotonic Devices Group

Speed Limitation of Electrical Communications

Microphotonic Devices Group

Optical Communication System

Typical DWDM (Dense Wavelength Division Multiplexing) system

Microphotonic Devices Group

Elements for Photonic Integrated Circuits

Microphotonic Devices Group

Example of Photonic Integrated CircuitsPhotonic Integrated Circuitcombines tunable laser and optical modulator 10/09/2007

JDSU demonstrated a photonic integrated circuit (PIC) thatcombines a tunable laser and optical modulator, using a technology known as the Integrated Laser Mach Zehnder (ILMZ).The PIC will allow the company to develop smaller, higher performance and more cost-effective tunable solutions that supportfaster network speeds. Tunable lasers are a key element requiredor the deployment of agile optical networks (AON). Such networksare deployed by service providers to scale network infrastructuresand replace slow, manual operations with simplified, dynamicnetwork solutions that can quickly respond to fluctuating traffic traveling over fiber optic networks. Tunable lasers providedynamic reconfigurability by allowing network operators to switchfrom one wavelength to another on demand, easing the cost ofpurchasing, storing and managing spare devices for wavelengthmanagement. The chip includes a widely tunable laser and MachZehnder modulator on a single chip that is small enough to fit on thetip of a finger. It will be incorporated into full-band tunabletransponders and transceivers within compact packages, such asthe 300-PIN small form factor (SFF) and pluggable small formfactors (XFP) starting in 2008. This combination enables JDSU to support transmission speeds greater than 11.3 Gigabits persecond and is scalable to support 40Gbit/s networks.

From www.epn-online.com

Microphotonic Devices Group

Optical Waveguides

Geometry of a Rib (Ridge) waveguide in planar photonic circuits

Microphotonic Devices Group

Types of Optical Waveguides

• SEM image of a dielectric rib (ridge) waveguide

• The calculated mode profile

n2

n1

n3

Microphotonic Devices Group

Optical Fiber

• High index core surround by lower index cladding

• The numerical aperture NA

0

2/122

sin

)(

nNA

nnNA claddingcore

=

−=

α

Microphotonic Devices Group

Semiconductor Lasers

Edge-emitting laser

VCSEL

DFB laser

Si Raman laser

Microphotonic Devices Group

Optical Amplifiers - EDFA• Erbium doped fiber

amplifier (EDFA)• Advantages

1. Cover wide wavelength range

2. Large total output power (> 1000 mW)

3. Large dynamic power range

• Disadvantages1. Not linear over the

working range2. Total power keep

constant for channels

Microphotonic Devices Group

Optical Amplifiers - SOA

• Semiconductor optical amplifier (SOA)

• Advantages1. For larger range of

wavelength

2. Easy to integrate to other elements

• Disadvantages1. Lower output power(5-

10 mW)

2. Crosstalk influences

Microphotonic Devices Group

Different Types of Optical Modulators

E-O Modulator Resonant Microdisk

Mach-ZehnderStructure

Size Large Compact

> 10 GHz

Vπ High Low Low

High

Larger

Speed > 10 GHz ~ 1 GHz

Cost Low Low

Microphotonic Devices Group

Demultiplexer Elements

Prism•Not used in DWDM system

Microphotonic Devices Group

Demultiplexer Elements

Diffraction Grating• Reflection light is not

homogeneous

• Not used in DWDM system

Microphotonic Devices Group

Demultiplexer Elements

Array waveguide grating (AWG)• Array WGs make phase shift,

and different focus in 2nd cavity• Higher No. of channels (>64)• Small wavelength spacing• Temperature dependence &

higher cost

λ (nm)

λ (nm)

Microphotonic Devices Group

Multiplexer Elements

• Optical couplers1. Simple, low cost

2. High insertion loss

3. Never be a DeMUX

Microphotonic Devices Group

Multiplexer Elements

Cascaded Mach- Zehnders

• Easy integrated

• Can be used for MUX/DeMUX

Microphotonic Devices Group

Photodectectors in Photonic Circuits

Transfer optical signals to electrical signals

The opposite way to lasers

Microphotonic Devices Group

Photodectectors in Photonic Circuits

Spectral response of different detector materials For fiber communication (~λ=1300-1550nm), InGaAs and Ge are prefer materials for photodetectors

