recent development of mppc at hamamatsu for photon
TRANSCRIPT
Solid State Division
HAMAMATSU PHOTONICS K.K.
Koei Yamamoto
PD18 27 Nov. 2018
Recent Development of MPPC at Hamamatsu for Photon Counting Applications
● What is an MPPC ?
The MPPC (Multi-Pixel Photon Counter)
is one of the devices called Si-PM
(Silicon Photomultiplier). It is a photon-
counting device using multiple APD
pixels operating in Geiger mode.
● Features Small size
Low bias operation
High gain: 105 to 106
High Photon detection efficiency
Excellent photon-counting capability
Excellent timing resolution
Insensitive to magnetic fields
Solid State Division
2 MPPC Keyfeatuers
2
Pulse Height Distribution Comparison 3
Solid State Division
1st gen.
High AP & CT
2nd gen.
Low AP But High CT
New gen. Low AP & CT
3x3mm 50umP
S1336 series
3
New MPPC Series
4
S1442x series (VIS-NIR: Peak shifted)
S1416x series (UV-VIS: Scintillation)
S1336x series (UV-VIS : General)
S1372x series (NIR: NIR-enhanced)
New MPPC Series 5
- General use
- PET (Positron Emission Tomography)
- Radiation monitor
- Laser microscope - Flow cytometry - Bio-medical
- LiDAR (Light Detection and Ranging)
＜MPPC Series＞ ＜Application＞
5
0
10
20
30
40
200 300 400 500 600 700 800 900 1000 1100
PD
E (
%)
Wavelength (nm)
S13360-1325CS
S14420-1325CN
Test Sample5
Under Dave.
MPPC Series for Industrial applications
Scintillation (P-on-N)
S1416 series
Peak shift (N-on-P)
S14420 series
NIR enhanced (N-on-P)
S13720 series
Pixel size : 25μｍ
6
S1337x series (VUV-MPPC)
＜MPPC Series＞ ＜Application＞
S1452x series (CTA-MPPC)
S1416x series (Small microcell: HDR-MPPC)
New MPPC Series for Scientific Application
- Calorie meter - High Dynamic Range
measurement
- CTA (Cherenkov Telescope Array)
- Liq. Xe / Ar scintillation measurement
7
0
10
20
30
40
50
100 200 300 400 500 600 700 800 900 1000
PD
E (
%)
Wavelength (nm)
S14520-3050CS
S13370-xx50CN
ー VUV-MPPC S1337x series
ー CTA-MPPC S1452x series
8
(microcell: 50um)
New MPPC Series for Scientific Application
8
Photon Counting Applications
9
High SN, high gain
Simple amplifier design
Optical signal
Weak
A little
Amplifier noise
High precision time information
Signal amount information
Benefits of semiconductor photon counting devices High speed / High gain: 1x106！ Weak pre-amp constraint, faster speed
Shot noise
Light
intensity
External
noise
HighSN
High gain High speed
Amplifier
signal
10
MPPC：High precision time information SPTR (Single Photon Timing Resolution)
Time measurement from Single photon
0
50
100
150
200
250
300
4 5 6 7 8
SP
TR
(ps)
Vover(V）
S13720-1325CS 1.3㎜□25μm pixel
Temp：25℃ Exposure：Whole Wavelength：650nm Light source pulse width：78ps
0
20
40
60
80
100
120
0 200 400 600 800 1000
Cou
nt
nu
mb
er
Time (ps)
140ps
11
LiDAR Applications
LiDAR : Light Detection and Ranging
12
Silicon Photodetectors for LIDAR
Si PIN PD
Si APD
MPPC (SiPM)
Hamamatsu Photonics / Booth #1412
S12158-01CT
Gain x 1
S12926-05
Gain x 100
S13720-1325PS
Gain x 1,000,000
Lo
ng
ra
ng
e
High NIR sensitivity
（800 nm ~ 1.06 μｍ）
Wide dynamic range
Fast response
Low timing jitter
Requirements of ADAS
13
Comparison of photodetector
Parameter PIN
photodiode APD MPPC®
Range Short Long Long
Accuracy High High High
Readout circuit Complex Complex Simple
Operation voltage 10 V to 30V 100Ｖ to 300Ｖ 30 to 60 V
Gain 1 10 to 100 105
Temperature sensitivity
Low High Middle
Response time Medium Medium Fast
Ambient light immunity
High Medium Medium
Array Suitable Suitable Suitable
100Ω typ.
High frequency amplifier Comparator
Trans impedance amplifier
A) Trans impedance amplifier Suitable for PIN-PD, APD and MPPC
B) Register with high frequency amplifier Suitable for MPPC
C) Register with high comparator Suitable for MPPC
Read out circuit
Difference in power consumption of first stage circuit by MPPC and APD
Current buffer (Low Input Impedance)
M=106
M=102
Cpd=1pF
Trans-Impedance Amplifier
G=103
APD
MPPC
0
100
200
300
400
500
0.1 1 10
BW
(M
Hz)
POWER (mW/ch)
APD
MPPC
G=1
With MPPC, high bandwidth can be achieved with low power consumption
Photon Counting Application for LIDAE
1.E+01
1.E+02
1.E+03
1.E+04
1.E+05
1.E+06
1.E+07
0.1 1 10 100 1000
SN
R
Distance [m]
MPPC
APD
PD
MPPC make possible to extend 10times longer distance
Laser Power:5W
PD/APD
・ QE ◎ ・ Dynamic range ○ ・ Gain ×
MPPC
・ QE ○～△ ・ ダイナミックレンジ △ ・ Gain ◎
17
Output comparison -APD, SPPC & MPPC-
APD MPPC SPPC
Very week backlight 10 W/m2 (100 lux)
Very strong backlight 1,000W/m2 (100 klux)
MPPC
Optical signal in LiDAR
Dark /Background
Threshold
1st
3rd
2nd
Background
LD
Laser
Signal returned from the target is very weak, and the background light is high
MPPC
19
Operation of Geiger mode AP(SPAD)
t
Dark 1photon >2photon
SPAD
Comparator
hν
Never distinguish multiple photons！
Geiger mode APD is high gain, Output a signal triggered by
1 photon
20
Identification of multiphoton by MPPC
Current Mode
Frontend
hν
・Multi-energy detection ・New pixel configurations can be designed for 1D or 2D SiPM arrays
t
Dark 1photon >2photon
21
Photon Detection Efficiency
905nm 7%
P-on-N Type
at Vop
N-on-P Type
840nm 12%
940nm 4.8%
22
本資料に掲載している情報、テキスト、画像等の無断転載・無断使用を固く禁じます。
All Rights Reserved. Unauthorized copying and replication of the contents of this document, text and images are strictly prohibited.
Hybrid module for LiDAR
Features
- Consist of 1D MPPC array and ASIC.
- It specializes in distance measurement.
- All function of ASIC are optimized for LIDAR.
- Integrated Time-to-Digital Converter (TDC) and energy measurement functions
Front-end circuit
Power 180mW (+1.8V) 11mW/ch
# of ch 1×16ch
Energy Resolution 1 p.e.~
Dynamic Range >100 p.e.
TDC LSB 0.096m(320ps)
Range ~192m(1280ns)
Chip Max. measure rate 250kHz
Footprint 13.0×10.6mm
ASIC block diagram for LiDAR
SPI
PLL
Serializer LVDS Data
Output
Fast comparator
×16ch
Shaper
1D MPPC Array
×16ch
LowZ FE
DAC
DAC TDC
Serializer
8bit Counter
SPI
TOT Pulse width measurement
Energy measurement section
Timing measurement section
24
Example of range image acquisition
optical system
Module function
• System
H：Galvano mirror ±20degrees/128pixel
V：MPPC Array ±5degrees/32pixel
• Laser：
905nm, 80W, 3nsec width, 250kHz
• Maximum measurement range：
100m @ 100kLux sunlight
• Laser class: Class 1
MP
PC
Arr
ay
(32p
ixel)
Mirror
LD
MP
PC
25
LiDAR Image
Illuminates wall surface by halogen lamp ~20000 lx
TSV
Support Glass
SPAD
Micro bump
CMOS
100μm
Sectional view
Hybrid photon counting image sensor
Sensor and ASIC 2 layer structure High aperture ratio >50% 100 μm pitch TSV
To Solid state LiDAR (Flash LiDAR)
本資料に掲載している情報、テキスト、画像等の無断転載・無断使用を固く禁じます。
All Rights Reserved. Unauthorized copying and replication of the contents of this document, text and images are strictly prohibited.
128 x 128 Hybrid photon counting image sensor ASIC block diagram
SPI
Re
gis
ters
PLL
Column Decoder for SPI
Row
Decod
er
for
SP
I
Row
Decod
er
for
pix
els
Column Decoder for pixels
128×128 Pixel circuit Built-in TDC
Row
Dri
ver
/ B
uff
er
Data Output
Master CLK
Row/Col
CLK/Bias
PFD CP LPF
Divider
Amp Reference CLK Control bias
Global clock
PLL Overall synchronization
signal Delay control bias voltage
本資料に掲載している情報、テキスト、画像等の無断転載・無断使用を固く禁じます。
All Rights Reserved. Unauthorized copying and replication of the contents of this document, text and images are strictly prohibited.
3.31 5.75 3.34 3.89 5 3.8 3.12 4.15 5.05 4.48 4.16 3.79 4.14 4.34 5.19 5.72 5.03 4.42 4.54 3.37 4.74 5.25 4.38 5.32 4.3 3.16 4.39 3.98 4.56 3.54 4.68 3.98 4.42 4.52 3.91 4.52 3.58 4.34 4 3.79 3.53 3.84 4.51 4.56 4.07 4.1 3.61 4.12 3.89 3.74 5.14 4.7 4.95 4.09 4.44 4.65 4.37 5.03 4.11 3.97 4.48 3.69 4.45 4.42 3.77 4.03 5.45 3.79 4.14 4.21 4.05 4.1 4.03 5.33 3.82 4.23 3.67 4.22 4.8 4.46 4.38 4.31 4.17 4.24 4.01 4.62 3.78 3.82 4.3 3.82 4.24 4 3.64 4.87 4.2 4.06 4.21 4.28 4.41 3.53 3.91 4.36 4.3 3.24 4.51 4.55 5.98 5.56 4.18 3.95 4.54 4.52 4.05 5.33 4.45 4.21 5.52 5.17 3.3 4.44 5.62 4.9 4.36 5.52 5.29 3.23 3.51
3.94 4.44 3.99 4.19 5.11 4.59 5.18 4.53 3.66 5.53 6.66 4.34 3.92 4.32 4.03 3.87 3.42 4.79 5.29 4.49 4.25 4.72 3.78 3.93 4.29 3.95 4.64 4.62 4.31 4.62 4.84 4.76 4.76 4.23 3.68 4.64 5.49 4.49 4.44 4.09 5.27 3.97 4.3 4.03 4.83 3.72 4.12 4 4.35 3.8 4.31 4.34 4.63 4.78 3.56 3.73 3.72 4.25 4.76 5.3 4.6 4.21 4.06 4.12 4.31 4.12 3.83 4.18 5.05 4.13 3.96 4.17 4.07 3.54 4.08 5.11 4.37 4.37 3.79 3.94 4.26 5.03 3.6 4.62 3.53 4.27 4.6 4.47 4.76 3.73 3.82 4.24 3.83 3.98 4.97 5.16 3.49 5.3 3.98 4.37 4.84 4.4 3.98 4.05 5.62 4.01 5.57 3.29 4.73 3.52 4.68 5.07 5.16 4.49 5.54 4.93 4.2 4.52 4.26 4.69 4.46 4.46 3.49 4.68 6.29 5.38 6.92 4.44
4.74 4.85 4.73 4.68 3.9 3.86 4.76 3.4 3.5 5.24 4.55 3.17 4.15 4.62 3.18 3.94 4.42 4.9 4.12 4.29 4.57 3.8 4.78 4.5 5.07 5.11 3.81 4.71 4.16 4.36 4.35 4.22 4.24 5 5.21 4.85 3.9 5.22 4.67 3.96 4.24 4.78 4.07 5.29 4.44 4.47 4.14 4.29 4.02 4.17 3.52 4.4 4.98 4.03 4.48 4.92 3.99 4.52 4.98 4.57 4.34 3.89 5.35 4.09 4.74 4.08 3.98 4.76 4.02 3.91 4.04 4.31 4.25 4.07 4.45 3.8 4.07 4.61 4.22 4.16 3.95 4.07 3.6 3.61 3.97 5.04 5.53 4.42 4.61 4.22 4.8 4.05 4.47 4.23 4.52 4.88 4.88 3.89 4.71 4.26 4.99 4.29 4.22 4.97 4.36 3.88 4.98 4.37 3.88 5.1 4.98 4.02 4.38 3.78 3.49 4.53 5.93 4.44 3.96 5.65 3.86 5.22 6.03 3.78 4.37 5.1 4.34 4.69
4.21 4.21 5.11 4.18 5.85 3.83 4.6 5.31 6.3 5.22 4.78 4.16 4.53 4.12 5.39 4.55 4.81 4.95 4.48 5.02 4.23 5.02 4.86 3.86 5.37 5.97 5.11 3.99 5.7 4.54 4.49 5.12 4.4 4.72 4.44 4.13 4.62 4.55 4.47 4.76 4.05 4.01 5.13 4.18 4.61 4 4.95 4.26 4.66 4.44 5.64 5.33 4.48 3.9 4.34 5.06 3.83 3.97 3.86 6.43 4.18 4.57 4.22 4.23 3.66 3.89 3.91 4.08 5.22 4.57 4.59 4.64 4.13 4 4.53 4.09 4.69 4.15 4.22 4.37 4.06 4.48 4.26 3.99 4.07 4.01 3.66 4.22 4.05 4.33 4.13 5.17 3.84 3.59 4.02 4.4 4.37 4.87 4.06 4 4.66 6.3 4.31 4.01 4.33 4.84 5.28 5.3 6.45 4.64 5.06 4.11 5.57 4.79 4.77 6.79 4.57 3.89 4.55 5.28 4.87 5.5 3.8 3.22 3.26 4.24 2.12
5.5 4.42 5.4 5.39 6.16 4.67 4.46 3.59 4.85 5.4 5.19 4.39 4.73 5.49 4.86 5.35 4.72 4.08 3.91 5.07 4.64 4.57 5.25 4.97 3.84 5.35 5.49 5.05 4.32 4.36 4.91 4.17 4.79 4.91 4.44 4.03 4.38 5.07 4.33 4.35 5.25 4.47 4.12 5.1 4.71 5.25 4.61 5.33 3.95 4.21 4.77 4.52 4.39 4.37 4.32 4.2 4.28 3.79 4.14 4.06 4.38 4.23 4.46 4.41 4.84 4.24 4.27 3.85 4.16 4.83 4.45 4.17 4.95 4.01 4.45 3.99 4.18 4.39 4.36 4.72 5.28 3.62 4.95 3.83 4.38 4.5 4.52 4.5 4.75 3.83 4.95 4.93 5.19 5.03 4.1 4.05 4.65 4.56 5.53 4.4 4.48 5.03 3.86 4.9 4.48 4.93 4.4 4.62 5.15 5.72 4.22 3.95 4.36 4.27 3.56 6.53 4.76 4.7 5.75 6.96 5.33 3.54 4.62 4.66 5.9 4.21 4.02 3.62
4.36 4.71 4.96 4.34 4.04 4.73 4.17 4.68 5.06 4.5 5.06 4.85 6.19 5.93 4.2 4.3 4.53 5.18 5.08 5.44 4.67 5.34 3.89 4.61 4.69 5.29 4.98 6.12 4.99 5.17 4.58 5.54 4.07 4.07 3.79 5.09 4.63 5 4.02 5.06 4.45 4.86 4.76 4.09 4.69 5.33 4.14 4.68 4.35 4.36 4.64 4.7 5.18 4.94 4.56 3.97 5.25 4.73 4.66 4.18 4.4 4.51 4.31 4.25 4.31 4.56 4.37 4.03 4.61 3.93 4.24 5.42 4.71 4.63 4.08 4.07 4.53 4.24 4.02 4.12 4.96 5.2 4.44 4.94 4.91 5.14 4.12 5.69 4.23 4.45 4.73 5.15 4.12 4.68 4.51 4.6 5.27 4.87 4.83 4.75 4.67 4.09 5.93 5.19 5.09 4.72 4.85 5.32 3.98 4.18 6.62 5.06 5.51 3.79 4.29 5.81 5.49 5.79 6.42 4.77 4.47 4.72 2.79 4.52 5.58 3.73 5.62
4.13 4.98 4.1 5.43 5.36 4.14 4.31 5.68 5.15 4.77 4 4.36 5.56 3.92 4.84 5.33 4.16 5.5 5.4 3.61 5.68 4.3 4.04 4.05 4.37 4.65 4.09 4.6 4.76 4.86 4.03 5.52 4.01 4.53 4.36 4.25 4.47 5.95 3.93 6.03 4.79 4.22 5.18 4.17 4.09 3.82 5.15 4.77 4.31 4.42 6.1 4.27 3.93 4.26 4.88 5.5 5.93 6.04 4.43 4.62 4.66 4.36 4.21 4.69 4.93 4.29 5.02 4.26 4.56 3.95 4.26 5.61 4.28 4.68 4.65 4.92 4.12 4.34 4.37 4.4 5.25 4.99 4.71 4.09 4.32 5.7 4.09 4.86 4.19 4.93 4.79 4.4 4.58 4.54 4.93 4.27 4.41 5.68 5.62 4.48 4.2 4.43 4.73 4.05 5.79 5.56 4.51 4.21 5.51 5.02 5.33 4.27 5.88 4.76 5.16 5.81 4.88 3.74 7.46 3.5 4.66 7.53 4.06 4.17 4.26 4.46 3.28 3.57
3.25 4.65 4.24 4.53 5.73 5.64 3.49 6.54 4.05 4.33 5.39 5.85 4.15 5.86 4.67 4.59 4.33 4.37 3.89 4.73 6.13 4.51 5.79 3.8 4.7 5.12 5.68 5.57 4.51 4.08 4.59 4.27 5.96 5.35 4.4 4.36 4.17 4.86 5.65 4.45 4.77 3.99 6.15 4.25 4.95 5.76 4.79 4.7 4.94 5.13 4.68 5.43 5.37 4.57 4.51 4.94 5.14 4.35 4.57 4.55 4.44 5.44 4.79 4.05 4.27 4.48 5 4.84 3.99 3.94 3.7 4.67 4.42 4.59 4.23 4.16 4.34 4.99 4.24 5.36 5 5.17 4.17 4.58 5.48 4.36 4.32 4.97 4.8 4.75 5.41 4.52 4.56 5.16 4.68 4.81 4.21 4.54 5.92 5.18 4.98 4.65 4.26 4.52 5.53 5 6.84 4.8 4.58 4.64 4.25 5.06 5.16 4.94 4.17 4.46 4.12 4.57 4.94 4.52 4.52 3.66 4.86 5.48 4.33 4.85 3.26
