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Page 1: October 23, 2018 Hilton Suzhou Hotel -Suzhou, China Keynote€¦ · Keynote October 23, 2018 Hilton Suzhou Hotel -Suzhou, China ©2018 TestConX - Ima ge: Breath10/iStock. COPYRIGHT

KeynoteOctober 23, 2018

Hilton Suzhou Hotel - Suzhou, China

©2018 TestConX - Image: Breath10/iStock

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COPYRIGHT NOTICEThe presentation(s)/poster(s) in this publication comprise the Proceedings of the 2018 TestConX China workshop. The content reflects the opinion of the authors and their respective companies. They are reproduced here as they were presented at the 2018 TestConX China workshop. This version of the presentation or poster may differ from the version that was distributed in hardcopy & softcopy form at the 2018 TestConXChina workshop. The inclusion of the presentations/posters in this publication does not constitute an endorsement by TestConX or the workshop’s sponsors.

There is NO copyright protection claimed on the presentation/poster content by TestConX. However, each presentation/poster is the work of the authors and their respective companies: as such, it is strongly encouraged that any use reflect proper acknowledgement to the appropriate source. Any questions regarding the use of any materials presented should be directed to the author(s) or their companies.

The TestConX China logo and TestConX logo are trademarks of TestConX. All rights reserved.

www.TestConX.org

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1

Advanced Packaging Innovation Challenges

- Super-thin Optical SiP & CIS

Mark Huang

A-Kelon (Huizhou) Optronics

Suzhou ▪ October 23, 2018

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2

Contents

Main Trend of IC Packaging Innovation

Development on Super-thin Optical SiP (SOSiP)

Development on Super-thin CSP (SCSP)

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

4

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Main Trend of IC Packaging Innovation

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

5

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Driving Force for IC Packaging Innovation

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

6

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Driving Force for IC Packaging Innovation (Cont’d)

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

7

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Integral solution to customers

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS8

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Main Trend of Advanced IC Packaging

SiP (System in Packaging)

FOWLP (Fan-out Wafer-level Packaging)

FOPLP (Fan-out Panel-level Packaging)

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

9

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What is SiP?

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Thinner / smaller form factor than individually packaged

components

Increased performance and functional integration

Design flexibilities

Better electromagnetic interference (EMI) isolation

Reduced system board space and complexity

Improved power management and more room for battery

Simplified SMT assembly process

Cost effective “plug-and-play” solutions

Faster time-to-market (TTM)

One stop turnkey solution - Wafer to fully tested SiP

modules

Advantages:

A combination of one or more IC devicesplus optionally passive components thatdefine a certain functional block within aquasi-package mounted onto PCB.

10

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Example of SiP Module from ASE

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

To minimize the antenna size atthe package level offering thesmallest antenna & highlyintegrated RF SiP module.

Antenna on Package (AoP)

• Min. package size: 4.9mm x 3.3mm (achieved at 2.4GHz)

• Film step coverage: >30%• Min. line/space on top: 250μm• Dimension tolerance on side wall: within +/-35um

Capabilities:

Good radiation performance with the lowinsertion loss and good impedance matchingbetween the RF SiP and the antenna.

Feature:

11

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What is FOWLP?

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Substrate-less package

Low thermal resistance

Improved RF performance due to shorter

interconnects together with direct IC connection by

thin film metallization

Embedded passives (R, L, C) as well as antenna

structures using a multi-layer structure.

Lower cost larger mold embedding form factors

Advantages:

Reconfigured molded wafer

combined with a thin film

redistribution layer to yield an SMD-

compatible package.

12

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FOWLP

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

13

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Examples of FOWLP from ASE

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Chip-First, chip embedded in moldcompound, fan-out by wafer-level RDL

aWLP

Laminated FCCSP

Chip-First, chip embedded in moldcompound, fan-out by wafer-level RDL

Chip-First, chip embedded in moldcompound, fan-out by wafer-level RDL

Chip-First, chip embedded in moldcompound, fan-out by panel-level RDL

Size: 600x600mm

a-EASI

Panel Level Platform Fan Out Package

14

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What is FOPLP?

