mems journal, inc . & meptec present 12 2012 proceedings.pdf · mems journal, inc . &...

Exhibiting Companies

Wednesday, October 17, 2012 • Biltmore Hotel & Suites • Santa Clara, California

M E M S J O u r n a l , I n C . & M E P T E C P r E S E n T

12Microfluidics

F I R S T A N N U A L

2012M I C R O F L U I D I C T E C H N O L O G I E S

A N D A P P L I C AT I O N S

ParTICIPaTIng COMPanIES anD OrganIZaTIOnS:

DJ DEvCOrPFuJIFIlM DIMaTIx

HarvarD MEDICal SCHOOlHEWlETT-PaCkarD

MICrO EngInEErIng SOluTIOnSSTanFOrD gEnOME TECHnOlOgy CEnTEr

STanFOrD unIvErSITy

unIvErSITy OF CalIFOrnIa aT BErkElEy

AGENDA7:45 am Registration Opens

8:30 am – 8:45 am Welcome and Introduction

8:45 am – 9:30 am Polymer Materials and Processing for Microfluidic Applications Donald W. Johnson, Ph.D., MBA, Founder, DJ DevCorp

9:30 am – 10:15 am Drop-on-Demand Inkjet Technology with Picoliter Drop Size Ejection for Materials Deposition, Precision Dosing and Aerosol Generation Martin Schoeppler, President and CEO, FUJIFILM Dimatix

10:15 am – 10:45 am Break and Exhibits

10:45 am - 11:30 am Drug Delivery Microfluidic Devices Using Nano-Size Positional Accuracy Donna Bibber, President and CEO, Micro Engineering Solutions

11:30 am – 12:15 pm Cell Detection and Sorting Using Microfluidic Devices Tohid Fatanat Didar, Visiting Researcher, Harvard Medical School

12:15 pm – 1:15 pm Lunch and Exhibits

1:15 pm – 2:00 pm Microfluidics for Applications in Sensing and Biochemical High-Throughput Screening Sindy Tang, Ph.D., Assistant Professor, Stanford University

2:00 pm – 2:45 pm Integrated Micropump Technology for Lab-on-Chip Applications Alexander Govyadinov, Ph.D., R&D Engineer, Hewlett-Packard

2:45 pm – 3:15 pm Break and Exhibits

3:15 pm – 4:00 pm Microfluidic Technologies for Low Cost Healthcare Mehdi Javanmard, Ph.D., Microfluidics and Biosensors Researcher, Stanford University

4:00 pm – 4:45 pm Microfluidic Technologies for Cellular Reconstitution Michael D. Vahey, Ph.D., Postdoctoral Fellow, University of California at Berkeley

4:45 pm – 5:00 pm Wrap Up

5:00 pm – 6:00 pm Reception and Exhibits

Wednesday, October 17, 2012 • Biltmore Hotel • Santa Clara, Ca

Auer Precision Co., Inc. 1050 W. Birchwood AvenueMesa, AZ 85210Phone: 408-834-4637www.auerprecision.comAuer Precision has 25+ years of proven product support for medical devices, with focus on Ballistic Press Systems to preci-sion convert multi-layer laminated capillary channel devices. Core competencies of Auer Precision focus upon web han-dling, cleanliness and precision converting for die cut chan-nels, and registration features.

Their services include design, engineering collaboration, preci-sion converting, laminating and extensive characterization to reduce time in the concept stage through early product development. Auer’s specialty is thin materials, both metallic and non-metallic, from 0.001 - 0.060” thick. Typical materials include: Melinex, Mylar, Polyester, Polycarbonate, and multi-layer substrates with adhesives.

Bio-Rad Laboratories2000 Alfred Nobel DriveHercules, CA 94547Phone: 510-741-1000www.bio-rad.comBio-Rad Laboratories continues to play a leading role in the advancement of scientific discovery by offering a broad range of innovative tools and services to the life science research and clinical diagnostics markets. Founded in 1952, Bio-Rad has a global team of more than 7,000 employees and serves more than 100,000 research and industry customers world-wide through the company’s global network of operations. Throughout its existence, Bio-Rad has built strong customer relationships that advance scientific research and develop-ment efforts and support the introduction of new technology used in the growing fields of genomics, proteomics, drug dis-covery, food safety, medical diagnostics, and more.