4.94 5.02 5.49 3.91 3.68 3.26 4.39 4.62 4.71 5.52 5.55 7.17 4.11 4.71 4.28 3.67 4.31 4.65 5.17 5.88 5.07 4.22 5.08 6.61 4.22 5.38 5.16 4.76 4.74 4.8 5.29 3.78 5.36 5.28 5.45 3.87 4.7 5.14 4.77 4.97 3.91 6.53 4.99 4.42 5.29 4.44 5.32 4.2 4.69 5.6 8.11 4.99 4.96 4.39 4.96 4.89 4.39 5.3 4.33 4.44 4.84 4.6 5.63 4.51 3.66 4.16 4.04 4.25 4.09 4.81 3.93 4.67 4.93 5.53 5.28 4.68 4.27 5.88 5.14 4.45 4.79 4.93 4.15 4.87 4.36 4.34 5.11 4.19 4.87 4.07 3.82 5 4.45 5.74 5.42 4.26 4.59 4.75 4.6 4.3 4.86 4.05 4.63 4.71 4.57 5.03 4.8 5.86 5.22 4.58 4.29 5.29 4.71 5.33 4.88 5.49 4.96 4.7 5.17 4.39 5.63 2.59 4.28 3.15 5.42 6.93 2.41
5.72 4.1 5.73 5.15 5.58 7.66 5.85 4.4 5 3.99 5.07 5.02 5.2 5.92 4.64 5.47 5.12 4.52 5.68 4.28 3.6 4.65 4.92 4.65 5.35 6.1 5.39 5.94 5.44 4.46 4.74 4.84 4.28 4.8 4.92 5.64 4.73 5.03 5.39 4.4 4.69 4.6 4.77 4.57 5.37 4.71 6.82 5.15 4.5 4.81 4.15 3.83 4.21 4.41 3.75 5.63 4.77 4.85 4.62 5.29 4.5 4.62 4.35 6.07 4.94 4.42 4.46 4.42 5.91 4.27 3.96 4.83 4.91 4.98 5.05 4.66 5.1 4.04 4.15 5.19 4.45 5.27 4.75 4.55 4.72 4.23 4.47 5.11 4.37 4.89 4.7 5.03 4.88 4.73 5.43 4.65 4.66 4.83 5.31 4.06 4.5 5.28 4.59 5.4 4.87 4.19 5.23 4.21 5.23 5.01 3.89 4.79 4.14 4.87 5.18 5.88 5.25 4.11 3.27 4.12 5.47 5.23 5.24 5.69 5.78 4.49 4.24 5.24
3.92 4.22 4.53 5.09 5.06 4.66 4.95 5.83 5.77 4.63 3.99 4.93 5.58 4.79 5.22 4.54 4.88 4.99 6.85 5.71 4.28 3.98 4.5 5.72 4.96 6.87 4.46 6.6 4.43 4.46 5.24 4.63 5.29 5.86 4.67 5.14 4.82 4.74 3.96 5.74 5.05 5.6 5.44 4.08 4.83 4.36 4.84 5.48 4.15 4.98 5.25 4.57 5.26 5.29 3.9 4.4 4.12 4.26 4.7 3.99 4.42 4.47 4.33 4.41 4.74 4.7 4.14 4.87 4.73 4.74 4.41 4.9 5.03 4.64 4.69 5.83 3.93 5.2 4.26 4.21 5.24 5.23 5.42 4.81 4.91 5.63 4.34 5.12 5.29 4.48 4.45 4.26 4.85 5.57 5.02 5.17 5.19 4.91 3.51 4.66 4.57 4.64 4.12 6.98 6.06 6.64 4.76 6.1 4.39 4.78 4.5 5.58 6.74 3.89 3.99 5.07 3.56 4.38 3.42 4.04 5.41 4.41 5.27 5.6 4.61 6.66 6.47
3.45 5.04 4.27 4.45 5.29 5.34 5.73 4.31 4.56 3.96 5.26 5.13 5.02 5.56 4.63 3.87 4.98 4.21 4.38 4.97 4.58 4.58 4.71 3.64 5.13 5.62 5.73 3.86 5.48 4.57 4.84 5.18 4.34 4.86 6.73 4.64 4.76 4.68 4.84 4.98 5.98 4.44 4.35 4.34 5.22 3.86 4.36 4.6 4.71 4.96 4.47 4.62 5.15 4.61 5.2 4.88 5.09 4.05 5.64 5.14 4.13 4.72 4.93 4.84 4.93 4.44 4.63 5.01 3.62 4.36 4.82 5.02 4.65 4.85 4.61 4.68 3.87 4.78 4.35 4.84 5.06 4.47 5.08 4.08 4.84 4.59 5.04 5.38 4.88 6.36 5.09 4.23 4.92 4.5 3.96 5.49 4.66 5.44 4.61 6.08 6.19 4.45 5.43 5.24 5.18 5.28 5.6 5.37 5.27 4.82 5.26 5.23 5.07 5.1 6.83 4.04 5.69 3.98 5.28 5.96 4.05 4.12 5.68 4.31 5.95 4.57 6.23 5.84
4.88 4.47 4.26 5.38 4.97 4.7 5.35 3.91 3.31 5.45 3.62 4.45 4.06 6.32 5.32 4.29 4.81 4.74 6.98 5.37 4.44 3.61 4.52 5.08 6.93 5.91 7.06 4.55 4.28 6.17 5.73 6.9 5.54 6.33 5.08 4.26 4.65 4.88 3.97 5.11 4.66 4.74 5.4 5.53 5 4.89 4.41 5.51 4.38 4.89 4.42 4.55 4.42 4.48 6.27 4.16 5.41 5.11 4.03 4.22 4.75 4.97 4.75 4.95 4.96 4.47 4.42 4.3 4.89 4.52 5.06 3.65 4.89 5.01 4.51 5.04 5.56 4.48 4.23 5.11 4.2 4.52 4.94 4.35 4.37 5.61 5.93 6.43 4.37 4.89 5.15 5.22 5.42 4.86 5.04 5.19 5.33 5.25 5.87 4.83 4.41 4.53 5.09 4.7 4.85 4.93 4.86 4.24 5.3 5.42 4.37 4.6 4.95 6.57 6.26 5.65 4.53 4.87 3.6 5.65 5.39 3.91 5.35 5.53 4.08 5.53 4.14
4.05 5.2 5.07 5.54 5.97 6.79 4.77 4.93 5.38 6.12 3.52 5.73 5.54 6.37 4.83 5.58 4.17 3.88 4.85 5.67 5.08 6.48 5.66 5.09 5.3 5.36 5.72 4.73 5.01 4.82 5.62 5.44 6.6 5.88 4.65 5.93 4.51 5.33 4.7 4.1 4.93 5.45 4.67 4.3 4.99 4.66 4.32 4.71 5.63 5.04 5.22 4.89 4.69 4.45 4.4 4.31 4.94 4.61 4.65 4.71 5.02 5.23 4.73 3.5 5.7 5.23 4.96 3.8 4.23 4.6 4.4 5.46 4.34 4.73 4.14 5.29 4.34 4.88 4.59 4.93 5.28 4.54 5.14 5.35 4.56 5.19 4.31 4.35 5.94 4.54 4.96 5.18 5.44 5.81 5.68 5.04 5.43 5.54 5.16 5.2 5.46 4.36 3.51 5.81 5.98 3.81 6.53 5.08 4.79 5.83 5.42 5.96 5.13 5.6 4.84 4.85 4.99 4.41 4.08 6.32 4.87 5.64 5.25 4.46 3.49 3.69 2.88
6.06 5.64 6.38 5.24 6.23 5.61 4.54 4.63 6.5 4.26 4.85 6 5.54 5.06 4.66 4.98 4.31 5 6.26 4.83 5.81 4.56 5.51 5.61 6.9 4.53 5.48 6.04 5.93 6.35 5.18 4.93 5.41 4.5 3.39 4.25 4.27 5.71 5.34 4.97 3.93 5.06 7.18 4.91 5.2 4.45 5.63 5.25 4.71 4.98 5.82 4.84 5.21 4.94 3.53 5.05 5.02 3.74 4.44 5.07 4.61 4.41 4.79 4.83 4.69 5.72 4.88 5.49 4.1 4 4.78 5.23 5.17 4.23 4.33 4.86 4.31 4.93 5.48 6.53 4.14 5.67 5.18 5.23 5.59 5.03 4.8 5.02 5.37 5.11 5.4 5.27 4.24 5.77 5.62 5.42 4.88 4.1 8.08 4.88 5.87 5.17 5.18 4.53 5.39 4.57 4.76 5.66 4.69 4.35 5.43 5.54 4.96 6.97 5.11 4.95 4.97 4.49 3.24 5.01 5.09 5.06 5.33 5.32 4.54 4.27
6.54 7.01 4.72 5.4 7.26 6.7 7.89 6.61 6.55 5.16 5.66 6 5.1 6.14 6.86 4.65 5.69 5.55 5.71 4.04 5.8 4.12 4.04 4.68 5.03 4.29 5.49 5.03 6.49 6.26 4.4 6.57 6.46 4.76 4.78 3.72 6.68 5.02 4.97 6.68 5.27 5.46 5.44 4.54 3.43 4.51 5.64 5.9 4.79 6.38 4.12 5.98 5.92 4.26 6.29 4.07 5.49 4.78 4.78 5.61 4.76 4.71 4.84 3.97 4.01 4.7 5.07 5.68 4.32 5.01 5.16 5.18 4.28 4.99 4.01 4.6 4.69 5.03 4.1 5.04 4.42 4.04 5.99 4.87 6.03 5.41 4.69 5.06 6.2 4.2 5.77 5.39 6.42 3.49 5.23 5.27 5.52 5.37 6.65 5.83 3.59 4.93 4.24 5.16 4.65 5.88 5.4 4.88 5.45 5.54 6.06 5.15 4.78 4.69 6.23 4.87 4.57 4.75 5.89 5.78 5.01 4.32 5.68 4.62 3.99 4.51 4.95 4.59
6.73 3.61 3.46 2.42 4.4 5.92 4.85 6.02 5.54 5.99 5.04 6.44 5.14 6.79 4.36 4.7 5.97 5.21 7.2 3.66 6.57 4.46 4.58 6.16 6.12 6.31 6.38 5.55 4.33 6.27 5.2 5.22 5.37 4.97 5.11 4.56 4.57 5.46 4.56 2.89 5.63 5.07 7.97 5.45 5.34 4.12 4.66 5.11 5.8 3.57 4.83 5.69 4.88 5.69 5.41 5.18 5.21 4.9 4.68 5.05 4.74 5.5 5.44 5.98 3.43 5.1 4.61 3.85 4.72 4.55 4.39 4.75 4.45 4.61 5.05 4.28 5.73 4.43 4.64 4.55 5 5.28 5.11 4.68 5.3 5.36 5.8 5.55 5.18 5.07 4.67 5.17 5.96 4.67 6.4 5.11 6.11 5.08 5.91 4.89 5.89 4.39 4.95 5.29 4.51 4.79 4.98 6.75 6.29 7.04 5.26 6.12 5.56 6.47 4.98 5.62 4.44 4.85 4.6 3.44 6.02 3.39 3.39 4.55 5.73 4.78 5.66 3.92
5.57 7.78 5.13 7.53 5.57 6.11 6.65 6.47 6.58 5.52 6.2 6.25 4.87 4.28 4.33 5.91 4.9 4.86 4.88 4.07 5.07 6.13 5.23 6.48 6.06 4.64 4.14 4.27 5.28 4.45 4.47 5.78 6.63 5.89 5.17 5.38 6.26 4.81 4.2 5.11 5.19 5.2 4.88 6.92 6.22 5.21 5.47 5.81 5.97 4.34 4.56 4.96 5.03 4.17 4.92 4.44 4.41 4.74 3.87 4.59 4.37 4.85 3.56 5.12 6.01 4.14 4.16 5.41 5.16 5.96 3.83 4.53 4.46 3.68 5.03 5.15 4.58 4.43 5.99 5.44 5.45 4.87 4.92 5.1 5.41 5.97 4.81 5.55 6.39 4.92 6.44 4.72 4.75 4.48 4.79 6.11 5.24 4.09 5.62 7.17 5.12 5.81 6.05 6.12 5.23 5.19 5.68 4.76 6.61 6.92 5.98 5.97 4.34 5.16 6.29 5.49 4.36 4.71 4.11 4.45 5.3 5.59 3.85 5.27 4.78 4.37 4.56 3.45
3.02 4.19 5.47 5.31 6.74 5.68 6.19 2.57 5.85 5.44 5.93 4.98 4.91 2.96 5.3 5.07 5.73 4.56 5.66 4.23 5.28 5.6 6.32 6.51 4.58 3.34 3.51 7.68 5.65 5.44 4.81 5.09 5.56 6.83 4.2 6.27 5.31 5.38 5.59 5.23 5.71 4.59 5.59 4.95 4.67 4.65 5.26 5.38 5.13 4.53 4.82 4.45 4.26 5.8 4.08 4.25 4.31 4.36 4.34 4.58 4.6 5.86 4.99 5 4.34 4.48 4.42 4.43 5.57 4.89 6.17 4.3 6.01 5.14 5.67 4.46 4.48 4.99 3.96 4.46 5.13 4.59 5.89 4.28 3.59 4.28 5.19 3.82 5.69 5.31 6.52 6.35 5.43 5.33 4.76 4.99 5.24 5.89 5.59 5.78 5.3 5.65 5.89 5.66 7.01 7.64 7.24 4.52 5.11 6.17 5.55 3.9 4.09 4.93 4.39 6.1 5.85 4.56 4.21 4.11 5.65 5.03 3.88 4.57 4.34 3.87 5.51 4.46
6.09 6.26 5.35 5.05 5.41 5.81 5.23 7.88 8.52 4.6 5.87 6.21 3.79 7.98 5.92 8.7 5.07 4.44 5.3 6.15 6.09 5.44 6.13 3.49 6.98 6.1 4.07 4.89 5.14 4.53 5.75 6.04 6.08 5.95 5.82 4.14 5.59 5.91 3.44 4.32 4.7 5.93 4.45 5.54 4.7 4.79 5.92 3.83 4.54 4.77 5.47 4.91 5.03 5.02 4.94 5.34 3.97 5.32 5.13 6.47 3.96 3.5 3.59 4.14 4.04 4.43 4.61 4.26 4.93 5.14 4.31 6.36 4.57 5.24 5.27 4.98 5.08 4.57 4.76 4.87 5.26 4.64 5.25 5.05 5.29 5.44 5.64 5.8 5.59 5.19 4.42 6.16 6.31 7.16 5.98 6.52 5.98 6.14 6.7 6.58 6.74 5.36 4.84 5.71 4.43 5.4 5.01 5.47 5.38 5.31 4.72 5.23 4.95 5.19 5.24 4.94 4.72 4.78 4.13 5.28 4.23 3.99 4.05 3.6 5.53 6.05
5.26 4.13 6.5 4.64 5.53 4.22 6.59 4.54 8.26 4.43 5.25 6.81 4.98 5.71 7 7.71 7.23 5.92 5.38 6.63 5.64 4.25 7.77 6.08 5.81 7.86 7.75 4.87 5.39 5.3 5.11 4.48 4.87 5.57 4.51 6.11 6.15 5.36 4.91 6.04 4 6.43 4.58 6.82 7.22 6.28 4.23 6.08 4.93 6.43 6.95 5.62 5.52 5.19 5.03 5.56 4.54 5.07 5.2 4.66 4.23 3.09 2.87 3.08 3.01 4.11 4.17 4.64 3.7 5.69 5 6.28 5.25 4.65 4.75 6.12 5.46 4.95 5.39 5.12 6.05 4.68 5.59 6.73 4.46 4.47 5.21 5.85 5.56 5.11 4.8 5.57 5.31 6.03 6.51 5.14 6.36 5.89 6.69 6.23 6.38 5.61 5.02 6.99 4.88 5.79 5.28 3.82 4.53 4.68 7.56 6.4 5.35 4.72 3.98 4.14 4.81 4.32 5.82 5.93 5.02 4.5 5.55 3.1 5.02 3.14
4.24 4.02 5.28 4.17 4.31 6.29 5.89 5.57 5.67 4.67 8.12 4.69 5.84 4.67 5.72 7.44 6.48 7.71 5.47 5.63 4.44 5.2 4.68 3.73 6.47 6.84 3.89 5.05 4.11 5.55 6.75 4.84 4.49 5.96 6.07 5 6.83 6.87 3.15 4.99 4.84 3.83 6.39 5.06 5.57 5.54 6.58 4.97 4.5 4.14 5.06 3.59 4.47 3.29 5.21 3.71 4.35 5.43 3.19 3.04 2.84 2.79 2.9 2.66 3.77 2.86 3.48 3.84 5.31 4.87 4.78 4.32 3.9 4.98 4.67 4.76 4.86 5.46 5.27 5.39 5.19 5.97 5.34 6.16 5.91 4.66 5.66 5.34 5.11 5.83 5.7 5.49 5.26 6.91 5.59 5.99 5.66 6.82 4.95 6.91 5.75 5.17 5.53 4.45 4.09 5.34 6.1 4.93 5.46 5.1 6.14 6.01 4.71 5.66 4.51 4.72 4.94 4.38 4.77 4.03 4.14 3.54 3.67 5.35 4.65 3.53
5.81 4.54 5.27 2.42 3.49 4.46 5.66 4.9 5.5 4.68 3.36 6.97 4.36 7.11 4.29 5.32 7.41 6.14 5.31 4.5 7.38 4.86 4.24 5.02 6.11 4.96 5.57 6.69 6.41 5.72 4.09 6.85 5.49 5.5 4.91 6.8 4.32 4.48 3.88 5.33 4.8 4.87 5.05 6.3 4.96 5.2 4.39 4.59 4.62 6.22 4.88 5.15 4.89 3.73 6.26 5.37 5.1 4.8 3.31 2.95 2.73 2.76 2.57 2.52 2.89 3.1 3.17 3.4 4.37 5.16 5.57 5.91 5.08 5.15 5.47 5 5.32 4.81 5.38 5.89 5.6 6.02 6.16 5.09 5.12 5.32 5.59 4.77 5.58 5.23 5.73 5.95 5.94 5.95 5.61 5.68 5.51 7.18 7.41 5.47 5.7 7.39 6.04 7.1 4.21 5.56 5.23 6.39 4.05 8.29 6.55 5.28 6.24 6.24 5.22 5.05 4.62 5.38 4.03 6.22 4.92 4.92 4.56 3.82 4.09 3.91
4.14 6.73 4.85 5.02 3.78 9.72 5.43 5.6 5.82 4.38 4.1 6.63 3.6 4.84 3.95 5.74 6.12 4.35 4.35 5.43 4.45 5.31 5.68 5.06 5.29 6.89 5.52 6.6 5.51 6.02 5.65 5.94 6.25 4.21 4.95 6.2 3.75 4.89 4.92 5.41 5.13 6.25 5.83 4.69 8.05 3.21 3.08 4.54 3.4 3.62 4.81 4.12 6.28 4 3.8 3.34 2.89 2.5 2.53 2.52 2.5 2.78 2.59 3.52 3.63 5.09 4.97 5.73 6.54 5.69 4.77 4.64 4.87 5.57 5.05 5.29 3.29 5.94 4.32 5.17 5.13 5.13 4.4 4.36 5.05 5.98 5.2 5.81 5.65 5.77 5.24 4.9 6.08 5.68 7.68 7.95 7 6.73 6.75 5.42 7.74 5.5 9.83 6.36 5.82 6.21 6.78 7.16 5.19 5.55 4.48 5.24 4.5 5.27 4.29 4.92 5.42 3.12 4.55 5.38 5.52 4.55 3.53
5.31 6.6 5.89 4.57 6 6.39 4.25 4.58 5.35 4.04 5.7 7.48 6.01 6.67 4.84 6.82 5.57 5.71 6.74 3.7 6.04 7.1 3.52 6.13 5.57 6.72 4.93 4.59 5.06 3.82 5.19 6.48 4 4.47 5 4.57 5.06 6.79 7.83 6.21 6.06 4.87 4.95 6.13 4.43 5 5 3.94 4.26 4.38 4.78 5.93 5.97 5.16 5.96 4.75 3.76 2.97 2.49 2.48 2.45 2.49 2.62 2.63 2.65 2.89 2.64 5.05 5.26 4.8 5.35 5.46 5.19 5.87 3.43 5.49 5.09 5.92 6.19 4.95 6.01 9.65 5.15 4.96 6.29 4.71 3.71 6.9 4.07 4.31 5.62 5.46 5.06 4.52 4.81 4.02 7.27 6.38 7.69 8.13 5.52 6.05 4.02 7.93 6.5 7.6 6.62 5.66 4.49 6.46 4.85 5.43 5.01 4.92 4.81 4.36 4.51 5.46 4.14 4.59 4.35 5.08 3.83 5.03 4.25
4.08 6.85 5.36 4.94 6.07 4.9 6.6 4.5 6.09 5.52 3.81 7.88 5.42 6.57 8.35 5.06 5.98 6.13 7.25 5.03 7.45 5.77 4.79 5.56 6.98 5.22 5.98 6 5.74 5.18 6.35 5.75 7.04 5.64 5.02 6.44 5.16 2.31 6.22 4.96 4.49 4.69 6.11 5.75 4.02 2.42 4.9 5.13 4.72 4.79 4.96 4.38 6.08 4.57 3.67 4.71 3.86 2.77 2.45 2.7 2.52 2.62 2.71 2.67 2.66 2.97 3.38 3.62 4.41 5.61 3.96 6.35 4.53 4.81 5.41 4.67 3.62 5.14 5.1 6.2 6.12 4.68 4.93 4.34 5.23 4.46 5.47 4.68 5.17 4.56 7.02 3.11 4.89 5.72 7.11 6.41 6.04 8.09 7.37 4.51 6.78 5.32 6.76 5.61 6.22 6.57 5.5 6.4 8.37 4.16 4.25 4.39 6.01 5.79 4.95 4.36 5.38 6.21 4.64 4.47 5 4.56 4.44 4 4.35
7.29 7.51 6.41 4.55 5.99 5 3.45 7.05 6.19 6.11 6.02 5.47 4.32 4.87 7.58 7.21 6.93 3.97 4.32 4.88 5.57 6.23 4.59 5.79 5.05 5.75 5.41 5.57 5.73 5.33 5.93 4.21 5.5 4.34 7.28 3.46 2.28 4.98 4.65 5.06 4.67 5 6.19 5.05 4.76 4.47 4.48 4.18 4.92 6.74 5.46 4.14 6.17 5.23 3.48 2.75 2.49 2.46 2.3 2.74 2.68 2.53 2.51 2.8 2.9 3.03 3.24 3.84 4.01 4.1 5.04 5.54 5.29 3.84 6.97 3.63 4.73 3.41 5.87 3.38 6.85 4.73 5.16 3.61 5.18 4.55 4.65 4.87 6.53 5.14 5.83 4.67 4 5.08 6.2 5.4 6.48 3.21 3.62 7.63 6.17 9.35 4.28 4.37 5.7 8.16 8.34 4.48 6.4 5.61 7.22 4.55 5.29 4.8 5.05 5.14 4.5 4.73 4.66 5.02 4.24 4.32 4.25
7.6 5.44 4.84 6.51 5.32 5.13 4.78 6.34 6.17 4.47 5.59 4.75 4.5 7.02 4.19 5.15 5.86 5.11 4.38 6.68 5.85 6.32 5.67 5.03 5.52 4.63 5.03 6.29 5.75 5.09 5.76 5.82 7.76 7.15 6.13 5.39 5.02 6.28 6.87 3.35 5.52 6.45 5.43 6.81 6.23 5.54 6.67 3.62 5.02 5.69 4.73 4.95 5.49 6.63 5.94 4.19 4.1 2.71 2.64 2.38 2.37 2.44 2.44 2.36 2.61 2.49 2.62 2.79 3.14 2.5 4.61 4.79 5.39 4.67 2.55 4.46 4.28 4.29 3.32 5.52 4.06 3.57 4.12 5.29 3.68 4.6 2.72 5.14 3.38 2.9 4.83 3.67 5.59 7.21 4.46 6.29 4.95 5.93 5.65 5.36 6.28 4.88 6.46 5.67 5.8 7.1 3.43 5.85 6.05 6.56 7.36 9.82 8.67 5.18 5.28 5.29 4.48 4.07 4.37 4.64 4.89 4.32 3.71 4.46 4.35 4.1