Microphotonic Devices Group

End……

Microphotonic Devices Group

Photonic Crystal Devices for Photonic Integrated

Circuits

Min-Hsiung Shih(施閔雄)

Research Center for Applied Sciences (RCAS)&

Taiwan International Graduated Program (TIGP)Academia Sinica, Taiwan

May 16, 2008

Microphotonic Devices Group

Elements for Photonic Integrated Circuits

Microphotonic Devices Group

Building Blocks for Photonic Integrated Circuits with 2D Photonic Crystals

Laser / Light Source Waveguide / Bend Modulator

Photodetector

λ1, λ2, λ3 …

λ4, λ5, λ6 …

Microphotonic Devices Group

Photonic Crystal Defect Laser Cavity

• Micro-Disk Lasers

• Photonic Crystal D3 Membrane Cavity

• Continuous-Wave (CW) Operation Photonic Crystal Laser Cavity under

Microphotonic Devices Group

III-V Gain Materials for Semiconductor Lasers

Microphotonic Devices Group

Micro-Disk Laser Cavity

~ 5 μm

SEM image of a micro-disk laser from angle view4 InGaAsP

QWs enbeded

240 nm

Microphotonic Devices Group

Micro-Disk Laser CavityWhispering-gallery resonant modes

of a micro-disk

1st order mode 2nd order mode

Microphotonic Devices Group

Micro-Disk Laser Cavity

Lasing spectrum

1.40 1.45 1.50 1.55 1.60 1.65 1.70

0.0

20.0p

40.0p

60.0p

80.0p

100.0p

120.0p200712QW12 MD1_a6incident power = 6 mWduty cycle 1.5 % pulsed width 30 nsOSA res 1 nm

Mon

itor V

alue

(W)

Wavelength (μm)

1.35 1.40 1.45 1.50 1.55 1.60 1.650.0

1.0x10-11

2.0x10-11

3.0x10-11

4.0x10-11

5.0x10-11

6.0x10-11

7.0x10-11

8.0x10-11

Δλ=108nm

Mon

itor V

alue

(W)

Wavelength (μm)

PL from 200712QW 12incident power = 6 mW

λ=1555nm72.94 pW

PL spectrumGain peak ~ 1550 nm

Microphotonic Devices Group

0.0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

In-Plane Propagation DirectionΓΚΜ

Nor

mal

ized

Fre

quen

cy (a

/λ0)

Γ

Membrane Photonic Crystal Defect Laser Cavity

Band Gap

Two dimensional triangular photonic crystal suspended membrane with r/a = 0.3, d/a=0.6 and dielectric constant ε=11.56

3D Band diagram of the photonic crystal membrane from finite-difference time-domain (FDTD) method

Microphotonic Devices Group

Finite-Difference Time-Domain Method Simulation

The highly localized field in photonic crystal structures couldn’t be solved analytically

The finite-difference time-domain (FDTD) method can simulate the evolution of the field which governed by Maxwell’s equation in real time space domain

Simulated Hz of a D3(19 missing holes) suspended membrane photonic crystal cavity by three dimensional

FDTD method

Microphotonic Devices Group

Quality Factor (Q) of CavityThe decay of energy in a cavity is expressed in term of the quality factor or Q.

Different notations1)1) Theoretical def. Theoretical def.

2)2) Experimental data in frequency domainExperimental data in frequency domain

3)3) Photon life time, Photon life time, ττpp

)()(2

noscillatioofcycleainlostenergyresonanceatcavitytheinstoredenergyQ π

=

2/1

0

ωωΔ

=Q

0ωτ Q

p =

Microphotonic Devices Group

D3 Membrane Photonic Crystal Cavity

~3 μm

240 nm InGaAsP

Microphotonic Devices Group

Lasing Data from D3 Membrane Photonic Crystal Cavity

The lasing spectrum (red) of a suspended membrane D3 photonic crystal laser cavity.

The resonance peaks of the spectrum match well in the predicted normalized frequency which have higher quality (Q) factors and inside the high gain region.