DJ DevCorp490 Boston Post RoadSudbury, MA 01776Phone: 978-261-3188www.djdevcorp.comDJ DevCorp of Sudbury, MA USA develops new and innovative photosensitive resist materials and technologies targeted to meet the needs of advanced MEMS, microfluidic and wafer level packaging applications. DJ DevCorp produces SUEX epoxy Thick Dry Film Sheets based on an antimony-free epoxy resin formulation coated between two throw-away polyester sheets. Precut sheets up to 12” in size with uniform thicknesses ranging from 100µm to more than 1mm are quickly laminated to most substrates and are ready for exposure using UV and X-ray photons within minutes. The patterned structures exhibit excellent resolution, extremely high aspect ratios and thick-ness uniformity as well as offer outstanding planarization over topography.

Infinite Graphics4611 East Lake StreetMinneapolis, MN 55082Phone: 612-728-1323www.igi.comInfinite Graphics Incorporated is redefining precision 3D struc-turing by solving challenges with mastering, shims and molds where high volume, size, substrate, dimensions and tolerances are unique. Infinite Graphics also supplies photomasks, imag-ing on your substrate and custom engineering. IGI recently unveiled the industry first Phototooling Toolbox software for hierarchical editing, stencil generation, data clean-up, and automating manufacturing compensation. Stop by our table to discuss your projects requiring incomparable quality photo-masks, photolithography, 3D sculptured microstructures and sophisticated software editing, just to name a few. Or, e-mail Pete Maitland at [email protected] to begin discussing IGI’s end-to-end photolithography solution.

Invenios320 N. Nopal StreetSanta Barbara, CA 93103Phone: 805-962-3333www.invenios.comInvenios Inc. is a Santa Barbara based, vertically integrated, large volume micro-technology company specializing in the design and fabrication of three-dimensional glass pieces and assemblies. Invenios is a Inc. 5000 fastest growing private company and the 6th fastest growing engineering company in the United States. Invenios has recently developed an inno-vative process for permanently bonding glass and silicon to other similar and dis-similar substrates in a non-vacuum, room temperature environment that eliminates the adverse heat and adhesive effects of traditional bonding processes. This bonding process complements our world leading production expertise utilizing Foturan™ photo-structural glass for micro-fluidic and MEMS product solutions.

Micrel, Inc. 2180 Fortune DriveSan Jose, CA 95131Phone: 408-944-0800www.micrel.comMicrel is a world class manufacture of MEMS, analog, high bandwidth communications and Ethernet ICs. Located in San Jose, California, Micrel has to date completed foundry work for several customers and has completed successful MEMS prototypes of accelerometer, microphone, pressure sensor, inkjet, microprobe, and BioMEMS devices. In 2011, Micrel installed additional MEMS Foundry manufacturing capabili-ties, including DRIE, low-stress Nitride, thin-wafer, etc. They have also begun exploring TSV capabilities and equipping itself for emerging MEMS technologies in order to meet future customer needs. With the MEMS capital investments made in 2011 and this year, Micrel now has open capacity of 200 MEMS wafers per day or in excess of 50,000 starts per year.

EXHIBITOR DIRECTORY

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Micro Engineering Solutions, LLCPO Box 952Charlton City, MA 01508Phone: 774-230-3459www.microengineeringsolutions.comMicro Engineering Solutions is a micro molding, micro machin-ing, and micro assembly systems integrator serving medical and pharmaceutical device companies. 25 years of experience and 1,000+ successful micro manufacturing programs provide their clients with quality and confidence. MES microfluidic lid to chip tolerances held to 25-100 nanometers enables cost effective micro molded and assembled microfluidic devices.

OAI685 River Oaks ParkwaySan Jose, CA 95134Phone: 408-232-0600www.oainet.comOAI is a leading manufacturer of UV Exposure Systems for R&D to production, Direct Write Lithography Systems for rapid prototyping, economical LED UV Exposure Systems, advanced Photo Resins, and a Liquid Photopolymer Process for rapid prototyping of Microfluidic Devices. With focus on the require-ments of each customer, OAI offers technical engineering expertise and over 35 years of manufacturing knowledge. OAI is located in San Jose, CA (Silicon Valley).