3.3 5.72 7.08 8.29 8.51 5.88 4.7 2.75 5.33 5.18 5.03 5.06 7.29 6.5 6.98 5.02 4.37 4.36 6.89 4.33 7.52 5.41 5.83 5.5 5.29 6.77 4.9 5.18 5.61 7.19 6 5.34 2.79 4.12 3.78 5.82 5.65 6.72 6.3 6.03 3.05 5.54 5.31 2.92 3.52 2.95 6.18 4.46 5.82 4 5.46 4.87 5.52 4.6 4.47 3.73 3.08 3.42 2.56 2.5 2.47 2.45 2.63 2.48 2.73 2.84 2.67 2.85 4.12 4.37 5.73 4.03 6.5 3.45 3.88 6.55 4.13 4.26 3.52 3.82 4.59 5.37 4.11 6.06 3.06 5.58 6.06 5.22 4.9 5.17 4.44 4.28 5.05 5.63 3.12 5.87 6.15 3.95 4.27 6.58 7.17 4.49 7.34 6.67 7.65 6.14 8.17 6.5 7.05 6.99 6.26 4.27 4.63 4.44 4.73 4.42 4 4.21 6.09 4.65 4.37 4.62 4.02 4.62
5.5 4.12 7.65 6.74 5.67 5.05 4.68 3.4 3.13 5.81 2.83 5.03 4.73 4.85 7.45 4.59 2.87 3.91 5.71 7.48 5.66 5.43 4.82 6.07 6.45 4.67 8.51 6.36 6.42 10.1 9.18 5.61 5.11 4.03 6.8 4.02 5.22 4.21 5.53 5.3 3.5 4.99 2.9 2.6 2.58 2.72 3.11 2.38 4.12 4.12 6.16 4.76 5.32 7.4 3.41 3.2 2.67 2.65 2.52 2.61 2.49 2.42 2.37 2.79 2.71 2.86 3.28 3.92 4.03 5.96 5.19 4.85 5.12 4.87 5.27 4.23 4.92 3.6 4.96 5.34 4.86 5.68 7.42 4.51 4.12 4.36 4.79 5.17 3.63 3.31 5.19 5.57 4.13 4.21 5.09 3.03 4.96 4.86 5.43 10.4 7.41 7.33 3.11 3.37 10.7 5.26 4.69 5.95 5.04 5.6 5.85 5.79 3.92 5.46 4.96 5.45 4.55 4.83 4.96 3.99 3.98 4.08 4.6 4.17
6.19 6.4 4.98 3.8 7.51 5.35 7.79 3.9 5.56 4.44 5.06 6.31 5.3 5.98 6.02 7.34 5.39 5.83 6.5 7.32 8 3 2.71 4.23 10.7 7.56 5.78 2.94 7.02 7.88 5.85 4.06 4.32 6.6 3.57 5.57 7.14 6.88 6.36 5.3 2.65 5.81 4.32 2.55 2.33 2.18 2.5 2.5 2.66 2.39 3.14 3.84 3.9 5.39 5.46 3.27 2.39 2.55 2.51 2.7 2.49 2.52 2.51 2.51 2.81 2.9 3.43 3.25 3.19 3.06 3.7 4.16 4.88 4.05 3.79 6.17 4.32 5.72 6.07 6.41 6.72 4.03 3.81 5.88 4.4 5.72 5.46 8.36 5.56 4.92 8.37 4.14 4.29 4.46 2.46 4.76 5.32 5.61 4.56 6.9 5.6 8.97 6.35 8.88 9.11 7.71 6.2 5.83 6.24 4.6 7.34 8.31 7.33 5.26 4.58 4.46 4.25 4.67 5.41 4.08 4.98 4.11 4.5 4.74 4.24
3.75 6.99 3.39 6.03 4.56 7.57 5.66 6.99 6.24 4.75 5.15 2.71 2.71 5.88 4.56 5.53 2.42 6.49 4.68 3.24 3.85 9.23 3.24 4.26 2.83 5.88 6.41 5.01 4.05 4.32 4.17 3.77 7.48 4.98 5.73 5 3.3 5.7 3.6 3.88 6.87 4.52 2.14 2.21 2.05 1.99 2.1 2.94 2.49 3.08 7.11 3.7 4.62 5.91 3.34 3.36 3.84 2.89 2.62 2.45 2.77 2.59 2.72 2.57 2.86 4.39 5.35 4.11 4.36 3.93 2.48 5.46 5.04 3.92 4.36 3.88 4.91 6.62 5.29 4.09 6.92 4.62 4.52 4.34 4.21 5.75 5.02 6 7.04 5.38 4.79 3.46 4.33 5.92 6.62 5.34 4.4 6.32 4.65 3.13 5.56 8.29 4.77 4.36 5.98 3.44 6.29 3.65 3.14 6.13 5.12 5.63 5.1 4.46 4.73 4.46 4.54 4.3 3.65 4.29 4.17 4.57 4.69 3.97
7.77 2.85 6.66 4.55 7.86 6.13 4.82 4.99 6.69 7.44 6.08 7.11 5.34 5.58 4.64 5.48 3.63 4.04 5.83 4.59 9.22 4.82 6.45 6.08 5.02 4.52 4.11 4.3 6.36 5.11 5.8 5.81 5.23 3.82 7.35 2.95 6.19 4.91 6.34 2.87 6.04 4.59 3.87 2.4 2.21 2.09 1.81 2.25 2.3 2.6 2.4 5.81 3.07 4.02 4.37 4.23 3.88 3.41 2.57 2.44 2.54 2.47 2.5 2.52 3.06 3.54 3.92 3 4.75 4.86 3.83 6.44 4.47 4 5.22 4.26 2.86 4.56 3.97 5.51 3.45 5.02 3.82 3.62 5.37 4.53 4.89 4.63 4.09 5.24 6.76 2.69 5.55 4.38 4.62 5.18 4.53 4.21 2.9 3.89 4.5 5.76 6.8 4.2 5.06 6.58 5.12 4.99 6.73 4 6.09 8.45 4.62 7.46 4.41 4.93 4.47 4.9 5.29 4.26 4.63 4.28 5.06 4.45 4.46
5.37 3.47 9.38 7.24 5.24 6.36 3.85 5.98 4.61 3.83 5.67 6.15 4.48 3.69 5.14 5.59 6.14 6.09 7.25 4.08 5.41 2.56 5.29 3.76 4.07 4.4 2.36 2.92 5.05 3.91 5.18 8.7 6.53 4.96 7.13 5.1 2.92 5.47 4.57 9.09 4.79 2.95 2.03 2.08 2.22 1.89 2.17 2.33 2.79 3.53 3.24 3.51 4.04 3.08 4.2 3 2.61 2.49 2.59 2.44 2.45 2.57 2.57 3.05 2.89 3.7 7.03 5.44 3.28 4.59 3.33 5.03 3.64 3.84 3.41 5.27 5.53 3.27 6.73 5.59 3.92 4.83 5.29 6.55 4.82 5.32 5.67 6.3 6.09 4.4 5.89 4.85 4.84 2.93 6.23 4.03 6.35 3.99 5.62 3.86 5.85 5.59 5.28 5.42 7.02 6.9 5.8 6.7 5.89 6.39 5.28 5.2 4.78 4.88 4.91 4.88 4.69 5.03 4.76 4.25 4.3 3.96 4.13
6.27 3.76 2.78 5.93 8.14 9.5 8.74 6.8 1.93 7.53 7.05 2.11 6.57 6.85 2.82 3.66 4.48 6.69 4.81 3.1 3.91 3.26 2.9 3.55 6.45 4.42 5.78 5.35 7.7 2.74 2.81 7.59 3.22 4.09 8.24 5.13 4.31 4.47 4.87 7.27 6.13 6.31 2.16 1.97 1.99 1.79 1.82 1.96 2.05 2.79 2.59 2.64 3.22 2.64 3.08 2.4 2.38 2.42 2.55 2.32 2.3 2.36 2.44 2.53 2.77 3.37 3.28 3.8 4.5 2.56 5.24 4.09 4.5 3.36 6.34 2.65 6.53 4.44 5.05 4.31 6.36 6.28 5.27 6.3 7.2 5.72 5.77 5.83 6.39 5.2 5.64 6.09 3.71 4.36 5.72 3.77 5.91 7.7 5.23 5.24 5.24 5.26 5.44 5.79 5.05 5.62 5.41 6.19 6.84 7.18 5.85 6.07 4.41 4.97 4.57 5.2 4.91 4.42 4.91 4.27 5.37 4.17 3.92 3.98
8.43 2.67 6.95 3.55 5.87 3.2 7.87 9.18 8.04 3.68 5.67 2.78 5.24 4.32 3.91 4.34 5.09 6.32 6.39 2.02 6.11 4.59 4.99 7.79 3.58 5.75 6.35 7.16 6.43 3.46 6.61 4.71 7.37 7.17 4.69 3.45 2.36 1.86 1.89 1.8 1.94 1.93 2.14 2.78 2.63 2.44 2.24 2.37 2.61 2.42 2.37 2.3 2.31 2.33 2.48 2.43 2.54 2.52 3.14 3.09 3.91 3.4 4.71 3.62 4.35 5.01 4.63 6.5 4.72 4.32 6.23 5.46 5.78 5.77 5.4 6.33 6.98 6.09 6.07 7.28 6.42 6.57 6.13 6.43 6.71 3.02 5.54 4.37 5.08 7.5 5.27 5.86 6.21 6 5.23 5.72 4.36 5.59 5.74 5.8 5.38 5.94 5.89 5.75 5.37 5.52 4.86 6.04 4.68 5.28 4.5 3.9 4.98 5.01 3.91 4.12 5.09
6.86 5.83 10.9 2.74 6.4 4.57 6.84 2.91 5.57 4.18 5.98 3.75 4.9 4.49 5.21 4.23 4.97 4.16 2.21 3.57 5.82 6.52 3.35 3.38 4.55 6.76 2.32 6.37 3.68 3.64 5.86 3.91 5.97 6.29 4.27 3.71 6.49 6.98 6.26 3.89 4.46 1.93 2.13 1.86 1.85 1.68 2.04 1.97 2.38 2.57 2.3 2.5 2.52 2.44 2.48 2.32 2.35 2.32 2.42 2.34 2.28 2.36 2.37 2.47 2.88 2.73 2.94 2.71 2.71 3.69 4.52 3.71 5.89 4.81 4.56 6.05 4.74 5.81 4.84 5.83 3.34 4.8 5.08 6.54 6.32 5.96 6.32 4.86 5.36 4.75 7.67 4.47 7.35 4.77 4.12 5.72 5.73 3.84 6.06 5.37 5.36 5.24 6.18 6.1 6.68 5.38 5.02 6.24 5.79 5.21 5.43 5.08 5.21 4.83 4.29 5.49 5.27 5.09 4.12 5.13 4.47 4.01 4.46
5.25 3.7 6.76 4.27 5.34 7.85 5.25 4 2.04 9.02 4.98 6.23 2.53 4.88 7.84 4.5 6.87 4.19 4.53 2.98 4 6.63 3.85 4.96 4.64 9.63 6.25 5.6 5.85 6.61 8.85 6.76 3.79 4.21 4.7 4.51 3.23 2.44 1.81 1.99 1.81 1.78 2.03 2.03 2.1 2.28 2.22 2.33 2.3 2.25 2.25 2.25 2.3 2.31 2.19 2.31 2.36 2.29 2.42 2.36 2.58 2.49 2.49 2.58 2.52 3.22 3.21 3.31 3.44 4 4.36 5.41 6.21 6.83 5.08 5.82 7.78 5.88 5.98 4.38 6.39 8.21 5.55 6.5 5.97 6.1 3.26 6.37 6.61 6.25 7.02 4.42 4.79 5.21 5.13 4.99 5.75 5.54 5.14 5.93 5.49 5.44 5.2 5.79 5.45 5.9 5.99 4.86 4.45 5.86 3.89 4.06 4.6 3.66 4.86 4.05 4.6 3.82 4.15
4.08 4.22 5.79 3.62 6.31 8.32 4.71 4.87 2.21 7.07 7.96 3.42 6.95 6.09 2.37 6.78 6.25 2.6 4.44 2.25 2.74 4.27 5.79 4.07 4.54 4.82 4.67 1.84 6.95 7.42 4.46 4.37 4.4 3.94 5.55 5.3 5.1 3.03 6.04 4.65 4.04 2.21 1.84 2.07 1.81 1.9 1.87 2.01 2.37 2.23 2.22 2.21 2.21 2.18 2.18 2.23 2.25 2.4 2.22 2.27 2.28 2.3 2.27 2.3 2.51 2.46 2.55 2.44 2.41 2.56 2.78 3.7 3.2 3.43 4.61 7.11 4.59 6.72 4.68 6.92 7.69 7.71 6.02 6.12 5.12 5.55 5.74 2.71 5.58 5.79 4.95 4.62 7 6.63 3.65 5.79 4.74 5.88 4.76 5.39 4.89 5.25 6.41 6.58 5.48 7.49 6.39 5.57 5.31 6.23 6.59 5.81 6.56 4.72 5.42 6.09 3.92 4.45 4.58 4.15 4.12 3.92 4.15
3.46 4.16 4.27 3.95 4.27 6.07 4.42 5.83 6.02 6.61 5.41 5.04 4.23 7.08 3 7.9 2.16 3.34 5.61 3.91 3.43 4.33 4.58 2.66 2.99 3.57 5.12 7.27 3.77 4.04 4.11 3.98 5.47 4.61 4.72 3.72 5.67 5.73 5.48 5.88 6.38 6.88 5.73 4.29 3.59 2.57 1.98 2.16 2.1 1.99 1.81 2.1 2.11 2.33 2.28 2.22 2.13 2.21 2.15 2.19 2.23 2.14 2.21 2.19 2.25 2.49 2.23 2.27 2.31 2.46 2.42 2.38 2.38 2.57 2.79 2.61 2.82 4.74 4.16 5.88 6 3.34 5.27 5.93 5.93 6.34 5.21 7.06 7.53 5.77 4.63 5.92 5.88 8.37 7.5 5.74 7.61 3.99 3.56 3.86 4.33 4.76 5.64 6.38 5.42 4.51 5.72 6.22 5.97 5.58 6.21 5.24 4.74 6.71 5 4.74 5.34 4.04 4.86 4.9 5.08 5.26 4.04 4.25 4.24 3.76 4.08
4.81 4.93 5.15 5.99 4.73 6.31 4.5 4.7 6.12 5.64 3.97 6.97 4.45 5.85 4.99 5.88 4.84 9.86 4.75 2.51 2.38 7.4 4.01 7.43 2.41 6.03 2.77 7.07 4.03 4.9 4.62 3.71 5.67 3.36 2.71 4 2.77 7.18 2.24 4.22 3.22 4.43 3.44 3.05 2.24 1.96 1.93 2.06 2.02 1.95 2.05 2.06 2.13 2.22 2.2 2.21 2.1 2.15 2.16 2.14 2.22 2.15 2.26 2.19 2.24 2.25 2.31 2.31 2.41 2.41 2.41 2.56 2.41 2.55 2.64 3.3 8.07 5.03 2.77 7.09 5.61 5.47 4.88 5.66 3.55 4.38 8.71 8.48 3.15 5.06 4.14 4.23 5.25 6.39 4.09 4.86 3.51 3.85 3.79 3.96 3.86 5.05 5.06 5.21 5.44 5.06 4.76 5.69 6.13 5.37 6.38 6.26 5.01 4.77 6.37 5.18 4.46 4.85 4.21 4.21 4.12 4.09 4.38 4.04 4.49 5.05
3.96 4.52 4.47 6.69 5.27 5.99 5.37 5.43 4.94 4.26 4.7 5.76 5.58 5.47 3.98 5.54 7.46 7.73 3.33 3.09 2.38 6.26 6.77 3.29 4.89 4.96 2.7 6.75 3.51 3.54 3.11 2.38 2.52 2.67 2.1 5.32 4.31 3.11 4.19 3.43 3.84 5.12 2.27 2.15 1.99 1.96 2.01 1.95 1.92 2.11 2.2 2.17 2.13 2.11 2.19 2.19 2.26 2.2 2.16 2.17 2.18 2.37 2.22 2.21 2.24 2.24 2.28 2.23 2.31 2.49 2.38 2.36 2.45 2.66 3.53 4.21 5.93 4.36 4.21 5.83 4.19 6.72 7.08 5 8.53 8.17 5.42 4.33 6.86 4.77 6.78 5.79 6.08 5.23 3.56 3.79 3.83 3.87 3.77 3.93 4.99 5.63 5.69 5.05 5.16 4.94 6.6 5.85 5.32 5.37 5.42 4.81 5.28 6.13 4.75 4.65 5.42 5.09 4.67 7.78 4.35 4.7 4.64 4.1 5.56
5.01 4.96 4.66 5.03 5.45 4.82 5.09 4.45 5.44 4.4 4.83 5.51 3.64 4.77 6.18 4.14 3.58 2.13 5.71 2.84 3.71 7 4.81 5.75 1.83 4.58 6.28 6.23 2.5 2.73 2.5 3.44 3.95 6.3 4.19 6.04 4.33 4.75 5.85 3.28 2.1 2.13 2.01 2.02 2.09 2.25 2.01 2.09 2.12 2.15 2.27 2.16 2.2 2.18 2.14 2.16 2.18 2.14 2.19 2.2 2.19 2.26 2.2 2.22 2.21 2.23 2.26 2.33 2.39 2.38 3.04 3 3.79 3.48 6.54 5.51 4.59 6.91 6 6.34 5.3 4.78 6.49 8.45 8.2 5.82 7.6 4.82 7.92 4.51 4.86 6.38 3.78 3.63 3.81 3.82 3.94 4.62 4.99 5.14 5.04 5.79 5.94 5.69 5.82 6.77 5.47 6.11 5.75 5.11 6.1 4.96 5.34 3.68 5.65 4.73 5.13 4.38 4.61 4.23 4.28 3.77
6.12 5.21 5.18 5.38 5.27 5.01 5.66 5.61 4.07 4.81 5.73 4.77 6.37 5.74 6.13 3.95 3.52 3.98 4.26 4.87 2.75 2.95 5.89 3.2 4.51 6.18 3.17 4.59 3.8 4.97 5.99 5.14 4.32 2.7 6.94 3.42 6.95 2.6 2.93 6.08 11.1 2.42 2.5 2.46 2.19 1.99 2.12 2.15 2.32 2.36 2.22 2.23 2.22 2.16 2.15 2.12 2.12 2.14 2.14 2.19 2.22 2.17 2.2 2.22 2.2 2.17 2.13 2.16 2.18 2.3 2.4 2.28 2.35 2.34 3.18 3.46 4.39 8.17 5.51 7.32 4.36 5.18 6.37 6.32 3.73 5.46 4.04 5.3 6.39 5.37 4.14 6.48 7.17 4.62 3.65 3.75 3.96 3.97 3.95 3.98 4.82 4.55 4.78 4.15 4.99 6.01 5.41 6.14 5.22 5.47 5.27 5.58 5.2 5.06 5.13 4.69 4.06 5.25 4.48 5.22 5.92 5.03 3.76 3.77 2.75
5.06 3.06 5.66 5.1 5.05 5.36 6 4.91 5.49 5.13 4.55 4.52 5.23 4.87 4.99 3.61 4.47 4.84 3.99 6.98 3.95 5.71 7.67 2.65 1.83 5.28 6.41 6.47 6.59 6.3 7.31 2.5 4.29 5.93 5.11 2.88 3 4.23 4.05 6.61 6.43 10.3 4.58 2.64 2.54 2.16 2.06 2.12 2.14 2.12 2.43 2.27 2.15 2.24 2.13 2.11 2.26 2.05 2.11 2.05 2.08 2.08 2.18 2.21 2.16 2.08 2.08 2.09 2.17 2.12 2.24 2.29 2.32 2.32 2.37 2.52 3.94 4.55 8.92 4.07 7.05 4.37 4.18 7.46 10.4 10.1 8.91 9.94 10.2 8.49 5.03 7.66 7.66 4.66 4.25 4.6 3.67 3.98 3.95 4.01 4.49 5.41 4.83 5.15 5.06 5.33 5.61 5.96 5.54 5.93 6.38 5.62 4.98 5.96 5.68 5.59 5.14 4.58 5.03 4.81 5.47 4.87 4.37 3.95 3.95 3.65
5.82 4.56 4.78 4.95 4.97 4.95 4.71 4.05 4.82 5.13 5.39 6.13 6.35 5.03 5.49 5.91 4.04 3.13 3.61 2.3 4.23 4.52 2.86 4.93 7.1 2.08 3.47 7.37 7.55 5.85 4.86 5.22 3.1 3.09 2.72 4.26 4.4 7.13 4.5 5.77 2.44 3.66 2.47 2.75 2.66 2.52 2.39 2.36 2.22 2.27 2.29 2.42 2.23 2.22 2.13 2.15 2.15 2.13 2.15 2.23 2.12 2.18 2.25 2.16 2.19 2.14 2.19 2.19 2.21 2.27 2.37 2.31 2.36 2.45 2.51 3.27 4.6 7.98 7.16 8.04 7.79 7.44 9.23 9.91 10.3 10.8 11.1 10.7 11.6 10.7 7.33 5.13 3.86 6.27 5.12 4.14 4.2 4.38 4.3 3.83 4.39 4.17 4.5 4.9 4.55 5.83 5.38 4.91 4.75 5.41 5.93 5.69 6.06 5.76 4.52 4.71 4.39 4.83 4.22 4.43 4.04 5.06 3.87 4.23 2.81
5.69 4.7 6.29 4.87 6.23 4.34 6.38 4.71 4.18 6.83 5.2 5.75 5.05 4.47 6.66 4.47 3.38 3.97 2.45 9.15 4.04 3.91 2.9 2.72 3.04 4.28 3.46 4.8 5.93 3.67 4.17 3.14 3.35 1.91 5.25 3.36 3.59 6.8 3.06 4.16 2.7 3.23 3.61 3.13 2.49 2.22 2.76 2.46 2.59 2.41 2.72 2.46 2.35 2.17 2.14 2.23 2.15 2.12 2.37 2.14 2.08 2.18 2.14 2.19 2.2 2.18 2.13 2.21 2.21 2.29 2.34 2.33 2.39 2.32 2.78 3.23 4.79 8.15 7.5 4.8 7.23 8.45 11.6 9.07 10.3 10.9 10.3 11 10.1 11.6 8.67 6.04 5.3 6.02 4.16 4.44 4.47 3.9 4.04 4.03 4.8 3.89 4.06 4.14 4.83 4.66 5.32 5.43 5.77 4.97 5.66 5.86 4.94 5.38 5.02 4.82 4.61 4.4 4.84 5.43 4.24 3.96 3.71 4.56 2.97
5.14 4.46 5.9 6.13 5.31 4.73 4.99 5.55 5.33 4.5 4.95 5.07 5.45 4.72 4.48 5.06 3.75 4.61 3.94 2.75 2.69 2.42 2.61 3.43 3.91 3.17 3.55 5.22 2.38 2.51 4.95 2.18 3.45 5.54 7.33 3.4 6.64 1.89 3.45 2.5 2.69 4.07 4.86 4.4 2.73 2.11 3.65 2.9 2.74 2.46 2.28 2.23 2.1 2.14 2.1 2.05 2.06 2.14 2.14 2.17 2.1 2.15 2.13 2.16 2.16 2.13 2.2 2.27 2.25 2.26 2.31 2.4 2.46 4.09 5.45 7.3 5.7 5.74 6.94 5.49 10.6 10.5 10.9 10.2 10.9 9.93 10.6 10.9 9.05 9.51 4.61 4.55 4.35 4.18 4.13 3.95 3.96 3.96 3.88 4.3 3.97 3.92 3.61 4.46 4.85 4.92 5.45 5.96 6.23 6.08 5.06 4.61 4.5 4.73 4.21 5.15 4.42 4.26 5.22 4.23 4.54 4.81 3
4.63 5.43 4.33 4.84 4.82 5.01 4.85 3.88 4.51 5.76 3.9 5.86 6.72 4.45 4.77 5.2 3.82 3.8 2.06 4.93 5.16 2.87 3.27 3.81 1.99 4.59 3.43 5.34 3.97 2.83 2.89 2.61 2.43 4.83 2.44 5.3 4.19 2.79 3.07 2.99 5.39 5.08 3.55 5.13 4.74 4.89 3.14 3.19 2.96 2.74 3.08 2.53 2.21 2.13 2.13 2.1 2.1 2.08 2.15 2.07 2.08 2.16 2.13 2.15 2.17 2.19 2.16 2.23 2.24 2.33 2.3 2.26 2.26 2.28 2.54 3.28 3.4 6.37 9.11 6.26 8.11 8.02 10.8 9.89 10 10.7 10.9 11 10 9.77 7.98 5.78 4.05 4.67 4.16 4.16 4.28 3.86 3.86 3.63 3.92 3.93 4.13 3.4 4.06 3.64 4.49 5.25 5.56 5.38 6.11 5.51 5.99 5.07 4.78 4.55 4.15 4.94 4.3 4.98 3.89 4.08 3.83 3.9 3.36