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Electrical Performance

Improved wiring and I / O

Standardization for embedding die package

Definition of supply chain

Thermo-mechanical reliability

Lower Cost due to large panel size

High throughput

High volume production

Advantages:

Large area mold embeddingtechnologies and embedding ofactive components into printedcircuit boards (Chip-in-Polymer)

15

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Development on

Super-thin Optical SiP (SOSiP)

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

16

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15

Camera

CIS Module

Market

New CIS Application

• Intelligent hardware• Smart home • Internet of Things • Smart car• Artificial intelligence

Industry Maturity

• Increasing customer demand

• Higher M/C requirements • Technology update speed • Gross profit margin slipped • High-Pixel IC chips

Competition differentiation & innovation

Innovation Cost

Marketing of CIS Modules

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

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2017 market size reached 3.545

billion.

2018-2020, smartphones and tablet

cameras will grow steadily, while

applications such as in-vehicle

cameras, smart homes and

wearable devices will become new

growth points.

The smart device camera module

market will maintain rapid growth,

and shipments are expected to

reach 4 billion in 2021.

CIS module market prospects in China Trend distribution of mobile camera module

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Marketing of CIS Modules (Cont’d)

18

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Assembly Challenges

Dual Camera: high cost, low yield of co-substrate.

3D Camera:Difficult to run multi-chip assembly

High demand for super-thin 10M & above CIS module

Demand for under-glass FPS & super-thin and

minimized CIS modules

COB Process:high-level cleanroon

MOC/MOB Process:Complex processes with costly M/C and labor

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Challenges of CIS Modules

19

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Smart home area Intelligent vehicle field

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Applications of CIS Modules

20

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C2IM

BT

RF-PCB

Optical-System Integrated

Package

AREA MOLD

COB HOLDER

• FLIPCHIP• MOLD/GRIND

• MOB• MOC

• DB / WB• SMD

PCB MaterialsAssembly Innovation

Mininaturization

High integrationPrecision

Tools

Mold Chase

Standardization

ManufactureProcess FlowIntelligent automationDatamention

Innovation

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Trend of Optical CIS Module

21

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Key Technology Key Issues Applications

Design Optimization

Process Development

Super-thin moduleReliability & YieldEase of ProcessCost Control

CIS AssemblyIC AssemblyMEMS Assembly

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Consideration on SOSiP

22

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Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Design of A-Kelon’s SOSiP Module

FPC

Connector

PCB

Epoxy

CIS

IR Cut

Image Area

Flip Chip bonding

ACP bonding

Molding Package

23

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Chip

PR opening

Chip

Electroplated solder bump

Mushrooming

2. Sputter UBM金属层溅射

3. Coat with PR覆盖光胶

4. Pattern for bump凸点光刻

5. ElectroplatingCu and Sn/Pb焊料电镀

6. Remove Resist去除光胶

1. Wafer with Al pad钝化和金属化晶片

Chip

PassivationAl pad

Chip

UBM

Chip

Thick photoresist film

Chip

7. Strip Under Bump Metal去除UBM

Chip

8. Reflow回流

Chip

solder ball after reflow

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Flip Chip Bumping for SOSiP Module

24

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Pick up Flip Chip Precision

Added film/pasteSubstrate

FCIP Molding

Thinning

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Assembly of SOSiP Module

25

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Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Inspection by Optical Tester

26

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Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Reliability Tester

27

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Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Assembly Equipment

Overview of Cleanroom

Assembly Line Cleaning System

Curing System

Filter Assembly M/C

Bonder

Tester

28

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Item 1st Generation 2nd Generation 3rd Generation

Process COB MOB MOC MONC F/C SOSiP

Assembly Methods

Structure

Area 100% 88% 77% 82% 85% 55~65%Thickness 1.0~1.2 0.8~1.0 0.8~0.75 0.8~1.0 0.65 0.3~0.5

Cost Very High High High High Expensive LowProcess Flow Complex Long steps Long steps Long steps Long steps SimplifiedRepresentative

enterprise ALLSUNNY GROUP

Q-TechSUNNY GROUP

Q-TechSUNNY GROUP APPLE A-Kelon

Advantages of SOSiP: miniaturization, ultra-thin, simple process, low cost.

