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SINGULUS
TECHNOLOGIES
February 2016
IV German-Brazilian Renewable Energy Business Conference
Photovoltaics in Rio de Janeiro and Northeastern Brazil
Rio de Janeiro – 29th of February 2016Thomas Künzl
Director Sales & Marketing
High Performance Production Lines for Crystalline Solar Cells
SINGULUS Technologies AGThomas Kuenzl – Director Sales & Markerting
SINGULUS TECHNOLOGIES AG
October 2016 - 2 -
The Green Expo 2016, WTC Mexico City
SINGULUS - Innovations for New TechnologiesState-of-The-Art Equipment Supplier in combination with market orientated Technology Know-How
I. Corporate Profile
II. PV Technology Overview and Market Informations
III. Selection Criteria‘s and Impacts
i. Solar Cell Concept
ii. Production Lines
IV. PV Value Chain
V. Solar Cell Production Lines
i. Standard Line Overview with Key Equipment
ii. PERC Solar Cell Production Lines
iii. Cell Efficiency
iv. Improved Cell Features
SINGULUS TECHNOLOGIES AG
October 2016 - 3 -
The Green Expo 2016, WTC Mexico City
SINGULUS - Innovations for New TechnologiesState-of-The-Art Equipment Supplier in combination with market orientated Technology Know-How
I. Corporate Profile
II. PV Technology Overview and Market Informations
III. Selection Criteria‘s and Impacts
i. Solar Cell Concept
ii. Production Lines
IV. PV Value Chain
V. Solar Cell Production Lines
i. Standard Line Overview with Key Equipment
ii. PERC Solar Cell Production Lines
iii. Cell Type and Efficiency
iv. Improved Cell Features
SINGULUS TECHNOLOGIES AG
October 2016 - 4 -
The Green Expo 2016, WTC Mexico City
Cooperated Headquarter
Kahl/Main - Germany
Research & Development
Consulting
Engineering & Design
Project Management
Production
Installation
Commissioning
Service/Maintenance
Hotline24/7
Training
Optical Disc PhotovoltaicSemiconductor
Corporate Profile
SINGULUS - Innovations for New TechnologiesState-of-The-Art Equipment Supplier in combination with market orientated Technology Know-How
SINGULUS TECHNOLOGIES AG
October 2016 - 5 -
The Green Expo 2016, WTC Mexico City
Corporate Profile
SINGULUS - Innovations for New TechnologiesWorldwide Connected, Close to the Markets, Close to the Customer Base
SINGULUS Technologies AG
Headquarter Kahl am Main, Germany
SINGULUS Technologies AG
Branch FFBFürstenfeldbruck (near Munich), Germany
Singulus Inc.Headquarter US, Hartford
Singulus Inc.Sales and Service West Coast
Singulus Latin AmericaSales and Service South America
Semiconductor
over 180
systems installed
Photovoltaic
over 4.000 MW
production capacity
installed
Optical Disc
over 8550
systems installed *
* including Metallizer
SINGULUS TECHNOLOGIES AG
October 2016 - 6 -
The Green Expo 2016, WTC Mexico City
Corporate Profile
SINGULUS - Innovations for New TechnologiesHistory Milestones – Successful and Innovative over Decades
Foundation
SINGULUS Technologies
1995 1996 1997 2002 2007 2010 2011 2012 2013 2014 2015
IPO
Optical Disc
Business
Semiconductor
Business
Opening
CIGS Pilotline
(PTIP)
Singulus enter
Photovoltaik
Business
SINGULAR
Market LaunchICP PECVD System
SOLARE
Market LaunchCrystalline Turn Key Lines
Acquisition
STANGL Semiconductor Equipment AG
Experience since 1995 in SOLAR Equipment
TENUIS Gen 2
Market IntroductionCIGS Buffer Layer System
Start
New Business
Fields
SILEX II
Market Launchc-Si Batch System
EVAPOR
Market Launch
Co-Evaporation System
VISTARIS
Market LaunchPVD Sputter System
PERC
Market LaunchPERC Upgrade
Major Order
SILEX II1 GW HJT Project
SINGULUS TECHNOLOGIES AG
October 2016 - 7 -
The Green Expo 2016, WTC Mexico City
SINGULUS - Innovations for New TechnologiesState-of-The-Art Equipment Supplier in combination with market orientated Technology Know-How