5.32 4.77 6.73 5.43 5.37 5.88 4.48 5.03 4.52 4.65 4.88 4.98 4.51 5.36 4.9 4.18 6.45 3.66 4.15 5.37 6.8 4.19 3.3 4.96 5.2 2.29 2.79 2.88 5.98 2.12 2.77 5.44 2.86 3.13 3.11 2.11 4.03 3.23 5.89 2.71 4.16 5.27 5.39 3.92 2.66 4.87 2.31 2.82 4.32 2.59 2.49 2.27 2.15 2.09 2.08 2.13 2.17 2.1 2.07 2.07 2.15 2.16 2.17 2.19 2.22 2.12 2.29 2.25 2.33 2.34 2.24 2.26 2.35 2.4 2.77 3.38 5.77 5.32 6.25 6.01 8.38 10.8 10.6 9.58 9.38 11.2 10.4 10 9.92 6.49 3.88 4.91 4.08 3.98 4.06 3.82 4.25 3.86 3.79 3.95 3.87 3.58 3.72 3.99 3.69 4.36 4.38 5.35 5.59 6 5.88 5.99 4.96 4.96 4.94 5.26 5.04 4.15 3.6 3.82 4.02 5.64 3.65 3.21
3.83 4.72 5.33 4.81 4.24 4.73 5.23 4.78 4.64 4.8 4.85 4.67 5.69 4.63 4.45 4.65 4.17 4.78 2.86 3.36 6.74 2.57 4.5 4.04 3.78 4.51 5.44 3.96 2.92 3.23 4.1 4.2 3.84 3.45 2.84 2.65 6.96 3.21 3.39 6.05 4.72 4.34 3.51 4.44 4.31 4.27 5.16 2.58 3.98 3.68 4.89 5.01 2.84 2.53 2.39 2.12 2.08 2.17 2.05 2.05 2.07 2.14 2.05 2.13 2.1 2.14 2.1 2.11 2.17 2.24 2.26 2.21 2.31 2.27 2.29 2.31 2.38 2.49 3.85 5.02 6.96 4.26 7.03 6.48 5.11 9.14 10.3 10.6 9.54 9.88 9.75 6.02 5 4.3 3.93 4.03 3.78 4.06 3.82 4.14 3.88 3.87 4.26 4.1 4.19 3.81 4.67 3.83 4.56 4.69 5.21 5.74 4.81 5.31 4.88 5.77 4.18 4.87 4.11 3.91 4.23 3.97 4.67 3.65 4.69 4.04 4.45
4.14 4.81 4.63 4.44 4.17 4.28 4.76 4.83 4.63 4.1 4.49 5.16 4.9 6.06 5.1 5.59 4.49 5.91 4.84 4.16 4.6 3.39 4.58 3.61 4.27 2.99 3.55 6.77 4.11 3.41 2.52 4.59 4.53 4.03 3.68 3.63 2.29 5.19 7.11 4.45 3.48 4.1 2.94 3.32 6.29 4.01 3.35 5.51 3.84 4 3.91 4.3 2.46 2.51 2.19 2.13 2.05 2.07 2.03 2.11 2.06 2.03 2.07 2.1 2.09 2.12 2.13 2.13 2.17 2.3 2.24 2.26 2.24 2.29 2.28 2.33 2.34 2.49 2.43 5.2 4.79 6.86 4.47 4.98 5.37 4.88 5.72 6.1 9.06 7.77 6.46 3.93 4.63 4.2 3.98 3.99 3.9 3.93 3.69 3.78 4.16 3.88 3.76 3.92 4.1 4.27 4.18 4.15 4.37 5.02 4.9 4.95 4.68 5.56 5.1 4.43 5.11 5.02 4.54 6.01 4.59 4.85 4.03 4.33 3.79 3.41 3.17
4.91 4.73 4.1 5.64 5.38 4.43 4.8 5.05 5.94 5.26 4.49 2.51 4.22 6.49 4.3 4.34 4.55 5 5.05 3.96 3.66 3.8 3.8 5.01 4.69 4.08 3.96 4.43 3.64 3.49 4.77 3.13 3.85 2.24 2.42 2.6 3.06 3.6 5.15 6.85 5.92 5.72 3.8 4.26 4.48 3.95 4.63 5.65 4.25 3.54 4.79 3.09 2.53 2.29 2.3 2.19 2.04 2.04 2.06 2.12 2.03 2.05 1.99 2.04 2.1 2.08 2.09 2.16 2.14 2.21 2.21 2.2 2.24 2.22 2.25 2.42 2.59 2.45 2.41 3.52 3.57 4.31 6.01 7.43 8.07 6.28 6.28 5.34 6.7 5.43 6.53 4.58 3.82 4.03 3.83 3.92 3.67 4.02 3.72 3.67 4.13 4.07 4.11 4.14 3.75 3.79 4.14 4.23 4.5 5.47 5.3 6.07 5.47 5.66 5.33 5.01 4.62 4.57 4.7 4.42 3.99 3.88 3.69 4.24 4.08 3.23 3.38
5.36 4.12 4.4 4.88 4.74 4.24 4.72 5.19 4.61 5.66 4.4 4.5 3.89 4.85 5.1 4.66 4.44 4.13 5.39 5.03 5.03 4.17 4.24 4.85 4.28 4.92 4.79 5.05 4.68 3.51 5.86 6.74 4.73 5.34 4.23 3.26 3.53 4.68 6.33 6.19 6.69 4.92 4.88 3.52 4.44 3.75 3.72 3.46 4.04 3.5 3.53 3.36 2.57 2.29 2.19 2.21 2.16 2.05 2.05 2.03 2.09 2.05 2.07 2.08 2.09 2.08 2.1 2.16 2.19 2.17 2.37 2.29 2.29 2.31 2.32 2.32 2.35 2.43 2.76 3.67 6.73 5.79 5.74 4.56 6.05 6.16 7.03 3.8 6.77 4.19 6.77 3.72 4.04 3.9 3.95 4.39 4.07 3.73 3.75 4.04 3.94 4.18 3.95 3.89 3.87 3.8 3.93 4.6 5.02 5.24 5.52 5.37 5.96 4.18 4.02 5.42 4.45 4.27 4.61 3.97 4.64 4.4 4.6 4.01 4.96 3.25 3.57
5.41 4.89 5.73 4.87 4.38 3.95 5.25 4.85 4.25 4.64 4.46 4.38 5.09 4.09 5.39 4.44 4.21 4.14 4.22 4.99 5.22 5.01 4.68 4.31 4.96 4.48 4.94 3.11 3.75 5.82 4.96 6.58 6.51 5.64 5.87 2.87 7.08 8.65 4.14 8.21 5.62 4.37 5.07 4.83 3.44 3.63 3.74 3.37 4.01 3.7 3.6 3.9 3.16 2.81 2.46 2.3 2.01 2.07 1.98 1.97 2.07 2.07 2 1.97 2.02 1.98 2.04 2.06 2.2 2.09 2.14 2.21 2.25 2.31 2.27 2.29 2.29 2.29 2.37 2.55 2.55 6.11 5.13 5.12 5.26 6.34 4.66 7.96 4.75 6.17 8.96 4.47 5.02 4.12 4.01 4.05 3.78 3.75 4.1 3.84 4.2 3.8 3.88 3.55 3.81 3.85 4.13 4.11 5.11 5.32 5.43 6.93 5.42 5.95 5.25 5.49 4.85 4.42 5.4 4.47 4.16 4.95 3.85 4.18 4.28 4.31 3.95 3.42
5.2 4.6 4.41 4.34 6.09 3.93 4.33 4.15 4.15 4.79 4.69 4.72 4.2 4.45 6.44 5.61 4.22 4.25 4.56 5.38 4.68 5.12 4.69 4.96 4.47 4.69 6.06 5 3.81 4.41 4.03 7.42 6.55 4.56 4.24 5.73 3.73 4.51 5.33 8.14 4.68 5.46 4.11 3.82 4.18 3.63 4.09 3.59 3.94 3.64 3.64 3.85 3.47 2.55 2.38 2.24 1.99 2.05 2.01 2.02 1.99 2.04 2.02 2.05 2.08 2.07 2.09 2.1 2.08 2.12 2.12 2.26 2.28 2.29 2.31 2.27 2.28 2.28 2.64 2.48 3.21 5.75 5.02 6.18 6.59 6.87 6.62 6.37 5.21 5.43 6.91 3.44 4.12 3.71 3.87 4.4 3.81 3.94 3.86 3.93 4.01 3.87 3.71 4.05 3.6 3.83 4.01 4.54 4.84 4.81 5.4 5.55 5.82 5.17 6.05 5.58 5.83 4.69 4.48 5.54 4.14 4.13 4.18 4.02 3.88 4.22 4.5 3.92
4.64 4.53 4.97 5.72 4.53 5.32 4.86 4.83 5.63 4.54 4.47 3.87 4.55 4.85 5.15 4.74 4.52 4.14 5.64 4.73 4.69 4.72 4.87 4.58 5.14 5.13 5.1 3.54 4.65 5.5 4.16 4.87 4.93 4.87 2.81 3.33 4.94 4.03 4.44 4.76 4.59 4.02 4.13 4.28 4.34 3.52 3.71 3.63 3.52 3.98 3.62 3.4 2.97 2.62 2.49 2.25 2.05 2 2.05 2.03 2.01 2 1.96 2.01 2.03 2.05 2.03 2.11 2.07 2.13 2.22 2.18 2.23 2.28 2.29 2.26 2.38 2.3 2.34 2.47 2.74 4.26 4.29 6.73 5.84 4.06 5.45 6.31 6.07 8.51 5.37 4.31 4.01 3.77 4.01 3.86 3.98 4.18 3.8 3.88 3.49 3.66 3.88 3.85 3.74 3.73 3.92 4.3 4.75 5.3 5.77 5.29 5.31 6.06 5.33 5.87 5.34 4.38 4.17 4.37 4.73 4.99 5.29 3.79 4.2 4.28 4.45 3.59
4.16 5.27 4.45 4.51 5.28 5.03 4.75 5.1 5.21 4.68 4.7 4.66 5.43 5.08 5.14 4.7 4.76 4.38 5.01 5.29 4.8 5.18 5.45 5.14 5.02 5.4 4.47 5.55 5.08 5.49 5.54 5.62 5.72 3.26 3.88 5.03 3.34 3.78 3.75 5.19 4.17 3.85 3.94 3.86 3.87 4.05 3.76 3.87 3.72 4.1 3.59 3.28 3.13 2.45 2.17 2.16 2.04 2.03 2.03 2.08 1.99 2.01 2.01 2.06 2.07 2.09 2.06 2.09 2.12 2.17 2.19 2.2 2.2 2.26 2.34 2.32 2.31 2.38 2.41 2.5 2.59 4.4 5.72 5.75 6.9 5.06 6.44 3.49 5.58 7.15 6.05 3.8 4.24 3.83 4.09 3.97 4.12 4.14 4.11 3.73 3.72 3.9 3.91 3.97 3.84 4.08 3.95 4.68 4.95 5.38 5.47 5.36 5.24 5 5.51 5.47 5.2 5.24 4.52 4.43 5.19 5.32 4.22 4.62 3.82 3.73 2.8 3.02
4.71 5.05 4.81 4.4 3.73 4.88 4.57 4.97 5.19 4.64 5.31 4.67 5.14 5.28 4.79 4.44 4.99 4.47 4.37 4.76 5.11 4.99 4.49 5.11 4.5 5.55 5.56 5.47 4.76 5.29 5.11 5.43 4.38 3.76 4.88 4.98 3.87 3.8 3.83 4.25 3.7 4.08 4.07 3.91 3.9 3.66 3.71 3.38 3.49 3.57 3.8 3.41 2.97 2.33 2.11 2.16 2.02 2.06 2.02 2 1.93 1.95 1.95 2.02 1.99 2.05 2.09 2.02 2.06 2.04 2.14 2.24 2.28 2.18 2.24 2.22 2.25 2.28 2.4 2.52 2.63 3.94 7.02 4.41 6.03 6.16 2.47 5.97 6.08 5.51 5.87 5.48 4.74 4.2 4.16 4.23 3.85 4.19 4.12 3.79 3.85 3.72 4 3.69 3.79 3.87 3.91 4.67 5.32 4.74 5.55 5.27 5.15 5.26 5.11 5.25 4.7 5.23 4.42 4.82 4.99 3.86 5.16 4.24 4.29 3.86 3.9 3.79
3.92 5.83 4.77 4.59 4.72 5.35 4.46 5.62 4.84 4.52 4.65 4.68 5.29 4.84 5.09 4.68 4.7 4.57 4.36 4.87 4.65 4.36 4.2 5.53 4.74 5.19 5.24 4.86 4.24 4.46 5.37 4.44 4.63 4.33 5.1 5.32 3.73 3.91 4.11 3.83 3.52 3.71 3.49 3.87 3.69 3.68 3.9 3.59 3.96 3.51 3.79 3.3 2.69 2.37 2.05 2.06 2.02 1.98 2.01 1.89 1.93 1.89 1.93 1.86 1.98 2.03 1.99 2.05 2.04 2.11 2.13 2.17 2.21 2.27 2.25 2.25 2.27 2.25 2.33 2.44 2.53 2.95 4.23 4.67 6.79 6.62 3.07 5.04 7.45 6.55 6.2 5.41 5.73 3.73 3.32 4.25 3.8 3.48 3.82 3.76 3.69 3.98 4.17 3.85 3.83 4.03 3.96 4.66 4.66 4.96 5.7 5.21 5.18 5.27 5.1 5.08 4.86 4.25 4.75 4.37 4.73 4.29 4.48 3.98 4.46 3.77 3.54 3.72
4.65 4.54 4.69 4.03 3.61 5.01 4.97 4.11 4.02 5.22 4.29 4.85 4.86 5.08 4.99 4.62 4.75 4.22 4.21 4.36 5.43 5.4 4.71 4.79 4.33 4.58 5.26 3.69 5.43 5.2 4.44 5.54 5.24 4.65 4.92 5.29 3.69 4.24 3.58 3.78 3.74 3.84 3.6 3.96 3.65 3.48 3.7 3.71 3.39 3.68 3.46 3.35 2.47 2.32 2.18 2.07 1.94 1.97 1.95 1.97 1.9 1.94 1.95 1.95 2.02 2 2 2.03 2.07 2.06 2.12 2.12 2.26 2.25 2.35 2.23 2.18 2.37 2.26 2.49 2.6 3.26 3.93 5.17 7.25 4.43 3.17 5.15 5.24 3.86 5.61 6.91 4.09 4.14 3.49 4.1 3.91 3.89 3.85 3.78 4.04 3.79 3.53 3.63 3.83 3.95 4.37 3.95 4.87 5.2 5.45 5.1 5.36 5.14 4.92 5.12 4.69 4.46 4.37 5.16 4.8 4.72 4.2 4.47 4.74 4.63 3.54 4.58
4.55 4.94 4.55 3.79 3.85 3.32 4.95 4.82 4.25 4.99 4.57 3.79 4.41 5.06 5.19 4.6 4.36 4.28 4.52 4.97 4.31 4.42 4.49 4.75 4.42 4.67 4.99 4.56 4.73 5.37 4.43 5.13 3.73 4.96 5.25 4.1 3.87 3.47 3.6 3.93 4.01 3.7 3.77 3.72 3.85 3.69 3.94 3.86 3.79 3.74 3.52 3.41 2.63 2.38 2.14 2.01 1.96 2.02 1.97 1.95 1.9 1.9 1.87 1.98 1.96 1.94 1.98 1.99 2.05 2.09 2.1 2.18 2.22 2.23 2.28 2.22 2.25 2.25 2.34 2.37 2.52 2.61 4.84 6.69 4.61 4.32 4.46 4.93 5.23 3.8 4.58 8.25 3.56 5.17 3.15 3.99 3.43 3.7 3.86 3.76 3.79 3.77 3.94 3.71 3.65 3.77 3.98 4.2 4.38 5.23 5.85 5.18 5.47 5.3 4.95 4.97 5.03 4.1 4.33 5.19 4.54 4.17 4.11 4.25 4.45 4.04 3.89 3.21
4.6 5.32 4.4 4.9 5.8 6.34 4.75 5.55 4.69 4.75 4.52 4.56 5.11 4.16 4.23 5.03 4.52 4.54 4.56 4.81 3.87 5.05 5.32 4.69 4.97 4.67 4.57 4.21 4.69 4.63 4.55 4.97 4.25 5.1 4.54 4.2 4.25 4.02 4.11 3.7 3.47 3.76 4.27 4 3.51 3.6 3.57 3.63 3.71 3.85 3.81 3.41 2.37 2.2 2.09 2.06 1.97 1.98 2.02 1.99 1.95 1.91 1.94 1.9 1.94 1.97 1.99 2.05 2.03 2.12 2.13 2.25 2.38 2.43 2.31 2.22 2.22 2.29 2.25 2.42 2.63 3.07 2.99 5.84 4.92 4.78 4.66 3.69 5.46 6.73 4.85 4.39 3.35 5.7 6.14 4.04 4.19 4.11 4.06 4.22 3.69 3.72 3.91 3.92 3.97 3.81 3.77 4.16 4.57 4.52 5.81 5.78 5.48 5.21 5.19 5.16 5.1 4.57 4.8 4.37 3.97 4.77 3.82 4.94 4.22 4 3.07 3.7
4.52 4.34 4.93 4.64 4.71 5 4.52 4.11 5.44 4.61 4.77 4.46 5.38 4.47 5.49 4.46 4.19 4.12 4.7 4.99 4.4 5.03 4.24 4.4 4.46 5.53 4.46 5.05 5.07 5.11 4.1 4.19 5.16 4.8 4.5 3.64 3.75 3.72 3.55 3.68 3.75 3.83 3.69 3.82 3.93 4.07 3.38 3.82 3.69 3.75 3.63 3.45 2.64 2.23 2.03 2 2 1.96 1.93 2 1.93 1.89 1.92 1.91 1.93 1.98 1.98 2.04 2 2.05 2.16 2.1 2.29 2.36 2.32 2.33 2.32 2.35 2.37 2.49 2.9 3.3 4.48 5.71 5.09 2.94 3.54 5.68 4.64 4.37 3.36 4.18 4.24 5.1 4.27 4.19 3.89 3.68 3.67 3.94 3.76 3.99 3.69 3.9 3.94 3.62 3.96 3.68 4.53 5.31 5.23 5.17 5.05 5.34 5.36 5.18 4.99 4.07 4.66 4.64 4.93 4.78 4.62 4.16 3.66 3.63 4.14 3.97
4.95 4.96 4.73 4.43 4.5 4.72 5.63 5.39 4.65 4.78 4.79 5.07 4.23 4.59 4.78 5.09 4.75 4.45 4.57 5.09 4.83 4.97 5.57 4.52 4.84 5.64 4.64 4.45 5.08 4.45 4.31 4.2 4.49 5.06 4.05 3.86 3.88 3.77 3.69 3.58 4.15 3.99 3.7 3.8 3.96 3.73 3.64 3.52 3.63 3.96 3.57 3.29 2.54 2.44 2.08 2.1 2.04 1.96 1.96 2.02 1.96 2.03 2.02 1.96 2.09 2.03 2.01 2.04 2.07 2.12 2.12 2.23 2.25 2.41 2.56 2.27 2.38 2.48 2.73 2.85 3.29 4.87 4.96 4.92 5.36 6.46 4.84 4.12 5.79 5.01 6.63 4.51 4.61 4.31 4.19 4.19 3.93 3.96 3.74 3.77 3.91 3.88 3.78 3.93 4.19 4.17 3.81 4.47 4.78 5.3 5.04 5.44 5.35 5.37 5.25 5 5.07 4.57 4.4 4.11 4.37 4.23 4.7 3.81 5.78 4.7 4.58 2.73
4.33 4.39 4.63 4.19 5.54 4.95 4.45 5.49 3.74 4.84 3.73 5.65 4.96 4.82 4.29 4.43 4.48 3.98 4.27 4.43 4.5 4.96 5.1 4.84 5.13 5.35 4.92 4.61 4.58 4.97 4.85 4.91 4.6 4.4 3.94 4.4 3.54 3.8 3.78 3.86 3.67 3.86 3.35 3.28 3.66 3.97 3.48 3.53 3.44 3.33 3.7 3.65 2.35 2.2 2.07 1.95 1.93 1.95 1.91 1.94 1.89 1.85 1.89 1.82 1.92 2 1.97 1.97 2.03 2.01 2.01 2.09 2.26 2.42 2.42 2.52 2.53 2.48 2.81 2.88 3.5 4.09 5.01 4.14 6.13 4.2 3.94 4.39 4.9 8.01 5.88 4.1 6.16 3.55 5.14 4.16 3.91 3.65 3.59 3.89 3.93 4.2 3.53 3.9 3.85 3.95 4.21 4.25 4.67 5.21 5.12 5.04 5.28 6.4 5.16 4.88 4.47 4.21 5.24 4.62 3.9 4.36 4.32 4.58 4.16 3.98 2.83 2.51
5.25 4.69 5 4.83 4.39 4.6 5.37 4.65 5.01 4.87 4.55 5.23 5.47 4.68 5.12 4.36 4.89 4.36 4.96 4.46 4.45 4.49 4.77 4.37 4.67 5.13 4.83 4.81 4.54 4.36 4.71 4.19 4.09 4.11 4.33 4.35 3.66 3.55 3.79 3.54 3.55 3.7 4.07 3.96 3.64 3.68 4.2 3.6 3.47 3.55 3.26 2.58 2.26 2.03 2.05 1.94 1.95 1.94 1.9 1.95 1.92 1.96 1.91 2.02 2.03 1.99 1.97 1.98 2.03 1.96 2.1 2.22 2.65 2.6 2.44 2.45 2.56 3.14 4.87 3.24 3.71 2.93 3.95 2.81 5.28 8.7 6.23 3.98 6.14 4.35 3.76 5.18 5.17 5.91 5.16 3.71 3.78 3.75 3.99 3.81 3.76 3.72 3.83 3.77 3.77 3.78 4.65 4.66 6.29 5.52 5.3 5.48 5.73 5.4 5.07 4.4 4.7 4.02 4.64 4.09 3.95 4.74 4.16 4.79 5.61 6.36 4.25
4.79 3.65 5.05 3.86 4.18 4.31 3.77 5.76 5.4 5.37 5.15 5.71 4.64 4.37 4.43 4.45 4.78 4.17 4.16 4.41 4.22 4.43 4.44 5.27 4.76 4.64 4.19 4.28 4.21 4.69 4.2 4.65 4.31 4.13 3.94 3.85 4.02 3.81 4.24 3.49 4.09 3.92 3.98 4.19 3.95 3.99 3.59 3.84 3.71 3.84 3.54 2.98 2.67 2.27 2.09 2.08 1.94 2.04 1.97 1.98 2.02 1.93 2.03 1.98 2.04 2.11 2.08 2.03 2.08 2.05 2.1 2.13 2.16 2.37 2.7 2.52 2.36 2.6 2.67 2.66 3.91 4.13 3.79 4.93 3.77 4.89 5.22 6.08 6.32 4.31 5.66 5.08 5.87 4.99 5.22 4.27 3.82 4.1 3.82 3.61 3.81 3.66 3.77 4.15 4.09 4.05 3.81 4.21 4.71 5.61 5.38 6.3 5.19 5.4 5.33 5.14 3.44 4.7 4.39 4.13 4.36 3.9 4.87 4.33 4.89 4.11 4.1 2.12
5.03 4.84 3.84 4.4 5.22 4.04 5.25 7.98 5.12 4.78 4.53 4.1 4.81 4.52 4.61 5.03 4.36 4.37 4.6 4.85 4.45 4.54 4.27 4.54 4.63 4.61 4.99 4.74 4.79 4.51 4.79 4.26 4.05 4.24 3.88 3.89 3.79 3.9 4.52 3.7 3.92 3.73 3.64 3.8 3.8 3.22 3.58 3.46 3.89 3.44 3.68 3.34 2.32 2.17 2.05 1.99 2 1.92 1.98 1.97 1.98 2.12 1.95 1.96 2 2.07 2.07 2 2.06 2.07 2.11 2.12 2.22 2.33 2.46 2.3 2.41 2.68 2.57 4.86 6.07 4 3.85 2.54 5.34 3.31 4.15 3.93 5.01 4.47 4.77 5.91 6.11 6.32 5.11 4.19 4.04 3.75 3.78 3.81 3.73 3.91 3.66 3.83 3.9 4.08 3.96 4.42 4.59 4.85 4.69 5.27 5.24 5.13 5.43 5.46 4.93 4.14 4.07 4.08 4.79 4.38 3.96 4.44 4.22 3.12 3.33 2.83
