Ischia, 21-23 giugno 2006Riunione Annuale GE 2006

R. C. Zaccuri, M. Iodice, G. Coppola, I. Rendina.

Istituto per la Microelettronica e Microsistemi, Sezione di NapoliConsiglio Nazionale delle Ricerche

Via P. Castellino 111, 80123, Napoli, Italia

Thermo-electrical analysis of an Thermo-electrical analysis of an optoelectronic modulator integrated in a optoelectronic modulator integrated in a SOI rib waveguide operating in the Gb/s SOI rib waveguide operating in the Gb/s

regimeregime

Ischia, 21-23 giugno 2006Riunione Annuale GE 2006

Silicon PhotonicsSilicon Photonics

Advantages:Advantages:

Integration with electronic devices

Simple fabrication

Low cost

Reliability

EM Interferences immunity

New perspectives

Optoelectronic building blocks:Optoelectronic building blocks:

Ischia, 21-23 giugno 2006Riunione Annuale GE 2006

Silicon Optoelectronic DevicesSilicon Optoelectronic Devices

Sensing Microsystems

Optical sensors interrogation

Low cost optical interconnections

Fiber-to-the-Home and Fiber-in-the-Loop

Local Area Network (LAN)

…

Application fields:Application fields:

Input portOutput port

P-Si mirrors

Air beam splitter

Ischia, 21-23 giugno 2006Riunione Annuale GE 2006

P-i-N diode like electrical structure Free-carriers injection is transversal to

the optical beam propagation direction Planar structure compatible with

standard microelectronic processes Bipolar mode injection which is more

efficient respect to unipolar devices

Modulator Basic Structure Modulator Basic Structure

Main properties:Main properties:

Ischia, 21-23 giugno 2006Riunione Annuale GE 2006

Design MethodologyDesign Methodology

ATHENAATHENA Microelectronic fabrication processes simulator

ATLASATLASElectronic devices behavior simulator

with thermal module

2D optical mode solver and

3D optical Beam Propagation Method (BPM)

OPTIMIZED OPTIMIZED DEVICEDEVICE

IS THE DEVICE ELECTRICALLY

ANDTHERMALLY OPTIMIZED ?

IS THE STRUCURE A SINGLE-MODE

WAVEGUIDE AND ABLE TO EFFECTIVELY MODULATE THE OPTICAL BEAM?

YES

NO

NO

SOFTWARE SOFTWARE INTERFACE LAYERINTERFACE LAYER

MatlabMatlabYES

BeamPROPBeamPROP

Ischia, 21-23 giugno 2006Riunione Annuale GE 2006

Microelectronics Technology LabsMicroelectronics Technology Labs

Depositions

Photolitography

Wet & Dry Etching

Oxidations

FacilitiesFacilities