Photron USA, Inc.9520 Padgett Street, Suite 110San Diego, CA 92126Phone: 858-684-3555www.photron.comPhotron offers a wide range of very light sensitive high-speed cameras with the shortest inter-frame (222ns) times that are the perfectly suited for Particle Image Velocimetry (PIV) applications. From miniature camera heads for microscopy applications, through 12,500 frames per second (fps) mega pixel systems, the full resolution at one million fps Fastcam IS-1M, to 2K x 2K resolution at 1,000 fps high-speed cameras mean Photron has a camera for your application. Please stop by to discuss your high speed imaging needs.

Pozzetta3121 S. Platte River DriveCentennial, CO 80110Phone: 303-783-3172www.pozzetta.comCompanies turn to Pozzetta to manufacture, purify, protect and package their critical products. Pozzetta’s core competen-cies in material science and precision manufacturing ensure safe transport and packaging for the building block compo-nents of medical and high technology products. They offer full service injection molding, precision microcleaning, cleanroom assembly, and an array of packaging solutions. Pozzetta will protect your valuable products from particles, ESD damage, outgassed components, and high costs.

Toppan Photomasks2520 Mission Blvd., Suite 202Santa Clara, CA 95054Phone: 408-660-1042www.photomask.comToppan is a world leader in imaging technologies with experi-ence ranging from leading-edge IC photomasks to advanced packaging solutions. Having been a supplier to the MEMS market for decades, they know that one-size doesn’t fit all. That’s why they leverage their technology advantage and unparalleled manufacturing network to offer you optimized MEMS solutions – tailored products to fit your unique applica-tions. Their 9 manufacturing facilities are strategically posi-tioned and fully qualified to provide fast, local service to MEMS foundries across the globe. Through unbeatable technology, impeccable service, customized solutions and high quality, Toppan will work tirelessly to become your first choice supplier for photomasks.

EXHIBITOR DIRECTORY


BIOGRAPHIES

CONFERENCE CHAIR

Mikhail (“Mike”) Pinelis, Ph.D. is the CEO and editor-in-chief of MEMS Journal, Inc., an independent publication based in Southfield, Michigan that he founded in 2003 and grew to the current 21,200+ sub-scribers worldwide. Along with MEMS Journal, Dr. Pinelis has also developed a management consulting practice focused on MEMS, sensors and microsystems.

Prior to MEMS Journal, Dr. Pinelis served as Director of Business Development for ISD Technology Group in Mansfield, Massachusetts. Prior to that, Dr. Pinelis founded MindCruiser, a company specializing in devel-oping intellectual property online marketplaces that was sold to Akiva Corporation in 2001. Dr. Pinelis is an active participant in the MEMS and semiconductor market sectors and currently serves on advisory boards of leading industry associations such as the Micro Electronics Packaging and Test Engineering Council (MEPTEC) and Micro and Nanotechnology Commercialization Education Foundation (MANCEF).

Dr. Pinelis earned a Bachelor’s degree in engineering from Harvey Mudd College in Claremont, California and Master’s and Ph.D. degrees in electrical engineering with a focus in MEMS and microfluidics at the University of Michigan in Ann Arbor.

PRESENTERS

Donna Bibber is the President and CEO of Micro Engineering Solutions, a medical and pharmaceutical device design, manufacturing, and assembly integration company working on critical tolerance-based devices for small to Fortune 100 companies. Ms. Bibber holds a Bachelor of Science degree in Plastics Engineering from the University of Massachusetts-Lowell. She has completed over 1,000 micro medical and pharmaceutical devices using micro machining, micro molding, and micro assembly. Ms. Bibber has written and lectured hundreds of technical papers on micro and ultra-precision manufacturing associ-ated topics worldwide and was voted onto the List of 100 Notable People in Medical Devices.