4.4 3.31 3.15 3.69 3.71 3.63 3.85 3.28 5.86 4.43 4.18 4.77 3.82 4.91 5.36 4.19 4.65 4.38 4.53 4.58 4.89 4.31 4.94 4.78 4.97 5.08 4.24 4.73 4.52 4.21 3.93 3.09 3.09 3.43 3.62 3.5 4.05 3.73 3.78 3.93 3.73 3.57 4.03 4.26 3.81 3.43 4.42 3.15 3.48 3.22 4.05 2.83 2.39 2.13 1.93 1.9 1.91 1.88 1.91 1.98 1.93 1.86 1.95 2.01 2.02 2.03 2.03 2.03 2.04 2.02 2.04 2.17 2.18 2.37 2.41 2.42 2.28 2.47 3.12 6 5.4 4.24 4.24 5.37 5.68 4.88 4.64 3.85 3.58 4.6 4.5 4.52 5.11 5.58 5.05 4.58 3.74 3.99 3.7 3.82 3.82 3.97 3.74 3.7 3.69 3.77 3.93 4.22 4.34 5.08 4.93 5.86 5.78 4.86 5.38 6.25 4.42 4.79 4.74 4.3 3.73 4.03 4.78 3.98 4.79 4.97 4.23 3.44
3.29 2.82 3.28 2.45 3.29 3.03 2.75 4.12 4.29 3.7 3.8 4.51 4.54 4.66 4.36 5.13 4.67 4.24 4.31 4.39 3.84 4.19 5.3 4.32 5.28 4.69 5.58 4.62 3.97 3.37 2.81 2.98 2.79 3.02 3.42 3.3 3.39 3.76 4.24 3.42 4.56 3.05 3.86 4.02 4.21 3.62 3.57 3.21 4.58 3.35 3.06 2.84 2.51 2.18 2.04 2.01 2.03 1.96 1.96 1.93 1.98 1.93 1.96 1.96 2.01 2.01 2.05 2 1.96 2.07 2.03 2.16 2.23 2.37 2.41 2.45 2.4 2.68 3.11 4.05 4.27 4.99 6.71 4.65 3.51 3.38 3.36 3.73 2.97 3.39 3.56 5.42 6.02 5.69 5.23 4.67 4.17 3.73 3.8 3.91 3.88 4.02 4.05 3.77 3.74 4.12 4.26 4.78 4.48 4.74 5.32 5.48 5.3 5.99 4.88 4.96 5.5 4.76 4.23 4.51 4.03 3.82 4.23 4.13 3.92 3.17 4.19 3.82
3.04 2.68 3.3 3.14 2.63 3.47 2.08 2.54 3.6 3.53 3.94 3.57 3.99 4.36 4.14 5.44 4.2 4.37 3.65 3.79 4.42 4.38 4.44 4.76 4.78 3.79 4.37 4.51 4.41 3.41 2.74 2.49 2.29 2.36 3 3.01 3.45 4.22 3.89 3.71 3.8 3.52 4 3.51 3.69 3.89 3.94 3.77 3.49 4.19 3.91 2.74 2.19 2.05 1.98 1.97 1.94 1.9 1.96 1.96 1.97 1.99 1.91 1.95 2.02 2 2.01 2.04 1.98 2.12 2.07 2.22 2.18 2.18 2.44 2.55 2.31 2.45 3.43 4.85 5.77 5.79 4.45 3.07 3.86 3.26 3.04 4.27 3.42 3.88 3.61 4.39 6.01 6.42 6.42 4.87 4.99 4.18 3.86 3.88 4.09 3.8 3.61 3.86 3.97 3.98 3.94 4.7 4.9 4.89 5.72 5.54 5.33 5.58 5.3 4.92 4.66 4.59 4.78 4.29 4.41 3.68 4.55 4.33 4.09 3.85 3.46 1.94
3.01 3.44 2.46 2.48 2.45 2.52 2.37 2.8 3.03 2.75 2.92 3.31 2.96 2.86 3.12 4.25 4.06 3.49 3.86 5.41 4.3 3.84 4.15 3.5 3.37 4.79 4.65 3.97 4.41 2.52 2.58 2.57 2.36 2.43 2.68 2.72 3.67 3.65 3.46 3.64 3.12 3.91 3.67 3.7 3.31 3.36 3.1 3.46 3.41 3.77 3.33 2.43 2.23 2.31 2.04 2 1.99 1.98 2.04 1.98 1.99 1.99 2.02 2.07 2.05 2.06 2.12 2.05 2.03 2.09 2.15 2.17 2.39 2.38 2.6 2.53 2.74 2.51 3.89 5.26 5.93 4.67 4.45 5.86 4.89 4.22 3.97 4 3.95 4.05 5.41 5.86 5.44 4.12 4.81 4.53 3.93 3.93 4.17 3.69 3.75 3.72 4.14 3.7 3.82 3.91 4.38 4.83 5.94 5.18 5.2 5.81 5.61 5.48 5.48 4.85 4.46 4.19 4.62 4.44 4.79 4.1 3.99 3.96 4.23 3.08 4.07 2.7
2.15 3.11 2.4 2.35 2.36 3.02 2.81 2.02 2.7 2.76 2.93 2.9 3.05 2.72 3.5 3.67 3.72 2.65 2.81 2.76 2.67 3.68 3.2 3.93 3.91 3.23 3.38 4.33 3.37 2.56 2.45 2.29 2.37 2.43 2.3 3.26 3.6 3.92 3.31 3.46 2.91 3.6 3.62 3.55 3.22 3.23 3.22 3.72 3.5 3.77 3.17 2.48 2.33 2.06 1.98 1.95 2.01 1.96 2.02 2.04 2.01 2.06 2.05 1.96 2.05 2.02 2.11 2.05 2.06 2.18 2.08 2.18 2.32 2.43 2.41 2.76 2.51 3.02 3.56 4.56 4.4 4.95 5.72 5.3 4.19 5.16 4.35 3.49 3.99 3.48 6.08 4.57 5.45 5.52 6.6 4.92 3.79 4.13 3.73 3.76 3.79 3.88 3.97 3.74 3.83 3.87 4.28 4.69 5.56 5.1 5.62 5.31 5.68 4.89 5.85 5.13 5 4.07 4.5 4.21 4.2 4.1 4.72 4.91 4.06 3.87 4.46 3.39
2.92 2.81 2.5 2.51 2.67 2.46 2.32 2.65 2.43 2.56 2.53 2.62 2.44 2.9 2.93 2.72 3.25 2.64 3.18 2.23 2.18 2.64 2.91 4.32 4.24 3.91 4.61 3.55 2.75 2.45 2.32 2.17 2.4 2.44 3.11 3.38 3.44 3.26 3.13 3.16 3.39 2.74 3.06 3.31 2.95 2.64 3.41 3.23 3.48 3.06 3.05 2.32 2.16 2.13 2.04 2.01 2.02 1.95 2.14 2 2.01 2.02 2.12 2.09 2.09 2.08 2.07 2.07 2.12 2.13 2.09 2.23 2.24 2.53 2.58 2.5 2.63 3.01 4.31 7.39 4.48 3.32 5.21 6.34 5.98 3.98 3.85 4.1 4 3.88 4.61 4.47 6.19 5.78 7.22 5.96 4.43 3.78 4.08 4.15 3.84 3.96 4.66 4.51 3.92 3.75 4.47 4.48 6.52 5.17 5.36 5.31 5.56 5.65 6.02 5.95 4.77 4.91 4.82 4.68 4.09 4.23 4.85 4.81 4.25 5.11 3.42 3.31
2.71 2.6 2.69 2.43 2.51 2.54 2.25 2.24 2.81 2.48 2.31 2.6 2.74 2.91 2.68 3.04 2.27 2.56 2.83 2.55 2.49 3.13 3.02 3.25 4.31 4.34 2.56 3.44 3.63 2.53 2.57 2.21 2.33 2.72 2.81 3.39 3.24 3.2 3.35 3.17 3.27 3.7 2.92 2.63 3.91 2.56 3.5 3.04 4.26 2.8 2.29 2.39 2.19 2.06 2 1.99 2.07 2.01 1.98 2.09 2.1 2.04 2.05 2.02 2.1 2.1 2.08 2.12 2.08 2.07 2.22 2.27 2.32 2.33 2.93 3.36 3.07 2.89 3.17 4.33 4.27 5.39 5.22 5.58 4.03 3.7 4.04 3.82 4.13 2.98 4.14 4.24 6.15 6.14 5.25 4.27 4.55 3.99 3.97 4.18 4.52 3.57 4.13 4.04 3.75 4.05 5.24 5.76 5.11 5.68 5.22 5.19 4.84 4.87 4.91 4.47 4.69 4.09 4.3 4.19 4.33 4.28 4 4.06 4.37 4.98 5.16 4.9
2.46 2.1 2.82 2.18 2.43 3.26 3.07 2.75 2.66 2.48 2.65 2.16 2.13 2.8 2.79 3.06 2.44 2.08 2.63 2.83 2.41 2.49 3.11 4.09 2.91 3.27 2.5 3.09 2.28 2.54 2.39 2.25 2.14 2.64 2.91 3 3.44 3.58 3.02 2.69 2.81 2.38 3.15 3.17 2.45 3.14 2.48 3.43 2.63 3.36 2.92 2.54 2.27 2.07 2.1 2.04 2.09 2.03 1.95 2.04 1.99 2.1 2.02 2.04 2.07 2.09 2.04 2.06 2.07 2.08 2.14 2.17 2.25 2.51 3.32 3.3 3.05 4.07 3.79 3.39 4.72 3.16 3.81 2.8 4.05 5.69 3.02 3.82 4.53 4.3 4.48 4.46 7.67 4.93 6.2 4.99 4.21 4.02 3.77 4.12 4.62 3.94 3.65 4.02 3.88 4.21 4.55 4.46 4.67 5.8 6.1 5.76 5.69 6.34 5.78 5.46 4.18 5.31 4.12 4.69 4.81 4.11 5.3 4.73 3.17 3.59 3.31 4.2
2.3 2.12 2.51 2.44 2.19 2.36 2.62 2.31 2.89 2.14 3.19 2.12 2.26 2.79 2.54 2.34 2.52 3.19 2.61 2.16 3.01 2.9 3.46 3.25 3.18 3.8 2.98 3.22 3.04 2.49 2.83 2.68 2.5 3.39 2.66 2.96 3.03 2.88 2.75 2.26 3.11 2.43 3.9 2.38 2.98 2.44 3.1 3.91 4.4 2.72 2.98 2.44 2.38 2.19 2.06 2.01 2.09 2.2 2.03 2.08 2.1 2.12 2.14 2.17 2.12 2.13 2.11 2.09 2.09 2.12 2.2 2.32 2.62 2.81 3.14 3.94 3.99 3.64 3.4 3.93 4.42 4.51 3.83 3.79 3.78 4.86 2.93 4.35 3.44 3.61 4.57 5.1 4.69 4.94 6.08 5.02 5.25 4.15 4.49 4.17 3.98 4.53 4.24 4.26 4.28 4.21 4.45 4.88 5.14 5.48 5.53 4.71 5.85 5.28 4.72 4.69 3.92 4.66 3.93 4.82 4.76 4.98 4.58 4.32 3.9 4.96 4.88 3.34
1.98 2.85 2.18 2.2 2.31 2.48 1.98 2.48 2.55 2.18 2.14 2.16 2.63 2.56 2.56 2.39 2.39 2.53 2.62 2.28 2.72 2.21 2.28 2.3 3.38 2.21 2.08 1.96 3.1 2.57 2.62 2.52 2.73 2.41 2.2 3.07 2.14 4 2.63 2.6 2.59 3.3 3.01 2.37 2.89 2.95 2.83 3.43 4.59 2.79 2.23 2.52 2.12 2.02 2.03 1.98 2 1.95 2.02 2.11 2.11 2.2 2.16 2.11 2.09 2.19 2.17 2.09 2.04 2.11 2.24 2.3 2.4 2.94 3.43 3.9 3.65 3.72 3.65 3.87 2.62 3.27 3.53 4.11 4.54 3.48 3.74 4.15 4.69 2.93 3.43 5.57 4.54 5.85 4.95 6.22 4.17 4.05 3.99 3.93 4.21 3.5 3.84 4.2 3.82 4.4 4.69 5.26 5.79 5.27 5.46 5.26 5.25 4.99 4.97 5.41 3.9 4.12 4.2 3.91 3.79 3.8 3.67 4.16 3.77 4.01 3.87 3.57
2.01 2.21 2.18 2.16 2.24 1.91 2.03 1.98 2.37 2.25 1.97 2.25 2.62 2.43 2.26 3.55 2.25 3.04 2.33 2.58 3.08 2.23 2.82 2.61 2.12 2.21 2.25 2.55 2.47 2.32 2.39 2.37 2.08 2.12 2.97 3.2 2.34 2.82 2.21 3.05 2.96 4.25 2.46 2.61 2.51 2.9 2.77 2.79 2.94 3.23 2.33 2.3 2.55 2.05 2.11 2.07 2.11 2.04 2.11 2.08 2.21 2.25 2.16 2.2 2.19 2.17 2.25 2.22 2.22 2.2 2.29 2.35 2.52 2.97 3.68 3.7 3.81 4.32 4.21 4.48 4.25 3.67 3.74 5.6 3.32 2.89 2.89 3.96 4.68 3.49 6.01 5.13 4.22 6.14 4.97 5.01 3.95 4.31 3.83 3.9 4.55 5.18 4.03 3.88 4.09 4.1 4.19 4.92 5.76 5.21 5.47 4.85 4.94 5.42 6.15 5.63 4.03 4.18 4.39 4.35 5.1 4.68 5.09 4.03 4.71 3.95 3.83 5.08
1.89 2.22 2.02 2.47 1.97 1.88 2.23 2.37 2.13 2.61 2.27 2.29 2.13 2.47 2.4 2.58 3.26 2.41 3.05 3.27 2.32 2.58 3.01 2.45 2.26 2.05 2.21 2.1 2.33 2.15 2.36 2.18 3.12 2.29 3.06 2.14 2.2 2.52 3.25 2.85 2.67 2.43 2.48 2.85 3.25 2.61 2.86 2.75 3.87 2.57 2.51 2.37 2.11 2.2 2.09 2.11 2.12 2.21 2.13 2.16 2.22 2.23 2.24 2.24 2.32 2.21 2.2 2.24 2.31 2.13 2.3 2.5 2.71 3.13 3.71 3.72 3.7 4.15 4.12 5.08 3.21 3.79 4.63 3.74 3.43 3.29 4.02 5.37 4.63 4.15 5 5.51 3.19 6.01 5.39 5.3 4.3 4.67 3.75 4.14 3.85 4.81 3.95 3.94 4.33 4.37 4.48 4.81 6.29 5.66 5.57 5.72 5.44 5.61 5.11 4.81 4.6 4.32 4.25 4.09 4.92 4.98 4.1 3.22 4.12 5.2 3.66 3.56
2.08 2.38 2.35 2.64 2.23 2.17 2.33 2.52 2.1 2.24 2.33 2.38 2.28 2.05 2.13 2.2 2.28 2.29 3.3 2.55 2.79 2.71 2.62 2.11 2.06 2.46 2.28 2.61 2.31 2.37 2.02 2.27 2.23 2.81 2.38 2.26 3.14 3.07 3.39 3.2 3.05 2.82 2.65 2.8 2.51 2.52 2.83 3.15 3.48 2.9 2.85 2.49 2.17 2.05 2.4 2.15 2.08 2.02 2.11 2.21 2.23 2.31 2.39 2.21 2.19 2.18 2.19 2.11 2.17 2.17 2.28 2.41 2.55 3.24 3.47 3.84 3.54 4.33 3.9 4.09 4.27 3.89 4.01 3.05 2.54 3.42 4.84 2.13 4.29 5.28 4.03 5.79 5.62 4.83 5.6 4.49 3.51 3.93 4.21 4.41 3.91 4.26 4.37 3.97 4.31 4.51 4.43 4.43 5.98 5.16 5.5 5.41 5.04 5.28 4.95 4.77 4.84 4 4.54 3.91 4.19 3.91 4.63 3.91 2.83 3.95 3.3 4.07
1.94 2.41 2.13 2.35 2.51 1.93 2.11 2.14 2.28 2.03 2.61 2.39 2.4 2.61 2.7 2.34 2.7 2.73 2.98 2.68 2.21 2.35 2.95 2.64 1.95 2.54 2.58 2.76 1.98 2.55 2.44 2.64 2.37 2.42 2.78 3.05 2.9 2.84 2.66 2.98 3.07 3.86 3.41 3.26 2.97 2.56 2.93 2.59 3.46 2.31 2.49 2.21 2.18 2.12 2.17 2.12 2.14 2.11 2.16 2.14 2.17 2.35 2.43 2.36 2.34 2.34 2.21 2.23 2.29 2.41 2.44 2.46 3.01 3.26 3.29 3.7 3.54 4.37 4.14 4.01 4.79 4.89 3.12 4.17 4.26 4.17 3.91 4.6 3.74 5.37 4.04 5.01 5.34 5.57 4.54 5.14 4.17 4.21 4.14 3.88 3.7 4.5 3.63 4.11 4.38 4.16 4.73 4.26 5.71 5.97 5.28 5.98 5.62 5.55 4.24 5.59 4.21 4.4 4.2 4.29 4.65 4.67 4.42 4.18 3.79 4.44 2.49 3.27
2.25 2.27 2.15 2.37 2.15 2.14 2.59 1.9 2.68 2.3 3.3 2.27 2.31 2.7 2.38 2.63 2.67 2.18 2.26 3.78 2.7 2.79 3.43 2.73 2.94 1.99 2.25 2.83 2.29 2.23 2.58 2.23 2.61 2.53 2.23 2.58 2.92 3.49 4 3.92 3.44 3.7 2.99 2.74 2.31 2.54 2.7 3.47 3.47 3.09 2.88 2.28 2.17 2.21 2.47 2.15 2.29 2.11 2.17 2.26 2.3 2.53 2.26 2.53 2.31 2.22 2.23 2.15 2.27 2.27 2.32 2.43 2.93 3.53 3.67 3.58 3.58 3.77 4.79 4.28 4.25 5.26 2.68 3.58 3.65 5.52 3.95 4.15 3.91 3.86 4.7 4.35 3.9 5.86 4.31 4.16 4.43 3.79 4.3 4.04 4.39 3.73 3.8 3.92 4.48 4.63 4.37 5.32 5.48 4.9 5.96 5.43 5.3 4.7 4.95 4.34 4.17 4.52 4.07 4.2 4.22 4.24 4.38 3.79 3.41 3.38 2.58 1.73
1.92 1.85 2.12 2.36 1.9 2.1 1.93 2.22 2.19 2.21 1.95 2.5 3.09 2.75 3.12 3.25 2.48 2.7 3.2 3.84 4.46 4.48 3.63 4.03 3.93 3.33 3.12 2.99 2.85 3.08 2.38 2.34 2.29 3 3.74 3.54 4.19 4.42 4.06 4.28 2.77 3 2.77 2.5 2.51 2.67 2.89 2.68 3.49 3.11 2.63 2.41 2.24 2.1 2.11 2.21 2.1 2.09 2.08 2.14 2.22 2.58 2.68 2.54 2.3 2.14 2.31 2.24 2.34 2.26 2.36 2.52 3.34 3.54 4.04 3.8 3.42 3.95 4.16 4.6 4.55 4.06 4.03 4.2 3.84 3.93 4.22 4.13 3.83 7.24 4.47 4.51 5.38 5.73 4.59 5.18 3.83 3.83 4.1 3.87 4.04 4.38 4.46 3.88 4.05 3.89 4.25 4.73 5.42 5.1 5.65 5.97 5.16 5.74 5.32 5.11 4.07 4.03 3.82 4.08 4.3 4.3 4.22 3.91 4.11 4.24 3.67 6.06
2.5 2.01 2.18 2.26 2.81 3.2 2.11 2.57 2.89 2.95 2.23 2.52 2.83 3.35 2.95 2.86 2.35 3.47 3.93 4.7 3.97 3.91 4.61 4.55 3.3 4.23 5.2 3.69 2.76 2.41 2.04 2.36 2.31 2.38 3.02 3.49 3.94 4.28 3.41 3.17 2.62 4.43 2.7 2.41 3.06 2.84 3.72 3.1 3.43 3.04 2.84 2.4 2.21 2.19 2.23 2.15 2.16 2.11 2.21 2.25 2.38 2.62 2.5 2.26 2.29 2.23 2.27 2.22 2.23 2.34 2.39 2.57 3.19 3.59 3.72 3.93 4.32 3.64 3.65 4.12 3.8 4.95 5.13 4.58 3.99 4.18 4.75 4.55 3.79 4.01 3.76 4.05 4.68 5.49 4.3 4.71 4.28 4.08 4.28 4.15 3.84 4.13 4.17 4.47 4.25 3.92 4 4.19 3.86 5.7 6.03 4.65 6.2 5.7 4.97 5.17 4.54 4.11 4.42 4.03 4.89 4.01 4.33 4.01 5.61 5.05 3.69 3.45
2.32 2.54 2.08 2.48 2.27 1.82 2.52 2.44 2.37 2.48 2.43 2.26 4.87 3.69 2.55 2.73 2.67 3.5 3.26 3.69 4.68 4.2 3.97 4.37 3.78 4.51 3.98 3.54 5.25 3.06 2.35 2.33 2.53 3.58 3.67 3.95 4.03 4.14 3.37 4.22 4.23 2.64 3.47 3.33 3.83 2.98 2.6 3.58 3.38 3.54 2.91 2.81 2.23 2.16 2.17 2.15 2.13 2.18 2.24 2.35 2.47 2.53 2.63 2.98 2.28 2.43 2.22 2.24 2.24 2.25 2.38 3.4 3.04 3.45 3.88 3.46 3.95 4.3 3.51 3.74 4.09 3.87 5.54 3.03 4.68 3.82 4.76 4.71 5.52 6.13 4.71 4.66 5.61 5.05 5.21 4.7 3.99 4.06 4.09 3.83 4.41 4.35 3.7 4.04 3.83 4.02 4.58 5.32 4.49 5.76 5.19 5.08 5.46 5.21 4.81 4.21 4.56 4.27 4.34 4.76 4.58 4 3.73 4.69 4.27 3.86 3.53 2.62
2.33 2.45 3.02 3.09 2.5 3.19 2.86 2.72 2.43 2.05 4.03 4.09 3.29 4.03 2.41 2.98 3.02 3.21 4.52 4.82 3.79 5 4.26 4.2 3.89 3.84 3.41 4.02 4.16 2.26 2.13 2.27 3.22 3.31 3.37 2.84 3.76 4.06 3.94 4.68 3.66 5.14 3.89 3.39 2.63 2.42 2.79 2.99 3.14 3.86 2.59 2.67 2.2 2.18 2.16 2.07 2.17 2.17 2.32 2.41 2.76 2.69 2.59 2.84 2.65 2.36 2.27 2.29 2.43 2.36 2.51 2.89 3.23 3.88 3.68 3.5 4.07 3.72 4.49 4.34 4.64 4.25 3.78 4.76 5.43 3.79 4.93 4.33 4.35 3.91 6.29 4.47 4.37 5.41 4.49 4.62 4.73 3.72 3.84 3.91 3.9 3.75 3.85 4.22 4.56 4.25 4.43 4.46 5.64 5.35 5.05 5.23 5.66 5.26 5.04 3.98 5.22 4.22 3.87 3.69 4.26 4.16 4.18 3.22 4.86 3.64 4.31 5.94
2.6 2.06 2.06 2.66 2.12 4.73 2.48 5 3.09 2.12 2.87 3.18 3.39 3.25 3.84 3.73 3.69 5.31 5.69 3.98 4.62 4.5 4.82 4.51 3.95 4.4 3.08 3.47 2.15 2.08 2.28 2.73 3.6 4.18 3.54 4.89 3.34 4.24 3.66 4.13 3.24 3.46 3.09 3.12 3.25 2.76 3.8 3.33 3.03 2.63 2.46 2.28 2.23 2.18 2.29 2.16 2.25 2.5 2.88 3.28 3.53 2.88 2.66 2.51 2.6 2.34 2.35 2.25 2.44 2.8 3.66 3.38 3.45 3.82 3.86 3.7 4.1 4.29 5.27 5.85 4.52 4.27 4.14 5.5 3.78 4.64 5.54 5.48 5.32 4.9 4.97 4.44 5.39 5.26 4.78 4.26 4.3 4.35 4.19 4.82 3.73 3.98 4.38 4.27 5.21 4.75 5.12 4.31 4.6 5.47 5.06 5.59 5.18 4.75 4.4 4.07 4.39 4.11 4.9 3.75 4.37 3.97 5.14 3.77 2.46 4.34