I. Corporate Profile
II. PV Technology Overview and Market Informations
III. Selection Criteria‘s and Impacts
i. Solar Cell Concept
ii. Production Lines
IV. PV Value Chain
V. Solar Cell Production Lines
i. Standard Line Overview with Key Equipment
ii. PERC Solar Cell Production Lines
iii. Cell Type and Efficiency
iv. Improved Cell Features
SINGULUS TECHNOLOGIES AG
October 2016 - 8 -
The Green Expo 2016, WTC Mexico City
CdTe Thin Film Solar Cells
Wet Process Applications
Horizontal- and Vertical PVD Sputter
Systems
CdTe = Lowest Production Cost (Wp)
Crystalline Solar Cells (Multi/Mono)
SOLARE c-Si Turn Key Solution
Batch- and Inline Wet Processing
AR and ITO/ Ag Deposition (HJT)
c-Si = Highest Efficiency
CIGS Thin Film Solar Cells
Selenization and Sulphurisation Systems
Horizontal- and Vertical PVD Sputter Systems
Wet Process Applications
Evaporation System
CIGS = Highest Performance Potential
PV Technology Overview
Comparison of the dominant Photovoltaik Technologies
c-Si are leading Photovoltaic Technology referencing to installed production capacity
SINGULUS TECHNOLOGIES AG
October 2016 - 9 -
The Green Expo 2016, WTC Mexico City
Market Informations/Overview
Worldwide Market Shares for different Cell Technologies
Market Shares predicts a mainstream for double sided contact cell concepts
Source of Figure
SINGULUS TECHNOLOGIES AG
October 2016 - 10 -
The Green Expo 2016, WTC Mexico City
Market Informations/Overview
Average stabilized efficiency values for Si solar cells
Average efficiencies on State-of-the-art mass production lines, with major potential to improve performance
Source of Figure
SINGULUS TECHNOLOGIES AG
October 2016 - 11 -
The Green Expo 2016, WTC Mexico City
Market Informations/Overview
Average module power on 60 cell module technology
Average module power State-of-the-art mass production lines, with major trend to module output
Source of Figure
SINGULUS TECHNOLOGIES AG
October 2016 - 12 -
The Green Expo 2016, WTC Mexico City
SINGULUS - Innovations for New TechnologiesState-of-The-Art Equipment Supplier in combination with market orientated Technology Know-How
I. Corporate Profile
II. PV Technology Overview and Market Informations
III. Selection Criteria‘s and Impacts
i. Solar Cell Concept
ii. Production Lines
IV. PV Value Chain
V. Solar Cell Production Lines
i. Standard Line Overview with Key Equipment
ii. PERC Solar Cell Production Lines
iii. Cell Type and Efficiency
iv. Improved Cell Features
SINGULUS TECHNOLOGIES AG
October 2016 - 13 -
The Green Expo 2016, WTC Mexico City
Selection Criteria for Solar Cell ConceptThe State-Of-The-Art mass production with Production Lines for Standard- and High Efficiency Cells
Cell concept should be compatible with Multi-PERC processing
Trade-off between efficiency increase and
o Higher CAPEX
o Higher OPEX
o Lower yield
Our philosophy
o Production line for multi-crystalline cells suitable for PERC and Bifacial cells
N-type wafers are so expensive that a real high-efficiency, technology should be
chosen for:
o HIT or IBC
PERL and PERT cell concepts require additional CAPEX and OPEX (higher silver
paste consumption) which are not justified by efficiency increase
Conclusion
PERC/Bifacial Production
line for Multi wafers
SINGULUS TECHNOLOGIES AG
October 2016 - 14 -
The Green Expo 2016, WTC Mexico City
Globally competitive quality
Lowest production cost
Highest cell efficiency / module power
Product differentiation compared to standard
modules
High-potential / Low risk technology selection
o No fancy promises that do not work in practice
o Many small steps are better than 1 big risky step
Lowest material consumption
Small foot print