Tohid Fatanat Didar, Ph.D. is a visiting scholar at Harvard Medical School (Wyss Institute for Biologically Inspired Engineering). He received his bachelors degree in mechanical engineering from Sharif University of Technology and Ph.D. in biomedical engineering from McGill University. During his master’s studies, he worked on micro/nano fabrication of microfluidic platforms. His current research involves implement-ing micro and nanofabrication principles to produce micro-chips for biological applications. He designs microfluidic platforms with bio-functional interfaces to specifically detect, separate or investigate bio-logical elements. He has several publications in this field and recently received the prestigious young scientist award at the 9th World Biomaterial Congress for his work on microfluidic devices for biological applications.


(continued)

Alexander Govyadinov, Ph.D. has over 30 years of experience in various sensing platform development in academic and R&D industrial environments. For the past 10 years he has worked for Hewlett-Packard Technology Development Organization. He is a co-author of more than 100 scientific publications and over 80 U.S. Patents and patent applications.

Mehdi Javanmard, Ph.D. is an Engineering Research Associate at the Stanford Genome Technology Center (SGTC) in the Department of Biochemistry at Stanford University where he is leading the center’s efforts at the interface of engineering and biology. He received his B.S. (2002) from Georgia Institute of Technology where he received the Outstanding Undergraduate Research Award. He received his M.S. in Electrical Engineering at Stanford University (2004) working at Stanford Linear Accelerator Center researching the use of photonic nanostructures for high energy physics. In 2008, he received his Ph.D. in Electrical Engineering at Stanford University working on development of electronic microfluidic plat-forms for low cost genomic and proteomic biomarker detection. At SGTC, he worked as a postdoctoral scholar from 2008-2009, and then as a staff engineering research associate from 2009 until present. His interests lie in the exploitation of emerging micro- and nanotechnologies, electronic, micromechanical and photonic for developing rapid and low cost technologies for point-of-care diagnostics, proteomic biomarker discovery, global health, and drug screening.

Donald W. Johnson, Ph.D. is founder of DJ DevCorp which is developing new and innovative dry film photoresist materials targeting specialty MEMS manufacturing approaches and advanced wafer level packaging applications. He was also the founder and past President of MicroChem and managed the company through its growth and development phase. While at MicroChem he led the commercializa-tion efforts on their SU-8 epoxy resist products. For over 35 years he has worked on the development of photosensitive polymeric materials for semiconductor and more recently display, MEMS and advanced packaging applications. He has over thirty years of experience in research and development, product and process development and product market analysis. Martin Schoeppler is President and CEO of Fujifilm Dimatix, the world’s leading manufacturer of piezo inkjet printheads and micropumps for industrial applications. Martin has extensive experience develop-ing new markets and advanced applications using inkjet for materials deposition, printed electronics, dis-plays and bioscience product fabrication. He holds a BSEE degree from the University of Applied Science, Esslingen, Germany with advanced studies at INSEAD and IMD. Martin has written and presented exten-sively on micro-deposition of functional fluids using inkjet.

Sindy K.Y. Tang, Ph.D. joined the faculty of Stanford University in September 2011 as an assistant profes-sor in the Department of Mechanical Engineering. She received her B.S. degree in Electrical Engineering from California Institute of Technology in 2003, M.S. from Stanford University in 2004, and Ph.D. from Harvard University in Engineering Sciences in 2010. Dr. Tang’s research interests include optofluidics, microfluidics and nanophotonics for the development of tools for biology and smart materials.


Michael Vahey, Ph.D. is a postdoctoral fellow in the lab of Prof. Daniel Fletcher in UC Berkeley’s Department of Bioengineering, where he has been since February 2011. He received his B.S. degree in Electrical and Computer Engineering from Carnegie Mellon University in 2004, and his Ph.D. in Electrical Engineering from the Massachusetts Institute of Technology in 2010. Dr. Vahey’s research focuses on developing novel techniques for characterizing biological systems.


