upgrade kit gasonics aura 1000 - allwin21...comparing 39 no. description original system upgraded...
TRANSCRIPT
Upgrade KitGasonics Aura 1000
220 Cochrane CircleMorgan Hill, CA95037
U.S.A.Tel.:+1-408-778-7788
Fax.:+1-408-904-7168www.allwin21.com
[email protected]© 2015 Allwin21 Corp. All Rights Reserved.
1
Why Upgrade Kit
2
1. Low cost solution of obsolete components and parts.
2. Requirement of stability of the system
3. Requirement of network function (GEM/SECSII).
4. Requirement of PC control for data storage.
5. Requirement of GUI.
6. Requirement of more precise control.
7. Requirement of CLTC (Closed Loop Temperature Control)
8. Requirement of better repeatability, uniformity.
9. Requirement of easier maintenance, calibration, and trouble
shooting
Wafer Handling
3
1. Equipe Robot
2. Robot Controller
3. Robot Arm
4. Fixed Cassette
Station
Fixed Cassette Station
4
Hinged Panel
5
Quartz Tray and Door
6
Quartz Tray and Door
7
Installed Thermocouple Assembly
8
AC Box and Lamp Control
9
Lamp Tray
10
045-0121 LAMP, 120V, 1000W
Main PCB and DC Power
11
PC Screens
12
Main Menu
PC Screens
13
Recipe Edit Selection screen
PC Screens
14
Recipe Editor
PC Screens
15
Process for Production screen, basic functions
PC Screens
16
Process for Engineer screen
PC Screens
17
Robot Auto Sequence Setup screen
PC Screens
18
WTM Manual Operation
PC Screens
19
Process Monitor screen
PC Screens
20
Maintenance Menu
PC Screens
21
RS-232 Configure screen
PC Screens
22
Board Configuration screen
PC Screens
23
Robot Station Configure
PC Screens
24
Robot Speed Setup
PC Screens
25
Robot Teach Screen
PC Screens
26
Factory Setup screen
PC Screens
27
Throttle Valve Test screen
PC Screens
28
System Setup screen
PC Screens
29
Modular Parameter Description menu
PC Screens
30
Password Setup screen
PC Screens
31
Level Setup
PC Screens
32
Calibration Menu
PC Screens
33
Thermocouple Calibration screen
PC Screens
34
Gas Calibration screen
PC Screens
35
Pressure Calibration Screen
PC Screens
36
System Diagnostics Screen
PC Screens
37
Board Test screen
Video
38
https://www.youtube.com/watch?v=9FY64se3njI
Comparing
39
No. Description Original system Upgraded System
1 Controller 68000 CPU controller
Pentium computer
2 User interface No GUI
3 Data Storage No Hard Disk
4 Recipe edit Not Easy Easy
5 Diagnostic Limited More functions and I/O hardware “exposed” for easier maintenance and trouble shooting
6 Temperature measurement and control
No New advanced adaptive temperature control (CLTC)
7 Wafer Transfer Index Robot (Optional)
8 Cassette Station Elevator Fixed Station
9 Lamp Tower No Optional
10 GEM/SEC II No Optional
11 A/D precision 12bits 14-16bits
12 EOP Basic Advanced (Optional)
220 Cochrane Circle
Morgan Hill, CA95037,U.S.A.
Tel.:+1-408-778-7788
Fax.:+1-408-904-7168
www.allwin21.com
40
Contact Us