MSN551 notes

Plasma Etchingmost of the information here was gathered off the web and no copyright violation is intended

Overview● Difference between plasma deposition and

etching● Plasma etching mechanisms● Anisotropic and isotropic etching● Redeposition and self-passivation● DRIE● Application examples

Plasma etching summary● Plasma has ions and excited species of

reactive gases● Reactive ions are directed to the surface by

electric fields● Chemical reactions take place at the surface

and eat away the material● Sputtering can also etch away material● Reaction products are removed in gas form● DRY ETCHING: reactants are gaseous and

solid

Halogens

Examples

Examples

Examples