Best price/performance ratio
Reduced man-power per throughput
High
Throughput
High
Uptime
Low
Breakage
Selection Criteria for Solar Cell Production LineThe State-Of-The-Art mass production with Production Lines for Standard- and High Efficiency Cells
SINGULUS TECHNOLOGIES AG
October 2016 - 15 -
The Green Expo 2016, WTC Mexico City
SINGULUS - Innovations for New TechnologiesState-of-The-Art Equipment Supplier in combination with market orientated Technology Know-How
I. Corporate Profile
II. PV Technology Overview and Market Informations
III. Selection Criteria‘s and Impacts
i. Solar Cell Concept
ii. Production Lines
IV. PV Value Chain
V. Solar Cell Production Lines
i. Standard Line Overview with Key Equipment
ii. PERC Solar Cell Production Lines
iii. Cell Type and Efficiency
iv. Improved Cell Features
SINGULUS TECHNOLOGIES AG
October 2016 - 16 -
The Green Expo 2016, WTC Mexico City
The PV Value ChainThe State-Of-The-Art mass production with Production Lines for Standard- and High Efficiency Cells
Source of Figure : NREL
Ingotting
Si melted /
solidified to
Si block (Ingot)
Wafering
Silicon to solar
wafers
Solar Cell
Wafer to solar
cell
Module
Cell to module
Silicon
Sand to
metallurgical
silicon
SINGULUS TECHNOLOGIES AG
October 2016 - 17 -
The Green Expo 2016, WTC Mexico City
Wafer Stack
Splitting
Loading and
Inspection
Saw Damage
Etch (SDE)
Texturing
Junction
Formation
Phosphorous
Silicate Glass
Removal /
Edge Isolation
(EE)
Anti-Reflection
Coating and
Passivation
(PECVD)
Printing /
Firing
Front- /
Backside
Contact
Testing /
Sorting
Wafer
(Multi/Mono)
Solar Cell
SINGULUS TECHNOLOGIES AG
October 2016 - 18 -
The Green Expo 2016, WTC Mexico City
SINGULUS - Innovations for New TechnologiesState-of-The-Art Equipment Supplier in combination with market orientated Technology Know-How
I. Corporate Profile
II. PV Technology Overview and Market Informations
III. Selection Criteria‘s and Impacts
i. Solar Cell Concept
ii. Production Lines
IV. PV Value Chain
V. Solar Cell Production Lines
i. Standard Line Overview with Key Equipment
ii. PERC Solar Cell Production Lines
iii. Cell Type and Efficiency
iv. Improved Cell Features
SINGULUS TECHNOLOGIES AG
October 2016 - 19 -
The Green Expo 2016, WTC Mexico City
Photovoltaic Production Line
Standard Line Overview with Key Equipment Focus
SINGULUS Product Placement at Al-BSF and PERC Cell Line as Turn-Key Solution SOLARE
SOLARE Mono Line SOLARE Multi Line
SINGULUS TECHNOLOGIES AG
October 2016 - 20 -
The Green Expo 2016, WTC Mexico City
Depending on wafer material
SILEX or LINEXLINEX PSG EE SINGULAR XP
Wafer Stack
Splitting
Loading and
Inspection
Surface
Treatment
SDE/Texturing
Wet processing
Junction
Formation
Diffusion
Thermal
Process
PSG Removal /
Edge Isolation
(EE)
Removal
Wet Processing
Anti-Reflection
Coating and
Passivation
PECVD
Deposition
Process
Printing /
Firing
Front- /
Backside
Contact
Testing /
Sorting
Photovoltaic Production Line
Standard Line Overview with Key Equipment Focus
SINGULUS Product Placement at Al-BSF and PERC Cell Line as Turn-Key Solution SOLARE
SILEX Batch Processing of MONO Crystalline Solar Cells
LINEX Inline Processing of MULTI Crystalline Solar Cells
SOLARE with BATCH System SIELX SOLARE with INLINE System LINEX
SINGULUS TECHNOLOGIES AG
October 2016 - 21 -
The Green Expo 2016, WTC Mexico City
Multi Crystalline
(MC) Wafer
LINEX
Standard and advanced production methods for multi crystalline
solar cells
Main Features
One InLine Platform for all processes with
optimized process parameter
Throughput up to 7200 wph (appr. 200 MW)
Lowest CoO (e.g. DI Water Recycling)
Wafer Transport system with no mechanical
contact on the top-side
Shadow free contact of the wafer surfaces