2.98 3.35 3.03 2.86 2.21 3.11 2.2 4.79 2.69 2.58 2.11 2.47 2.97 3.01 3.26 3.37 3.09 3.99 3.99 5 5.52 4.68 4.35 4.24 4.6 3.36 4.53 3.09 2.56 2.04 2.65 2.57 3.12 3.46 3.68 3.65 3.41 4.77 3.31 4.49 2.49 4.09 2.82 3.6 3.06 2.79 2.95 3.86 3.97 2.36 2.67 2.28 2.2 2.31 2.26 2.28 2.15 2.33 2.62 3.16 3.85 3.7 3.19 2.67 2.55 2.39 2.3 2.23 2.39 2.48 2.97 3.92 3.64 3.72 3.72 3.64 4.18 3.82 3.72 3.58 4.58 3.97 5.28 3.92 6.92 3.92 4.44 6.48 5.32 7.39 4.85 5.94 3.91 4.07 4.12 3.87 3.63 4.08 4.42 4.59 3.85 4.12 3.87 4.21 3.77 3.82 4.47 4.82 5.95 5.44 5.17 4.75 5.12 4.53 5.07 4.4 4 4.02 4.96 4.3 4.05 3.99 4.31 4.8 3.57 2.79 2.88
3.09 1.88 3.42 2.17 2.62 2.49 3.15 2.27 2.62 2.87 2.34 3.39 2.63 2.85 2.76 4.3 4.32 3.73 3.62 4.71 3.47 4.38 4.97 4.61 4.28 4.48 4.31 4.19 3.4 2.19 2.75 2.42 2.76 3.26 3.53 4.01 3.36 4.16 3.15 3.65 3.77 3.66 4.05 2.88 2.9 3.03 2.48 2.86 5.26 4.45 3.13 2.39 2.28 2.23 2.2 2.2 2.33 2.23 2.44 3.01 3.22 3.31 4.1 3.22 2.71 2.44 2.48 2.38 2.35 2.39 2.57 3.12 3.7 3.57 3.66 3.62 3.7 3.9 3.31 5.07 4.13 4.44 3.77 4.12 4.86 4.23 4.5 6.05 8.68 6.42 5.77 5.72 3.93 5.11 4.03 4.75 4.67 4.27 3.94 4.07 4.54 4.5 3.63 4.35 4.51 4.3 4.01 4.48 4.52 4.97 5.1 4.92 5.09 4.69 5.11 4.23 4.45 4.41 4.34 4.02 4.34 3.8 3.03 4.92 3.85 2.96 3.48 3.31
3.11 2.83 1.67 2.79 3.34 2.77 2.78 2.8 7.24 2.95 3.76 2.09 2.99 3.6 3.48 3.02 3.82 3.93 4.87 3.36 4.12 4.17 5.65 4.51 4.35 3.33 4.08 4.5 3.33 2.75 2.6 2.66 2.93 3.89 3.15 3.52 4.84 4 4.29 4.5 3.71 4.4 3.45 2.39 2.99 2.91 3.39 3.56 5.47 3.73 2.91 2.34 2.31 2.11 2.18 2.21 2.26 2.36 2.7 3.21 3.61 3.53 4.17 3.31 2.76 2.51 2.65 2.37 2.31 2.37 2.57 2.72 3.51 4.35 3.85 4.01 3.67 3.93 4.03 4.08 4.15 3.86 3.76 4.25 4.44 3.97 5.67 6.65 7.07 7.88 8 6.72 6.73 4.26 4.68 4.25 5.02 3.95 3.73 4.42 3.95 4.56 5.09 3.83 4.07 4.07 4.03 3.93 4.27 4.77 4.98 5.16 4.57 4.05 5.44 3.63 4.1 4.09 4.2 3.76 3.98 4.25 4.96 3.35 3.57 2.32 2.88 2.77
2.31 2.59 2.29 3.41 3.43 2.44 2.7 2.61 4.39 2.21 3.26 2.57 2.72 4.06 3.39 3.65 3.18 3.47 4.45 4.76 3.85 5.48 4.17 4.29 3.61 3.95 3.86 4.33 3.09 2.14 2.09 2.3 3.34 3.99 3.31 3.51 3.98 3.87 3.94 4.15 3.65 4.58 2.88 3.44 2.83 3.33 2.78 3.71 3.37 2.32 2.57 2.66 2.49 2.53 2.2 2.29 2.4 2.39 3.01 3.89 3.5 3.64 3.7 2.85 2.56 2.39 2.36 2.35 2.34 2.59 3.31 3.37 3.64 3.7 3.99 4.35 4 4.07 4.36 4.16 3.7 4.34 4.22 6.07 5.46 5.02 5.32 7.09 8.87 8.66 7.08 5.26 5.58 4.2 4.72 5.41 3.84 3.68 4.61 3.9 4.29 4.29 4.44 4.45 4.31 4.56 4.09 5.56 3.68 4.31 5.09 4.66 5.55 4.69 4.64 4.65 4.54 3.88 4.24 3.12 4.62 3.38 4.4 4.33 2.44 3.35 5.3
2.93 2.82 3.73 3.18 4.08 3.19 3.55 2.23 2.67 4.04 2.49 2.75 3.37 3.93 4.08 3.35 4.43 3.18 3.53 4.97 4.18 4.74 4.82 3.13 4.12 3.59 4.42 4.22 2.77 2.95 2.3 2.3 2.69 2.99 4.59 3.73 4.58 4.16 3.87 3.79 3.49 4.03 3.62 3.29 2.96 3.38 2.71 4.24 3.2 3.06 3.22 2.36 2.52 2.29 2.18 2.44 2.59 2.62 2.68 2.72 3.26 3.55 4.23 3.43 3.01 2.71 2.47 2.5 2.31 2.32 2.51 2.83 3.58 3.72 3.69 3.41 3.78 3.87 3.71 3.69 3.64 3.33 5.04 3.55 3.52 4.54 4.28 5.62 6.78 5.97 8.96 6.41 6.67 5.04 4.47 4.4 4.29 4.36 4.36 4.35 4.84 4.43 3.71 4.18 4.13 3.41 4.47 4.31 4.08 5.2 4.99 4.99 5.95 4.77 4.12 3.56 4.27 3.14 4.58 3.85 3.87 3.72 3.67 4.4 3.2 4.64 3.17 5.06
3.18 2.86 3.69 2.96 2.91 2.92 3.13 3.03 3.99 2.29 2.19 6.74 2.78 2.8 5.01 5.2 2.44 3.23 3.5 4.37 3.06 5.33 5.26 5.34 3.07 4.42 4.34 4.35 4.13 2.61 2.42 2.63 2.6 3.77 3.99 4.18 3.34 4.03 3.54 4.19 3.78 3.17 3.44 3.38 2.77 3 2.98 4.08 3.58 3.83 3.05 3.06 2.43 2.39 2.27 2.43 2.59 2.68 2.73 3.03 3.26 3.88 3.92 3.11 2.97 2.64 2.59 2.64 2.57 2.47 2.47 2.94 3.13 3.81 4.64 4.08 3.89 3.72 4 4.47 3.92 4.07 4.1 3.22 3.36 7.64 6.69 7.8 6.8 7.15 6.68 6.49 5.75 4.47 4.3 4.24 4.45 3.79 3.77 5.19 4.27 4.1 4.46 4.35 4.32 3.7 4.19 4.14 4.11 3.9 4.61 4.49 4.5 4.74 4.15 4.64 4.02 4.99 4.74 4.77 3.79 4.54 4.11 4.07 2.8 3.2 3.71 4.15
3.05 2.61 3.11 3.21 3.08 3.01 3.11 4.49 2.55 2.93 3.46 2.91 4.24 4.98 5.39 3.91 3.73 3.63 3.32 3.91 4.96 2.82 4.31 3.94 4.21 3.7 3.3 3.75 2.94 3.15 3.38 2.93 3.59 4.55 3.69 4.02 3.66 3.81 4.45 3.74 2.69 4.15 3.52 2.87 3.73 2.81 3.16 4.67 3.58 3.44 2.49 2.56 2.56 2.39 2.38 2.39 2.47 2.65 2.8 3.93 3.56 3.32 3.05 2.99 2.74 2.5 2.44 2.38 2.42 2.54 2.78 2.99 3.75 3.87 3.83 3.76 3.91 4.43 3.89 4.3 3.68 3.68 4.2 4.08 5.13 5.13 6.54 5.46 7.92 5.18 5.12 4.83 5.24 2.85 4.23 3.97 4.14 3.73 4.69 4.29 4.65 3.81 3.86 4.12 4.33 4.7 4.05 3.38 5.28 4.12 4.69 4.38 4.31 3.62 4.05 3.76 4.21 4.7 4.56 3.37 4.14 6.51 2.84 4.26 3.07 2.52 2.72
2.32 3.23 2.74 3.28 3.69 2.51 2.92 3.3 2.95 3.83 2.07 2.6 3.61 3.58 3.4 3.01 3.58 3.04 3.21 3.94 4.95 4.15 3.69 3.68 4.42 3.94 4.52 3.09 4.98 2.73 3.06 2.57 2.59 3.55 4.93 3.84 3.7 4.53 4 3.14 4.54 3.81 4.76 3.6 2.7 2.96 3.13 2.8 3.46 3.13 3.24 2.73 2.69 2.28 2.42 2.41 2.39 2.55 2.6 2.95 3.35 3.85 4.04 2.72 2.82 2.62 2.41 2.75 2.37 2.49 2.53 2.68 3.19 3.82 4.22 3.39 4.17 3.52 3.63 3.43 5.42 3.42 3.66 3.65 4.43 5.09 5.63 4.21 5.59 7.83 4.55 5.54 4.58 4.79 4.1 4.36 3.98 4.67 4.22 4.37 4.2 4.01 3.29 4.51 3.71 4.45 4.25 4.26 4.62 4.44 4.29 4.49 4.74 5.62 4.94 4.36 3.9 4.03 3.93 4.04 3.39 4.01 4.17 3.52 2.9 3.8 3.67 3.93
3.19 2.63 2.89 3.37 2.94 3 3.03 3.08 2.67 2.81 2.43 1.65 3.82 3.95 6.14 4.87 4.05 3.49 3.54 4.49 3.76 5.12 4.31 6.72 4.58 3.42 4.22 4.23 3.4 2.65 2.68 2.26 2.8 2.52 4.11 4.46 3.5 3.74 3.11 3.97 4.17 3.26 3.89 3.83 3.74 2.87 3.1 3.05 3.54 3.62 3.49 2.52 2.59 2.44 2.27 2.36 2.52 2.58 3.06 2.7 3.38 4.09 3.63 2.98 2.7 2.63 2.5 2.46 2.4 2.52 3.1 2.82 3.2 4.52 3.84 3.76 4.28 3.47 3.65 3.87 4.89 4.14 3.77 4.07 4.41 3.87 3.63 4.12 5.38 5.71 4.26 4.58 4.04 5.06 6.27 4.94 3.6 4.03 3.79 4.18 4.16 4.73 4.65 4.46 4.61 3.93 4.34 4.55 3.77 4.53 5.13 4.95 4.4 4.34 4.61 5.05 4.51 3.21 3.86 3.82 3.27 3.7 3.7 4.2 4.1 4.21 4.18 4.21
3.13 2.36 2.94 2.85 3.26 3.06 2.75 2.78 2.74 2.9 2.18 3.07 2.55 3.77 3.47 3.73 3.68 3.01 3.78 5.12 4.34 4.5 3.64 4.3 3.73 3.91 4.23 4.39 4.31 4.71 2.51 2.27 2.81 2.91 3.66 3.45 3.34 3.69 4.38 3.39 3.37 3.31 3.44 4.24 3.08 3.07 3.3 2.93 3.44 3.68 3.22 2.78 2.87 2.43 2.69 2.43 2.63 2.79 2.83 3.32 4.16 4.6 3.76 2.77 2.52 2.71 2.42 2.47 2.4 2.33 2.59 3.03 3.42 3.69 3.56 3.64 3.53 3.46 3.91 5.3 3.28 3.6 4.47 3.46 3.85 4.29 3.69 4.26 4.97 4.73 4.96 4.25 4.1 3.48 4.35 4.45 3.74 3.81 4 4.21 4.07 4.26 4.76 4.2 4.12 4.49 3.82 4.74 5.2 3.57 4.69 4.35 4.46 4.64 5.34 4.56 4.59 3.85 4.23 4.47 4.89 3.92 4.32 4.32 6.33 4.3 4.54 2.52
2.39 2.45 2.47 2.95 2.84 3.2 3.61 2.78 2.61 3.41 2.29 3.71 2.78 3.95 3.07 4.67 4.15 3.12 3.32 3.49 2.86 5 4.2 4.69 3.84 4.47 4.42 3.67 4.11 2.43 2.34 2.54 2.41 4.21 3 2.93 3.87 2.74 3.53 3.4 3.04 3.93 4.26 3.44 3.67 2.82 3.27 3.32 3.2 3.53 3.32 2.73 2.6 2.38 2.59 2.43 2.77 2.41 2.74 3.36 3.54 3.41 2.86 2.89 2.95 2.72 2.64 2.51 2.62 2.53 2.62 2.68 3.64 3.79 3.9 4.15 4 3.59 3.41 3.61 3.63 4.14 4.04 3.2 3.86 3.32 2.96 3.34 3.88 4.19 3.64 4.54 4.2 4.13 4.08 3.62 3.87 4.12 3.77 4.19 4.08 3.86 4.15 3.84 4.05 4.41 4.6 4.68 3.95 4.72 4.12 4.51 5.71 4.15 4.63 4.24 4.23 3.66 3.94 3.78 4.87 5.66 3.78 3.73 3.69 3.9 3.36 2.98
2.46 2.64 2.91 2.81 2.93 3.24 2.78 2.67 3.34 2.16 2.96 2.45 2.44 2.03 4.09 3.24 2.65 4.14 3.43 3.63 3.37 5.64 4.02 3.96 4.15 3.78 4.86 3.73 3.57 3.09 2.38 2.14 3.63 3.55 3.36 3.56 3.73 2.68 3.43 3.71 4.3 3.72 4.37 3.88 3.25 2.52 2.94 3.15 4.44 3.2 3.53 2.51 2.54 2.41 2.43 2.45 2.49 2.67 2.85 3.12 3.74 3.75 3.28 2.77 2.69 2.4 2.47 2.31 2.75 2.46 2.69 2.98 3.48 3.3 4 3.68 3.34 3.32 4 3.2 3.27 3.52 3.22 3.78 4 3.03 2.53 3.79 4.12 3.38 3.96 3.85 3.28 3.5 4.07 3.22 4.06 3.75 4.19 4.04 3.75 4.16 2.87 3.99 4.39 3.73 3.64 4.19 3.58 4.63 4.29 3.81 3.41 4.01 3.72 3.62 3.86 4.19 4.99 3.87 5.2 4.23 4.15 3.81 5.65 3.18 3.81 3.4
2.82 3.08 3.79 3.08 2.71 2.79 2.85 3.13 2.76 2.51 3.24 2.44 3.45 3.53 3.88 3.11 3.13 3.76 3.25 3.57 2.76 4.3 4.38 4.74 3.62 4.77 4.31 4.59 3.63 3.22 2.46 2.54 2.64 2.95 3.89 4.16 2.84 3.96 4.34 3.2 3.87 3.48 2.92 4.13 3.06 3.31 2.93 3.04 3.61 3.3 3.29 2.81 2.43 2.41 2.82 2.38 2.74 2.71 2.7 3.21 3.16 3.6 3.49 2.7 3.03 2.64 2.37 2.62 2.51 2.48 2.61 2.83 3.63 3.81 4.02 3.22 3.8 3.59 4.24 3.96 4.17 3.35 3.37 3.47 4.49 3.26 3.2 5.05 3.83 3.85 3.99 4.44 3.12 3.04 3.69 3.88 4.18 3.5 4.47 3.36 3.94 3.81 3.44 3.82 3.27 4.28 3.22 4.62 3.77 4.05 5.01 4.02 4.15 4.48 4.26 4.59 3.73 3.57 3.49 3.56 3.5 4.56 3.29 3.07 4.28 3.7 3.83
2.61 3.04 2.71 2.69 2.7 3.1 2.66 2.85 2.5 3.17 2.43 2.41 3.32 3.76 3.23 3.32 4.65 3.56 3.17 2.79 3.17 3.47 3.64 3.6 3.96 3.87 3.9 3.63 4.36 3.22 2.32 2.17 2.18 3.1 5.6 3.75 3.33 4.53 3.41 3.2 3.29 3.59 2.78 3.84 4.1 2.67 3.09 3.38 3.61 3.76 3.41 2.84 2.63 2.59 2.49 2.58 2.47 2.58 2.52 3.39 3.23 3.35 3.28 3 2.66 2.55 2.65 2.51 2.55 2.49 3 2.92 3.69 3.76 3.41 3.68 3.65 4.57 3.56 3.81 3.32 4.06 3.81 5.06 3.48 4.91 3.41 3.57 4.12 3.77 3.75 3.92 4.77 3.8 3.09 4.11 3.97 3.88 4.07 3.95 4.08 3.71 3.9 4.17 3.4 3.75 4.01 4.84 3.38 4.65 4.27 4.51 4.61 3.68 3.7 4.3 3.93 3.97 4.32 3.2 4.1 3.76 3.58 4.8 3.57 4.57 2.99
3.03 2.96 3.29 3.44 2.69 3.19 2.68 2.98 3.98 2.95 2.48 2.04 3.21 2.8 3.42 3.54 3.76 3.66 3.19 3.68 3.78 3.21 3.72 3.37 3.96 3.43 3.55 4.34 3.45 2.93 2.49 2.45 2.91 3.59 3.33 4.11 3.52 3.25 4.02 3.98 2.99 3.47 3.96 3.59 3.16 4.66 2.68 3.21 3.32 3.09 3 3.97 2.79 2.66 2.5 2.45 2.41 2.81 3.01 3.01 3.65 2.94 2.85 2.61 2.79 2.73 2.46 2.53 2.64 2.51 2.9 3.16 3.51 3.45 3.61 3.08 3.67 3.26 3.85 3.05 3.69 3.16 3.59 4.28 4.04 4.13 3.98 3.68 3.94 4.06 3.86 3.13 3.28 3.69 4.53 3.53 3.98 3.52 3.57 3.5 3.79 3.47 3.68 3.38 3.9 4.05 3.53 3.78 3.72 3.87 3.98 2.69 3.7 3.83 4.77 3.47 3.71 3.84 3.8 4.02 3.41 4.04 3.8 4.19 4.18 3.13 3.5 4.47
3.21 2.84 2.7 2.67 2.85 2.84 2.6 3.04 2.84 2.61 3.14 3.97 2.6 4.75 3.21 3.78 4.47 3 3.69 3.38 3.5 3.74 3.9 4.23 4.23 3.94 3.91 5.02 3.99 3.07 2.44 2.5 2.83 3.01 2.73 3.8 4.17 3.12 3.89 2.98 3.08 2.68 3.09 2.95 2.46 3.25 2.69 3.78 3.19 4.08 3 2.84 2.72 2.58 2.55 2.56 2.67 2.48 2.87 3.03 3.07 3.58 2.65 2.74 2.74 2.51 2.66 2.56 2.47 3.08 2.65 2.98 3.36 3.52 3.47 3.52 3.17 4.43 3.28 4.08 3.29 4.1 3.37 3.51 2.92 3.32 2.9 3.21 3.76 4.08 4.45 4.57 4.44 3.63 3.53 3.02 4.08 3.77 2.99 3.78 3.83 4.05 3.3 3.52 3.38 3.39 3.74 4.14 4.6 3.91 4.57 3.71 4.87 4.36 4.28 3.6 3.3 3.17 3.74 4.03 4.11 4.43 4.45 3.27 4.72 3.75 5.31 2.56
2.71 3.09 3.15 2.5 2.49 2.87 3.13 2.99 2.62 3.1 3.63 3.1 4 2.9 2.42 4.14 4.06 3.04 2.79 3 3.52 3.3 3.68 4.13 3.71 3.86 3.81 3.55 3.79 3.35 2.28 2.91 2.81 2.74 3.95 3.5 3.46 3.19 3.68 2.58 2.31 2.52 3.29 2.76 2.7 2.82 3.13 3.1 3.2 3.35 4.09 3.52 2.89 2.6 2.71 2.55 2.53 2.46 2.58 2.96 3.26 3.05 3.02 2.5 2.52 2.66 2.44 2.53 2.74 2.54 2.73 3.29 3.13 3.08 4.02 4.03 3.54 3.42 3.3 2.92 3.19 3.19 3.74 3.59 3.75 3 2.96 3.57 3.28 3.78 3.01 3.79 3.42 3.2 3.64 3.07 3.51 3.61 2.92 3.53 3.39 3.68 4.12 3.43 3.93 3.33 3.35 3.79 3.92 4.04 4.46 3.88 3.16 4.61 4.28 5.12 3.87 4.26 4.54 3.88 4.72 5.07 4.58 3.72 5.2 2.91 1.82 1.86
2.54 2.35 2.61 2.62 2.73 2.71 3.24 2.79 2.52 2.72 2.38 3.6 2.46 3.53 4.78 3.27 3.73 2.92 3.89 3.6 3.73 4.58 4.56 4.53 3.96 3.73 3.38 3.6 3.62 3.68 2.15 2.36 2.27 2.67 3.6 4.18 3.88 2.44 3.04 3.14 3.01 2.96 3.41 3.39 2.83 2.62 2.61 3.09 2.78 3.09 3.05 3.46 2.68 2.54 2.67 2.59 2.42 2.52 2.63 2.69 3.22 2.65 2.88 2.65 2.79 2.47 2.63 2.57 2.52 2.64 3.18 3.4 3.94 3.74 3.91 4.14 3.54 3.13 3.57 3.37 3.15 3.3 3.4 3.49 3.41 3.02 2.76 3.39 3.38 3.71 3.3 2.78 3.98 2.72 3.47 3.57 3.2 3.28 3.68 3.94 4.23 4.4 3.68 3.49 4.11 3.9 3.72 3.69 3.55 3.65 4.58 3.39 4.11 3.72 4.62 4.55 4.11 3.04 3.27 3.22 3.5 4.18 3.57 3.46 3.15 4.25 5.67 1.94
2.46 2.64 2.81 2.45 2.34 2.73 2.77 2.89 3.02 2.69 3.45 2.39 2.75 3.52 3.52 3.19 2.66 2.73 2.91 2.82 4.1 3.65 4.12 4.14 3.33 3.14 4.08 4.41 3.26 3.31 2.66 1.99 2.63 3.06 3.21 2.72 3.6 3.31 3.75 2.73 3.05 3.05 3.05 3.11 4.19 2.86 2.88 3.39 3.38 3.49 3.05 2.62 2.99 2.7 3.25 2.6 2.72 2.6 2.5 2.55 3.41 2.73 2.8 2.61 2.53 2.4 2.66 2.53 2.76 2.61 3.32 3.7 3.31 3.16 3.68 3.45 3.1 3.51 3.54 3.49 2.96 3.08 3.23 3.66 3.75 3.43 3.29 3.29 3.15 2.93 3.56 3.09 4.86 3.88 2.98 4.5 3.58 3.45 3.04 3.05 3.51 3.5 3.48 3.91 3.88 3.52 3.6 3.75 4.03 2.93 3.19 3.62 3.84 3.34 3.93 3.71 3.53 3.46 4.42 3.82 4.13 4.39 4.74 4.92 5.33 3.99 2.24
2.73 2.97 2.54 2.42 2.67 2.65 2.8 2.77 3.23 3.22 2.14 2.4 2.92 2.64 4.65 2.68 3.2 2.55 2.36 4.04 3.22 3.45 3.82 3.46 3.06 3.81 3.38 2.79 4.75 2.9 2.78 2.7 2.39 2.67 2.82 2.8 3.59 3.03 2.85 3.1 2.46 2.68 3.45 2.79 3.52 2.93 2.96 3.22 4.1 2.69 3.23 3.23 3.38 2.85 2.51 2.71 2.71 2.79 2.86 2.82 2.75 2.88 2.53 3.08 2.56 2.55 2.66 2.51 2.58 3.04 2.55 4.12 3.11 3.36 3.32 3.06 3.74 3.86 3.04 3.16 2.99 3 2.92 3.07 3.66 3.05 3.06 3.23 3.25 3.37 3.58 3.84 3.1 3.42 3.17 2.82 2.97 3.26 3.57 3.39 4.06 3.84 4.03 3.82 3.49 3.65 3.98 3.19 3.17 3.43 3.45 3.82 3.93 4.35 4.3 5.01 3.4 3.33 3.09 4.48 5.04 3.37 2.57 4.19 2.57 2.58 4.76 4.09