0.32 0.33 0.34 0.35 0.36 0.37 0.38 0.39

0.01

0.1

1

0.31 0.32 0.33 0.34 0.35 0.36 0.37 0.38 0.39100

1000

10000

Res

onan

ce M

ode

Qua

lity

Fac

tor

Normalized Frequency (a/λ 0)

12/15/2002 offseted -0.025 in normalized frequency

Microphotonic Devices Group

Suspended Membrane and Sapphire-Bonded Structure

Sapphire substrate, n= 1.7

InGaAsP layer

Air-dielectric-air structure has better confinement for the localized fields

The structure only laseunder pulse width conditions

Air-dielectric-sapphire structure has less confinement for the localized fields

This structure can lase under continuous wave (CW) conditions

Thermal conductivityAir : 2.5x10-5 W/cm·K and Sapphire : 5x10-1 W/cm·K

Microphotonic Devices Group

Quality Factor (Q) of Sapphire-Bonded Photonic Crystal Cavity

0.24 0.26 0.28 0.30 0.32 0.340

2,000

4,000

6,000

8,000

10,000

12,000

14,000

Qua

lity

Fact

or

a/λ

(a)

0.28 0.30 0.32 0.34 0.36 0.380

2,000

4,000

6,000

8,000

10,000

12,000

14,000

a/λ

(b)

D3 on Sapphire D3 on Air

0.24 0.26 0.28 0.30 0.32 0.340

2,000

4,000

6,000

8,000

10,000

12,000

14,000

a/λ0

D4 on Sapphire

0.24 0.26 0.28 0.30 0.32 0.340

2,000

4,000

6,000

8,000

10,000

12,000

14,000

a/λ0

D4 on Sapphire

(c)

D4

D3

Microphotonic Devices Group

Continuous Wave (CW) Operation of Sapphire-Bonded Photonic Crystal

Cavities

3.2 μm

SEM image of D4 sapphire-bonded cavity from angle view

1.57 1.58

-30

-20

-10

0

Out

put p

ower

(dB

)

Wavelength (μm)

0.0 0.5 1.0 1.5 2.0 2.50.0

0.2

0.4

0.6

0.8

1.0

Out

put P

ower

(a.u

.)

CW incident pumped power (mW)

Microphotonic Devices Group

Side-Mode Suppression Ratio (SMSR) of Sapphire-Bonded PhC Cavities

1.50 1.55 1.6010-12

10-11

10-10

10-9

10-8

(a)CW Condition

Inte

nsity

(a.u

.)

Wavelength (μm)

30 dB

1.50 1.55 1.6010-12

10-11

10-10 (b)

13 dB

Inte

nsity

(a.u

.)

Wavelength (μm)

Pulse Condition 8/800 ns

In fiber communication or CATV system, SMSR > 25 dB is considered a single mode light source.

Microphotonic Devices Group

Lasing Modes of Sapphire-Bonded Photonic Crystal Cavities

Since PhC is scalable, the lasing wavelength varied with PhC lattice constant.

The lasing wavelengths are separated into two groups, group A has normalized frequency ~ 0.252, and group B has ~ 0.263.370 380 390 400 410 420

1350

1400

1450

1500

1550

1600

1650

B

Lasi

ng W

avel

engt

h (n

m)

Lattice Constant (nm)

A0.252

0.263

Microphotonic Devices Group

Comparison of Lasing Spectrum and 3D-FDTD Calculation

Mode B lasing spectrum (red curve)from a PhC laser under CW pumping condition.3D FDTD Calculated quality factor (Q) spectrum (orange) in normalized frequency axis.The shift between two spectra is about 1 %.

0.24 0.25 0.26 0.27 0.28

10-11

10-10

10-9

10-8

0.24 0.25 0.26 0.27 0.28102

103

104

Normalized Frequency (a/λ)

B

AIntensity (a.u.)

Qua

lity

Fact

or (Q

)

Microphotonic Devices Group

Photonic Crystal Waveguides

Introduction to photonic crystal waveguides

Doubly-bent photonic crystal waveguides

Photonic crystal Mach-Zehnder structure

Microphotonic Devices Group

Introduction to Photonic Crystal Waveguide

Band Gap

ΓK

0.0 0.2 0.4 0.6 0.8 1.00.0

0.1

0.2

0.3

0.4

Nor

mal

ized

Fre

quen

cy (a

/λ0)

In-Plane Propagation Constant β (x π/a)

0.0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

In-Plane Propagation DirectionΓΚΜ

Nor

mal

ized

Fre

quen

cy (a

/λ0)

Γ

Microphotonic Devices Group

Types of Photonic Crystal Waveguides

Suspended Membrane

Oxide Substrate

Deeply Etched

Microphotonic Devices Group

Loss in Photonic Crystal Waveguides from FDTD

• The out-of-plane radiation loss of the waveguide is generally large for modes in the radiation light cone.