with the process media
Multi Crystalline
Acidic Texture
Photovoltaic Production Line
Standard Line Overview with Key Equipment Focus « Wet Process »
Inline Wet Processing for TEXTURING of Multi Crystalline Solar Cells
SINGULUS TECHNOLOGIES AG
October 2016 - 22 -
The Green Expo 2016, WTC Mexico City
SILEX II
Standard and advanced production methods for mono crystalline
solar cells
Photovoltaic Production Line
Standard Line Overview with Key Equipment Focus « Wet Process »
Batch Wet Processing for SAW DAMAGE REMOVAL and TEXTURING of Mono Crystalline Solar Cells
Mono Crystalline
(CZ) Wafer
Mono Crystalline
Saw Damage and
Alkaline Texture
Main Features
Versatile batch tool platform for wet processes
in clean technology
Standard line configuration with IPA free
texturing and state-of-the-art process
High throughput performance up to 5,600 wph
Low breakage rate down to 0.01 %
Wafer thickness down to 110 μm (post process)
SINGULUS TECHNOLOGIES AG
October 2016 - 23 -
The Green Expo 2016, WTC Mexico City
Photovoltaic Production Line
Standard Line Overview with Key Equipment Focus
SINGULUS Product Placement at Al-BSF and PERC Cell Line as Turn-Key Solution SOLARE
SINGULUS TECHNOLOGIES AG
October 2016 - 24 -
The Green Expo 2016, WTC Mexico City
Ground floor First Floor
The layout is executed on a
90 MW example line:
efficient production flow with
one line execution (90x40m)
ideal connection to utility
expanding in the future
standard concept
Photovoltaic Production Line
Standard Line Overview with Key Equipment Focus
Example Layout of an 90 MW standard line for Al-BSF Solar Cells
90 MW calculations:
Cells : 2800 wph (gross)
Modules : 46 mph (60 cells)
SINGULUS TECHNOLOGIES AG
October 2016 - 25 -
The Green Expo 2016, WTC Mexico City
Photovoltaic Production Line
High Efficience Solar Cell Production of PERC Cell Concept
Difference between Standard Al-BSF (Back Surface Cell) and PERC Solar Cell Concept
The PERC (passivated emitter rear cell)
prevents electrons being captured by
the rear surface, resulting in increased
cell current voltage / higher efficiency
The Aluminum oxide (AIOx) passivation
with a silicon nitrate capping layer stops
electrons to be captured and give a
“second chance”
SINGULUS TECHNOLOGIES AG
October 2016 - 26 -
The Green Expo 2016, WTC Mexico City
The cell power increasing technology
PERC perfectly balances manufacturing
costs and efficiency.
Actual PERC results show performance
of up to 21.2% (confirmed by ISE
CalLab).
Photovoltaic Production Line
High Efficience Solar Cell Production of PERC Cell Concept
SINGULUS Product Placement at Al-BSF and PERC Cell Line as Turn-Key Solution SOLARE
SINGULUS TECHNOLOGIES AG
October 2016 - 27 -
The Green Expo 2016, WTC Mexico City
Wafer Stack
Splitting
Loading and
Inspection
SDE
Texturing
Junction
Formation
Phosphorous
Silicate Glass
Removal /
Edge Isolation
(EE)
Anti-Reflection
Coating and
Front
Passivation
(PECVD)
Printing /
Firing
Front- /
Backside
Contact
Testing /
Sorting
LCO
Laser Contact
Opening
Rear side
passivation
AlOx and SiNx
Single Side
Polish
Wet Chemical
Step
Upgrade of Standard Production Lines for PERC Cells (Passivated
Emitter and Rear Cells) with three additional process steps
LINEX SSE SINGULAR XP
Photovoltaic Production Line
High Efficience Solar Cell Production of PERC Cell Concept
SINGULUS Product Placement at PERC Cell Line as Turn-Key Solution SOLARE
SINGULUS TECHNOLOGIES AG
October 2016 - 28 -
The Green Expo 2016, WTC Mexico City
Ground floor First Floor
The layout is executed on a
90 MW example line:
efficient production flow
ideal connection to utility
expanding in the future
standard concept
PERC cell concept
Photovoltaic Production Line