Polymer Materials and Processing for Microfluidic Applications

Presented byDonald W. Johnson, Ph.D., MBA

FounderDJ DevCorp

Polymeric materials combined with cost-effective mass production are targeting markets needing low cost disposable microfluidic analytical chips with enhanced functionality and decreased dimensions and are the focus of a growing community of researchers from aca-demia and industry. This overview presentation will briefly summarize existing processes and materials including traditional patterning techniques such as glass and silicon wet- and dry etching, hot embossing, injection molding, casting, and micro- and laser-machining, as well as higher resolution optical, x-ray and nanoimprint lithography. The sealing, functionalization and biocompatibility of fabricated channels and fluidic networks as well as the interfacing of packaged chips to peripheral equipment, thereby bridging structure dimensions from nanometer to millimeter and heights from sub-micrometer to centimeter, is crucial for any microfluidic application with polymers being a flexible and promising solution. Recently, new generations of dry film resists offer the convenience of handling along with high aspect ratio lithographic patterning capability thus enabling simple fabrication of multi-layer, multi-level fluidic channels and structures on patternable substrates and covers. Of special benefit is the extreme simplicity in the use of dry film sheets and the use of polymer substrates, which elim-inates the time consuming debonding of the final devices from a rigid silicon or glass base.


Drop-on-Demand Inkjet Technology with Picoliter Drop Size Ejection for

Materials Deposition, Precision Dosing and Aerosol Generation

Presented byMartin SchoepplerPresident and CEOFUJIFILM Dimatix

Piezo drop-on-demand (DOD) inkjet is well-suited for exploring, testing, prototyping and scaling up new products and processes into manufacturing using this nano-scale, micro-deposition method. As a non-contact deposition technology, inkjet avoids contamination or damage to substrates. Rather than flooding a surface with functional fluid, it is a precise and purely additive process, able to deposit the exact amount of material at the exact locations where it is need without waste. These and other advances allow manufacturers to apply the advantages of DOD inkjet technology to tap into the rapidly advancing markets for micro-dosing, aerosol generation and materials deposition.


Drug Delivery Microfluidic Devices Using Nano-Size Positional Accuracy

Presented byDonna Bibber

President and CEOMicro Engineering Solutions

Many therapeutic devices are now including pharmaceutical compounds and materials to provide patients with pain management and create minimally invasive strategic value. Traditional processing techniques, even “traditional” micron level positional accuracy prac-tices are not good enough to prevent cross contamination of microfluidic wells to nearby wells. This presentation explores new techniques for producing 25-100 nanometer positional accuracy tolerances of lid to chip sealing and assembly.


Cell Detection and Sorting Using Microfluidic Devices

Presented byTohid Fatanat Didar, Ph.D.

Visiting ResearcherHarvard Medical School

The detection, isolation and sorting of cells are important tools in both clinical diagnostics and fundamental research. Advances in microfluidic cell sorting devices have enabled sci-entists to attain improved separation with comparative ease and considerable time savings. These devices have opened new avenues for the analytical study of biological and chemical samples in a single microfluidic device, and have begun to play an increasingly important role in cell biology, neurobiology, pharmacology, and tissue engineering. Based on the detec-tion method used, cell sorting microfluidic devices can be divided into label-free and pre-processed techniques. In contrast to pre-processed methods, label-free techniques do not alter the separated cells functions providing a great advantage for their subsequent use. This presentation elaborates on recent advances in label free microchips for sorting, detection and enrichment of different cell lines, with a particular focus on primary cells and rare cells. Recently developed Lab-On-a-Chip (LOC) devices for label free separation of target cells will be presented to further elucidate the advances in the field.


Microfluidics for Applications in Sensing and Biochemical High-Throughput Screening

Presented bySindy Tang, Ph.D.

Assistant ProfessorStanford University

Droplet microfluidics has demonstrated unprecedented capability in large-scale compart-mentalization and isolation of individual molecules, bacteriophage and cells at high rates up to > 10kHz. We illustrate a few applications relevant to phage display and bacteria detection. In phage display, competition among different phage library members during the phage amplification step in bulk solution often leads to loss in diversity of the library. Encapsulation of individual phage in micro-droplets prevents undesired competition during the amplifica-tion step, preserving the original diversity of the library. In bacteria detection, the nL to pL confinement of cells in drops allows for enhanced assay sensitivity. The signal to noise ratio in detection can be increased in a short amount of time.


Integrated Micropump Technology for Lab-on-Chip Applications

Presented byAlexander Govyadinov, Ph.D.