• Low loss transmission for suspended membrane and oxidized lower claddingstructures occurs at the vicinity of the Brillouinzone boundary.

projection of sapphire light cone

projection of air light cone

0.0 0.2 0.4 0.6 0.8 1.0

0.1

1

10

100

1000

10000

Thin Oxide Thick Oxide

Vert

ical

Rad

iatio

n Lo

ss (c

m-1)

In-plane Wave Vector β (π/a)

Deep Undercut Shallow Undercut

Deeply-Etched

3.0 μm

1.0 μm

From Wan Kuang, MPDG, USC

Microphotonic Devices Group

InGaAsP Membrane Photonic Crystal Waveguides

Suspended Membrane

InGaAsP

InP scarified layer

InP substrate

Microphotonic Devices Group

Fabrication of Photonic Crystal Membrane Waveguides

InP Substrate

InGaAsP 240 nm

SiNx layer 50 nm

PMMA 100 nm

E-Beam lithography

RIE CF4 Etching ECR etching

with CH4/H2/Ar HCl wet etching

at 0ºC

Remove all masks

lapping & cleaving

Microphotonic Devices Group

SEM Images of InGaAsP Membrane Photonic Crystal Waveguides

10 μm

10-15 periods

Microphotonic Devices Group

Transmission Through Straight Photonic Crystal Waveguides

Bandstructure and measured transmission of suspended membrane photonic crystal waveguide

Microphotonic Devices Group

Group Index of Propagated Mode in Photonic Crystal Waveguides

0.0 0.2 0.4 0.6 0.8 1.00.0

0.1

0.2

0.3

0.4

Nor

mal

ized

Fre

quen

cy (a

/λ0)

In-Plane Propagation Constant β (x π/a)

gg n

c=

∂∂

=βων

0.265 0.270 0.275 0.280 0.285 0.290 0.295 0.3000

10

20

30

40

50

60

1st band

2nd band

Gro

up in

dex

ng

Normalized Frequency

Group Indices of two guided bands

Microphotonic Devices Group

1480 1500 1520 1540 1560

4

6

8

10

Gro

up In

dex

Wavelength (nm)

r/a=0.30 r/a=0.33

0 5 10 15 20

Group Index

Spe

ctra

l Am

plitu

de

ng = 5.14

Comparison of the Predicted and Observed

Group Indices of Photonic Crystal Waveguides

Lng2

2λλ =Δ

Fabry-Perot oscillation period

Group indices of defect waveguide modes obtained from bandstructure

a= 420 nm, r/a = 0.315, Length = 292 μm

Microphotonic Devices Group

Fabry-Perot Oscillations from Doubly Bent Photonic Crystal Waveguides

LBend= 42.42 μm

31.92 μm

21.42 μm

Fabry-PerotRBend

RBend

Reflection from the two bends will lead to Fabry-Perot oscillations with a period that should be inversely proportional to LBend

Microphotonic Devices Group

1400 1450 1500 1550 16000.0

0.1

0.2

0.3

0.4

0.5

0.6

Tran

smis

sion

(a.u

.)

Wavelength (nm)

Theoretical Prediction of Transmission Through Photonic Crystal Waveguides by Finite Element

MethodCalculated Transmission

Straight waveguide

Bent waveguide

r/a = 0.3

74 nm

Microphotonic Devices Group

1460 1480 1500 1520 1540 1560 15800.0

0.2

0.4

0.6

0.8

1.0

Tran

smis

sion

(a.u

.)

Wavelength (nm)

Comparison of Transmission Measurement and Simulation

• Fabry-Perot oscillations were observed in measured transmission.

• The oscillation from the bent section can be identified by the period.

Measured result

r/a~0.31

Simulated result r/a=0.30

Microphotonic Devices Group

1480 1490 1500 1510 1520

Tran

smis

sion

( a.

u.)

Wavelength ( nm )

1500 1510 1520 1530 1540

Tran

smis

sion

( a.

u.)

Wavelength ( nm )

1500 1510 1520 1530 1540

Tran

smis

sion

( a.

u.)