High Efficience Solar Cell Production of PERC Cell Concept
Example Layout of an 90 MW standard line for PERC Solar Cells
90 MW calculations:
Cells : 2800 wph (gross)
Modules : 46 mph (60 cells)
SINGULUS TECHNOLOGIES AG
October 2016 - 29 -
The Green Expo 2016, WTC Mexico City
Photovoltaic Production Line
High Efficience Solar Cell Production of PERC Cell Concept
Example Layout of an 220 MW standard line for PERC Solar Cells with integrated Module Line
220 MW calculations: Cells 6800 wph (gross) | Modules 114 mph (60 cells)
SINGULUS TECHNOLOGIES AG
October 2016 - 30 -
The Green Expo 2016, WTC Mexico City
nStandard
Al-BSF PERC Bifacial *
Efficiency
Standard
Efficiency
PERC
Efficiency
Bifacial *
Multi p-Type X X X 17.8 – 18.2 % 18.2 – 19.6 % 20.4 %
Mono p-Type X X X 18.9 – 19.2 % 19.3 – 19.8 % 21.5 %
Mono n-Type X N/A N/A 22.0 %
SINGULUS SOLARE Production Line is flexible to run Standard,
PERC (and Bifacial)
No additional hardware investment for Bifacial required
* Market introduction Q4/2016
Photovoltaic Production Line
Guaranteed Solar Cell Efficiency on Production Lines
Guaranteed Efficiencies (Cell) on Standard Solar Cell Production Lines by SINGULUS
SINGULUS TECHNOLOGIES AG
October 2016 - 31 -
The Green Expo 2016, WTC Mexico City
Photovoltaic Production Line
Improved Cell Features on SINGULUS Production Lines
Guaranteed and approved Cell Features on Standard Solar Cell Production Lines by SINGULUS
0.98
0.99
1.00
1.01
1.02
0 1 2
No
rma
lize
d d
ata
weeks
IV data module 1
Ncell
Uoc
Isc
FF
LID – Light Induced Degradation:
PID – Potential Induced Degradation:
TID – Time Induced Degradation:
Reduces minority carrier lifetime
Caused by increased recombination at complexes
under illumination
Effect is restricted to p-type (Br doped) cell concepts
Degrades power of solar modules ≥50 %
Caused by potential driven diffusion of Na+ into ARC, causing
shunting effects
Increased humidity accelerates PID
Observation of significant efficiency losses of PERC
due to storage of cells under room conditions („on the desk”)
after a few days only. 1.00 0.99
0.0
0.2
0.4
0.6
0.8
1.0
1.2
initial re-measured
η
[a.u
.] /
Js
c[a
.u.]
Both Efficiency + Jsc (normalized)
SINGULUS TECHNOLOGIES AG
October 2016 - 32 -
The Green Expo 2016, WTC Mexico CityContact
Q & AQuestions & Answers
SINGULUS TECHNOLOGIES AG
Headquarter - Kahl am Main, Germany
Thomas Künzl
Director Sales & Marketing
thomas.kuenzl@singulus.de
Mobile +49 176 203 503 66
Office +49 6188 440 233
SINGULUS Technologies AG
http://www.singulus.de
SINGULUS TECHNOLOGIES AG
October 2016 - 33 -
The Green Expo 2016, WTC Mexico City
SINGULUS TECHNOLOGIES AG
Hanauer Landstrasse 103
D-63796 Kahl/Main
Dr.-Ing. Stefan Rinck, President and CEO
Tel: +49-6188-440-109
Stefan.Rinck@singulus.de
Markus Ehret, CFO
Tel: +49-6188-440-204Markus.Ehret@singulus.de
Maren Schuster, Head of Investor Relations
Tel: +49-6188-440-612
Maren.Schuster@singulus.de
Bernhard Krause, Communications Worldwide
Tel: +49-6181-9828020
Bernhard.Krause@singulus.de
Forward-Looking Statements
This presentation contains forward-looking statements
based on current expectations, assumptions and forecasts
of the executive board and on currently available
information. Various known and unknown risks,
unpredictable developments, changes in the economic and
political environment and other presently not yet
identifiable effects could result in the fact that the actual
future results, financial situation or the outlook for the
company differ from the estimates given here. We are not
obligated to update the forward-looking statements made in
this presentation unless there is a legal obligation.
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