R&D EngineerHewlett-Packard

Integrated micropump is one of the essential components of most lab-on-a-chip (LOC) appli-cations. This presentation provides an overview of the modern pumping technologies used in microfluidic systems. Detailed analysis of passive (capillary) and active micropumps will be presented, including blister, pneumatic peristaltic, as well as a variety of membrane pumps such as electro, magneto, and piezo hydrodynamic. Acoustic and electroosmosis micropump concepts will be presented as well. Generally, current micropump technology lack of scal-ability and ease of integration. As conclusion of this presentation, the fundamental action of the low-cost, high efficiency bubble-driven inertial microfluidic pump will be introduced. The pump has no moving parts and consists of a thermal resistor placed asymmetrically within a micro-channel system connecting inlet and outlet reservoirs. Potential applications of this small form-factor and easy-to-integrate micropumps for LOC applications will be discussed.


Microfluidic Technologies for Low Cost Healthcare

Presented byMehdi Javanmard, Ph.D.

Microfluidics and Biosensors ResearcherStanford University

The high cost of diagnostic exams in the clinical setting has resulted in a healthcare crisis both nationally and globally. The lack of sensitivity in current state-of-the-art biosensing plat-forms used in the clinical setting has resulted in slow and expensive diagnostic exams. This makes it economically unfeasible to regularly screen patients for a wide panel of biomarkers, making impossible the diagnosis of diseases at early stages while still curable. In this presen-tation, an overview will be provided of the emerging microfluidic technologies used for low cost diagnostics.


Presentation not available at time of printing.

Microfluidic Technologies for Cellular Reconstitution

Presented byMichael D. Vahey, Ph.D.

Postdoctoral FellowUC Berkeley

Advances in imaging, genetics, and sequencing have made it possible to identify, track, and manipulate molecules involved in many different cellular processes. However, still missing is the ability to recapitulate the spatial organization and dynamic properties of living cells in a precisely controlled synthetic environment. Although such a capability has the potential to drive biological discovery in novel ways, progress towards this goal has been severely limited by technological challenges that microfluidics are uniquely positioned to address. This talk will focus on a variety of microfluidic strategies we have developed for constructing artificial cells from the bottom up, by encapsulating purified proteins, plasmid DNA, and cytoplasmic extracts within unilamellar bilayer membranes. With these approaches, we are investigating the self-organization of biological systems and developing engineering strategies to better characterize and control these processes.


Presentation not available at time of printing.

About MEMS Journal, Inc.

MEMS Journal is the only independent publication that provides comprehensive coverage of the latest develop-ments in the rapidly emerging MEMS industry. Our Weekly Newsletter reports on the top MEMS stories from 8,500+ sources worldwide. We cover the most notable MEMS industry developments to ensure that our subscribers explore and take advantage of the latest business development, commercialization and partnership opportunities. The MEMS Journal newsletter also reports on the newly granted MEMS patents and applications. We were founded in 2003, currently have 21,200+ subscribers worldwide and attract top-level executives, engineers and researchers whoare active participants in the MEMS community. We also provide recruiting, market research, consulting and IP bro-kerage services. We are already the largest MEMS publication in the world and are continuing to grow steadily. For more information, please visit www.memsjournal.com.

About MEPTEC

MEPTEC (MicroElectronics Packaging and Test Engineering Council) is a trade association of semiconductor suppli-ers, manufacturers, and vendors concerned exclusively with packaging, assembly, and testing, and is committed to enhancing the competitiveness of the back-end portion of the semiconductor industry. Since its inception over 30 years ago, MEPTEC has provided a forum for semiconductor packaging and test professionals to learn and exchange ideas that relate to packaging, assembly, test and handling. Through our monthly luncheons, and one-day sympo-siums, and an Advisory Board consisting of individuals from all segments of the semiconductor industry, MEPTEC continuously strives to improve and elevate the roles of assembly and test professionals in the industry. For more information about MEPTEC events and membership visit www.meptec.org.

PO Box 222, Medicine Park, OK 73557Tel: 650-714-1570 www.meptec.org

2000 Town Center, Suite 1900, Southfield, Michigan 48075Tel: 248-792-9618

www.memsjournal.com

mems journal, inc . & meptec present 12 2012 proceedings.pdf · mems journal, inc . &...

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