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Comparison between SOSiP & Existing Packages

29

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Multi-chip Stacking and Repopulation

Repopulation

Multi-chip Assembly

Multi-chip Molding

Thinning

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Benefits from SOSiP

30

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Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Competitive advantages of SOSiP

Enhancement of Multi-chip design ability.

Breaking the limitation of image chip thickness

Simplification of the process and thus reduction of cost

High utilization rate of PCB, greatly reducing board cost, estimated 50% reduction

Easy to achieve buried components, reducing the material cost.

High reliability and innovative modular manufacturing process, expanding

modular commercialization application in mobile phone, industry security vehicle,

medical devices and space vision.

31

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Development on Super-thin CSP (SCSP)

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

32

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Lens

Base Holder

Filter Glass

CIS Chip

Substrate

Connector

SUS 304

FPC

RLC

Objective of Study:

I. To develop super-thin CIS module

by reducing 0.4mm in height

II. To materialize Cu-Pillar & Flip-chip

Bonding

Challenges of Process:

I. Protection of CIS Chip

II. Flip-Chip bonding

III. Underfilling Control

What is SCSP? Structure of SCSP module

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS33

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Design of R-F Substrate

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS34

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Equipment for SCSP Module

Cleanroom (1000m2) Metal Etcher PVD

Bonding M/CFlip-chip Bonder

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS35

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SCSP Process Process flow

CIS晶圆PVD MetalPR Bump

Cu-Pillar PlatingPR Strip

Metal EtchWafer Thinning

DicingFlip Chip Bonding

Underfilling

IR Glass BondingSMT RLC

Test / Reliability

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS36

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Dimension of Organic and Ceramic Substrate

Substrate for SCSP

Ceramic

Organic

Unit:mm

Gold bump on Ceramic Copper pillar on Ceramicsample1 sample2 sample3 sample1 sample2 sample3

Length 8.5+/-0.1 8.54 8.47 8.45 8.52 8.48 8.45Width 8.5+/-0.1 8.45 8.45 8.45 8.52 8.51 8.58

Thickness 0.65+/-0.05 0.84 0.85 0.84 0.65 0.67 0.65

Criteria thicker thicker thicker OK OK OK

Unit:mm

Gold bump on Organic Copper pillar on Organic

sample1 sample2 sample3 sample1 sample2 sample3

Length 8.5+/-0.1 8.55 8.42 8.4 8.4 8.43 8.44Width 8.5+/-0.1 8.47 8.41 8.4 8.4 8.48 8.43

Thickness 0.65+/-0.05 0.77 0.76 0.76 0.61 0.6 0.61

Criteria thicker thicker thicker OK OK OK

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Top Bottom

37

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SCSP vs CSP vs COB in Thickness

Type SCSP CSP COBTTL 3.8mm 3.8mm 3.8mm

Sensor 0.2mm 0.3mm 0.2mmPCB 0 0.4mm 0.4mm

Total thickness 4.0 mm 4.5mm 4.4mm

SCSP CSP COB

The thickness of SCSP reduced by 0.4 mm Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

38

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Failure of Flip Chip Bumping

Delamination of Cu-Pillar Bump after Reflow

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

SEM Micrograph of Flip Chip bumps

39

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Failure Analysis of SCSP Module

Open and Cracked bumps

Die1

Open Bump Open Bump

Cracked Bump

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS40

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Yield of SCSP Module

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

SCSP Yield > 90%

41

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SCSP module

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS

Back SideFront Side

42

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• Authors appreciate the financial support from Huizhou Science and

Technology Creative Team Program (Project no:

20150316074819218).

• Many thanks go to Mr. Lyu Jun and Mr. Chen Sheng from Suzhou

Speed Semiconductor Pte Ltd. for their R-F PCB design and CIS

fabrication.

Acknowledgements

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS43

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Thank you for your attention!

Advanced Packaging Innovation Challenges - Super-thin Optical SiP & CIS44