Wavelength ( nm )

Reflectance Extracted from Measured Spectra

lengthLratiovalleytopeakK

KKR

LdB

::

1011 10

−−−

⎟⎟⎠

⎞⎜⎜⎝

+−

=⎟⎠⎞

⎜⎝⎛ α

Error-bars represent the range of αdBfrom 2 to 20 dB/mm.

LBend = 21.21 μm

1480 1490 1500 1510 1520

Tran

smis

sion

( a.

u.)

Wavelength ( nm )

LBend = 42.42 μm

1480 1500 1520 1540 1560

Tran

smis

sion

( a.

u.)

Wavelength ( nm )1500 1510 1520 1530 1540 1550

0.0

0.1

0.2

0.3

Wavelength ( nm )

Mea

sure

d R

efle

ctan

ce (a

.u.)

Microphotonic Devices Group

1520 1530 1540 15500.0

0.2

0.4

0.6

0.8

Wavelength ( nm )

Sim

ulat

ed R

efle

ctan

ce (a

.u.)

1520 1530 1540 15500.0

0.1

0.2

0.3

Wavelength ( nm )

Mea

sure

d R

efle

ctan

ce (a

.u.)

Simulated Reflectance

r/a > r/a ~ 0.3 r/a=0.30

Measured Reflectance

Comparison of Measured and Simulated Reflectance

Microphotonic Devices Group

Fabricate asymmetric Mach-Zehnder interferometers and characterize the transmission as a function of wavelength.

The Fourier transform of the transmission spectrum will contain information about the propagation coefficient of the photonic crystal waveguide mode.

The Basic Idea of Mach-ZehnderStructure

Microphotonic Devices Group

Photonic Crystal Mach-Zehnder

Structures in InP

InGaAsP/InP Membrane Structure

Microphotonic Devices Group

Mach-Zehnder Transmission Data

Wavelength (nm)

1550 1560 1570 1580 1590 1600 1610 1620

1550 1560 1570 1580 1590 1600 1610 1620

1550 1560 1570 1580 1590 1600 1610 1620

Inte

nsity

Inte

nsity

Inte

nsity

162015801560 1600

symmetric structure

path lengthdifference

75 μm

path lengthdifference121 μm

expect transmittedintensity to

contain oscillations that

go ascos(βΔL),

andβ= β(ng)

Microphotonic Devices Group

The Group Index of Photonic Crystal Waveguide

Three- Dimensional Finite Element Calculation

Microphotonic Devices Group

Fourier Transform of Transmission Spectra

Symmetric Mach-Zehnder

0 2000 4000 6000 8000 10000

No Dominant signals form the measured transmission

Microphotonic Devices Group

Mach-Zehnderwith Path Length Difference of 75 μm

Fourier Transform of Transmission Spectra

0 2000 4000 6000 8000 10000

502 μm Interference between two branches with a propagation index of 6.7

Microphotonic Devices Group

Fourier Transform of Transmission Spectra

Mach-Zehnderwith Path Length Difference of 121 μm

0 2000 4000 6000 8000 10000

637 μm

2230 μm

Interference between thetwo branches with a propagation index of 5.3

Fabry-Perot mode propagatingthrough the substrate

Microphotonic Devices Group

SummaryPhotonic crystal device, can be engineered by Photonic crystal device, can be engineered by changing the geometry, is a excellent candidate for changing the geometry, is a excellent candidate for dense photonic integrated circuits.dense photonic integrated circuits.

Photonic crystal defect laser cavities were obtained Photonic crystal defect laser cavities were obtained from from InGaAsPInGaAsP membrane.membrane.

Smallest continuousSmallest continuous--wave (CW) photonic crystal wave (CW) photonic crystal laser cavities was achieved on the sapphire laser cavities was achieved on the sapphire substrate.substrate.

Photonic crystal waveguides and its MachPhotonic crystal waveguides and its Mach--ZehnderZehnderstructure are demonstrated.structure are demonstrated.

Microphotonic Devices Group

Thank You

Microphotonic Devices Group

Propagation Loss Measurements using the Fabry-Perot Resonance Method

ΓK = 6.80~ 10.56 dB/mm (15.66 ~ 24.32 cm-1)

Fabry-Perot Spectrum of Stripe PCWG

1550.00 1575.00 1600.00 1625.00Wavelength ( nm )

Inte

nsi

ty

The Propagation Loss ΓK

Microphotonic Devices Group

Characterization Setup