2.84 2.93 2.7 2.73 2.93 3.02 2.63 3.06 2.65 4.66 2.21 2.65 2.44 3.26 4.01 3.26 3.77 3.09 2.72 2.81 2.88 4.37 3.25 3.44 3.48 4.08 3.14 3.38 2.84 2.51 2.42 2.49 2.73 2.25 3.17 2.64 3.73 2.77 3.29 3.22 3.65 3.48 3.18 2.75 2.56 3.47 3.21 2.98 2.42 3.11 3.85 3.06 2.96 2.63 2.56 2.73 2.59 2.46 3.18 2.75 2.77 3.02 2.79 2.93 2.55 2.52 2.48 2.51 2.7 2.7 3.01 3.13 3.44 3.05 3.17 4.18 3.16 2.85 3.79 3.97 3.16 4.34 3.38 3.08 2.93 3.26 3.22 3.17 4.42 3.49 2.75 4.07 3.06 3.45 3.07 3.73 3.57 3.89 4.08 3.27 3.74 3.63 3.7 5.44 3.77 3.71 3.7 3.58 4.5 3.19 4.23 3.22 3.51 4.36 4.2 3.55 3.25 3.54 3.73 3.12 3.73 2.89 4.41 1.99 4.22 3.08 2.4 3.45
2.77 2.48 2.94 2.89 2.7 2.55 3.03 2.69 2.7 2.94 2.44 3.24 3.9 3.64 3.87 3.1 2.67 3.42 4.48 2.8 2.65 4.23 4.03 3.55 4.02 3.58 3.39 4.15 4.38 3.16 2.72 2.41 2.43 2.41 2.58 2.6 3.44 3.26 3.29 3.06 2.96 4.36 3.15 3.46 3 2.54 3.39 3.14 3.6 3.19 3.09 2.83 2.78 2.81 2.69 2.44 2.6 2.9 2.73 2.71 3.12 2.81 2.78 2.58 2.8 2.78 2.74 2.74 3.08 3.97 3.2 2.87 3.24 4.04 3.6 3.08 3.51 3.65 3.7 2.55 3.53 2.97 3.67 2.64 4.07 3.13 2.92 3.52 3.42 3.1 2.68 3.57 3.46 3.38 3.22 3.33 2.98 2.91 3.18 3.14 3.46 3.46 2.98 3.52 3.35 3.26 3.6 3.71 3.94 4.08 4.06 3.33 3.83 3.74 4.72 3.69 3.12 3.47 3.79 3.44 4.41 7.17 3.38 2.92 2.84 2.6 3.9 3.6
3.08 2.57 2.75 2.57 2.88 2.87 3.42 3.47 2.88 3.91 2.79 2.75 2.43 2.76 3.72 2.89 3.42 2.93 2.5 3.71 3.32 3.28 2.61 3.22 3.1 4.07 3.3 3.66 3.17 3.64 2.89 2.43 2.65 2.22 2.97 3.11 2.42 3.03 3.02 3.23 3.33 3.73 3.4 2.8 2.9 2.92 2.51 3.05 2.93 3.49 3.33 2.85 2.43 2.54 2.37 2.44 2.58 2.66 3.06 3.55 3.05 2.69 2.42 2.37 2.55 2.58 2.7 2.47 3.01 3.05 3.33 3.38 3.23 2.81 3.52 3.43 3.29 2.72 3.9 3.3 3.13 3.1 3.63 3.31 2.99 2.77 2.89 2.74 3.05 3.2 3.04 4.31 2.67 2.86 3.22 3.07 4.15 3.31 3.35 3.21 3.36 3.27 3.42 3.85 3.3 2.9 3.93 3.46 3.44 3.79 4.1 3.87 3.21 3.09 4.17 3.7 3.17 3.63 4.7 3.5 3.91 3.66 3.81 3.27 4.52 3.87 2.97 4.18
2.56 2.73 3.22 2.66 2.71 3.04 4.49 2.67 2.39 4.37 3.39 2.99 2.38 2.68 3.33 3.61 4.11 2.7 3.05 2.38 3.04 2.87 3.24 2.69 3.19 3.12 2.82 3.1 3.63 3.02 2.32 2.9 3.28 2.68 3.2 2.57 2.81 3.46 2.88 2.9 2.97 2.7 3.11 2.9 3.36 2.89 2.92 3.01 3.43 2.94 3 2.45 2.52 2.46 2.59 2.63 2.72 2.7 2.6 2.92 2.84 2.37 2.71 2.61 2.52 2.49 2.5 2.95 3.5 3.12 2.87 3.29 3.18 2.7 2.71 2.94 3.2 2.93 2.62 2.54 2.76 2.95 3.1 3.09 3.17 3.17 3.54 3.57 2.91 2.97 3.31 3.15 3.37 2.85 2.86 3.06 3.59 3.05 3.23 3.61 3.36 3.24 3.48 2.99 3.2 2.89 3.53 4.17 3.12 3.22 5.02 3.09 2.86 3.11 3.78 4.27 3.27 2.88 3.23 2.9 3.94 3.29 4.57 2.73 2.66 2.81 2.94 2.69
2.26 2.48 2.91 2.49 2.01 2.75 3.44 2.33 3.24 2.73 2.85 2.94 2.81 2.71 2.74 3.08 3.45 2.59 3.28 2.85 3.15 3.3 3.6 2.73 3.35 3.02 3.17 3.33 2.54 2.61 2.74 3.18 2.53 3.21 2.95 2.82 2.83 2.83 3.6 3.12 2.73 2.74 3.1 3.06 2.87 3.41 3.01 2.53 3.06 2.79 2.43 2.61 2.46 2.95 2.59 2.41 2.62 2.88 2.69 2.75 2.87 3.2 2.66 2.54 2.39 2.53 2.59 2.46 3.18 3.21 3.15 2.69 3.24 3.26 2.69 2.68 3.24 3.28 2.93 3.3 3.21 2.97 2.92 2.59 3.23 3.59 3.06 3.3 3.41 4.04 2.99 2.67 3.16 3.54 2.65 2.79 3.22 3.86 2.98 3.15 2.98 2.74 3.29 2.91 2.47 2.95 3.55 3.06 4.15 2.8 3.19 3.13 2.97 3.55 3.83 3.86 3.47 4.02 2.67 4.41 4.18 3.29 2.95 2.85 5.63 2.51 2 4.25
2.48 2.45 3.2 2.99 2.29 2.23 3.53 2.17 2.67 2.23 2.21 1.96 2.67 2.48 4.34 3.81 2.94 3.47 3.36 2.96 3.63 4.33 2.84 2.61 3.08 2.97 2.85 3.51 3.15 2.47 3.21 3.34 2.49 2.53 3.18 3.63 2.54 2.73 2.51 2.98 2.69 3.27 3.05 3.06 2.89 2.9 2.95 3.48 3.05 4.18 3.14 2.77 3.08 2.75 2.44 2.68 2.65 2.7 2.65 2.63 2.41 3.56 2.73 2.43 2.55 2.4 2.78 2.42 2.39 2.64 2.9 2.48 3.25 3.25 3.17 3.1 3.07 2.88 2.86 3.74 2.65 3.21 3.04 3.07 3.1 3.09 2.97 3.05 3.04 3.71 3.8 2.84 3.13 3.29 3.67 2.83 3.05 2.9 3.23 3.16 3.36 2.84 2.5 3.12 3.77 2.71 3.03 3.04 3.62 3.36 3.85 3.24 3.92 3.45 3.27 3.31 3.13 3.07 3.55 3.99 5.57 3.18 4.12 4.15 1.85 3.29 2.89 4.44
2.96 4.03 2.27 2.9 2 2.45 2.75 2.84 2.26 3.3 2.89 2.49 3.16 4.24 2.86 2.59 3.37 2.54 3.08 2.96 2.88 2.08 2.85 2.8 2.86 3.34 2.83 3.23 3.68 2.68 2.23 3.42 2.18 3.12 3.1 3.47 2.56 2.79 2.91 3.13 2.7 2.79 2.73 2.9 2.63 3.26 2.43 3.2 2.84 2.69 2.78 2.9 2.62 3.09 3.54 2.58 2.88 2.81 2.58 2.81 2.69 3.11 2.72 2.73 2.62 2.66 2.39 2.82 2.9 3.01 3.27 2.98 3.01 3.47 3.4 2.66 2.57 2.84 2.97 3.32 3.05 2.71 3.3 3.36 2.72 2.63 2.51 3.11 2.53 2.93 3.23 2.86 2.82 3.33 3.26 2.72 3.25 2.73 3.05 3.9 3.18 3.2 2.81 3.11 3.33 3.45 3.11 3.46 3.22 3.88 3.51 3.07 3.27 3 3.54 3.79 3.97 2.62 3.44 2.68 2.24 4.01 3.11 4.43 2.56 2.39 5.48 4.85
2.43 2.27 3.25 2.47 2.74 2.79 2.91 3.17 2.46 2.74 2.12 2.77 2.52 2.27 2.38 3.07 2.96 2.61 3.03 3.18 2.99 2.51 2.9 3.48 3.09 2.77 2.76 3.36 3.04 2.97 2.6 2.8 2.56 2.5 2.57 2.76 2.78 3.71 2.85 2.42 3.19 3.44 2.97 2.72 2.93 3.14 2.53 2.98 2.9 2.71 2.86 2.65 2.73 3.46 2.79 2.8 2.58 2.89 2.42 2.91 2.55 3.24 3.04 2.58 3.1 2.37 2.42 2.65 3.15 2.76 2.71 2.74 2.53 2.86 2.65 3.08 3.68 2.85 2.83 2.91 2.39 2.49 3.15 2.82 3.13 2.68 2.59 2.85 2.51 3.57 2.56 3 2.96 2.74 2.81 3.58 2.91 3.91 3.27 3.13 3.57 3.06 3.13 2.99 3.11 3.47 3.17 3.56 3.15 3.68 3.12 3.2 3.77 3.35 3.63 3.34 3.62 3.47 2.92 3.25 2.74 2.98 4.25 2.37 2.57 3.4 2.26
2.69 2.31 2.21 2.37 2.92 2.94 2.58 2.65 3 3.51 2.42 3.55 2.37 3.06 3.05 2.95 3.22 2.62 2.46 3 2.44 3.14 2.6 2.82 2.58 2.99 2.87 3.16 3.05 3.62 2.2 2.75 2.69 2.77 3.05 2.82 2.82 3.11 2.69 3.28 3.02 3.14 2.67 2.77 2.82 2.63 3.04 3.13 2.72 2.87 2.83 3.28 2.72 2.43 2.93 3.15 2.55 2.79 2.48 2.62 2.78 2.57 3.02 2.93 2.88 2.85 2.62 2.71 2.75 2.7 3.14 2.93 2.66 3.01 2.38 2.75 3.39 3.35 2.74 2.68 2.8 2.83 2.82 2.68 2.92 2.91 3.63 2.96 3.14 3.01 3.78 3.07 2.82 3.43 3.16 2.88 3.02 3.37 2.94 3.97 2.63 3.3 4.11 3.44 3.46 3.39 3.15 3.3 3.51 2.93 2.7 3.31 3.37 2.55 3.16 3 3.65 3.87 2.96 2.84 2.34 2.11 3.17 1.92 2.71 4.55
6.82 2.81 2.37 2.56 2.92 2.73 3.03 2.91 2.51 2.67 2.23 2.5 2.68 3.72 2.85 3.06 3.46 3.21 2.83 3.21 2.77 3.1 3.32 3.08 2.94 3.56 3.13 3.7 2.73 3.61 2.64 2.43 2.99 3.11 2.56 2.74 2.76 2.95 2.8 2.84 2.76 2.56 2.94 2.85 2.84 2.43 3.54 2.49 2.71 2.91 2.28 2.61 2.73 2.67 2.48 2.74 2.71 2.81 2.5 3.14 2.89 2.49 2.66 2.64 2.41 2.57 2.5 2.4 3.2 2.91 2.82 2.59 3.12 2.7 2.91 2.58 2.81 3.06 2.36 2.83 2.93 2.85 2.65 3.46 2.78 2.66 2.78 2.83 2.81 2.71 3.3 2.82 2.94 2.94 2.47 2.79 2.85 3.16 2.67 2.94 3.03 3.22 2.57 3.26 2.82 2.91 4.07 3.67 2.84 3.1 4.07 3.52 2.8 2.86 4 3.85 3.27 4.1 3.3 3.47 3.46 2.48 1.69 2.36 2.7 3.35
4.31 3.59 2.16 3.74 2.43 2.62 2.33 2.33 2.72 2.65 2.78 2.24 2.41 3.65 2.67 2.33 4.81 2.75 3.58 2.93 2.53 2.77 2.61 2.48 2.8 3.06 2.79 2.76 2.81 3.72 2.36 2.02 2.79 2.84 2.46 2.6 3.61 2.79 3.26 2.59 2.76 2.7 2.88 3.87 2.86 2.46 2.72 2.84 2.35 2.66 2.57 2.93 2.72 2.59 2.52 2.64 2.39 2.29 2.57 2.35 2.8 2.44 2.78 2.32 2.57 2.4 2.98 2.62 2.69 2.72 2.64 2.51 3.22 2.39 2.79 2.8 2.45 2.57 2.89 2.79 2.79 2.79 3.39 2.62 2.44 3.13 2.4 2.85 2.98 3.56 2.9 3.14 2.63 3.25 3.57 3.27 2.87 2.98 2.96 3.03 3.15 3.21 3.64 2.97 2.95 2.51 3.03 3.82 3.02 3.71 2.97 3.48 3.79 3.11 2.94 2.52 2.6 3.43 3.25 2.98 4.49 4.42 3.64 4.77 3.47 2 1.68 2.15
3.31 2.3 2.79 2.21 2.79 2.9 4.29 2.68 2.59 3.57 3.27 2.15 2.22 3.76 2.95 4.39 2.85 2.7 2.99 2.72 2.64 2.86 2.9 2.21 2.74 2.53 2.77 3.37 2.82 2.33 3 2.68 2.25 2.68 2.64 2.67 2.42 2.78 3.29 2.62 2.9 2.78 2.67 3.1 2.35 2.89 2.58 2.56 2.94 2.54 2.81 2.51 2.75 2.38 2.61 2.37 2.74 2.49 2.86 2.32 2.6 2.57 2.37 3.08 2.55 2.53 3.07 2.69 3.03 2.99 3.03 2.91 2.64 2.81 2.47 2.45 2.32 2.95 2.73 2.58 3.15 3.15 3.21 2.83 2.4 2.33 3.01 3.08 2.53 2.9 2.72 3.12 2.85 2.48 2.82 3.67 2.48 2.76 2.81 2.86 3.1 3.23 3.28 2.92 2.92 3.17 2.5 2.48 3.34 3.51 2.89 3.03 2.99 2.97 3.42 3.07 3.35 3.66 5.86 2.24 5.27 4.78 2.16 5.48 2.56
1.87 2.64 1.98 2.44 2.73 2.57 2.9 2.71 2.16 2.01 2.14 3.03 4.01 2.93 2.53 3.16 3.34 3.01 2.97 2.96 2.67 2.41 3.2 2.99 2.85 2.64 2.56 2.42 2.13 2.36 2.86 2.82 2.7 2.73 2.35 2.15 3.07 2.7 2.83 2.58 2.44 2.36 2.59 2.46 2.64 2.51 2.89 2.68 2.79 2.9 2.56 2.84 2.32 3.03 2.49 2.93 2.77 3.14 2.54 2.24 2.35 2.92 2.62 2.49 2.47 2.7 2.64 2.6 2.45 2.69 2.42 2.92 2.97 2.41 3.37 2.76 2.68 2.55 3 2.48 2.81 2.84 2.42 2.4 2.97 2.54 2.65 3.16 2.44 2.33 2.54 2.68 3.08 2.88 2.55 3.87 3.01 3.04 2.7 3.03 3.17 3.23 4 2.83 3.33 2.89 2.85 2.72 3.31 3.43 3.39 2.57 2.91 3.02 2.68 4.44 2.73 3.16 3.78 3.1 2.38 3.02 2.31 2.8 3.77
1.83 2.3 2.31 2.54 2.38 2.11 2.14 2.6 2.1 3.02 4.04 2.44 3.17 2.39 3.18 1.9 2.71 3.95 2.12 2.94 3.91 2.38 2.73 2.48 2.81 2.22 2.44 2.69 2.19 2.08 2.71 2.13 3.39 2.73 2.79 3.29 2.38 2.17 2.82 3.49 2.28 2.19 2.73 2.54 2.24 2.31 2.59 3.04 2.77 2.94 2.81 2.57 2.63 2.25 2.55 2.29 2.5 2.42 2.91 2.62 3.51 2.69 2.6 2.66 2.31 2.65 3.06 2.27 2.68 2.44 3.08 3.11 3.25 2.86 2.88 2.65 2.6 2.66 3.84 2.43 2.57 2.91 2.93 2.94 2.63 2.63 2.67 3.18 2.87 3.4 2.72 2.65 2.4 2.52 2.54 2.85 2.68 2.7 3.45 2.82 3.37 2.98 2.8 2.94 2.72 2.79 2.82 3.29 2.57 2.68 3.19 3.47 2.62 3.2 2.59 3.43 3.33 2.46 2.91 2.1 3 4 3.47 8.07 1.98
2.46 2.36 2.09 3.96 2.97 5.24 4.1 2.01 5.14 2.2 4.17 2.02 2.36 1.82 2.33 3.68 2.4 3.89 2.34 4.92 4.22 1.89 2.29 3.28 2.78 2.6 2.61 2.47 2.79 2.79 2.68 2.2 2.35 2.72 2.38 2.81 2.62 2.54 2.86 2.91 2.75 2.67 2.86 2.41 2.92 3.06 2.46 2.96 2.67 2.44 2.51 2.6 2.71 2.95 2.32 2.8 2.83 2.75 2.66 2.49 2.3 2.48 2.23 2.61 2.6 2.93 2.66 2.55 2.61 2.78 2.61 3.03 2.48 2.26 3.03 3.03 2.42 2.32 2.78 2.5 2.51 2.44 2.45 2.78 3.08 2.41 2.51 2.59 2.68 2.65 2.8 3.01 2.69 2.27 2.98 3.12 3.04 2.86 3.38 2.72 2.76 2.8 2.75 4.09 3.35 2.76 3.32 3.42 2.82 3.84 3.1 2.83 4.13 3.07 2.8 3.38 2.11 3.2 2.74 2.94 2.62 3.62 2.97 2.2 4.19 6.17 2.33
2.84 2.26 3.33 3.6 2.05 2.84 2.83 3.36 3.1 2.03 7.18 2.96 2.43 2.79 1.97 2.31 3.43 3.77 3.18 2.12 2.69 2.41 3.48 2.75 2.72 2.97 2.65 3.1 2.29 2.44 2.02 2.12 2.7 2.86 2.54 2.52 2.83 3.02 2.87 2.67 2.72 2.62 2.65 2.49 2.42 2.11 2.24 2.41 2.47 2.78 2.51 2.48 2.27 2.8 2.51 2.26 2.53 2.75 2.55 2.53 2.4 2.72 2.57 2.97 2.17 2.62 2.68 2.33 2.38 2.62 2.12 2.79 2.39 2.83 2.68 2.03 2.42 2.98 2.75 2.82 2.51 2.3 2.85 2.74 3.05 2.41 2.23 3.19 2.85 2.88 2.58 2.51 2.58 3.43 2.72 2.97 2.97 2.77 3.38 2.94 3.06 2.81 2.48 3.01 3.25 2.76 2.97 3.05 2.94 2.98 2.71 3.29 2.99 3.28 2.9 3.42 2.88 2.85 2.77 5.02 3.13 2.64 2.54 4.42 5.19
4.81 2.87 2.74 2.36 2.15 2.64 3.73 3.11 2.98 2.32 2.04 2.56 3.36 3.5 3.68 2.73 3.07 2.81 2.76 2.37 2.95 3.1 2.82 3.17 2.87 2.43 2.78 2.54 2.76 2.49 2.34 2.59 2.42 2.27 2.8 2.29 2.81 2.71 2.81 2.81 2.49 2.63 2.55 2.92 2.53 2.3 2.77 2.53 2.62 2.37 3.15 2.26 2.4 2.4 2.54 2.46 2.49 2.5 2.61 2.96 2.59 3.4 2.44 2.77 2.65 2.59 2.65 2.79 2.64 2.73 2.4 2.92 2.6 2.91 3.3 2.42 2.58 3.09 2.79 2.73 2.5 2.52 2.52 3.05 2.83 2.54 2.46 2.59 2.19 2.66 2.48 2.52 2.81 2.95 2.77 3.53 2.94 2.43 2.99 3.01 3.34 3.19 3.02 2.8 2.78 2.67 3.08 2.98 3.77 3.05 2.99 3.23 3.73 3.09 3.89 2.04 2.57 4.66 3.13 2.53 2.86 2.98 2.73 2.88 3.12 2.51 4.2
2.81 3.28 2.63 2.9 3 2.56 3.4 2.68 2.77 2.85 3.48 2.95 2.19 2.92 2.17 2.27 2.56 3.09 3.4 2.2 2.24 2.24 2.84 2.65 2.31 2.86 2.78 2.36 2.49 2.05 2.8 2.38 2.48 2.2 2.87 2.85 2.66 3.01 2.32 2.15 2.76 2.12 2.08 2.34 2.23 2.41 2.52 2.61 2.94 2.37 2.41 2.76 2.36 2.62 2.25 2.82 2.39 2.7 2.34 2.24 2.46 2.45 2.88 2.65 2.39 2.25 2.58 2.36 2.3 2.45 2.32 2.44 2.8 2.64 2.72 2.71 2.45 2.26 2.34 3.2 2.83 2.75 2.84 2.69 3.02 2.67 2.84 3.47 2.53 2.23 2.59 2.68 2.48 2.15 3.4 2.68 3.05 2.56 2.42 3.21 3.13 3.03 3.63 3.09 3.42 3.19 3.05 2.52 3.72 2.65 3.44 3.08 2.89 3.64 3 5.06 2.43 3.31 4.06 2.9 2.86 1.86 1.93 2.31 3.18 3.57 2.35 1.84
2.2 2.14 2.59 2.42 2.02 2.4 2.46 2.4 2.46 2.33 3.07 2.57 2.99 2.32 2.34 2.59 2.24 2.72 2.61 2.7 2.44 3.94 2.13 2.05 2.77 2.92 2.42 2.66 2.11 2.1 2.21 3.12 2.88 2.71 2.28 2.66 2.68 2.52 2.38 2.61 2.71 2.79 2.4 3.19 2.69 2.51 2.49 2.5 2.59 3.1 2.43 2.54 2.92 2.93 2.44 2.3 2.6 2.4 2.28 2.49 3.17 2.59 2.91 2.39 2.8 3.02 2.77 2.8 2.11 2.17 2.23 2.42 2.39 2.4 2.33 2.47 2.8 2.94 2.84 3.07 2.99 3.26 3.02 2.5 2.72 2.55 2.89 3 2.81 2.66 3.11 3.05 2.5 2.75 2.69 2.57 2.2 2.63 2.94 3 2.83 3.16 2.86 3.3 2.96 2.72 2.62 2.26 2.77 2.71 2.95 3.64 2.68 3.32 4.33 3.37 2.64 3.56 1.75 3.15 2.39 2.19 4.69 3.74 3.05 1.8 2.24
Distance image acquisition experiment
101520253035404550
2 6 4 3 5 [m]
Solid state LiDAR (Flash LiDAR)
Si SPAD/Front illuminated MPPC
Micro bump
CMOS pixel electronics
P+ P
N+
TSV
Pixel
Support glass
SPPC type MPPC type
TSV
MPPC for ＰＥＴ
PET : Positron Emission Tomography
31
MPPC for PET Application
32
PET
X-ray CT MRI
PET Medical Imaging
+
PET
+
Now Future
MRI compati.
