quantum electronics ii (tmu)
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Semiconductor Theory
The Course Outline
Fall 2014
Professor M K Moravvej-Farshi
Faculty of Electrical & Computer EngineeringTarbiat Modares University
P. O. Box 14115-194
Tehran, Iran
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Semiconductor Theory Course Outline
Tarbiat Modares University (TMU) 1 Faculty of ECE
0. An Overview
1. The Quantum Foundation
2. Carrier Scattering
3. The Boltzmann Transport
4. Low –Field Transport
5.
Balance Equations
6. Monte Carlo Simulation
7.
High-Field Transport in BulkSemiconductors
8. Carrier Transport in Devices
9.
Transport in Mesoscopic
Structures
QC611.L86.2000
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Fall 2014 2
An Overview
Until recently, Semiconductor devices were described well by
the drift and diffusion equation,
n n n J q qD nµ = + ∇E .
µ n and Dn had been measured carefully.
µ n and Dn did not need to be calculated exactly.
A deep understanding of electron transport was not essential to
the device engineers.
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Semiconductor Theory Course Outline
Tarbiat Modares University (TMU) 3 Faculty of ECE
In the modern submicron devices: µ n and Dn are no longer
material- and field-dependent parameters.
µ n and Dn depend on microscopic physics, on the device
structure, and even on the applied bias.
Nowadays, we can engineer material properties, with modern
epitaxial technology.
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Fall 2014 4
In this course, we begin at the microscopic level and progress
towards the macroscopic level of the devices.
The basic level: Electrons in semiconductors are quantum
mechanical waves propagating through the device under the
influence of the crystal, applied, and
scattering potentials, as shown in Fig. (a).
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Semiconductor Theory Course Outline
Tarbiat Modares University (TMU) 5 Faculty of ECE
In Chapter 1, we begin at this level and
show that when the device is large
enough, the electron can be treated as a
classical particle, as Shown in Fig. (b).
Electron scattering, however, is the result of short-range forces.
Therefore, scattering must be treated quantum mechanically.
Calculation of scattering probabilities per unit time, for
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Fall 2014 6
perturbing potentials encountered in common semiconductors is
the subject of Chapter 2.
At the macroscopic level, equations such as the drift-diffusion
result by averaging a great number of nearly chaotic trajectories
like that shown in Fig. (b).
One may ask, "What is the probability of finding an electron at r
with momentum p?" The answer is the distribution function,
f (r, p, t ), which defines the state of the device.
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Semiconductor Theory Course Outline
Tarbiat Modares University (TMU) 7 Faculty of ECE
As shown in Fig. (c), f (r, p, t ) is a
probability density function. f (r, p, t )
completely defines the average state of
the system.
In chapter 3, we formulate and solve the Boltzmann transport
equation (BTE), an equation that determines f (r, p, t )
In chapter 4, a systematic treatment of low-field transport based
on solving the BTE is presented.
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Fall 2014 8
A device engineer is mostly interested in quantities such as the
average carrier density, velocity, and energy.
These 3 quantities are the zeroth, first, and second moments of
the distribution function, respectively.
Chapter 5 presents a procedure for generating balance equations
for these quantities.
In the process, we will demonstrate how to derive drift-diffusion
equation from BTE.
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Semiconductor Theory Course Outline
Tarbiat Modares University (TMU) 9 Faculty of ECE
At the drift-diffusion level, the quantities
of interest are the position-dependent
carrier and velocity profiles as illustrated
in Fig. (d)
Another approach for computing macroscopic transport
properties is to use Monte Carlo simulation technique to
simulate a large number of trajectories, like that in Fig. (b) on a
computer to average the results [see chapter 6].
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Fall 2014 10
In chapter 7, both the balance equation approach and the Monte
Carlo simulation are applied to the problem analyzing high-field
carrier transport in bulk semiconductors.
Chapter 8 presents several of transport effects that occur in
modern devices. Devices contain both low- and high-field
regions, but spatial variations are strong, so some qualitatively
new transport features arise.
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Semiconductor Theory Course Outline
Tarbiat Modares University (TMU) 11 Faculty of ECE
The course will be concluded by chapter 9, in which transport in
microscopic devices is examined.
Size of such devices lies between macroscopic and atomic
regimes.