Solid state
Detector
33
TOF(Time of Flight)-PET
PET
TOF-PET
t1
t2
CRT = 300 ps ➔ Dd = 4.5 cm
Market demand spec is
CRT=280ps
CRT (Coincidence Resolving Time) FWHM
• Lower cost
• High PDE around 450nm
• Lower voltage operation Vbr = 37V
• Lower temp coef. of Vop 34mV/℃
• 4 side tillable
• Active area line up： 3x3, 4x4, 6x6 mm
S1416X series - Overview
■Features
100
150
200
250
300
350
400
450
500
1 2 3 4 5 6 7 8
CR
T (F
WH
M)
[ps]
Over voltage Vover [V]
S14160-4075HS 4x4mm, 75μm Pixel, Silicon Coating
New MPPC
Coincidence Resolving Time(CRT)
36
HPK ASIC for PET Latest ver.
● Features
- Low power consumption: 4.5mW/ch, 81mW/chip
- Number of channel: 18ch/chip
- <200ps CRT@FWHM(3.14mm□, 20mm LFS) ← Improved !!
- <15% energy resolution @FWHM(3.14mm□, 20mm LFS)
- High dynamic range : ~20mA max.
- High count rate: >1Mcps/chip max.
1ch 1ch ・・
・
Hs-comp.
post amp
Comp.
DAC
Timing (differential)
shaper
DAC OR
16ch
TOT
Pre- amp
1ch
Current buffer
MPPC array
ASIC
18ch/chip
TDC
FPGA
Energy (single-ended)
SPI Interface 37
This ASIC board is optimized to Super TOF-PET measurement.
The signal processing board is including ASIC, TDC, HVPS,
HVPS and FPGA
Features ・ Low power consumption ～1.3W
・ Excellent coincidence resolving time <200ps ← Improved !! (3～4mm sq. MPP with LYSO scintillator)
・High energy resolution ～12% (511keV, LYSO)
・ Automatic temperature compensation
・ Digital I/F: High speed serial or LVDS
Signal processing board CRT
Improved to <200ps
Test kit image
Data I/F Board in PC
Power supply board
Data HUB Clock
MPPC Module (with scintillator)
MPPC array(4x4mm,12x12ch) + ASIC Board
Test result NEW standard Module CRT (12x12 array module)
140
150
160
170
180
190
200
210
220
230
240
250
260
270
280
290
300
1 2 3 4 5 6 7 8
CR
T 1
2x1
2 a
vera
ge (
FW
HM
) [p
s]
Ve [V]
CRT value is <200ps (average,FWHM)
*reference resolution (~210ps) is subtracted *the result includes the TDC resolution *threshold = 2~3 p.e.
CRT 12x12 map
HPK reached <200ps CRT as module
40
Lutetium scintillator
MPPC: best type for PET-OEM
S1416x Series
HPK MPPC PET module key component
• High performance CRT
ASIC
• High quality crystal
All components are suitable for PET application
■High-voltage Power supply
Low power consumption Low Cost customizable
High Light Output No deliquescence Superior time resolution
Low power consumption High Maximum count rate customizable
Low CrossTalk Low AfterPulse Low voltage(Vop=37V Typ.) High PDE:(50%) High gain:105 to 106
41
MPPC for Scientific application
42
New scientific Applications
Cherenkov telescope
High sensitivity for UV
Lower dark count
Dark matter research
High sensitivity for VUV
Low RI
Calorimeter
High dynamic range
Radiation hardness
43
MPPC for Cherenkov Telescope
44
For Scientific Application
Higher PDE Lower Crosstalk
MAPMT
MPPC for Cherenkov Telescope Array
Required Properties High PDE @350nm・・・・High F.F & large Pixel
Large sensitive area・・・・Bigger than 6mm2 and small dead space
Less visible sensitivity・・・・Not so sensitive to NSB
High Gain Low cross talk Low dark count
Cherenkov spectrum
NSB spectrum
SiPM
NSB: Night sky background 45
PDE, Crosstalk ＆ PDE / Crosstalk
0
5
10
15
20
25
30
35
0
10
20
30
40
50
60
70
0 1 2 3 4 5 6 7
Cro
ssta
lk (
%)
PD
E (
%)
Overvoltage (V)
S13360-3050CS
S13360-3075CS
0
10
20
30
40
50
60
70
0
10
20
30
40
50
60
70
0 1 2 3 4 5 6 7
PD
E / C
rossta
lk
PD
E (
%)
Overvoltage (V)
S13360-3050CS
S13360-3075CS
Standard Type
3x3mm 50μｍ, 75μｍ
Silicone Coating
Crosstalk Analysis
What influence to the Crosstalk value ?
With coating > Without coating
Lager Pixel > Smaller Pixel
Lager chip > Smaller chip
Higher Overvoltage > Lower Overvoltage
Higher Overvoltage is necessary to get higher PDE
but makes Gain, Dark current and Crosstalk higher
How to get higher PDE with lower Overvoltage ?
0
5
10
15
20
0 1 2 3 4 5 6 7 8 9 10
Cro
ssta
lk (
%)
Overvoltage (V)
S13360-3050VN
LVR-3050VN
3x3 mm2, 50 μｍ
λ = 405 nm
New Result : PDE / Crosstalk
Silicon Coating
Without Coating
Summary of new MPPC
Vbr = 41V
Vbr = 52V
500 kcps
New Type 3050CS
34 mV/℃
50
Crosstalk - Coating vs Without Coating -
VS (Mold Type)
VN (Without Coating)
6075S
6075N
6050S
6075S
Confidential 51
MPPC
MPPC
MPPC
①1.3mm□
②3mm□
③6mm□
Crosstalk - Chip size and Coating/without coating-
6050S
3050S
1050S
(Ta=25 ℃, Vover = 3 V)
PDE
S14520series Array type Products List
Type Chip Area Microcell Passivation Resin Channel
50 μｍ N : Non -08 : 8x8ch
75 μｍ S : Silicone -16 : 16x16ch
50 μｍ N : Non -04 : 4x4ch
75 μｍ S : Silicone -08 : 8x8ch
50 μｍ N : Non
75 μｍ S : Silicone -08 : 8x8ch
SiO2
SiO2
SiO2
S14520-30xxVx-xx 3x3 mm 2
S14520-60xxVx-xx 6x6 mm 2
S14520-70xxVx-xx 7x7 mm 2
V: TSV
Small Pixel size MPPC
54
High dynamic range
Radiation hardness
For Scientific Application
New Small Pixel Size MPPC
S14160-1310PS/-1315PS, -3010PS, -3015PS
• High-dense pixels (10/15μm pitch ) with trench technique for Low crosstalk
• Break down voltage : 38V ( Low operation voltage )
• Higher PDE & Lower noise
• To be a candidate for the hard radiation application
55
S14160-1310PS
S14160-3010PS
56
Design comparison of MPPCs
S12571 S13360 S14160
(Latest)
Breakdown voltage 65 V 53 V 38 V
Trench isolation none Yes Yes
Trench width - ~ 1 μm ~ 0.5 μm
Fill factor 10μm: 33%
15μm: 53%
10/15μm
no lineup
10μm: 31%
15μm: 49%
0.5μm
Cross-section of micro-cells
trench
Micro-cell design of new MPPCs
Old design (w/o trench)
Fill factor: 53%
New design (w/ trench)
15 μm
10 μm
Fill factor: 49%
Fill factor: 33% Fill factor: 31%
trench
57
Photon detection efficiency（PDE)
58
0
10
20
30
40
50
60
2 4 6 8 10
Ph
oto
n d
ete
cti
on
eff
icie
ncy(%
)
Overvoltage (V)
S14160-xx10
S12572-010
PDE vs. Wavelength PDE vs. Overvoltage
Pixel pitch : 10μm Pixel pitch : 10μm
ーS14160-XX10
ーS12572-010
Dark count & Crosstalk
59
0
100
200
300
400
500
600
700
800
900
1,000
2 4 6 8 10
Dark
cou
nt
rate
(kcps/m
m2
)
Overvoltage (V)
S14160-xx10
S12572-010
Pixel pitch : 10μm
Dark count rate Crosstalk probability
0%
10%
20%
30%
40%
50%
2 4 6 8 10C
rossta
lk p
rob
abilit
y
Overvoltage (V)
S14160-xx10
S12572-010C
Pixel pitch : 10μm
Gain
60
0.E+00
5.E+04
1.E+05
2.E+05
2.E+05
3.E+05
2 4 6 8 10
Gain
Overvoltage (V)
S14160-xx10
S12572-010
Pixel pitch : 10μm
1.E+00
1.E+01
1.E+02
1.E+03
1.E+04
1.E-01 1.E+00 1.E+01 1.E+02
MP
PC
ph
oto
cu
rren
t [μ
A]
Incident power [nW]
S14160-3010
S12572-010
Dynamic Range
61
Active area size : 3x3mm2 Pixel pitch: 10μm
Dark count rate & Crosstalk probability
62
0
100
200
300
400
500
600
700
800
900
1,000
2 4 6 8 10
Dark
cou
nt
rate
(kcps/m
m2
)
Overvoltage (V)
S14160-xx15
S12572-015
Pixel pitch : 15μm
Dark count rate Crosstalk probability
Pixel pitch : 15μm
0%
10%
20%
30%
40%
50%
2 4 6 8 10
Cro
ssta
lk p
rob
abilit
y
Overvoltage (V)
S14160-xx15
S12572-015C
Photon detection efficiency(PDE)
63
PDE vs. Wavelength PDE vs. Overvoltage
Pixel pitch : 15μm Pixel pitch : 15μm
0
10
20
30
40
50
60
2 4 6 8 10
Ph
oto
n d
ete
cti
on
eff
icie
ncy(%
)
Overvoltage (V)
S14160-xx15
S12572-015
ーS14160-XX15
ーS12572-015
VUV MPPC
64
Dark matter research
High sensitivity for VUV
Low RI
For Scientific Application
This presentation is an intermediate, VUV sensitivity increase and new low RI package development are on going
VUV Detection MPPC
• For VUV light detection, precise control of MPPC’s protection layer and absorption region is required.
• Generated photo-electrons excited by VUV light are transported to avalanche region by electric field. To obtain higher carrier collect efficiency, defect-less device is required.
Protection layer (reflection)
Absorption and Carrier generation
Cross section of the
MPPC cell
VUV photons
Avalanche
Improvement for VUV sensitivity (VUV4)
MPPC : VUV Detection
For physics experiments using LXe or LAr scintillator Liquid xenon
(LXe) and liquid-argon (LAr) is used as scintillator. Their peak spectra
are in VUV region and their temperatures are cryogenic.
Vov=4V, 50 μｍ, Ta=25 ℃)
VUV4
VUV3
Package type:
Plastic mold (for indirect detection)
Pure ceramic (for direct detection)
RI level:
All radioactive nuclides has not been quantified in on-ground
measurement at HPK.
High precision RI measurements are ongoing with customers.
For indirect detection (1mm SQ.) For direct detection (6mm SQ.)
Ultralow-RI Package for physics
Low temp. Resistance
• VUV-MPPC is adopted the metal quenching resistor to keep pulse shape at
low temperature.
• The metal resistor has 1/5 lower temperature coefficient of resistance than
poly-Si resistor and it has excellent stability.
―Room Temp.
―Metal Resistor (LAr Temp.)
―Poli-Si Resistor (LAr Temp.)
Development of InGaAs MPPC
Si and InGaAs MPPC
380 nm 750 nm 1.4 μm
InGaAs
MPPC S13360
MPPC S14420
MPPC S13720 ~1.0 μm
0.8 μm 1.69 μm
Visible Near-infrared SW infraredUV
300 500 700 900 1100 1300 1500 1700
PD
E*
Wavelengh (nm)
71
Cross section of the developed InGaAs SPAD
P+
N+ InP Substrate
N-Grading
I-InGaAs Absorption
I-InP Multiplication Region
N+ InP Buffer
N-Charge
Isolation Trench
hv (λ=0.8 – 1.6 μm)
E
electrons
holes
Active area
InGaAs SPAD Gain Uniformity
0
10
20
30
40
50
0
10
20
30
40
50
60
70
80
90
100
0 10 20 3040
50
Norm
arize
d n
um
ber
of
puls
es
Dimension (μm)
0 2 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 42 44 46 48 50
0 2.9 3.6 3.6 4.9 5.8 6.8 8.3 8.6 9.2 9.3 9.4 10 9.3 10 9.6 10 9.1 7.4 7.2 5.9 5.4 4.1 3.8 2.2 2.1 1.9
2 2.8 4.3 4.4 6.5 7.4 7.8 9.7 10 11 12 11 12 12 11 11 11 9 8.9 8 6.5 5.9 5 3.6 2.9 3.2 1.4
4 3.1 5.1 5.6 8.2 8.4 9.2 10 13 13 13 13 14 14 14 13 12 13 10 9.2 7.9 7.1 5.5 4.9 4.4 2.4 1.8
6 4.1 5.5 6.9 8.8 10 12 13 14 15 16 18 18 18 17 16 16 14 12 11 9.9 7.5 7.5 5 4.8 3.4 2.2
8 5.9 6.5 8.3 11 12 12 15 16 19 20 22 24 23 23 21 20 18 15 13 11 9.3 7 6 4.6 3.7 3.6
10 6 7.9 9.6 11 12 15 18 21 23 30 36 38 39 39 34 29 22 18 15 13 10 8.3 6.1 5.3 3.6 3
12 6.4 8.5 10 12 14 18 20 26 35 48 61 66 68 69 62 50 36 23 18 14 12 11 7.6 6.7 5.3 3.4
14 6.4 9.5 12 13 15 21 24 37 50 78 99 94 91 92 93 85 60 36 22 16 13 11 8.2 6.9 4.5 4.5
16 8.1 9.2 11 14 18 21 32 49 83 100 90 81 83 82 86 96 84 47 29 18 14 11 9.2 7.2 6.2 4.6
18 8.3 11 12 15 18 23 36 67 100 95 86 80 80 83 79 80 85 66 38 21 16 12 9.9 7.2 5.2 4.7
20 8.8 11 12 15 18 27 40 79 98 91 84 80 82 87 82 80 87 81 47 25 17 12 10 8 5.7 5.9
22 8.7 10 13 15 18 27 43 78 89 88 86 80 80 88 84 78 85 85 49 26 17 12 10 8.8 6.4 6.2
24 8.3 9.4 12 16 18 26 42 76 90 91 88 80 78 81 78 77 79 86 57 28 16 14 11 8.3 5.7 5.2
26 7.2 9.5 12 15 18 24 40 75 92 90 86 80 78 83 81 80 84 81 48 23 16 13 10 8.4 6.3 5.1
28 7.7 9.5 11 13 17 22 33 59 89 89 85 82 81 93 96 89 92 73 38 20 15 12 10 8.2 5.9 4.9
30 6.8 8.4 10 13 15 19 24 39 73 94 93 84 84 93 93 91 83 52 28 17 14 11 8.8 8.1 6.2 3.9
32 5.6 6.8 10 11 13 16 19 26 47 81 98 90 86 90 91 81 55 33 20 15 13 10 7.6 7.5 4.7 4.5
34 5.4 6.3 8.6 11 12 13 16 21 28 46 63 69 71 74 68 47 32 23 16 16 12 10 6.9 7 4.8 3.6
36 3.9 6.2 7.6 9.8 9.6 12 14 16 20 25 30 33 35 36 33 26 19 16 15 11 10 9 6.1 5.2 3.9 3
38 3.7 4.3 6.3 7.7 9.4 9.5 12 14 16 18 18 20 20 18 20 17 16 14 11 11 9.3 6.8 5.3 4.1 3.6 2.9
40 2.4 4.2 5.1 5.9 7.3 8 9.4 12 13 15 15 15 16 15 14 13 13 11 9.8 8.7 7 6.1 5.1 3.3 3 2.2
42 2.5 3.6 4.2 4.9 5.8 5.7 7.9 9.7 10 12 11 12 13 12 12 11 10 8.8 7.7 7 6.2 5.3 4.5 2.9 2.6 1.8
44 2.2 2.9 2.5 3.1 5.3 4.7 6 7.4 7.6 8.4 8.7 10 9.8 9.4 9.9 7.9 7 6.7 6.4 5.2 4.5 4.2 2.6 2.7 2 2
46 0.9 2.2 2.5 2.8 3.3 3.7 5.4 5.8 6.5 6.8 7.8 7.1 7.8 7.1 7.4 6.7 6.2 5.4 4.5 3.6 3.1 2.6 2.3 1.9 1.3 0.8
48 1.4 1.1 1.6 1.9 2.1 2.8 4.2 4.1 5.1 4.9 4.3 5.1 5.2 5.7 6.1 5.5 4.5 3.6 3.5 3.1 1.8 2.5 1.3 0.6 0.8 0.8
μm 50 0.9 0 0.5 1.2 1.6 2.3 4 2.7 2.5 3.3 4.7 4.2 3.7 4.4 3.8 3.1 4 2.7 2.7 2.5 1.8 0.5 1.3 1.3 0 0.1
T = 243K Pitch : 2 μm
22 μm
73
Back illuminated InGaAs SPAD Array
Single 100μm pixel
InGaAs MPPC
Photon counting beyond 1μm wavelength (~1.6μm) An new concept device The customized InGaAs detector array and the CMOS
quenching circuit
2D Detector (InGaAs Back illuminated)
In Micro bump
CMOS Quenching Circuits
100µm pitch 32x32ch
ASIC Architecture
SPI
Re
gis
ters
PLL
Column Decoder for SPI
Ro
w D
eco
de
r fo
r S
PI
Ro
w D
eco
de
r fo
r p
ixe
ls
Column Decoder for pixels
32×32 pixel circuits
with in-pixel TDCs
Ro
w D
rive
r / B
uff
er
Data Output
Master CLK
Row/Col
CLK/Bias
A time-to-digital converter (TDC) is implemented in each pixel
2D InGaAs SPAD
InGaAs SPAD array
Micro bump
ASIC
Back-illuminated NIR ~ SWIR 12 μm (active) 32×32 pixels
100 μm pitch In Flip-chip bonding
0.18 μm CMOS
77
Vop[V]
Variation of Vbr : 32x32 2D G-InGaAs [c
ou
nt]
FWHM 0.3V
InGaAs SPAD array Vbr Variation
Vop
[V]
4V
[pix] X
[pix
] Y
78
InGaAs MPPC (IGA MPPC） InGaAs-MPPC composed of InGaAs Geiger-mode APD array and CMOS sub-mount passive quenching circuits.
Merit G-APD：fast response & high gain MPPC：possible to discriminate dark pulses active quenching：after pulsing reduction Problem Have to develop Back illuminated type
Quenching resistors
InGaAs G-APD array
Gain:106
Bump metals
Active area size ： 1㎜□~ Micro pixel size ： Φ10~40um
Sub. with Q.R
InGaAs In Bump
79
InGaAs MPPC Structure
N+ InP Sub i-InGaAs Absorption
n-InGaAsP grading & InP Control
i-InP Cap P+
Passive quenching circuits ・High-ohmic Poly resistors ・P-I-P capacitors
Common Cathode
Bias Contact
1 micro cell (SPAD + Rq)
75μm
This 1st trial design is 3×3 pixel configuration. Anode signals from each micro cell are
summed and read out as a current signal.
Sum of anode signals
80
InGaAs-MPPC Development
3X3 InGaAs chip Hybrid Type (MPPC chip and ASIC with In bump)
Flip chip bonding
ASIC with quenching resistance
3x3 InGaAs chip
HV
Rq Cq
To oscilloscope
CMOS
81
InGaAs-MPPC Performances
75um
75um
Vbr:57.9 Vbr:58.0 Vbr:58.2
Vbr:58.4
Vbr:58.3 Vbr:58.3
Vbr:58.4 Vbr:58.3 Vbr:58.1
Vbr Variation PDE
Dark Count
Vover=2.7 V Temp:ー20℃
Vover=2.7 V Temp:ー20℃
Pulse height uniformity
InGaAs-MPPC(Waveform of 3x3 pixel device)
0
200
400
600
800
1000
1200
-50 50 150 250 350 450 550 650 750C
ou
nt
pulse hight (mV)
We could confirm the basic behavior as MPPC.
1p.e.
2p.e. 3p.e.
4p.e.
5p.e.
6p.e.
Count numbers of pulse height
100mV
20ns
T=-40.0℃ V=56.6V（Ve=1.12） Gain=8.3e+5
83
84